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1. 发明专利

JP2008205157A Forming method of metal film pattern 审中-公开
标题翻译：金属薄膜形成方法
公开(公告)号：JP2008205157A
公开(公告)日：2008-09-04
申请号：JP2007039026
申请日：2007-02-20
申请人： Fujitsu Ltd , 富士通株式会社
发明人： FUKUDA HIROYUKI , SATO KAZUAKI
IPC分类号： H01L21/3205 , C25D5/02 , C25D5/48 , C25D7/12 , H01L21/288
摘要： PROBLEM TO BE SOLVED: To provide a forming method of a metal film pattern which reduces the composition distribution and film thickness distribution of the metal film pattern to cope with the high performance of an electronic device, and reduces loading to a plating liquid and a plating device to improve productivity upon forming the metal film pattern by forming a metal layer by electric plating and polishing the same by a chemical mechanical polishing (CMP) method.
SOLUTION: The forming method of the metal film pattern comprises a plating process for plating the surface of a substrate to form the metal film pattern 20B formed on the surface of the substrate which becomes a body 10 to be plated and a polishing process for thinning and flattening the film thickness of the metal layer 20A formed by plating after the plating process. In this case, the metal layer 20A formed on a part to be plated upon a plating process is formed so as to be small as much as possible with respect to the whole of the surface of the body 10 to be plated.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：为了提供金属膜图案的形成方法，其降低金属膜图案的组成分布和膜厚分布，以应对电子器件的高性能，并且减少对电镀液的负载以及电镀装置，通过用化学机械抛光（CMP）方法电镀和研磨金属层形成金属层来提高生产率。解决方案：金属膜图案的形成方法包括镀覆基板表面的电镀工艺，以形成形成在基板表面上的金属膜图案20B，该基板的表面将成为要被镀的主体10和抛光工艺用于使电镀后的电镀形成的金属层20A的膜厚变薄并变平。在这种情况下，形成在电镀处理部分上的金属层20A相对于要被电镀的主体10的整个表面尽可能小地形成。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2005108348A Method for manufacturing perpendicular magnetic recording head 审中-公开
标题翻译：制造全能磁记录头的方法
公开(公告)号：JP2005108348A
公开(公告)日：2005-04-21
申请号：JP2003341896
申请日：2003-09-30
申请人： Fujitsu Ltd , 富士通株式会社
发明人： SATO KAZUAKI , SAKUMICHI FUJIO , YAMAWAKI SEIGO , KOSHIKAWA YOSHIO , MIZOSHITA YOSHIBUMI , IKEGAWA YUKINORI
IPC分类号： G11B5/31
摘要： PROBLEM TO BE SOLVED: To efficiently manufacturing a highly accurate perpendicular magnetic recording head by accurately forming the section of a writing main magnetic pole into an inverted trapezoidal shape, and by preventing a variation in manufacturing.
SOLUTION: The method for manufacturing a perpendicular magnetic head provided with a magnetic yoke having a main magnetic pole opposed to a recording medium, a writing magnetic pole having a coil wound on the magnetic yoke, and a reproduction element, includes steps of: forming a main magnetic layer 20 as the main magnetic pole; forming a barrier layer 22 made of a nonmagnetic material on the surface of the main magnetic layer 20; and also forming a tip of the main pole 10 whose cross-section is formed into an inverted trapezoidal shape.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过将写入主磁极的部分精确地形成为倒梯形形状，并且通过防止制造变化来有效地制造高精度垂直磁记录头。解决方案：一种具有磁轭的方法，该磁轭具有与记录介质相对的主磁极，具有缠绕在磁轭上的线圈的书写磁极和再现元件，包括以下步骤：：形成主磁性层20作为主磁极; 在主磁性层20的表面上形成由非磁性材料制成的阻挡层22; 并且还形成其横截面形成为倒梯形形状的主极10的尖端。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2009266340A Method of manufacturing vertical magnetic head 审中-公开
标题翻译：制造垂直磁头的方法
公开(公告)号：JP2009266340A
公开(公告)日：2009-11-12
申请号：JP2008117348
申请日：2008-04-28
申请人： Fujitsu Ltd , 富士通株式会社
发明人： SUZUKI KENTARO , SATO KAZUAKI
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a vertical magnetic head by which a multilayer films are formed in the form in which they are flatly layered in the case of forming a main magnetic pole in a multilayer structure.
SOLUTION: The method of manufacturing a vertical magnetic head comprises the steps of: forming a resist pattern 10 including a concave section 10a having a flat of the main magnetic pole on a wafer substrate; and laminating a plurality of films in the concave section 10a according to the multilayer structure of the main magnetic pole. In the step for laminating the plurality of films in the concave section 10a, steps for: (a) forming films, in which sputter particles are sputtered so as to be made incident perpendicularly with respect to the surface of the substrate, a plurality of times so as to laminate sputtered films 12 flatly in the concave section 10a; and (b) removing the sputtered films 12, which have been stuck on the surface of the resist pattern 10 in the film forming step, from the surface of the resist pattern by polishing are repeated until the multilayer structure of the main magnetic pole is formed.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造垂直磁头的方法，在形成多层结构中的主磁极的情况下，以垂直磁头形成多层膜的形式，它们被平坦地层叠。解决方案：制造垂直磁头的方法包括以下步骤：在晶片衬底上形成包括具有主磁极平面的凹部10a的抗蚀剂图案10; 并根据主磁极的多层结构在凹部10a中层叠多个膜。在凹部10a中层叠多个膜的步骤中，为了（a）形成溅射粒子溅射以使其相对于基板表面垂直入射的步骤，多次从而将溅射膜12平坦地层叠在凹部10a中; 并且（b）重复将从成膜步骤中的抗蚀剂图案10的表面粘附的溅射膜12从研磨抗蚀剂图案的表面除去，直至形成主磁极的多层结构。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2009266331A Method of manufacturing thin film magnetic head 审中-公开
标题翻译：制造薄膜磁头的方法
公开(公告)号：JP2009266331A
公开(公告)日：2009-11-12
申请号：JP2008116665
申请日：2008-04-28
申请人： Fujitsu Ltd , 富士通株式会社
发明人： SUGIMOTO KOICHI , TACHIBANA MASANORI , SATO KAZUAKI , IKEDA YOSHIYUKI
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin film magnetic head in which a magnetic material having a satisfactory characteristic can be used for a main magnetic pole, and corrosion of the magnetic pole can be prevented to avoid a failure in a manufacturing process. SOLUTION: The thin film magnetic head manufacturing method of manufacturing a thin film magnetic head having a recording head unit formed by successively laminating predetermined thin films on a substrate, includes the steps of: forming a magnetic layer which serves as a recording magnetic pole on a base of the magnetic head unit; forming a stopper layer on the magnetic pole; forming an insulating layer on the stopper layer, polishing the insulating layer by a CMP process until an upper face of the stopper layer is exposed; removing the stopper layer by dry etching using reactive gas until an upper face of the magnetic head is exposed; removing the upper face of the magnetic pole by dry etching using inert gas until reaching a prescribed depth; and polishing the upper face of the magnetic pole by a CMP process until the upper face of the magnetic pole is planarized. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种制造其中可以使用具有令人满意的特性的磁性材料用于主磁极的薄膜磁头的方法，并且可以防止磁极的腐蚀以避免故障在制造过程中。解决方案：制造具有通过在基板上依次层叠预定薄膜而形成的记录头单元的薄膜磁头的薄膜磁头制造方法包括以下步骤：形成用作记录磁性的磁性层磁极单元的基座上的极; 在磁极上形成阻挡层; 在所述阻挡层上形成绝缘层，通过CMP工艺抛光所述绝缘层，直到所述阻挡层的上表面露出; 通过使用反应性气体的干蚀刻去除止动层直到磁头的上表面露出; 通过使用惰性气体的干蚀刻去除磁极的上表面直到达到规定的深度; 并通过CMP工序研磨磁极的上表面，直到磁极的上表面平坦化。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JPH10173711A CONNECTION SYSTEM FOR MULTIMEDIA NETWORK 失效
公开(公告)号：JPH10173711A
公开(公告)日：1998-06-26
申请号：JP33060096
申请日：1996-12-11
申请人： FUJITSU LTD
发明人： MIYAKE JUNICHI , SATO KAZUAKI
IPC分类号： H04L9/32 , G06F3/16 , G06F15/00 , G09C1/00 , H04L12/28 , H04L12/46 , H04L12/66 , H04L29/06 , H04M3/00
摘要： PROBLEM TO BE SOLVED: To deal with increasing multimedia communication by automatically connecting a destination address so as to enable access from a terminal to a server with a single access number by automatically performing the recognition and certification of media, while simultaneously managing addresses at the destinations to connect. SOLUTION: The access number common for respective media is dialed from a terminal to a server system 2 with a built-in gateway part 5, and when a call is terminated through a public network 1 to a port 3 of network connector 1, a getaway part 5 is activated. After a media-managing part 5b certifies a caller, based on a caller code and a password number or the like while identifying that caller based on its held media pattern, the destination to be connected to is retrieved by opening a data base (DB) 7a, any route which is optimum for that destination to connect is selected, and a path is connected through a line 12. Thus, the call termination to various media is enabled through one call-terminating port based on one access number. Further, transmission data are stored in a DB 8a and distributed at a designated time.

6. 发明专利

JPH1076153A AUTOMATIC LIQUID SUPPLY DEVICE AND ABNORMALITY DETECTOR 失效
公开(公告)号：JPH1076153A
公开(公告)日：1998-03-24
申请号：JP23550896
申请日：1996-09-05
申请人： FUJITSU LTD
发明人： SADAKATA TAKAYUKI , SATO KAZUAKI
IPC分类号： F15B20/00 , B01J4/00 , H01L21/304 , H01L21/306
摘要： PROBLEM TO BE SOLVED: To make a flow rate in each supply point constant and to precisely detect abnormality in a automatic liquid supply device for supplying 2 liquid to a supply point from a liquid forcibly feeding device through a liquid supply pipe line and an abnormality detector. SOLUTION: In the automatic liquid supply device provided with plural supply points 25-27, supply valves 30-32 provided respectively in the supply points 25-27, a pump 22 for forcibly feeding a liquid chemicals to the supply points 25-27 and the liquid supply pipe line 24 for connecting the supply points 25-27 to the pump 22, pleural supply points are connected to the liquid supply pipe line 24 in series and a flow control device 28 for controlling the flow rate of the liquid flowing in the liquid supply pipe line 24 corresponding to the opening state of the supply valves 30-32 to make constant is provided at a position of the downstream from the connecting positions of the supply points 25-27 to the liquid supply pipe line 24.

7. 发明专利

JPH0935997A MODULE WITH BUILT-IN THIN FILM CAPACITOR 失效
公开(公告)号：JPH0935997A
公开(公告)日：1997-02-07
申请号：JP18671595
申请日：1995-07-24
申请人： MITSUBISHI MATERIALS CORP , FUJITSU LTD
发明人： KUROMITSU YOSHIO , TOYODA SEIJI , SATO KAZUAKI
IPC分类号： H05K1/16 , C04B41/89 , H01G4/33 , H01L25/00 , H01L27/01 , H05K1/03 , H05K3/46
摘要： PROBLEM TO BE SOLVED: To make it possible to suppress power supply noise without problems in electric characteristics when an LSI to be mounted is a C-MOS LSI, to contain a thin film capacitor having very high reliability with large capacitance and to increase the mounting area. SOLUTION: A module 15 with a built-in thin film capacitor comprises a thin film capacitor 13 and a thin film multilayer circuit 14 on a module board 10. The board 10 is formed of sintered ceramic material 11 such as AlN, Al2 O3 or SiC, and a glass layer 12 provided on the surface of the material 11.

8. 发明专利

JPH0879391A ELECTRONIC CONFERENCE SYSTEM 失效
公开(公告)号：JPH0879391A
公开(公告)日：1996-03-22
申请号：JP20985894
申请日：1994-09-02
申请人： FUJITSU LTD
发明人： SATO KAZUAKI , YAMATO KOJI
IPC分类号： G06F13/00 , H04L12/18 , H04L12/54 , H04L12/58 , H04M3/42 , H04M3/50 , H04M3/56 , H04M11/00
摘要： PURPOSE: To allow a system to manage attendance/withdrawal/absence of those who intend to attendant an electronic conference automatically. CONSTITUTION: When a conference participation request or a conference withdrawal request comes from user terminals 2a to 2n or voice input output devices 1a to 1n, a network equipment 5 references connection addresses of the user terminals or the voice input output devices to obtain user identification information from a table CAT and informs utilizing party identification information to a conference server equipment 3. The conference server equipment 3 collects attendance withdrawal information of conference participants based on the informed user identification information. Furthermore, a list of conference participant scheduled parties is entered before the start of conference via the network equipment 5 to the conference server equipment 3 and the conference server equipment 3 compares the conference attendant scheduled parties and the conference participants to generate the conference absence party list.

9. 发明专利

JPH07161712A PATTERN FORMING METHOD 失效
公开(公告)号：JPH07161712A
公开(公告)日：1995-06-23
申请号：JP30308893
申请日：1993-12-02
申请人： FUJITSU LTD
发明人： TOMIZAWA SHIGERU , SATO KAZUAKI , SUGAWARA OMITOSHI , HOSOKAWA KAZUYUKI , YAMAWAKI SEIGO
IPC分类号： H01L21/3205 , H01L23/52 , H05K3/06
摘要： PURPOSE:To form a fine pattern of high quality. CONSTITUTION:An insulating film 22 is formed on a substrate 21. A Cr metal layer 23, a Cu conductor layer 24, and a Cr film 26 are formed in order on the film 22 by sputtering. Resist 27 is formed in a pattern forming part. Unnecessary part members except the resist 27 region are eliminated, and the resist 27 and a Cr etching film 26a are eliminated.

10. 发明专利

JPH0661645A PRODUCTION OF THIN FILM MULTILAYER BOARD 失效
公开(公告)号：JPH0661645A
公开(公告)日：1994-03-04
申请号：JP20922592
申请日：1992-08-05
申请人： FUJITSU LTD
发明人： SATO KAZUAKI
IPC分类号： H05K3/46 , G03F7/11 , H01L21/48 , H01L21/768 , H05K3/38
摘要： PURPOSE:To allow high speed formation of fine patterns with high yield by forming an effective barrier against photosensitive polyimide on a Cu wiring in the production of a thin film multilayer board. CONSTITUTION:In the production of a thin film multilayer board where an interlayer dielectric film 2 of photosensitive polyimide is laminated on a copper wiring 1, the copper wiring 1 is subjected to formation with a treating liquid mainly composed of K2Cr2O7 or Na2Cr2O7 to form a formation film 3 which is used as a barrier in the developing step of the interlayer dielectric film 2.

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