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    • 3. 发明专利
    • CHECKING OF FLATNESS OF MAGNETIC DISC MEDIUM AND SUBSTRATE
    • JPH02242109A
    • 1990-09-26
    • JP6096489
    • 1989-03-15
    • HITACHI LTD
    • ITO RITSUOTANI YUICHIYASHIKI HIROSHIHIRUTA TSUGIOITO KIKUICHINAKAJIMA YASUO
    • G01B11/30
    • PURPOSE:To check a flatness of a magnetic disc medium and substrate accurately in a short time with an inexpensive equipment by a method wherein a surface of an object to be measured with white light at an angle of incidence of 25 + or - 20 deg. and a reflection image thereof projected onto a reflector to observe a degree of gradation. CONSTITUTION:An object 1 to be measured as magnetic disc medium or substrate is carried on a rotor 2. The surface of the object 1 to be measured is irradiated with white light at an angle of 25 + or - 20 deg. of incidence from a light source 3 and reflected light thereof is introduced to a reflector 4 to observe a reflection image on the reflector 4. The object 1 to be measured, the rotor 2 and the reflector 4 are covered with a shielding screen 5 to optimize an incident light and the reflected light. When the object 1 to be measured has a good flatness, the reflection image presents an image with a uniform brightness without gradation. When a part of the object 1 to be measured is protruded, the reflection image at the protruded part becomes black (dark). To the contrary, when the part is recessed, the reflection image at the recessed part becomes white (bright). Judgment is performed by comparison with a reference sample for abnormality of the flatness.