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    • 2. 发明专利
    • VACUUM PUMP
    • JPH03168389A
    • 1991-07-22
    • JP30768789
    • 1989-11-29
    • HITACHI LTD
    • NAKAMORI KAZUAKI
    • F04D29/056F04D19/04F04D29/04F04D29/049F04D29/10
    • PURPOSE:To avoid pressure from being easily unbalanced at each portion by isolating a casing in which annular rings are arranged at the upper and lower portions of a seal pocket with a small gap to a rotor and also a small gap in an axial direction, from a stationary member via an Oring at the upper and lower portions of a purge gas supply hole. CONSTITUTION:A shaft seal structure 12 having a shaft seal purge hole 13 between the lower portion of a pump mechanism and the upper portion of a lubricating bearing 8 adjacent thereto is provided to supply purge gas from the outside of a pump. This restricts annular rings 20, which are arranged inside of the upper and the lower portions 18, 19 of a ring casing with a small gap toward a rotor side at the upper part of a purge gas pocket 25, by means of a holder casing so that it can also have a small gap in an axial direction. An annular ring 21 is provided at the lower part as well so that a small gap can be formed in an axial direction by means of a spacer 22, a snap ring 23, etc. An Oring 14 is provided in the upper and the lower portions of a hole 13 on the outer periphery of the ring casing to form a softly supporting system with a stator 5. It is thus possible to raise purge gas pocket pressure.
    • 3. 发明专利
    • VACUUM PUMP
    • JPH02245495A
    • 1990-10-01
    • JP6371789
    • 1989-03-17
    • HITACHI LTD
    • NAKAMORI KAZUAKI
    • F04D29/10F04D19/04
    • PURPOSE:To prevent reaction product in sucked gas from being stack to flow passage sections by providing shaft-seal gas feed holes in a space between a pump casting and a stator, providing shaft-seal gas passages inside the wall of the stator, and giving heat from a pump mechanism section to the sucked gas. CONSTITUTION:A shaft-seal gas feed port 19 is provided on a pump casing 1, and feed gas is supplied to a space 20 formed between the pump casing 1 and the stator 6 of a pump mechanism section 5. Gas feed holes 21 and 22 and gas passages 23 and 24 are provided in the stator 6, and the shaft-seal gas in the space 20 is forced to flow into a shaft-seal section 8 through the inside of the wall of the stator 6. Accordingly, the shaft-seal gas fed to the space 20 is heated by exchanging heat with the outer wall surface of the stator 6, and heated further in the gas passages 23 and 24. Thus, the atmosphere air sucked from a suction port 2 receives heat near delivery ports 3 and 4 and, even if it contains reaction product, the product does not transform into a solid so as to prevent the reaction product from being stuck to the wall surfaces of the flow passage sections.
    • 4. 发明专利
    • TURBO MOLECULE PUMP
    • JPS6229797A
    • 1987-02-07
    • JP16757185
    • 1985-07-31
    • HITACHI LTD
    • OKAWADA TAKESHIUEDA SHINJIRONAKAMORI KAZUAKI
    • F04D19/04
    • PURPOSE:To make it possible to exhaust at high speed even under low vacuum by arranging a wedge-shaped vortex flow groove on both the outer periphery of a rotor and the inner periphery of a stator respectwely, and communicating one partition of the vortex flow groove to a suction side stage and its other partition to an exhaust side stage. CONSTITUTION:In a rotor 1, a moving blade groove 4 and a wedge-shaped vortex flow groove 5 are dug on a suction side and an exhaust side respectively. On a stator 3 opposite to the rotor 1, a stationary blade 6 and the wedge-shaped vortex flow groove 7 are dug on the suction side and the exhaust side respectively. The moving blade groove and stationary blade groove can perform both functions as an axial flow blade and a screw groove type molecule pump to produce practicable high compression ratio and high speedy exhaust function. Consequently, since the exhaust function can be effectively carried out up to about 10 Torr, a higher exhaust speed can be taken even under low vacuum state.
    • 5. 发明专利
    • SHAFT SUPPORTING STRUCTURE OF HIGH SPEED ROTOR
    • JPS61224836A
    • 1986-10-06
    • JP6352985
    • 1985-03-29
    • HITACHI LTD
    • NAKAMORI KAZUAKIAWATA YOSHIHISA
    • F16C35/077H02K5/173H02K7/02H02K7/08
    • PURPOSE:To prevent a bearing from electrically corroding without disturbing the dissipation of heat of a motor by supporting one support of the bearing of a rotor which rotates at a high speed by a high frequency motor through an insulating bush made of an electrically insulating material. CONSTITUTION:The upper and lower ends of a shaft 3 which passes a rotor 2 forming a motor with a stator 1 as a pair are rotatably supported by a pair of bearings 5, 6. The bearings 5, 6 are engaged through bearing cases 7, 8 and an O-ring 9 with a motor case 13 and a cover 14. A rotor 4 which rotates in vacuum unit is mounted on the upper end of the shaft 3. The bearig 5 is supported by the case 7 and a spring 12, the other end of the spring 12 is pressed by a cover 11 inserted with an insulating bush 10, and the cover 11 is secured to the case 13. Thus, the heat in the motor is dissipated externally through the shaft 3, the bearing 6, the case 8 and the cover 14, and even if a shaft voltage is generated, the bush 10 opens the electric closing circuit to prevent the bearings 5, 6 from electrically corroding.
    • 6. 发明专利
    • Turbo molecular pump
    • 涡轮分子泵
    • JPS6131695A
    • 1986-02-14
    • JP15281284
    • 1984-07-25
    • Hitachi Ltd
    • UEDA SHINJIROOKAWADA TAKESHIMATSUSHITA OSAMINAKAMORI KAZUAKI
    • F04D19/04F04D23/00
    • F04D19/04
    • PURPOSE: To prevent counter-flow from static vane groove thus to improve the compression ratio and the exhaust speed considerably by constructing such that the dynamic vane groove making specific angle against the axial direction will lap axially over a portion of static vane groove making angle in the reverse direction against the dynamic vane groove and the axis of rotor.
      CONSTITUTION: Gas molecules flied from the suctin port A side to the dynamic vane groove 4 will collide againts the bottom face 4c and the side faces 4d, 4e, of the groove 4 and reflected in random but directed with correspondence to the movement of rotor 1. In other word, they will enter into the static vane groove 5 with directionality of absolute speed C in static co-ordinates. Since the static vane groove 5 is obtuse against the rotary direction of rotor 1, the directionality of gas molecules flied out of the rotor 1 is matching with said direction thereby the gas molecules will pass easily through said groove 5. There are also such gas molecules as flying from the static vane groove 5 side to the dynamic vane groove 4, but the directionality of gas molecules caused through motion of rotor 1 will be opposite from the direction of the dynamic vane groove 4 to prevent counter-flow and the gas molecules are discharged from the suction port A side to the delivery port B side as a whole resulting in improvement of the compression ratio and the exhaust gas speed.
      COPYRIGHT: (C)1986,JPO&Japio
    • 目的:为了防止静态叶片槽的逆流,通过构造成使得相对于轴向方向产生特定角度的动叶片槽将轴向地卷绕在静态叶片槽的一部分上形成角度,从而显着地提高压缩比和排气速度 与动叶片槽和转子轴相反的方向。 构成:从吸气口A侧向动态叶片槽4排出的气体分子将与凹槽4的底面4c和侧面4d,4e重合,并随机反射但与转子1的运动相对应 换句话说,它们将以静态坐标的绝对速度C的方向进入静态叶片槽5。 由于静叶片槽5与转子1的旋转方向相反,所以从转子1排出的气体分子的方向性与所述方向一致,从而气体分子将容易通过所述槽5.还有这样的气体分子 因为从静叶片槽5侧向动叶片槽4飞行,而由转子1的运动引起的气体分子的方向性将与动叶片槽4的方向相反,以防止逆流,气体分子为 从吸入口A侧排出到排出口B侧,从而提高压缩比和废气速度。
    • 10. 发明专利
    • VACUUM PUMP
    • JPS6469797A
    • 1989-03-15
    • JP22637887
    • 1987-09-11
    • HITACHI LTD
    • NAKAMORI KAZUAKIAWATA YOSHIHISA
    • F04D19/04
    • PURPOSE:To restrain heat conduction to an axial flow turbo molecular pump by forming the rotor of the axial turbo molecular pump by a material with less heat conductivity in the device in which an axial flow turbo molecular pump, a centrifugal compression pump and a circular flow compression pump are arranged in order. CONSTITUTION:A drive shaft 3 is supported by plural bearings 5, 6 after passing through a housing 20 which has an intake port 1 and an exhaust port 2 and driven by a motor 4. Inside the housing 20 going from the intake port 1 to the exhaust port 2, rotor 7 and stator 8 of an axial flow turbo molecular pump, rotor 13 and stator 14 of a centrifugal compression pump and rotor 15 and stator 16 of a circular flow compression pump are arranged in order. In the above composition, the rotor 7 made of a strength member with less heat conductivity is arranged on the rotor 13 and the stator 8 is held down on to the stator 14 by a ring 9 made of the strength member with better heat conductivity through a space made of the strength member with less heat conductivity.