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    • 3. 发明专利
    • Control system for fan-filter unit and clean room provided with the system
    • 用于风扇过滤器的控制系统和系统提供的清洁室
    • JP2003065577A
    • 2003-03-05
    • JP2001253771
    • 2001-08-24
    • Hitachi Ltd株式会社日立製作所
    • YOKOYAMA MAKOTOONO KEIICHITAMURA FUMIYUKI
    • F24F7/06B01L1/04F24F3/16F24F11/02F24F11/04F24F13/28H01L21/00
    • F24F3/161F24F11/39F24F11/77F24F11/79H01L21/67017H01L21/67253Y02B30/746
    • PROBLEM TO BE SOLVED: To control the direction of outlet air-flow from FFUs (fan-filter units) and the air-flow rate in order to improve cleanliness of the clean room for manufacturing electronic devices such as semiconductors and liquid crystal displays.
      SOLUTION: Air-flow direction and air flow-volume in each FFU are controlled on the basis of information obtained from FFU and a differential pressure gauge provided in the ceiling of the clean room. Pressure in the ceiling chamber is made uniform in order to improve the air-flow distribution in the clean room, further the number of rotation of a fan motor of each FFU is made easily controllable. In order to control the direction of air-flow in the clean room, a dumper-regulating mechanism is provided under the floor of a grating in the clean room. Through this constitution, operating conditions of the clean room are optimized and energy-saving is attained.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:为了控制从FFU(风扇过滤器单元)排出气流的方向和空气流量,以提高用于制造诸如半导体和液晶显示器的电子设备的洁净室的清洁度。 解决方案:每个FFU中的空气流动方向和空气流量根据从FFU获得的信息和洁净室天花板上提供的差压表进行控制。 为了改善洁净室内的气流分布,天花板室内的压力变得均匀,可以容易地控制每个FFU的风扇马达的转动次数。 为了控制洁净室中的空气流动方向,在洁净室中的格栅的底板下设置了一个自卸车调节机构。 通过这种结构,洁净室的运行条件得到优化,节能。
    • 4. 发明专利
    • Operation monitor system for device
    • 操作监控系统的设备
    • JP2003058651A
    • 2003-02-28
    • JP2001248478
    • 2001-08-20
    • Hitachi Ltd株式会社日立製作所
    • FUJIWARA KATSUHIROSAKAI KUNIYOSHITAMURA FUMIYUKIYOSHIZAKI AKIOKASAMATSU OSAMUTERAOKA WATARU
    • G06Q30/06G05B23/02G06Q50/00G06Q50/10G06F17/60
    • PROBLEM TO BE SOLVED: To speedily and smoothly provide maintenance services by a system which monitors the operation states of decentralized devices. SOLUTION: For the system which gathers information on monitor terminals through a communication line and monitors the operation states of the respective devices, a device maker sells a device to a user, provides a monitor terminal according to predetermined contract conditions, and fits a measuring instrument to the device and also connects the measuring instrument to the monitor terminal. According to the predetermined contract conditions, the monitor terminal is connected to a communication line means of a supervisory system provider having the communication line means and a monitor computer, and the device operation information on the user is obtained by using the monitor system that the supervisory system provider has, maintains, and manages to monitor the operation, thereby providing maintenance services of the device.
    • 要解决的问题:通过监控分散式设备的运行状态的系统来快速,平稳地提供维护服务。 解决方案:对于通过通信线收集监控终端信息的系统,监控各设备的运行状态,设备制造商向用户销售设备,根据预定的合同条件提供监控终端,并配合测量仪器 并将测量仪器连接到显示器终端。 根据预定的合同条件,监视终端连接到具有通信线路装置和监视计算机的监控系统提供者的通信线路装置,并且通过使用监视系统获得关于用户的设备操作信息,监视系统 系统提供商具有,维护和管理以监视操作,从而提供设备的维护服务。
    • 6. 发明专利
    • PROGRAMMABLE CONTROLLER
    • JPH09160611A
    • 1997-06-20
    • JP31657095
    • 1995-12-05
    • HITACHI LTD
    • TAMURA FUMIYUKIFUJIWARA KATSUHIROAIDA NORIHIRO
    • G06F9/06G05B19/05
    • PROBLEM TO BE SOLVED: To more flexibly cope with the change of a sequence program by controlling execution corresponding to attributes defined by corresponding information at the time of cyclically executing respective processing units in the sequence program in an order corresponding to a sequence. SOLUTION: An MPU 60 successively cyclically executes only circuits for which an execution code is set to a circuit information code among the respective circuits for constituting the sequence program stored in a user program memory 62. The circuit information code is rewritten by the MPU 60 as required corresponding to an instruction from an external controller 70. Rewrite is executed by receiving the instruction of the rewrite from the external controller 70 for the respective circuits or is executed by receiving the instruction of the rewrite from the external controller 70 altogether for the entire circuits. Thus, the change of the sequence program is more flexibly coped with and the correction and preparation of the sequence program as intended are more easily and surely performed.
    • 7. 发明专利
    • REMOTE SUPERVISORY CONTROL SYSTEM
    • JPH0847062A
    • 1996-02-16
    • JP17642594
    • 1994-07-28
    • HITACHI LTD
    • TAMURA FUMIYUKI
    • H04Q9/00
    • PURPOSE:To reduce the transmission power for a slave station, to reduce the a prescribed load of a master station and to improve the processing performance by sending a elapsed point time to a master station together with data and a time at the point of time elapsed by a setting time from a transmission point. CONSTITUTION:A data comparison section 13 of a slave station remote supervisory controller 14 compares measurement data 10 received from a supervisory control object 9 with a preset elapsed point or transmission point. A control section 4 reads an elapsed point excess time of the data 10 to a data storage section 2. When the data 10 exceed a transmission point, a supervisory timer 6 is started and after the timer expires, when the transmission point is exceeded again, the time is set to the storage section 2. Then the storage section 2 outputs the stored time and the data 10 to a data transmission section 7, which sends them to a master station remote supervisory controller.