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    • 1. 发明专利
    • GAS EXCHANGER DEVICE
    • JPH0266400A
    • 1990-03-06
    • JP21639788
    • 1988-09-01
    • FUJITSU LTDEBARA CORP
    • SADAKATA TAKAYUKIFUJIE NOBUONISHIMURA TATSUYASAITO MASAOHIROSE TETSUHISA
    • F17D1/04
    • PURPOSE:To perform gas exchange work in piping safely and in good efficiency further in a short time by providing a portable type exhaust device, portable tape inactive gas supplier device and a control unit, which controls the action of the inactive gas supplier device from a side of the exhaust device, further in the exhaust device. CONSTITUTION:In the case of replacing semiconductor manufacturing gas residual in a piping system with inactive gas, first an exhaust device 14 and an inactive gas supplier device 12 are connected respectively to a side of a semiconductor manufacturing device 4 and a semiconductor manufacturing gas bomb 2 in the piping system for gas exchange to be performed, and air in these devices is replaced with inactive gas. Exhaust in the piping system 5 is performed by the exhaust device 14, and in the point of time a pressure in the piping system 5 decreases to a predetermined value or less, exhaust operation is finished. Subsequently, supply operation of inactive gas is performed by the inactive gas supplier device 12 till the pressure in the piping system 5 increases to a predetermined value or more. And the exhaust and supply operations are repeated by a preset number of times by a control unit.
    • 2. 发明专利
    • LASER DIODE MODULE
    • JPH0784161A
    • 1995-03-31
    • JP22628493
    • 1993-09-13
    • FUJITSU LTD
    • NISHIMURA TATSUYA
    • G02B6/42G02B27/28H01S5/00H01S3/18
    • PURPOSE:To improve an extinction ratio in light output at the time of inputting of pulse signals by making the output light of a laser diode incident on a polarization separating element and introducing the exit light of the polarization separating element to an optical fiber. CONSTITUTION:The transmission loss of a laser oscillation region is lessened if the light of the laser oscillation region is previously aligned to p polarized light at the time of making the output light of the laser diode 4 incident at a Brewster angle on dielectric laminated films 1. Only the specific polarized light of the light of a spontaneously release region of randomly polarized light passes the region and, therefore, the transmission loss is increased. The transmitted light is emitted in a direction of the Brewster angle on the basis of the perpendicular erected on the plane of the dielectric laminated films 1. The light of the laser oscillation region is efficiently coupled to the optical fiber 3 if the direction is aligned to the direction of the optical fiber 3. The spontaneously released light of the light past the dielectric laminated films 1 is attenuated in such a manner and, therefore, the light output signal having the good extinction ratio characteristic is obtd.