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1. 发明专利

JPH11111205A PARTICLE BEAM DEVICE EQUIPPED WITH ELECTRON GUN OF FIELD EMISSION TYPE AND HEAT-DEGASSING METHOD THEREOF 失效
公开(公告)号：JPH11111205A
公开(公告)日：1999-04-23
申请号：JP26468197
申请日：1997-09-29
申请人： HITACHI LTD , HITACHI SCIENCE SYSTEMS LTD
发明人： OKURA AKIMITSU , NAGASE AKIHITO , MIYAMOTO RYOICHI , HIYAMA SABURO , FUKUHARA SATORU , SONOBE NOBUYUKI , KOKUBO SHIGERU , NITTA HISAO
IPC分类号： H01J9/39 , H01J37/073 , H01J37/141 , H01J37/18
摘要： PROBLEM TO BE SOLVED: To efficiently exhaust evolved gas in an electron gun chamber of a field-emission type. SOLUTION: Temperature-detecting means, 27 to 31, are installed on the outer wall of an electron gun chamber 12, near a magnet 23 of an ion pump IP1 which evacuates the electron gun chamber 12, on the outer wall of an electromagnetic lens part 11 near the connecting part with the electron gun chamber 12, near a magnet 24 of an ion pump IP2 which evacuates the electromagnetic lens part 11, and near an air-locking part 25, respectively. A power source 14 for baking, which is connected to heaters, 15 to 19, is controlled by a control means 32, as the temperatures detected by each temperature-detecting means, 27 to 31, fall in the prescribed range respectively during a heat-degassing period.

2. 发明专利

JP2002134056A ELECTRON BEAM APPLICATION DEVICE 失效
公开(公告)号：JP2002134056A
公开(公告)日：2002-05-10
申请号：JP2000329792
申请日：2000-10-24
申请人： HITACHI LTD , HITACHI SCIENCE SYSTEMS LTD
发明人： NAGASE AKIHITO , ISHIDA NAGAHIDE , SAITO HIDEAKI , TOMIZAWA JUNICHIRO
IPC分类号： G03F7/20 , H01J37/073 , H01J37/248 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To improve reliability of an electron beam application device by preventing a rapid change of state to an electron source with regard to a high voltage power source of a Schottky electron source adopted in the electron beam application device such as an electron microscope or an electron beam picture drawing device. SOLUTION: The high voltage power source which supplies a power source to the Schottky electron source controls each output voltage so that the rapid change is not brought about when a temperature of the electron source is lowered, and an stopping operation of the electron source is carried out according to the state of the device, which stably maintains performance of the device and improves the reliability.

3. 发明专利

JPH10289681A SCANNING ELECTRON MICROSCOPE 失效
公开(公告)号：JPH10289681A
公开(公告)日：1998-10-27
申请号：JP9557097
申请日：1997-04-14
申请人： HITACHI LTD , HITACHI SCIENCE SYSTEMS LTD
发明人： OKURA AKIMITSU , FURUYA HISAHIRO , MIYAMOTO RYOICHI , NAGASE AKIHITO , TOMIZAWA JUNICHIRO , ITO MASUHIRO
IPC分类号： H01J37/244 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To improve secondary electron detection efficiency and facilitate combined observation of a cathode luminescence image and a secondary electron image by providing a means for applying a voltage opposed to a sample surface, in an electron beam transmission hole in the cathode luminescence detection means. SOLUTION: A cathode luminescence detection means 6 is arranged between an objective lens 10 and a sample 3, the center of a transmission hole 20 of an electron probe 12 is made to coincide with an electronic optical axis of a scanning electronic microscope and an extraction electrode 21 is provided in the transmission hole 20 in such a state as being axially symmetric with the axis. When a sample 3 has the same earth potential 23 with a stage 11 and a bias voltage VB0 22 is applied thereon, the secondary element 4 generated from the sample 3 by irradiation of the electronic probe 12 is energized upward, passed through an objective lens magnetic pole hole 5, and reached a secondary electron detector 1. This constitution can efficiently guide the secondary electron to the secondary electron detector 1 and allows to observe the secondary electron image and the cathode luminescence image without putting a detection means 6 in/out the sample surface.

4. 发明专利

JP2003158875A HIGH VOLTAGE GENERATING CIRCUIT 审中-公开
公开(公告)号：JP2003158875A
公开(公告)日：2003-05-30
申请号：JP2001353950
申请日：2001-11-20
申请人： HITACHI HIGH TECH CORP , HITACHI SCIENCE SYSTEMS LTD
发明人： ISHIDA NAGAHIDE , NAGASE AKIHITO , TOMIZAWA JUNICHIRO , OKAYAMA TSUTOMU
IPC分类号： H01J37/24 , H01J43/30 , H02M3/28 , H02M3/337 , H02M7/10
摘要： PROBLEM TO BE SOLVED: To obtain a small-power high-voltage generating circuit which is in high efficiency, small-sized, large in output current, and little in ripple voltage. SOLUTION: Power loss is reduced by inserting a diode into a primary switching circuit. Moreover, the ripple voltage is reduced by the contrivance of a multistage boosting circuit of a full wave rectification type. Consequently, the downsizing and efficiency elevation of a small-current high-voltage transformer and the efficiency elevation and the ripple voltage reduction of the multistage boosting circuit can be made, and a small-sized and high-power- efficiency high voltage power source can be obtained.

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