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1. 发明专利

JPH0266400A GAS EXCHANGER DEVICE 失效
公开(公告)号：JPH0266400A
公开(公告)日：1990-03-06
申请号：JP21639788
申请日：1988-09-01
申请人： FUJITSU LTD , EBARA CORP
发明人： SADAKATA TAKAYUKI , FUJIE NOBUO , NISHIMURA TATSUYA , SAITO MASAO , HIROSE TETSUHISA
IPC分类号： F17D1/04
摘要： PURPOSE:To perform gas exchange work in piping safely and in good efficiency further in a short time by providing a portable type exhaust device, portable tape inactive gas supplier device and a control unit, which controls the action of the inactive gas supplier device from a side of the exhaust device, further in the exhaust device. CONSTITUTION:In the case of replacing semiconductor manufacturing gas residual in a piping system with inactive gas, first an exhaust device 14 and an inactive gas supplier device 12 are connected respectively to a side of a semiconductor manufacturing device 4 and a semiconductor manufacturing gas bomb 2 in the piping system for gas exchange to be performed, and air in these devices is replaced with inactive gas. Exhaust in the piping system 5 is performed by the exhaust device 14, and in the point of time a pressure in the piping system 5 decreases to a predetermined value or less, exhaust operation is finished. Subsequently, supply operation of inactive gas is performed by the inactive gas supplier device 12 till the pressure in the piping system 5 increases to a predetermined value or more. And the exhaust and supply operations are repeated by a preset number of times by a control unit.

2. 发明专利

JPH02303514A EVACUATING APPARATUS 失效
公开(公告)号：JPH02303514A
公开(公告)日：1990-12-17
申请号：JP12443989
申请日：1989-05-19
申请人： EBARA CORP , FUJITSU LTD
发明人： NISHIMURA TATSUYA , SADAKATA TAKAYUKI , FUJIE NOBUO
IPC分类号： A47L9/02 , B01D53/04 , B01D53/34 , B01D53/81 , B01L1/00 , F24F7/06
摘要： PURPOSE:To effectively prevent the diffusion of a produced gas and to improve the sanitation of working environment by providing a gas treating means with a dry type adsorbent and constituting the gas treating means freely attachable and detachable to and from a moving means. CONSTITUTION:A fan 32 to suck the gas, the gas treating means 20 which treats the sucked gas and a detecting means which detects, the concn. of the gas are imposed on a moving means 10. The gas treating means 20 is provided with the dry type adsorbent 28 and the means 20 is constituted freely attachable and detachable to and from the moving means 10. As a result, the local diffusion of the produced gas is effectively prevented as the device is of a moving type. In addition, the sanitation of the working environment is improved.

3. 发明专利

JP2004313620A Hydraulic unit for driving object to be opened and closed and water use apparatus 审中-公开
公开(公告)号：JP2004313620A
公开(公告)日：2004-11-11
申请号：JP2003114910
申请日：2003-04-18
申请人： Ebara Corp , 株式会社荏原製作所
发明人： SAKASHITA DAICHI , NISHIMURA TATSUYA , SASAKI KENICHI
IPC分类号： E05F15/20 , A47H5/02
摘要： PROBLEM TO BE SOLVED: To provide a hydraulic unit for driving an object to be opened and closed, which automatically operates the closure such as a curtain and a blind using eco-friendly city water supply pressure as a drive source, has superior crime prevention property and effectively using the drainage from an apparatus and to provide water use equipment. SOLUTION: This hydraulic drive unit is provided with the curtain 100, or the object to be opened and closed; a hydraulic drive mechanism 200 opening/closing the curtain 100 by the water supply pressure; an optical sensor 3 sensing a light; and a control means 300 controlling the hydraulic drive mechanism 200 to open/close the curtain 100 by a change in the brightness measured by the optical sensor 3. This unit is also provided with a water quality converting device 400 converting the water quality of the drainage in the drain side of the hydraulic drive mechanism 200. COPYRIGHT: (C)2005,JPO&NCIPI

4. 发明专利

JP2004221019A Method and device for igniting microwave plasma under atmospheric pressure 审中-公开
标题翻译：用于点燃大气压下微波等离子体的方法和装置
公开(公告)号：JP2004221019A
公开(公告)日：2004-08-05
申请号：JP2003010037
申请日：2003-01-17
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MATSUMURA SATORU , NISHIMURA TATSUYA
IPC分类号： H05H1/32 , B01J19/08 , C23C16/511 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To provide a method and device for obtaining excellent igniting performance of an atmospheric pressure microwave plasma, regardless of type of gas. SOLUTION: Plasma generating gas is supplied into a discharge tube for generating an atmospheric pressure microwave plasma, and a spark discharge electrode is inserted into the discharge tube at a place with a high microwave electric field intensity. After the plasma is ignited by discharging a spark, the electrode is evacuated to a place apart form the plasma, allowing a plurality of types of gas to be used for easily and automatically igniting the atmospheric pressure plasma. COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：提供用于获得大气压微波等离子体的优异点火性能的方法和装置，而不管气体的类型。解决方案：将等离子体产生气体供应到用于产生大气压微波等离子体的放电管中，并且在具有高微波电场强度的地方将火花放电电极插入放电管中。在通过放电火花点燃等离子体之后，电极被抽空到离开等离子体的地方，允许使用多种类型的气体来容易且自动地点燃大气压等离子体。版权所有（C）2004，JPO＆NCIPI

5. 发明专利

JP2002058986A NOZZLE FOR SUPERCRITICAL WATER AND SUPERCRITICAL WATER REACTION APPARATUS 失效
公开(公告)号：JP2002058986A
公开(公告)日：2002-02-26
申请号：JP2000245636
申请日：2000-08-14
申请人： EBARA CORP
发明人： HAMADA SHUSAKU , NISHIMURA TATSUYA , USUI TAKASHI , SERIKAWA ROBELT MASAHIRO , SATO KOICHI
IPC分类号： C07D319/24 , B01J3/00 , B01J3/02 , B05B1/02 , B05B7/04 , C02F1/74
摘要： PROBLEM TO BE SOLVED: To miniaturize a supercritical water reaction apparatus by small-sizing an external diameter of a nozzle for supercritical water. SOLUTION: The nozzle 10 for the supercritical water, which is constituted by having an outer pipe 14 and an inner pipe 11 inserted into the inner space of this outer pipe 14 and disposing spacers (for example, projecting parts 11a and 14a and a ring 19) for locating the outer peripheral surface of the inner pipe in a prescribed position with respect to the inner peripheral surface of the outer pipe 14 near a nozzle spout 16 into a reactor 1, is provided. The supercritical water reaction apparatus is provided by using such nozzle 10 and combining the same with the reactor 1, etc.

6. 发明专利

JP2001246201A METHOD AND APPARATUS FOR TREATING ORGANOCHLORINE COMPOUND-CONTAINING SOLID 失效
公开(公告)号：JP2001246201A
公开(公告)日：2001-09-11
申请号：JP2000058991
申请日：2000-03-03
申请人： EBARA CORP
发明人： SATO KOICHI , SERIKAWA ROBELT MASAHIRO , HAMADA SHUSAKU , NISHIMURA TATSUYA , USUI TAKASHI
IPC分类号： A62D3/20 , A62D3/38 , A62D101/08 , A62D101/22 , A62D101/28 , B01D11/02 , B01J20/30 , B09B3/00 , C08J11/02 , A62D3/00
摘要： PROBLEM TO BE SOLVED: To bring an extraction fluid into contact with alkaline and acidic solids containing an organochlorine compound to efficiently transfer the organochlorine compound from the solids to the extraction fluid and subsequently subjecting the organochlorine compound dissolved in a liquid medium to decomposition treatment by supercritical water oxidizing treatment. SOLUTION: In a method for separating the organochlorine compound from the alkaline and acidic solids containing the organochlorine compound, the extraction fluid is brought into contact with the alkaline and acidic solids to transfer the organochlorine compound to the extraction fluid from the alkaline and acidic solids.

7. 发明专利

JPH11202097A STRUCTURE OF BEAM IRRADIATION WINDOW IN ELECTRON BEAM ACCELERATOR 失效
公开(公告)号：JPH11202097A
公开(公告)日：1999-07-30
申请号：JP1482898
申请日：1998-01-09
申请人： EBARA CORP
发明人： NISHIMURA TATSUYA
IPC分类号： G21K5/00 , H01J33/04
摘要： PROBLEM TO BE SOLVED: To provide a structure of a beam irradiation window in an electron beam accelerator that keeps guide pins from dropping without the necessity of high-level fit tolerances in work and prevents the loss of a seal effect due to the acute-angle bend of a metal ring at the edges of four corners in a beam irradiation window. SOLUTION: In a structure of a beam irradiation window of an electron beam accelerator, a guide pin (plunger) 13 is installed in a guide pin (plunger) installation hole 12 at the edges of four corners in a scanning tube flange 6 so that the pin 13 can freely protrude and retract. The guide pin 13 is retracted in the scanning tube flange 6 by hooking a sealing metal ring 7 on the outside of the said guide pin 13 and tightening the scanning tube flange 6 and a foil holding flange 10. In this structure, a window foil and the sealing metal ring 7 are fixed between the said scanning tube flange 6 and the foil holding flange. The guide pin 13 is installed in the scanning tube flange 6 through a hole 13a made in the center of the pin 13 with a screw 14 for preventing the pin 13 from dropping.

8. 发明专利

JPH07169746A MICROMACHINING DEVICE USING LOW-ENERGY NEUTRAL PARTICLE BEAM 失效
公开(公告)号：JPH07169746A
公开(公告)日：1995-07-04
申请号：JP34249693
申请日：1993-12-14
申请人： EBARA CORP
发明人： NISHIMURA TATSUYA , SUZUKI HIDENAO
IPC分类号： G21K1/00 , B81C99/00 , C23F4/02 , H01J37/305 , H01L21/302 , H01L21/3065 , H05H1/46 , H05H3/02
摘要： PURPOSE:To provide a micromachining device which generates a high-density, low-energy, and highly directional neutral particle beam and performs fine machining by utilizing the synergistic effect of the neutral particle beam and a reactive gas in order to realize a micro fabrication technique effective to the manufacture of semiconductors or micromachining of the next generation or next but one generation. CONSTITUTION:A micromachining device using low-energy neutral particle beam is provided with a plasma chamber 1 for generating high-density plasma, electrode 4 for extracting a low-energy ion beam from the chamber 1, neutralizing chamber 5 in which the ion beam is neutralized by bringing a supplied reactive gas into contact with the beam so as to cause charge exchange between the beam and gas, and another electrode 7 which leads the neutral particle beam generated in the chamber 5 to an object to be machined.

9. 发明专利

JPH0594977A METHOD AND APPARATUS FOR CLEANING GALLIUM ARSENIDE WAFER 失效
公开(公告)号：JPH0594977A
公开(公告)日：1993-04-16
申请号：JP10311891
申请日：1991-04-08
申请人： EBARA CORP
发明人： YOSHIOKA TAKESHI , NISHIMURA TATSUYA
IPC分类号： H01L21/304 , B82B1/00
摘要： PURPOSE:To enable a dense gallium arsenide monoatomic layer to be formed by a method wherein a high speed atomic beam is made to scan the surface of a wafer to remove a contamination layer. CONSTITUTION:Gallium atoms are supplied from a gallium source 7 to a gallium Fast Atom Beam (FAB) source 6, ionized into positive ions in a discharge space 2, extracted by an extracting electrode, and accelerated. The accelerated gallium positive ions are made to scan as wide as prescribed by a scanning electrode, and then electrons generated at an electron source 5 are given to serve as a fast gallium atomic beam (gallium FAB). At this point, arsenic compound such as arsine (AsH3), arsenic trichloride (AsCl3), or arsenic trifluoride (AsF3) is supplied to an arsenic FAB source 1 from an arsenic compound bomb 8 to generate an arsenic FAB through the same way as a gallium FAB. These gallium FAB 16 and arsenic FAB 15 are cast at the same spot on a wafer 17 to remove grease or dust which covers the surface of the wafer 17.

10. 发明专利

JP2005030720A LIGHTING WINDOW FOR BUILDING, AND CITY WATER UTILIZATION SYSTEM USING LIGHTING WINDOW FOR BUILDING 审中-公开
公开(公告)号：JP2005030720A
公开(公告)日：2005-02-03
申请号：JP2003272554
申请日：2003-07-09
申请人： EBARA CORP
发明人： SAKASHITA DAICHI , NISHIMURA TATSUYA
IPC分类号： E06B5/00 , F24H1/00 , F24J2/00 , F24J2/04
摘要： PROBLEM TO BE SOLVED: To provide a lighting window for a building, and a city water utilization system using a lighting window for a building that enable reduction in energy consumption, indoor comfort, and effective utilization of water resources by improving functions of the lighting window used in a building such as a house and providing functions of warm water production using solar radiation heat, indoor temperature control, screening, and the like. SOLUTION: The lighting window for a building 1 forms a void 10 sealed between two glass plates 7, so that a supply of water to the void 10 from a supply port 2 can form a water layer 11 between the glass plates 7. When city water is stored in the void 10 of the lighting window 1, solar radiation heat 28 heats the city water, which is in turn discharged from a discharge port 3 and fed to and used in other equipment capable of using heated city water. COPYRIGHT: (C)2005,JPO&NCIPI

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