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    • 5. 发明专利
    • FORMING METHOD OF BUMP
    • JPH01220851A
    • 1989-09-04
    • JP4713788
    • 1988-02-29
    • HITACHI LTD
    • OKADA RYOJIHANEDA MITSUAKIARAYA TAKESHIHIOKI SUSUMU
    • H01L21/60
    • PURPOSE:To enable the effective baking of a printed film without heating the part except a printed film (metal fine grain film), by a method wherein, after metal powder is spread on an IC or lead wires by screen printing method, and the metal fine-grain film in the form of a bump is formed, the film is irradiated with laser light and baked. CONSTITUTION:For example, on the front surface provided with an IC chip 1, an aluminum wiring 4 and an insulator 6, a gold thin film 6 being a superior reflector of YAG laser is formed, and gold paste is printed in the form of a bump on the aluminum wiring 4 to be connected to lead wires, by screen printing method. After printing, the paste is heated at a temperature in the range wherein the IC is endurable, and organic solvent is eliminated. After that, the dried gold-printed film is irradiated with YAG laser light, and the printed film is baked to form a gold bump 3. The gold thin film 6 formed on the whole surface of IC is eliminated except the bump 3. Further, prior to the formation of a metal fine-grain film in the form of a bump, a film composed of a material having high wettability to a sintered body (that is a bump) obtained by laser light irradiation is formed on the IC or lead wires.
    • 7. 发明专利
    • PREPARATION OF ULTRAFINE PARTICLES
    • JPS63267431A
    • 1988-11-04
    • JP9982487
    • 1987-04-24
    • HITACHI LTD
    • ENDO KIJUIBARAKI YOSHIAKIARAYA TAKESHI
    • B01J19/08B22F9/12B22F9/14
    • PURPOSE:To make particle diameter distribution better and prepare ultrafine particles with little cohesion by generating an arc between a raw material of ultrafine particles and an electrode provided in the liquid and forming ultrafine particles. CONSTITUTION:When forming ultrafine particles, first, inactive gas is introduced from a sealed gas introducing inlet 9, while 5% stearic acid water solution is introduced in from a water solution introducing inlet 10, and after that, pure water 7 is introduced from a pure water introducing inlet 11 and a water tank 6, being filled up to the level higher than the end surface of a double sealed nozzle 8. By said arrangement, the water solution allowed to flow cylindrically acts as a curtain to the pure water 7, and an arc to be generated therein is in the same state as generated in gas. Electric current, therefore, is supplied from an electric source 4 for discharge to between the ultrafine particle raw material 1 and an electrode 2 to generate an arc 5. The raw material 1 is melted by the action of said arc heat to generate vapor and form ultrafine particles, which are quenched with the water solution flowing cylindrically immediately after the formation and discharged into the pure water 7.
    • 9. 发明专利
    • CORRECTING DEVICE FOR CORRECTION DIRECTION OF WELDING TORCH
    • JPS63224871A
    • 1988-09-19
    • JP5658887
    • 1987-03-13
    • HITACHI LTD
    • NAKAJIMA JUNARAYA TAKESHIUDAGAWA TSUGIOKAWASAKI KYOICHI
    • B23K9/127B23K9/12
    • PURPOSE:To prevent the deterioration of the following property and to improve the reliability of control of a welding torch by storing the torch position correction direction detected by a positional deviation detector of the welding torch during a weaving cycle to calculate the large correction direction and judging the propriety to correct the torch position. CONSTITUTION:In case the large correction direction is improper, a correction means 12 and a signal changeover means 13 to stop the correction or output a correction signal in the reverse direction to the large correction direction are added to the positional deviation detection means 8 of the welding torch based on a result of a judgement means 11 to judge whether the large correction direction is proper or not based on the reference quantity and the detected quantity of a welding current or the voltage, etc., at the weaving end to compare with the reference quantity with respect to the large correction direction calculated by a correction direction discrimination means 9 to calculate the large correction direction after the torch position correction direction detected by the positional deviation detector 8 is cycled by one weaving, by which the deterioration of the following property due to the disturbance is prevented.