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    • 3. 发明专利
    • Coating machine and method of manufacturing semiconductor device
    • 涂料机及制造半导体器件的方法
    • JP2008086872A
    • 2008-04-17
    • JP2006268864
    • 2006-09-29
    • Fujitsu Ltd富士通株式会社
    • SAWAHATA KOJIIGAWA OSAMUKANWA MASARUKATO SADATANE
    • B05C5/00B05C11/10
    • PROBLEM TO BE SOLVED: To provide a coating machine for improving the productivity of a semiconductor device and a method of manufacturing the semiconductor device using such a coating machine.
      SOLUTION: The coating machine 1 using for mounting a semiconductor element includes a container 10 for housing a liquid resin and a magnet 17a for allowing a metallic foreign matter 16 contained in the resin to be caught at a specific place within the container 10. The magnet 17a is arranged on the back surface of a plunger 11 and the metallic foreign matter 16 is stuck to the surface of the plunger 11. As the result, the metallic foreign matter 16 is caught on the surface of the plunger 11 to prevent the metallic foreign matter 16 from flowing out from the coating apparatus 1 and then, the metallic foreign matter 16 does not enter into a place between electrodes arranged in the semiconductor element and the short circuit between the electrodes arranged in the semiconductor element is prevented. As a result, the productivity of the semiconductor device is improved.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种用于提高半导体器件的生产率的涂布机以及使用这种涂布机制造半导体器件的方法。 解决方案:用于安装半导体元件的涂布机1包括用于容纳液体树脂的容器10和用于允许容纳在树脂中的金属异物16被捕获在容器10内的特定位置的磁体17a 磁体17a设置在柱塞11的背面,金属异物16粘贴在柱塞11的表面。结果,金属异物16被卡在柱塞11的表面上以防止 金属异物16从涂覆装置1流出,然后金属异物16不会进入布置在半导体元件中的电极之间的位置,并且防止布置在半导体元件中的电极之间的短路。 结果,提高了半导体器件的生产率。 版权所有(C)2008,JPO&INPIT