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1. 发明专利

JPH0320550A CLEAN ROOM 失效
公开(公告)号：JPH0320550A
公开(公告)日：1991-01-29
申请号：JP15221589
申请日：1989-06-16
申请人： HITACHI LTD , HITACHI PLANT ENG & CONSTR CO , HITACHI KENSETSU SEKKEI KK
发明人： SAIKI ATSUSHI , SUNAMI HIDEO , YAGI KUNIHIRO , KAWAMOTO YOSHIFUMI , FUNAKOSHI KIYOHIKO , KAMEYAMA MASAYOSHI , KURAMI MASARU , TAKAMORI TERUMITSU , KAWAI HIDENAO , SUZUKI MICHIO
IPC分类号： F24F3/16 , B01D46/00 , B01D46/42 , B01D53/34 , B01D53/81 , F24F7/06
摘要： PURPOSE:To keep a very clean area unexceptionally clean by installing a parti tion between a very clean area, a first return duct, a regular clean area, and a second clean area. CONSTITUTION:A partition 3 is installed between a wafer area 1 and a work maintenance area 2. The wafer area 1 is kept at a positive pressure against the work maintenance area 2. The partition 3 is provided with a release slit or window. Inside the wafer area 1 are provided only a wafer container 18a, a wafer carrier 19, and the like, which minimizes the generation dust inside the wafer area 1. On the other hand, inside the work maintenance area 2 there exist a production device 20 which is the largest generation source of dust on a production site of a semiconductor device and workers 21. The Wafer area 1 and a return duct 7a are separated from the work maintenance area 2 and a second return duct with the partitions 3 and 9. It is, therefore, possible to prevent the penetration of dust generated from the workers 21 in the work maintenance area 2 and the production device 20, thereby keeping the wafer area very clean.

2. 发明专利

JPS6181640A Manufacture of semiconductor device 失效
标题翻译：半导体器件的制造
公开(公告)号：JPS6181640A
公开(公告)日：1986-04-25
申请号：JP3633585
申请日：1985-02-27
申请人： Hitachi Ltd
发明人： KASHIOKA SEIJI , KAMEYAMA MASAYOSHI , MIYAMOTO NORIMASA , YAMAMOTO HIROSHI
IPC分类号： H01L21/66 , H01L21/60 , H01L21/67
CPC分类号： H01L2224/78 , H01L2924/00014 , H01L2924/01013 , H01L2224/48 , H01L2924/00012
摘要： PURPOSE:To obtain an image having a constant contrast independently from inclination of a semiconductor pellet, by providing the pellet with a vapor- deposited aliminium surface having a constant diffuse reflection component so as to inhibit any regularly reflected light from entering into a microscope. CONSTITUTION:Aluminium is vapor deposited on a semiconductor pellet under a sufficient residual air pressure (3X10 Torr or higher) to provide the deposited aluminium film with a satin-like surface having a reflection luminance higher than a predetermined value for all the radiation angles. Further, in order to observe the pellet, a tube 5 receiving a light source 3 and a condenser lens 4 therein is provided separately from a microscope lens barrel 1 and an object lens 2 so as to apply light obliquely to a semiconductor pellet 6 which is present within the visual field of the microscope and has the reflectivity of aluminium.
摘要翻译：目的：为了获得具有独立于半导体颗粒的倾斜的恒定对比度的图像，通过为颗粒提供具有恒定漫反射分量的气相沉积的ium表面，以便抑制任何规则的反射光进入显微镜。构成：在足够的残留空气压力（3×10 -6乇或更高）下，将铝蒸镀在半导体颗粒上，以使沉积的铝膜具有高于预定值的反射亮度的缎状表面辐射角度。此外，为了观察颗粒，在其中接收光源3和聚光透镜4的管5与显微镜镜筒1和物镜2分开设置，以便将斜光施加到半导体颗粒6上，半导体颗粒6是存在于显微镜的视场内并具有铝的反射率。

3. 发明专利

JPS6165204A Optical star coupler and its manufacture 失效
标题翻译：光星联轴器及其制造
公开(公告)号：JPS6165204A
公开(公告)日：1986-04-03
申请号：JP18696484
申请日：1984-09-06
申请人： Hitachi Ltd
发明人： IMOTO KATSUYUKI , MAEDA MINORU , KAMEYAMA MASAYOSHI , IKUTA YASUSHI , ARAKI HIROSHI , OBO SHIGERU
IPC分类号： G02B6/28 , G02B6/287
摘要： PURPOSE:To realize a low distributing dispersion and a low cost with respect to an optical star coupler for a single mode optical fiber, as well, by providing a twisted/welded part on both sides of a tapered twisted/welded/drawn part of the center part of plural bundled optical glass fibers. CONSTITUTION:A covering material 4 being in the vicinity of the center part of optical fibers 1a, 1b covered with silicone is peeled off, the peeled part is brought to an etching processing, and two processed optical fibers 1a, 1b are bundled and twisted. Along the axial direction of the optical fibers 1a, 1b, a heating source 15 is moved from the direction of a chuck 11a to the direction of a chuck 11b. The heated part is welded, a twisted/welded part 6a is formed, and at the time point when the heating source 15 has come to the vicinity of the optical fibers 1a, 1b, a twisted/welded/drawn part 7 is formed by rotating the chuck 11b. The twisted/welded parts 6a, 6b and the twisted/welded/drawn part 7 are inserted into a protective pipe 8, and are stuck and fixed in both ends. In this way, a low insertion loss, a low distributing dispersion and a low cost can be realized.
摘要翻译：目的：为了实现相对于单模光纤的光学星形耦合器的低分散散射和低成本，通过在锥形扭曲/焊接/拉出部分的两侧提供扭曲/焊接部分多个束状光学玻璃纤维的中心部分。构成：将被硅树脂覆盖的光纤1a，1b的中央部附近的覆盖材料4剥离，将剥离部进行蚀刻处理，将两根被处理光纤1a，1b捆扎并绞合。沿着光纤1a，1b的轴向，加热源15从卡盘11a的方向向卡盘11b的方向移动。加热部分被焊接，形成扭曲/焊接部分6a，并且在加热源15到达光纤1a，1b附近的时间点，通过旋转形成扭曲/焊接/拉伸部分7 卡盘11b。扭转/焊接部分6a，6b和扭曲/焊接/拉伸部分7插入保护管8中，并被卡住并固定在两端。以这种方式，可以实现低插入损耗，低分散色散和低成本。

4. 发明专利

JPS604486B2 失效
公开(公告)号：JPS604486B2
公开(公告)日：1985-02-04
申请号：JP12606076
申请日：1976-10-22
申请人： HITACHI LTD
发明人： KASHIOKA SEIJI , KAMEYAMA MASAYOSHI , YAMAGUCHI SUMIO , HORII MASAHIRO
IPC分类号： B41J7/34 , G05B19/18 , G05B19/404 , G05D3/00 , G05D3/12

5. 发明专利

JPS59103517A Power source interrupting device 失效
标题翻译：电源中断器件
公开(公告)号：JPS59103517A
公开(公告)日：1984-06-15
申请号：JP21085283
申请日：1983-11-11
申请人： Hitachi Ltd
发明人： KURAMI MASARU , HAYASHI MITSUO , IIJIMA SHINPEI , KAMEYAMA MASAYOSHI
IPC分类号： H02H3/33

6. 发明专利

JPS5362387A ILLUMINATION DEVICE FOR MICROSCOPE 失效
公开(公告)号：JPS5362387A
公开(公告)日：1978-06-03
申请号：JP13729676
申请日：1976-11-17
申请人： HITACHI LTD
发明人： YAMAGUCHI SUMIO , MORITA OSAMU , KAMEYAMA MASAYOSHI , KASHIOKA SEIJI , HORII MASAHIRO
IPC分类号： G02B21/06
摘要： PURPOSE:To simplify the device by means of a ligh t shutter in the course of the light path of a bright field illuminating device so as to switch to bright-field illumination or to drakfield illumination with the opening or closing of the shutter.

7. 发明专利

JPS52145720A DC MOTOR DRIVING CIRCUIT 失效
公开(公告)号：JPS52145720A
公开(公告)日：1977-12-05
申请号：JP6230676
申请日：1976-05-31
申请人： HITACHI LTD
发明人： SUZUKI ISAO , MASUDA TOSHIO , KAMEYAMA MASAYOSHI , HORIGUCHI HIROSHI
IPC分类号： G05D3/12 , G05D3/00 , H02P7/06
摘要： PURPOSE:To make a stable reciprocating shifting with little vibration by providing a light shielding board on a mechanical part to be shifting and a light detector upon a stationary table facing against it.

8. 发明专利

JPS52100137A MONITORING DEVICE FOR CHARGE AND DISCHARGE QUANTITIES OF STORAGE BATTERY 失效
公开(公告)号：JPS52100137A
公开(公告)日：1977-08-22
申请号：JP1604876
申请日：1976-02-18
申请人： HITACHI LTD
发明人： KIMURA TOSHIO , KAMEYAMA MASAYOSHI , TEIHOU KENICHIROU , TOMIZAWA FUMIO
IPC分类号： H02J7/00 , G01R31/36 , H01M10/48

9. 发明专利

JPS5832409B2 失效
公开(公告)号：JPS5832409B2
公开(公告)日：1983-07-13
申请号：JP8729076
申请日：1976-07-23
申请人： HITACHI LTD
发明人： KAMEYAMA MASAYOSHI , HORIGUCHI HIROSHI , ICHINO KAZUO
IPC分类号： H02P1/16 , B23Q5/28 , B23Q15/007 , B23Q15/013 , G05B19/02 , G05D3/00 , G05D3/12

10. 发明专利

JPS5434852A MEASUREMENT APPARATUS 失效
公开(公告)号：JPS5434852A
公开(公告)日：1979-03-14
申请号：JP10047177
申请日：1977-08-24
申请人： HITACHI LTD
发明人： YAMADA SEIICHI , KAMEYAMA MASAYOSHI , KIYOKUNI YOSHIHIKO
IPC分类号： G01D3/02 , G01R15/00
摘要： PURPOSE:To achieve the improvement in measurement accuracy by correcting nonlinearity measurement circuit with digital correction circuit.

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