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    • 3. 发明专利
    • BEARING DEVICE OF SEMI-CONDUCTOR MANUFACTURING APPARATUS
    • JPS6426015A
    • 1989-01-27
    • JP18102787
    • 1987-07-22
    • HITACHI LTD
    • HAZAKI EIICHIKITSUNAI HIROYUKI
    • F16C17/02
    • PURPOSE:To prevent abrasion powder from being discharged out of a bearing by making a clearance between a bearing periphery and a shaft to be slightly larger than a clearance between the shaft and the sliding surface of the bearing. CONSTITUTION:Abrasion powder generated by sliding between a shaft 3 and the sliding portion of a bearing 2 is captured in peripheral direction grooves 4a, 4b. Inasmuch as the diameters of peripheral portions 6a, 6b are set larger than the diameter of a sliding portion 7, these portions are out of contact with a shaft 3 and any abrasion powder is not generated from these portions. Since the diameters of the peripheral portions 6a, 6b are also set slightly larger than the diameter of the sliding portion 7, there is extremely less probability that the abrasion powder generated at the sliding portion and captured in the peripheral direction grooves 4a, 4b may be discharged out of the bearing. In this manner, the abrasion powder generated on the sliding surface of the bearing is prevented from being discharged out of the bearing, so that it is effective to prevent environmental contamination in surroundings.
    • 6. 发明专利
    • SCROLL COMPRESSOR
    • JPS58160581A
    • 1983-09-24
    • JP4273482
    • 1982-03-19
    • HITACHI LTD
    • SHIIBAYASHI MASAOTOUJIYOU KENJIHAZAKI EIICHI
    • F04C23/02F04C29/02
    • PURPOSE:To limit a leak amount of oil and maintain the pressure in a back pressure chamber, by successively providing each of a journal bearing part and thrust bearing part to a boss bearing in the back side of a turning scroll and a main bearing and finely forming upper and bottom gaps of a balance weight between both thrust bearings. CONSTITUTION:To limit a leak amount of oil to the side of a back pressure chamber 14, a thrust space used as the lead oil passage, that is, gaps formed between upper and bottom end faces of a balance weight 16 and a thrust bearing part 8a of a main bearing and a thrust bearing part 19a of a turning scroll boss part bearing 19 are finely formed. These gaps are assumed for delta3, delta4. Accordingly, the fine gaps delta3, delta4 provided to the upper and bottom end faces of the balance weight 16 permit the slide contact between the part 8a of the bearing 8 and the part 19a of the bearing 19 located at a face-to-face position.
    • 10. 发明专利
    • OIL FEED UNIT FOR SCREW COMPRESSOR
    • JPS57206791A
    • 1982-12-18
    • JP9097281
    • 1981-06-15
    • HITACHI LTD
    • HAZAKI EIICHINAKAYAMA SUSUMUURASHIN MASAYUKIMATSUBARA KATSUMIISHII MASAHARU
    • F04C18/16F04C29/02
    • PURPOSE:To properly control the quantity oil feed to bearings, prevent the bearings from a seizure, and improve the volume efficiency by providing a resistance means so that the flow resistance of a branch oil feed passage connecting to bearings of the discharge side is made smaller than that of a branch oil feed passage connecting to a bearings of the suction side. CONSTITUTION:The lubricating oil stored at the inner bottom of an auxiliary casing 11 flows into branch oil feed passages 18, 19 connecting to bearings 8, 10 of the discharge side and to bearings 9, 9 of the suction side under the pressure of screw rotors 2A, 2B, and it is decompressed by fine holes 32, 33 of flow resistance bodies 34, 35 respectively. In this case, the diameter of the fine hole 32 is made larger than that of the fine hole 33 and its flow resistance is smaller, then the degree of decomporession by the flow resistance body 34 is smaller than that by the flow resistance body 35. Thereby, the pressure in a ring groove 20 at the discharge side of the rotor becomes higher than that in a ring groove 21 at the suction side. Therefore, the oil feed can be smoothly supplied to the bearings 8, 10, the quantity of the lubricating oil can be properly supplied under control, a seizure of the bearings can be prevented, and the volume efficiency of the compressor can be improved.