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1. 发明专利

JP2012247240A Gas sensor and gas detection device 有权
标题翻译：气体传感器和气体检测装置
公开(公告)号：JP2012247240A
公开(公告)日：2012-12-13
申请号：JP2011117796
申请日：2011-05-26
申请人： Figaro Eng Inc , フィガロ技研株式会社
发明人： IZAWA KUNIYUKI , YOSHIOKA KENICHI , KITAGAWA CHISUMI
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a gas sensor that prevents poisoning due to an organic solvent.SOLUTION: In this gas sensor, a gas detection part is provided which includes a heater in insulator films on a silicon substrate surface, a cavity is provided on bottoms of the insulator films around the gas detection part, and a silicon substrate is housed in a housing. An adsorption agent of an organic solvent and an oxidation catalyst of an organic solvent are provided on the housing in the order of, from the outside to the inside of the housing, the adsorption agent and then the oxidation catalyst. Therefore, an atmosphere to be detected is guided to the gas detection part via the adsorption agent and the oxidation catalyst.
摘要翻译：要解决的问题：提供一种防止由有机溶剂引起的中毒的气体传感器。解决方案：在该气体传感器中，设置气体检测部，其包括硅基板表面上的绝缘体膜中的加热器，在气体检测部周围的绝缘膜的底部设置有空腔，硅基板住在一个住房。有机溶剂的吸附剂和有机溶剂的氧化催化剂以壳体的外部到内部，吸附剂和氧化催化剂的顺序设置在壳体上。因此，通过吸附剂和氧化催化剂将待检测气体引导至气体检测部。版权所有（C）2013，JPO＆INPIT

2. 发明专利

JP2012247239A Gas detection device and gas detection method 有权
标题翻译：气体检测装置和气体检测方法
公开(公告)号：JP2012247239A
公开(公告)日：2012-12-13
申请号：JP2011117795
申请日：2011-05-26
申请人： Figaro Eng Inc , フィガロ技研株式会社
发明人： IZAWA KUNIYUKI , YOSHIOKA KENICHI , KITAGAWA CHISUMI
IPC分类号： G01N27/12 , G01N25/30 , G01N27/16
CPC分类号： G01N27/124 , G01N27/128 , G01N33/0013
摘要： PROBLEM TO BE SOLVED: To provide a gas detection device that prevents poisoning of a MEMS gas sensor.SOLUTION: In this gas detection device, a gas is detected using a MEMS gas sensor. Electric power to a heater in the gas sensor is changed among a low level, a high level appropriate for detection of a gas to be detected, and a 0 level. Therefore, poisoning gas is evaporated or oxidized at the low level, and the gas to be detected is detected at the high level.
摘要翻译：要解决的问题：提供一种防止MEMS气体传感器中毒的气体检测装置。
解决方案：在该气体检测装置中，使用MEMS气体传感器检测气体。气体传感器中的加热器的电力在适于检测待检测气体的低电平，高电平和0电平之间变化。因此，中毒气体在低水平下被蒸发或氧化，并且被检测的气体处于高水平。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2012172973A Apparatus and method for detecting combustible gas 审中-公开
标题翻译：用于检测可燃气体的装置和方法
公开(公告)号：JP2012172973A
公开(公告)日：2012-09-10
申请号：JP2011031750
申请日：2011-02-17
申请人： Figaro Eng Inc , フィガロ技研株式会社
发明人： IZAWA KUNIYUKI , YOSHIOKA KENICHI , KITAGAWA CHISUMI
IPC分类号： G01N27/12 , G01N27/04
摘要： PROBLEM TO BE SOLVED: To prevent poisoning with a poisoning gas having passed through a filter.SOLUTION: An MEMS gas sensor comprises an insulating film provided on a silicon substrate, a SnO2 film and a heater film provided on the insulating film, and a filter for treating a gas reaching the SnO2 film. Power is supplied to the heater film from a power source, and the SnO2 film is heated intermittently in a pulse-like manner up to a detection temperature for a combustible gas, so as to detect a combustible gas, and the SnO2 film is heated intermittently to a removal temperature of 100 to 200°C for removing a poisoning gas.
摘要翻译：要解决的问题：为了防止通过过滤器的中毒气体中毒。解决方案：MEMS气体传感器包括设置在硅衬底上的绝缘膜，设置在绝缘膜上的SnO 2膜和加热膜，以及用于处理到达SnO 2膜的气体的过滤器。从电源向加热器膜供电，将SnO 2膜以类似脉冲的方式间歇地加热至可燃气体的检测温度，以便检测可燃气体，并且间歇地加热SnO 2膜去除中毒气体的去除温度为100〜200℃。版权所有（C）2012，JPO＆INPIT

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