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    • 2. 发明专利
    • Optical filter
    • 光学过滤器
    • JP2010039206A
    • 2010-02-18
    • JP2008202170
    • 2008-08-05
    • Hamamatsu Photonics Kk浜松ホトニクス株式会社
    • NOMOTO YOSHIAKIOBAYASHI YASUSHI
    • G02B5/28G02B5/26
    • PROBLEM TO BE SOLVED: To provide an optical filter of deterring a prescribed wavelength band of light from being transmitted, capable of restraining a ripple, and manufactured easily.
      SOLUTION: This optical filter is provided with a translucent substrate 12, a filter part 16 provided on a main face 12a of the substrate 12, having a refractive index varied continuously or stepwisely and periodically along a direction substantially orthogonal to the main face 2a, and having a fusiform shape of refractive index distribution, and a matching layer 18 layered on the filter part, the matching layer 18 is constituted by layering low refractive index layers having the first refractive index alternately with high refractive index layers having the second refractive index higher than the first refractive index, the outermost layer is the low refractive index layer, an optical film thickness is about 1/4 of the center wavelength of the prescribed wavelength band, and the optical film thickness adjacent to the outermost layer is about 1/2 of the center wavelength.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种防止传输的规定波长带的光滤波器,能够抑制纹波,并且容易制造。 解决方案:该滤光器设置有透光性基板12,设置在基板12的主面12a上的过滤部16,折射率连续或逐步且沿着与主面大致正交的方向周期性地变化 2a,具有折射率分布的梭形形状,以及层叠在过滤器部分上的匹配层18,匹配层18通过将具有第一折射率的低折射率层与具有第二折射率的高折射率层交替地层叠而构成 指数高于第一折射率,最外层是低折射率层,光学膜厚度是规定波长带的中心波长的约1/4,并且与最外层相邻的光学膜厚度为约1 / 2的中心波长。 版权所有(C)2010,JPO&INPIT
    • 4. 发明专利
    • Electron beam auxiliary irradiation laser ablation film deposition apparatus
    • 电子束辅助辐射激光吸收膜沉积装置
    • JP2006291328A
    • 2006-10-26
    • JP2005116814
    • 2005-04-14
    • Hamamatsu Photonics Kk浜松ホトニクス株式会社
    • KITAHARA TADASHIICHIKAWA NORIONOMOTO YOSHIAKI
    • C23C14/22C23C14/28
    • PROBLEM TO BE SOLVED: To provide a laser ablation film deposition apparatus capable of forming a thin film with a good film quality, by suppressing evaporation of a liquefied material when using an arbitrary solid material and suppressing production of particulates in solid target ablation.
      SOLUTION: The electron beam auxiliary irradiation laser ablation film deposition apparatus is equipped with a target holder 10 which holds the target 11, a substrate holder 20 which holds a substrate 21 for film deposition, an electron beam generator 30 which generates an electron beam, an electron beam-converging device 40 and a laser irradiation device 50. The electron beam-converging device 40 forms an electron lens to converge the electron beam generated by the electron beam generator 30 on a part of the surface of the target 11 and locally liquefies the part of the surface. The laser irradiation device 50 irradiates a laser beam onto the part of the surface of the target 11 liquefied by the electron beam-converging device 40 to perform ablation.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种能够形成具有良好膜质量的薄膜的激光烧蚀膜沉积设备,通过在使用任意的固体材料时抑制液化材料的蒸发并抑制固体靶烧蚀中的微粒的产生 。 解决方案:电子束辅助照射激光烧蚀膜沉积设备装备有保持靶11的靶保持器10,保持用于膜沉积的衬底21的衬底保持器20,产生电子的电子束发生器30 电子束会聚装置40和激光照射装置50.电子束会聚装置40形成电子透镜以将由电子束发生器30产生的电子束会聚在目标11的表面的一部分上, 局部液化表面的一部分。 激光照射装置50将激光束照射到由电子束会聚装置40液化的目标物11的表面的一部分上,进行烧蚀。 版权所有(C)2007,JPO&INPIT