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1. 发明专利

JP2007211293A Spray deposit film, and powder for thermal spraying 审中-公开
标题翻译：喷雾沉积膜和粉末喷涂
公开(公告)号：JP2007211293A
公开(公告)日：2007-08-23
申请号：JP2006032481
申请日：2006-02-09
申请人： Fujimi Inc , 株式会社フジミインコーポレーテッド
发明人： MIZUNO HIROAKI , KITAMURA JUNYA
IPC分类号： C23C4/04
CPC分类号： C23C4/06 , C23C4/02 , Y10T428/24942
摘要： PROBLEM TO BE SOLVED: To suppress peel and cracks of a spray deposit film caused by the difference in the coefficient of thermal expansion between the spray deposit film and a base member. SOLUTION: A spray deposit film 11 consists of cermet, and provided on a surface of a base material 12. The value of the coefficient of thermal expansion of the spray deposit film 11 divided by the thickness (unit: μm) of the spray deposit film 11 and further divided by the coefficient of thermal expansion of the base material 12 is set to be ≥0.15×10 -2 . COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了抑制由喷雾沉积膜和基底构件之间的热膨胀系数的差异引起的喷雾沉积膜的剥离和裂纹。解决方案：喷涂沉积膜11由金属陶瓷构成，并且设置在基材12的表面上。喷雾沉积膜11的热膨胀系数除以其厚度（单位：μm）喷涂沉积膜11进一步除以基材12的热膨胀系数设定为≥0.15×10 -2 。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2007100142A Sprayed coating 有权
标题翻译：喷涂
公开(公告)号：JP2007100142A
公开(公告)日：2007-04-19
申请号：JP2005289174
申请日：2005-09-30
申请人： Fujimi Inc , 株式会社フジミインコーポレーテッド
发明人： KITAMURA JUNYA , AOKI ISAO , SUGIYAMA YOSHIKAZU
IPC分类号： C23C4/10 , C23C4/04
摘要： PROBLEM TO BE SOLVED: To provide a sprayed coating having excellent plasma etching resistance to high output plasma in which plasma output applied to a sprayed coating per unit area is ≥0.8 W/cm 2 . SOLUTION: The sprayed coating at least comprises yttria as the main component. When the sprayed coating is exposed to CF 4 plasma in which plasma output applied to the sprayed coating per unit area is ≥0.8 W/cm 2 , the etching rate of the sprayed coating by the CF 4 plasma satisfies the inequality of Re≤7.7×Pp 2.2 ; wherein, Re denotes the etching rate [nm/min] of the sprayed coating by the CF 4 plasma; and Pp denotes the plasma output [W/cm 2 ] applied to the sprayed coating per unit area. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供对高输出等离子体具有优异的等离子体耐蚀刻性的喷涂涂层，其中施加到每单位面积的喷涂层的等离子体输出为≥0.8W/ cm 2 SP / 2。
解决方案：喷涂涂层至少包含氧化钇作为主要成分。当喷涂的涂层暴露于其中施加到每单位面积的喷涂涂层的等离子体输出为≥0.8W/ cm 2 SPF的等离子体时，喷涂的蚀刻速率通过CF 4 等离子体的涂覆满足Re≤7.7×Pp 2.2 的不等式。其中，Re表示通过CF 4 SBS等离子体喷镀的涂层的蚀刻速度[nm / min] Pp表示施加到每单位面积的喷涂层的等离子体输出[W / cm 2 ]。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2013136814A Ceramic spray deposit and method for manufacturing the same 审中-公开
标题翻译：陶瓷喷涂沉积物及其制造方法
公开(公告)号：JP2013136814A
公开(公告)日：2013-07-11
申请号：JP2011288262
申请日：2011-12-28
申请人： Fujimi Inc , 株式会社フジミインコーポレーテッド
发明人： SATO KAZUTO , MIZUNO HIROAKI , KITAMURA JUNYA , KOBAYASHI YOSHITOMO
IPC分类号： C23C4/10
摘要： PROBLEM TO BE SOLVED: To provide a ceramic spray deposit having characteristics near a ceramic sintering bulk body.SOLUTION: In the ceramic spray deposit, the Vickers hardness measured with a load of 200 gf (approximately 1.96 N) has a value 0.6 times or more as large as the ceramic sintering bulk body made of the same ceramics as ceramics constituting the ceramic spray deposit.
摘要翻译：要解决的问题：提供具有陶瓷烧结体本体附近特性的陶瓷喷雾沉积。解决方案：在陶瓷喷涂沉积物中，用200gf（约1.96N）的负载测量的维氏硬度具有0.6倍或更大的值与由构成陶瓷喷雾沉积物的陶瓷相同的陶瓷制成的陶瓷烧结体本体一样大。

4. 发明专利

JP2012188677A Powder for thermal spraying 审中-公开
标题翻译：用于热喷涂的粉末
公开(公告)号：JP2012188677A
公开(公告)日：2012-10-04
申请号：JP2011050414
申请日：2011-03-08
申请人： Fujimi Inc , 株式会社フジミインコーポレーテッド
发明人： SATO KAZUTO , KITAMURA JUNYA , HAKUKAWA TORU
IPC分类号： C23C4/10
摘要： PROBLEM TO BE SOLVED: To provide a powder for thermal spraying including ceramic particles, which has good thermal spraying efficiency.SOLUTION: The powder for thermal spraying includes ceramic particles, and the value of fractal dimension of the ceramic particles is 1.08 or less. The ceramic particles are preferably granulated-sintered particles, and the average aspect ratio of the ceramic particles is preferably 1.30 or less. The powder for thermal spraying may include additional ceramic particles, and the value of fractal dimension of the additional ceramic particles is preferably 1.08 or more.
摘要翻译：要解决的问题：提供具有良好的热喷涂效率的包括陶瓷颗粒的热喷涂用粉末。解决方案：用于热喷涂的粉末包括陶瓷颗粒，陶瓷颗粒的分形维数值为1.08以下。陶瓷颗粒优选为造粒烧结颗粒，并且陶瓷颗粒的平均纵横比优选为1.30以下。用于热喷涂的粉末可以包括另外的陶瓷颗粒，并且额外的陶瓷颗粒的分形维数的值优选为1.08以上。版权所有（C）2013，JPO＆INPIT

5. 发明专利

JP2007100143A Sprayed coating 有权
标题翻译：喷涂
公开(公告)号：JP2007100143A
公开(公告)日：2007-04-19
申请号：JP2005289175
申请日：2005-09-30
申请人： Fujimi Inc , 株式会社フジミインコーポレーテッド
发明人： KITAMURA JUNYA , AOKI ISAO , SUGIYAMA YOSHIKAZU
IPC分类号： C23C4/10 , C23C4/04
摘要： PROBLEM TO BE SOLVED: To provide a sprayed coating having excellent plasma etching resistance to low output plasma in which plasma output applied to a sprayed coating per unit area is 2 . SOLUTION: The sprayed coating at least comprises yttria as the main component. When the sprayed coating is exposed to CF 4 plasma in which plasma output applied to the sprayed coating per unit area is 2 , the etching rate of the sprayed coating by the CF 4 plasma satisfies the inequality of Re≤8.0×Pp 2.2 ; wherein, Re denotes the etching rate [nm/min] of the sprayed coating by the CF 4 plasma; and Pp denotes the plasma output [W/cm 2 ] applied to the sprayed coating per unit area. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供对低输出等离子体具有优异的等离子体耐蚀刻性的喷涂涂层，其中施加到每单位面积的喷涂层的等离子体输出<0.8W / cm 2 SP SP 2。
解决方案：喷涂涂层至少包含氧化钇作为主要成分。当喷涂的涂层暴露于其中施加到每单位面积的喷涂层的等离子体输出为<0.8W / cm 2 SPF的CFS等离子体时，喷涂的蚀刻速率通过CF 4 等离子体的涂覆满足Re≤8.0×Pp 2.2 的不等式。其中，Re表示通过CF 4 SBS等离子体喷镀的涂层的蚀刻速度[nm / min] Pp表示施加到每单位面积的喷涂层的等离子体输出[W / cm 2 ]。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2007100141A Powder for thermal spraying and method for forming sprayed coating 有权
标题翻译：用于热喷涂的粉末和形成喷涂的方法
公开(公告)号：JP2007100141A
公开(公告)日：2007-04-19
申请号：JP2005289173
申请日：2005-09-30
申请人： Fujimi Inc , 株式会社フジミインコーポレーテッド
发明人： KITAMURA JUNYA , IBE HIROYUKI , SUGIYAMA YOSHIKAZU
IPC分类号： C23C4/10 , C23C4/12
摘要： PROBLEM TO BE SOLVED: To provide a powder for thermal spraying suitable for the formation of a sprayed coating having excellent plasma etching resistance to low output plasma in which plasma output applied to a sprayed coating per unit area is 2 ; and to provide a method for forming the sprayed coating. SOLUTION: The powder for thermal spraying comprises yttria granulated-sintered particles obtained by granulating a raw material powder and sintering the same in the air. The average particle diameter of the primary particles composing the yttria granulated-sintered particles is 3 to 8 μm. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供适用于形成喷涂涂层的粉末，该粉末涂层具有优异的耐等离子体耐蚀刻性能，其中施加到每单位面积喷涂的等离子体输出<0.8W / cm的低输出等离子体 2 ; 并提供形成喷涂涂层的方法。解决方案：用于热喷涂的粉末包括通过将原料粉末造粒并在空气中烧结而获得的氧化钇粒状烧结颗粒。构成氧化钇粒状烧结粒子的一次粒子的平均粒径为3〜8μm。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2007100140A Powder for thermal spraying and method for forming sprayed coating 有权
标题翻译：用于热喷涂的粉末和形成喷涂的方法
公开(公告)号：JP2007100140A
公开(公告)日：2007-04-19
申请号：JP2005289172
申请日：2005-09-30
申请人： Fujimi Inc , 株式会社フジミインコーポレーテッド
发明人： KITAMURA JUNYA , IBE HIROYUKI , SUGIYAMA YOSHIKAZU
IPC分类号： C23C4/10 , B05D7/24 , C23C4/12
摘要： PROBLEM TO BE SOLVED: To provide a powder for thermal spraying suitable for the formation of a sprayed coating having excellent plasma etching resistance to high output plasma in which plasma output applied to a sprayed coating per unit area is ≥0.8 W/cm 2 ; and to provide a method for forming the sprayed coating. SOLUTION: The powder for thermal spraying comprises yttria granulated-sintered particles obtained by granulating a raw material powder and sintering the same in the air. The average particle diameter of the primary particles composing the yttria granulated-sintered particles is 0.5 to 1.5 μm, and is also ≥1.11 times the average particle diameter of the raw material powder. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供适用于形成喷涂涂层的粉末，其对于高输出等离子体具有优异的等离子体耐蚀刻性，其中施加到每单位面积的喷涂层的等离子体输出为≥0.8W/ cm 2 ; 并提供形成喷涂涂层的方法。解决方案：用于热喷涂的粉末包括通过将原料粉末造粒并在空气中烧结而获得的氧化钇粒状烧结颗粒。构成氧化钇粒状烧结粒子的一次粒子的平均粒径为0.5〜1.5μm，也是原料粉末的平均粒径的1 / 11.11倍。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2014062332A Slurry for spray coating, method for forming sprayed coating film, and sprayed coating film 有权
标题翻译：用于喷涂的浆料，形成喷涂膜的方法和喷涂膜
公开(公告)号：JP2014062332A
公开(公告)日：2014-04-10
申请号：JP2014000233
申请日：2014-01-06
申请人： Fujimi Inc , 株式会社フジミインコーポレーテッド
发明人： KITAMURA JUNYA , IBE HIROYUKI , MIZUNO HIROAKI
IPC分类号： C23C4/10
摘要： PROBLEM TO BE SOLVED: To provide a slurry for spray coating suitable for forming a spray coating film useful for preventing plasma erosion in a semiconductor device manufacturing apparatus, a flat-panel display device manufacturing apparatus, and the like.SOLUTION: A slurry for spray coating includes yttrium oxide particles and a dispersant. The yttrium oxide particles have a purity of 95 mass% or higher, a mean particle diameter of 6 μm or less, a content in the slurry for spray coating of 1.5 to 30 vol.%, and a BET specific surface area of 1 to 25 m/g. A relative deposition ratio of the slurry for spray coating measured by a fluid pressure method is preferably 30% or less.
摘要翻译：要解决的问题：提供适于形成用于防止半导体装置制造装置，平板显示装置制造装置等中的等离子体侵蚀的喷涂膜的喷涂用浆料。溶液：用于喷雾的浆料涂层包括氧化钇颗粒和分散剂。氧化钇粒子的纯度为95质量％以上，平均粒径为6μm以下，喷涂用浆料的含量为1.5〜30体积％，BET比表面积为1〜25 米/克。通过流体压力法测量的喷涂用浆料的相对沉积比优选为30％以下。

9. 发明专利

JP2008069386A Powder for thermal spray, and thermal spray coating 有权
标题翻译：热喷涂粉末和热喷涂
公开(公告)号：JP2008069386A
公开(公告)日：2008-03-27
申请号：JP2006247197
申请日：2006-09-12
申请人： Fujimi Inc , 株式会社フジミインコーポレーテッド
发明人： MIZUNO HIROAKI , KITAMURA JUNYA
IPC分类号： C23C4/06 , B22F1/00 , C22C29/08
CPC分类号： C23C4/06 , C23C4/129
摘要： PROBLEM TO BE SOLVED: To provide powder for thermal spray suitable for forming a WC-based cermet thermal spray coating for roll application, and to provide a thermal spray coating formed using the powder for thermal spray. SOLUTION: The powder for thermal spray contains cermet particles. The cermet particles comprise metal containing at least one selected from cobalt, chromium and nickel, and tungsten carbide. The ratio of the integrated weight of the cermet particles with the particle diameters of ≥25 μm to the integrated weight of all the cermet particles in the powder for thermal spray is 0.5 to 15%. COPYRIGHT: (C)2008,JPO&INPIT

10. 发明专利

JP2006336091A Powder for thermal spray, thermally sprayed coating, and layered body 审中-公开
标题翻译：热喷涂粉末，热喷涂和层状体
公开(公告)号：JP2006336091A
公开(公告)日：2006-12-14
申请号：JP2005164498
申请日：2005-06-03
申请人： Fujimi Inc , 株式会社フジミインコーポレーテッド
发明人： MIZUNO HIROAKI , KITAMURA JUNYA , ITSUKAICHI TAKESHI
IPC分类号： C23C4/04 , B32B18/00 , C22C27/04
摘要： PROBLEM TO BE SOLVED: To provide a powder for thermal spray, which is suitable for forming a thermally sprayed coating being hardly exfoliated from a base material having a relatively high coefficient of thermal expansion such as a base material made of stainless steel and having excellent erosion resistance. SOLUTION: The powder for thermal spray comprises cermet particles including boron, molybdenum, chromium and cobalt. In the cermet particles, the content ratio of molybdenum to cobalt is preferably within a range of 2.4-4.0, the content of chromium is preferably within a range of 11-16 mass%, and the content of cobalt is preferably within a range of 13-23 mass%. The coefficient of thermal expansion of the thermally sprayed coating formed from such a powder for thermal spray is preferably not lower than 9.5×10 -6 /K within a temperature range of 100-600°C. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于热喷涂的粉末，其适于形成几何不会从具有相对较高热膨胀系数的基材（例如由不锈钢制成的基材）剥离的热喷涂层，以及具有优异的抗侵蚀性。解决方案：用于热喷涂的粉末包括包括硼，钼，铬和钴的金属陶瓷颗粒。在金属陶瓷粒子中，钼与钴的含有比优选在2.4〜4.0的范围内，铬的含量优选为11〜16质量％，钴的含量优选为13 -23质量％。由这种用于热喷涂的粉末形成的热喷涂层的热膨胀系数在100-600℃的温度范围内优选不低于9.5×10 -6 / SP / K。版权所有（C）2007，JPO＆INPIT

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