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1. 发明专利

JP2010049761A Method for processing magnetic material, and method for manufacturing magnetic head 审中-公开
标题翻译：磁性材料加工方法及制造磁头的方法
公开(公告)号：JP2010049761A
公开(公告)日：2010-03-04
申请号：JP2008214533
申请日：2008-08-22
申请人： Fujitsu Ltd , 富士通株式会社
发明人： TAKASU YOICHI , INUKAI KAZUAKI
IPC分类号： G11B5/31 , C23F4/00 , H01L21/3065 , H01L21/8246 , H01L27/105 , H01L43/08 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To provide a method for processing a magnetic material, for making a main magnetic pole more fine than before.
SOLUTION: The method for processing a magnetic material includes the steps of: forming a magnetic body layer 31 having a magnetic material above a substrate 1; forming a mask 35 containing a metal having a boiling point in a chlorinated state higher than that of chloride of the magnetic material on the magnetic body layer 31; etching the magnetic body layer 31 of an area exposed from the mask 35 by a dry etching method including chemical reaction with chlorine gas, thereby forming the magnetic pole of a magnetic head.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于处理磁性材料的方法，用于使主磁极比以前更精细。解决方案：用于处理磁性材料的方法包括以下步骤：在基板1上形成具有磁性材料的磁性体层31; 在磁性体层31上形成含有比氯化物的氯化态高的金属的金属的掩模35; 通过包括与氯气的化学反应的干蚀刻方法来蚀刻从掩模35暴露的区域的磁性体层31，从而形成磁头的磁极。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2010152971A Method for manufacturing magnetic head 审中-公开
标题翻译：制造磁头的方法
公开(公告)号：JP2010152971A
公开(公告)日：2010-07-08
申请号：JP2008329405
申请日：2008-12-25
申请人： Fujitsu Ltd , 富士通株式会社
发明人： NAGANUMA YASUO , FUJIEDA HIROSHI , INUKAI KAZUAKI , YAMAMOTO TAMOTSU
IPC分类号： G11B5/31
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic head which suppresses a variation in the core width of a main magnetic pole between wafers. SOLUTION: In the method for manufacturing the magnetic head by forming a hard mask on a magnetic material layer and forming the inverted-trapezoidal main magnetic pole by ion milling which is irradiation with ion beams from an oblique direction, the width (the width of the bottom) W and the side wall inclination α of the hard mask before the ion milling are measured. Then, a beam irradiation angle θ when performing the ion milling of the magnetic material layer is determined according to the etching amount (shifting amount S) in the width direction of the hard mask and the side wall inclination α of the hard mask. The shifting amount S is obtained by subtracting the target value (design value) D of the core width of the main magnetic pole from the measured value of the width W of the hard mask. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种抑制晶片之间的主磁极的芯宽的变化的磁头的制造方法。解决方案：在通过在磁性材料层上形成硬掩模并通过从倾斜方向照射离子束的离子铣削形成倒梯形主磁极来制造磁头的方法中，宽度（测量离子铣前的硬掩模的底壁宽度W和侧壁倾角α。然后，根据硬掩模的宽度方向的蚀刻量（移动量S）和硬掩模的侧壁倾斜度α来确定进行磁性材料层的离子研磨时的光束照射角度θ。通过从硬掩模的宽度W的测量值中减去主磁极的芯宽度的目标值（设计值）D来获得移动量S. 版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2009015982A Manufacturing method of magnetic head, magnetic head, and magnetic recording and reproducing device 审中-公开
标题翻译：磁头，磁头和磁记录和再现装置的制造方法
公开(公告)号：JP2009015982A
公开(公告)日：2009-01-22
申请号：JP2007177725
申请日：2007-07-05
申请人： Fujitsu Ltd , 富士通株式会社
发明人： INUKAI KAZUAKI
IPC分类号： G11B5/31
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T428/11
摘要： PROBLEM TO BE SOLVED: To form a main magnetic pole of a magnetic head of a magnetic recording and reproducing device with high accuracy. SOLUTION: A hard mask layer is formed on an insulating layer and a pattern in a shape corresponding to the outline of a main magnetic pole layer is formed on the hard mask layer. Then a resist layer is formed, and a resist pattern is formed inside the outline patterned on the hard mask layer in a shape corresponding to the outline of a main magnetic pole auxiliary layer. Then the insulating layer is etched using the patterned resist as a mask to form a second groove corresponding to the outline of the main magnetic pole auxiliary layer. Then the resist pattern is removed. Then the patterned hard mask is used as a mask to form a first groove corresponding to the outline of the main magnetic pole layer on the insulating layer. After the hard mask layer is removed, a ferromagnetic body is deposited in the first and second grooves by a plating method to form the main magnetic pole and main magnetic pole auxiliary layer together at a time, and then the main magnetic pole layer is flattened by CMP. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：以高精度形成磁记录和再现装置的磁头的主磁极。解决方案：在绝缘层上形成硬掩模层，并且在硬掩模层上形成与主磁极层的轮廓相对应的形状的图案。然后形成抗蚀剂层，并且以对应于主磁极辅助层的轮廓的形状在硬掩模层上图案化的轮廓内部形成抗蚀剂图案。然后使用图案化的抗蚀剂作为掩模来蚀刻绝缘层，以形成对应于主磁极辅助层的轮廓的第二槽。然后去除抗蚀剂图案。然后将图案化的硬掩模用作掩模以形成对应于绝缘层上的主磁极层的轮廓的第一槽。在去除硬掩模层之后，通过电镀法将铁磁体沉积在第一和第二槽中，以一次形成主磁极和主磁极辅助层，然后主磁极层被平坦化 CMP。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2009123271A Method for manufacturing magnetic head, and magnetic recording device 审中-公开
标题翻译：制造磁头和磁记录装置的方法
公开(公告)号：JP2009123271A
公开(公告)日：2009-06-04
申请号：JP2007295007
申请日：2007-11-14
申请人： Fujitsu Ltd , 富士通株式会社
发明人： YAMAMOTO TAMOTSU , SHIRATAKI HIROSHI , INUKAI KAZUAKI
IPC分类号： G11B5/31 , G11B5/39
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic head, with which variations on pole heights of a main magnetic pole are suppressed, and to provide a magnetic recording device with the magnetic head manufactured by the method. SOLUTION: A plated seed layer 51 is formed on an insulating film 44, and a photoresist film 52 having an opening 52 formed into a desired main pole shape is formed thereon. Then, after formation of a magnetic film 36a in the opening 52a, the resist film 52 is ion-milled to have a predetermined thickness. Then, after formation of a stopper film 53 on the entire surface, polishing is performed by CMP method until the position of the upper surface of the magnetic film 36 matches that of the upper surface of the stopper film 53 on the photoresist film 52. Then, the photoresist film 52 is removed together with the stopper film 53 on it. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于制造磁头的方法，其中主磁极的极高度的变化被抑制，并且提供具有通过该方法制造的磁头的磁记录装置。解决方案：在绝缘膜44上形成电镀种子层51，并且在其上形成具有形成为所需主极形状的开口52的光致抗蚀剂膜52。然后，在开口52a中形成磁性膜36a之后，将抗蚀剂膜52离子研磨成具有规定的厚度。然后，在整个表面上形成止动膜53之后，通过CMP法进行研磨，直到磁性膜36的上表面的位置与光刻胶膜52上的止动膜53的上表面的位置一致。然后，光致抗蚀剂膜52与阻挡膜53一起被去除。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2008204526A Method for manufacturing magnetic recording head 审中-公开
标题翻译：制造磁记录头的方法
公开(公告)号：JP2008204526A
公开(公告)日：2008-09-04
申请号：JP2007037646
申请日：2007-02-19
申请人： Fujitsu Ltd , 富士通株式会社
发明人： INUKAI KAZUAKI , KON JUNICHI
IPC分类号： G11B5/31
CPC分类号： G11B5/3163 , G11B5/1278
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic recording head, capable of stably forming a main magnetic pole with minimized dispersion of the core width of a tip portion or the angles of both side surfaces of the main magnetic pole and the neck height of the main magnetic pole by preventing rounding of the shape of the main magnetic pole during the formation thereof.
SOLUTION: The method comprises a resist pattern forming process for forming a resist layer 30 with a part punched into a shape of the main magnetic pole 10 of a magnetic recording head, composed of a thermoplastic material; a hardening process for hardening a surface 30c of the resist layer 30; a baking process for heating and baking the resist layer 30 after the hardening process to fluidize it once; and a main magnetic pole forming process for forming the main magnetic pole 10 by filling the punched part 30a of the resist layer 30 with a material of the main magnetic pole 10.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造磁记录头的方法，其能够以最小化的尖端部分的芯宽度的分散或主磁极的两个侧表面的角度稳定地形成主磁极以及主磁极的颈部高度，通过防止主磁极在其形成时的形状的四舍五入。解决方案：该方法包括抗蚀剂图案形成工艺，用于形成抗蚀剂层30，其中冲压成由热塑性材料构成的磁记录头的主磁极10的形状; 用于使抗蚀剂层30的表面30c硬化的硬化处理; 用于在硬化处理之后加热和烘烤抗蚀剂层30以使其流化一次的烘烤工艺; 以及通过用主磁极10的材料填充抗蚀剂层30的冲压部分30a来形成主磁极10的主磁极形成过程。版权所有（C）2008，JPO＆INPIT

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