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    • 2. 发明专利
    • SOLAR CELL GENERATING DEVICE FOR ON-WATER INSTALLATION USE
    • JPH10173212A
    • 1998-06-26
    • JP27194796
    • 1996-10-15
    • FUJI ELECTRIC CO LTD
    • KIYOFUJI SHINJISAGARA HIROSHIFUNO HIDEKAZU
    • H01L31/042
    • PROBLEM TO BE SOLVED: To provide a solar cell generating device for on-water installation use, which is lightweight and is rich in mass productivity and is superior in workability. SOLUTION: A frame 2 consisting of a square-shaped panel material is fixed on a float 1 for on-water floating use, which is made of a foaming resin, with bolts or the like, an arch-shaped top plate 5 made of an Al alloy is mounted to the upper part of the frame 2 and a plurality of flexible solar cell modules 4 are fixed on the top plate 5 by module fixing plates 6 and bolts 7. A sheet with both surfaces subjected to waterproof treatment and having a size of 0.9×5m, a thickness of 1mm and a weight of 1kg/1m is mounted to the modules 4, a plurality of the lightened module fixing plates 6 are mounted to the modules 4 at intervals, output lead wires from the modules 4 are twined around and terminal boxes 8, in which terminals for connecting with other device are put, are mounted to the side plates 9 of the top plate 5. The lightweight and flexible solar cell modules are used and the top plate is also constituted of a lightweight material, Al, whereby the float has also only to have a regidity suitable to it and can be formed into a small size. As a result, a lightening of the whole solar cell generating device and the mass productivity and workability of the device are raised.
    • 5. 发明专利
    • Plasma cvd device
    • 等离子体CVD装置
    • JP2012072425A
    • 2012-04-12
    • JP2010216967
    • 2010-09-28
    • Fuji Electric Co Ltd富士電機株式会社
    • FUNO HIDEKAZUSHIMOZAWA SHINISHIKAWA TAKAMASA
    • C23C16/509
    • PROBLEM TO BE SOLVED: To provide a high-frequency electrode plate, which can secure the opening area of a gas flow hole, even if blast treatment is repeated to remove an unnecessary film adhered to a surface, with minimized deformation of the opening periphery of the gas flow hole, and which can be thereby used continuously for a long period of time, and which can further enhance the dispersion effect and flow rate of a raw material gas to reduce the cost, and a plasma CVD (Chemical Vapor Deposition) device.SOLUTION: In a shower electrode plate 3 of the high-frequency electrode plate which is disposed inside a film deposition chamber for forming a thin film on the surface of a substrate and includes the gas flow hole 6 for supplying the raw material gas to the surface of the substrate, the opening periphery located on the blast treatment surface side of the gas flow hole is formed in an inclined surface shape with an inclination of 20-30° and an inclination depth of 0.1 mm or more and less than half the plate thickness of the shower electrode plate.
    • 要解决的问题:为了提供可以确保气体流通孔的开口面积的高频电极板,即使重复进行喷砂处理以除去附着在表面上的不需要的膜,也可以使 能够长时间连续使用,能够进一步提高原料气体的分散效果和流量,降低成本,并且可以进行等离子体CVD(化学气相色谱法 沉积)装置。 解决方案:在设置在基板表面上形成薄膜的成膜室内的高频电极板的喷淋电极板3中,包括用于供给原料气体的气体流通孔6 在基板的表面上,位于气体流通孔的喷砂处理表面侧的开口周边形成为倾斜20-30°,倾斜深度为0.1mm以上且小于一半的倾斜面 淋浴电极板的板厚。 版权所有(C)2012,JPO&INPIT
    • 7. 发明专利
    • SOLAR CELL DEVICE
    • JPH11145503A
    • 1999-05-28
    • JP31009497
    • 1997-11-12
    • FUJI ELECTRIC CO LTD
    • FUNO HIDEKAZU
    • H01L31/042H02S30/20
    • PROBLEM TO BE SOLVED: To provide a portable type solar cell device, in which a flexible solar- cell module can be expanded and housed and which is lightweight and is handled and is transported easily. SOLUTION: In a portable type solar cell device, having a flexible solar-cell module 4 and supplying the outside with the generated outputs of solar cells, one end of the solar-cell module is fixed onto a wind-up drum 2 for winding the module, an end member 5 formed by extending the solar-cell module is fastened at the other one end of the solar-cell module, a shaft 3 on a periphery of which the wind-up drum can be rotated, a case 1, which fixes the shaft and in which the solar-cell module is housed as the shell of the solar cell device, and an output means for extracting the generated outputs to the outside are installed, so that the overall solar-cell module can be drawn out of a case and expanded, and wound on the wind-up drum and can be housed in the case.
    • 8. 发明专利
    • WAFER TRANSFER DEVICE
    • JPH06204317A
    • 1994-07-22
    • JP86993
    • 1993-01-07
    • FUJI ELECTRIC CO LTD
    • FUNO HIDEKAZUTANAKA YASUHITO
    • B65G49/07H01L21/677H01L21/68
    • PURPOSE:To provide the structure with which a reaction chamber can be brought into high vacuum and low particle state in the wafer transfer device of a semiconductor manufacturing device to transfer a wafer from a vacuum chamber to a reaction chamber. CONSTITUTION:The wafer transfer device is composed of a transfer susceptor 6 where a wafer is placed, a transfer arm 5 which retains the transfer susceptor 6 by moving upward, and arm rod 7 on which the transfer arm 5 is fixed to the tip and moves horizontally in axial direction, a forward-backward driving mechanism 100 with which the arm rod 7 is moved in forward and backward direction, biaxial driving mechanism consisting of the upper and the lower driving mechanism 101 with which the arm rod 7 is vertically moved through the intermediary of the forward-backward driving mechanism 100, and a vacuum preparation chamber 2. The mechanism on the side of a reaction chamber 1 is unnecessitated. In order to enhance the effect of the constitution of this device, the biaxial driving mechanism is arranged outside the vacuum preparation chamber 2, and the transfer suscesptor 6 is supported by the transfer arm 5 by hanger system using notches 5 and 5b and T-shaped hoods 6a and 6b.
    • 9. 发明专利
    • Thin film deposition apparatus
    • 薄膜沉积装置
    • JP2012001743A
    • 2012-01-05
    • JP2010134881
    • 2010-06-14
    • Fuji Electric Co Ltd富士電機株式会社
    • FUNO HIDEKAZU
    • C23C16/54H01L21/205H01L31/04
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide a stepping roll type thin film deposition apparatus capable of preventing the increase of tension produced in non-film deposition zones and stress concentration accompanying the increase of the tension during the step conveyance stopping period.SOLUTION: The thin film deposition apparatus is used for laminating and forming functional thin films on a belt-like flexible substrate 1. The apparatus includes: film deposition zones Z1, Z2 including film deposition units 5, 6, 7, 8; first and second conveyance control rolls 16, 26 arranged at the upstream side and downstream side of the film deposition zones; shielding means 53, 54, 63, 64, 73, 74, 83, 84 jointly installed in the respective film deposition units so as to demarcate closed spaces at the respective film deposition units during the conveyance stopping period; first tension controlling means 16, 17, 18, 19 of controlling the tension of the substrate during the carrying; and non-film deposition zones Z3, Z4 adjacent to the downstream sides of the film deposition zones. The system includes second tension controlling means 3, 4 controlling the tension of the substrate in the non-film deposition zones in a state where the shielding means are closed with the substrate interposed during the conveyance stopping period.
    • 解决问题的方案:提供一种步进式薄膜沉积装置,其能够防止在步进输送停止期间伴随着张力的增加而在非成膜区域产生的张力增加和应力集中。 解决方案:薄膜沉积装置用于在带状柔性基板1上层压和形成功能性薄膜。该装置包括:成膜区域Z1,Z2,包括膜沉积单元5,6,7,8; 布置在成膜区的上游侧和下游侧的第一和第二输送控制辊16,26; 屏蔽装置53,54,63,64,73,74,83,84共同安装在各个胶片沉积单元中,以在输送停止期间划分各个胶片沉积单元处的封闭空间; 第一张力控制装置16,17,18,19,用于在携带期间控制基底的张力; 以及与成膜区域的下游侧相邻的非成膜区域Z3,Z4。 该系统包括第二张力控制装置3,4,其在屏蔽装置在输送停止期间插入基板而被封闭的状态下控制非成膜区域中的基板的张力。 版权所有(C)2012,JPO&INPIT