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    • 2. 发明专利
    • Detection system for abnormality of semiconductor manufacturing plant
    • 半导体制造厂异常检测系统
    • JPS58206134A
    • 1983-12-01
    • JP8795382
    • 1982-05-26
    • Hitachi Ltd
    • KURIHARA KENZOUAKASHI KICHIZOUMITOME KAZUYUKISEKI SUSUMU
    • H01L21/02H01L21/66
    • H01L22/00
    • PURPOSE:To assume an abnormality generating process and its period by controlling the order of treatment of wafers, changing the hysteresis of processing of each wafer by a small amount at each time and using these processing hysteresis data and final inspection data. CONSTITUTION:The order of treatment of the wafers is determined in a method such as one as the figure. That is, all of the wafers of a lot (m) are treated collectively in a process 1, and the wafers of a lot (m) are divided equally into five groups and the wafers of a group m1 are treated together with the next lot (n) in the next process 2. The wafers belonging to a group l1 of a preceding lot lare treated together with the lot (m) in place of said treatment. Groups in lots are rearranged in succession one by one in the same manner in processes after a process 3. The abnormality generating process and its period are assumed in consideration of the hysteresis of processing on the basis of the results of the probe inspection of the lot (m).
    • 目的:通过控制晶片的处理顺序来进行异常生成处理及其周期的处理,并且使用这些处理滞后数据和最终检查数据,每个晶片的处理滞后改变少量。 构成:以如图所示的方法确定晶片的处理顺序。 也就是说,在工序1中对所有大量的晶片(m)进行处理,将批次(m)的晶片分成五组,将m1组的晶片与下一批处理 (n)。代替所述处理,属于前一批次的组l1的晶片与批(m)一起处理。 在处理3之后的处理中,以相同的方式逐个重新排列批次。根据批次的探针检查的结果考虑处理的滞后,假设异常产生处理及其周期 (m)。
    • 10. 发明专利
    • Conversational scheduling system
    • 对话调度系统
    • JPS59214964A
    • 1984-12-04
    • JP8744683
    • 1983-05-20
    • Hitachi Ltd
    • KONISHI YOUZOUMITOME KAZUYUKIAKASHI KICHIZOU
    • G06Q10/00G06Q10/06G06Q10/10G06Q50/00G06Q99/00G06F15/20
    • G06Q99/00
    • PURPOSE:To determine a schedule for a short time with a simple operation by displaying information necessary for the preparation of the schedule and the scheduled result corresponding to the input information on a display terminal equipment as pictures. CONSTITUTION:A computer 10 consists of a control part 19 to be operated in accordance with a program stored in a storage part 11 and four data storage parts 12-15. The storage part 12 stores data for working variables in each previously registered parts as a table. The storage part 13 stores a tabulated schedule enabled period for every equipment and every job. The storage parts 14, 15 store a reference schedule and a determined schedule respectively. The schedule is determined by a command from a keyboard input 21 and the scheduled result is displayed on a display device 22 as a picture.
    • 目的:通过在显示终端设备上显示与显示终端设备相对应的输入信息作为图片,通过显示准备时间表所需的信息和对应于输入信息的预定结果,通过简单的操作来确定短时间的时间表。 构成:计算机10由根据存储在存储部分11中的程序和四个数据存储部分12-15操作的控制部分19组成。 存储部12将作为各工作变量的数据存储在各先前登录的部分中作为表。 存储部分13存储针对每个设备和每个作业的制表计划启用周期。 存储部分14,15分别存储参考时间表和确定的时间表。 该调度由来自键盘输入21的命令确定,并且将调度结果作为图片显示在显示装置22上。