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1. 发明专利

JPH03188988A METHOD AND APPARATUS FOR PURIFYING PURE WATER OR ULTRAPURE WATER 失效
公开(公告)号：JPH03188988A
公开(公告)日：1991-08-16
申请号：JP32713589
申请日：1989-12-19
申请人： EBARA RES CO LTD , EBARA INFILCO , EBARA CORP
发明人： SAITO TAKAYUKI , NAKAJIMA TAKESHI , IWASE YOKO , IKEDA YUKIO , SHIMA HIROYUKI
IPC分类号： B01D19/00 , B01D61/00 , C02F1/20 , C02F1/32 , C02F1/42 , C02F1/44 , C02F1/50 , C02F1/70 , C02F1/72 , C02F1/78 , C02F9/00
摘要： PURPOSE:To produce ultrapure water of higher purity by dissolving ozone or hydrogen peroxide in pure water or ultrapure water, irradiating this water with UV, further dissolving hydrogen, further irradiating the water with UV and carrying out treatment with a gas permeable membrane, etc. CONSTITUTION:Ozone or hydrogen peroxide is dissolved in pure water or ultrapure water, this water is irradiated with UV, gaseous hydrogen is further dissolved and the water is further irradiated with UV. The treated water is fed to one of chambers separated with a gas permeable membrane and the other is kept vacuum to degas the treated water. This water is then passed through an ion exchange resin bed composed of H type highly acidic cation exchange resin and OH type highly basic anion exchange resin and ultrafiltration is carried out to finally purify the pure water or ultrapure water. The gas permeable membrane is preferably a porous hydrophobic membrane of silicone rubber, etc., permeable to gases such as O2, N2, H2 and steam but impermeable to water.

2. 发明专利

JPH0614967A ROTARY TABLE DEVICE 失效
公开(公告)号：JPH0614967A
公开(公告)日：1994-01-25
申请号：JP19909892
申请日：1992-07-02
申请人： EBARA CORP
发明人： KANEMITSU YOICHI , WATANABE KAZUHIDE , KASUYA YOSHIMITSU , IKEDA YUKIO , SHIOZAWA MASAO , YAMAMOTO HIROYOSHI , NATORI SHIRO , HIRANO KUNIHIKO , INOUE DAISUKE , HAYASHI SHUNSUKE , SHIRASAWA ITARU , TAKETOI SHIGEHARU , MIYAGAWA KIYOSHI , URUCHIMA KANICHIROU
IPC分类号： A61H1/00
摘要： PURPOSE:To give proper stimulation to the muscle of a patient suffering from lumbago, etc., and exert a high therapeutic effect by applying the motions in the radial direction and the thrust direction in addition to the rotational motion to a rotary table mounted by the patient, CONSTITUTION:A rotary shaft 6 is erected and arranged at the center section of a cylindrical casing 4, and a rotary table 8 to be mounted by a patient is fitted at the upper section of the rotary shaft 6. The rotary shaft 6 is rotatably supported by a thrust magnetic bearing 21 and a pair of radial magnetic bearings 22, 23, and a motor 24 rotating the rotary shaft 6 is fitted between the bearings 22, 23. The electromagnet of the thrust magnetic bear 21 is constituted of upper and lower electromagnets 27, 28, and a disk-like target 29 fitted to the rotary shaft 6 is inserted between both electromagnets 27, 28. The displacement quantities of the rotary shaft 6 in the radial direction and the thrust direction are detected, and the motion of the rotary shaft 6 is controlled by the proper combination of the rotational motion, motions in the radial direction and the thrust direction, and conical motion of the rotary shaft 6.

3. 发明专利

JPH05126205A VIBRATION ELIMINATING DEVICE 失效
公开(公告)号：JPH05126205A
公开(公告)日：1993-05-21
申请号：JP14390491
申请日：1991-05-20
申请人： EBARA CORP
发明人： WATANABE KAZUHIDE , KANEMITSU YOICHI , IKEDA YUKIO
IPC分类号： B23Q11/00 , E04H9/02 , F16F15/02 , G01H1/00 , G01H17/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To provide a vibration eliminating device which can avoid the state that would affect yield of products or accuracy of measurement and observation by monitoring vibration on a floor plate all the time with a vibration sensor mounted on the floor plate of a vibration eliminating table, judging whether the vibration is within a permitted value of mounted machinery and by putting out a machinery operative signal when the vibration is within the permitted value. CONSTITUTION:A vibration eliminating device suspends a floor plate of a vibration eliminating table 1 and has a spring action for eliminating microvibration from the installed floor of the vibration eliminating table or an exciting force from machinery 2 itself on the vibration eliminating table floor plate. A vibration detector S for detecting vibration on the floor plate is provided at the vibration eliminating table 1, and a vibration monitor device 4 is provided for judging whether the vibration detected by the vibration detector S is within a permitted value of the machinery 2 mounted on the floor plate of the vibration eliminating table 1 and for putting out a machinery operative signal only when the vibration is within the permitted value.

4. 发明专利

JPH0259001A DEVICE FOR REMOVAL OF HARMFUL SUBSTANCE FROM EXHAUST GAS 失效
公开(公告)号：JPH0259001A
公开(公告)日：1990-02-28
申请号：JP20805088
申请日：1988-08-24
申请人： EBARA CORP
发明人： TSUJIMURA MANABU , IKEDA YUKIO
IPC分类号： B01D53/46 , B01D5/00 , B01D7/02 , B01D8/00 , B01D53/34 , B01D53/68 , B01D53/70 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To remove harmful substance from exhaust gases by installing an addition- reaction tank, wherein gases, which are able to be liquefied or sublimated under atmospheric temperature and pressure, a selectively condensed or sublimated, on the upstream side of an exhaust-gas reaction tank to prevent blocking of the exhaust-gas reaction tank. CONSTITUTION:When a group of gases A, which are easily liquefied or sublimated under atmospheric temperature and pressure, and a group of gases B in gaseous state, being mixed together, flow into an addition-reaction tank 12, a majority of the group of gases A is liquefied or sublimated since the temperature of the tank 12 is located slightly lower than that of an exhaust-gas reaction tank 5 situated downstream, while the group of gases B remain in gaseous state, whereby the group of gases B which haven't been condensed or sublimated and a part of the group A flow into the tank 5, while, since the temperature in the tank 5 is higher than that of the tank 12, the gases having flowed into the tank 5 are subjected to an adsorption reaction in gaseous state, without being liquefied or sublimated. Consequently, blocking of the interior of the tank 5 is avoided and harmful substances are removed from the exhaust gases without fail.

5. 发明专利

JPS631494A MIXED BED TYPE FILTERING AND DESALTING METHOD 失效
公开(公告)号：JPS631494A
公开(公告)日：1988-01-06
申请号：JP10003587
申请日：1987-04-24
申请人： EBARA CORP
发明人： HAGIWARA MASAHIRO , ISAYAMA YASUSHI , IKEDA YUKIO , INO TAKAO
IPC分类号： B01J47/04 , C02F1/42
摘要： PURPOSE:To miniaturize an apparatus, by a method wherein the particle having a specific particle size range in a region where the final speeds of ion exchange resins becomes equal is separated preliminarily, and anion and cation exchange resins are mixed at a ratio for making the final speeds of both resins equal to each other to form a mixed bed. CONSTITUTION:The particle having a specific particle size range in a region where final speeds of anion and cation exchange resins become equal is separated and removed preliminarily from at least one of the populations of both resins. In backwashing separation, the quantity of particles wherein the final speeds in water become equal to each other is reduced to a predetermined ratio of less to perform mixing to form a mixed bed. Then, the particle quantity of a remaining mixed bed is reduced to make it possible to perform separation even when the particles of both ion exchange resins are made fine. By this method, an ion exchange speed can be increased and clad separation capacity can be enhanced.

6. 发明专利

JPS6180096A Method of reducing radioactive waste 失效
公开(公告)号：JPS6180096A
公开(公告)日：1986-04-23
申请号：JP20193284
申请日：1984-09-28
申请人： Ebara Corp
发明人： IKEDA YUKIO , YOSHIOKA TAKESHI , UENO SHUICHI
IPC分类号： B01J49/00 , B01J49/02 , G21F9/00 , G21F9/12

7. 发明专利

JPS6151597A Method of reducing radioactive waste 失效
公开(公告)号：JPS6151597A
公开(公告)日：1986-03-14
申请号：JP17340684
申请日：1984-08-22
申请人： Ebara Corp
发明人： IKEDA YUKIO , YOSHIOKA TAKESHI , UENO SHUICHI
IPC分类号： B01J49/00 , B01J49/02 , G21F9/00 , G21F9/06

8. 发明专利

JPS59147690A Mixed bed filtering and demineralizing method 失效
标题翻译：混合床过滤和分解方法
公开(公告)号：JPS59147690A
公开(公告)日：1984-08-24
申请号：JP2203483
申请日：1983-02-15
申请人： Ebara Corp
发明人： HAGIWARA MASAHIRO , ISAYAMA YASUSHI , IKEDA YUKIO , INO TAKAO
IPC分类号： C02F1/42 , B01J47/04
摘要： PURPOSE:To separate easily anion and cation exchange resins by specifying the mode value, geometric standard deviation and the particle size range to be separated from the population of the anion and cation exchange resins to increase the ion exchange velocity and clad separating capacity. CONSTITUTION:In the titled method using anion and cation resins having particle size forming a logarithmic normal distribution, 1) the mode value of the anion and cation exchange resins are regulated respectively to 420-600mu and 500- 700mu so that the mode value of the former may be lower than that of the latter, 2) one of the geometric standard deviations of the anion and cation exchange resins is regulated to
摘要翻译：目的：通过指定阴离子交换树脂和阳离子交换树脂的离子交换速度和包层分离能力，分离容易的阴离子和阳离子交换树脂，分离模式值，几何标准偏差和粒度范围。构成：在使用具有对数正态分布的粒径的阴离子和阳离子树脂的标题方法中，1）将阴离子和阳离子交换树脂的模式值分别调节为420-600mu和500-700mu，使得模式值前者可能低于后者，2）阴离子和阳离子交换树脂的几何标准偏差之一调节为<= 1.30，3）符合先前指定的粒度范围的颗粒与相应的阴离子和阳离子交换树脂。将两种树脂在水中的终端速度通过使用上述三种方法中的任意一种使彼此相等的阴离子和阳离子交换树脂的比例被调节到规定的范围。比例或更少的树脂与总树脂的比例。

9. 发明专利

JP2003179061A METHOD OF FORMING WIRINGS OF SEMICONDUCTOR ELEMENT 审中-公开
公开(公告)号：JP2003179061A
公开(公告)日：2003-06-27
申请号：JP2002253961
申请日：2002-08-30
申请人： EBARA CORP
发明人： IKEDA YUKIO , KOGURE NAOAKI , INOUE HIROAKI
IPC分类号： C23C18/16 , C23C18/32 , H01L21/3205 , H01L23/52
摘要： PROBLEM TO BE SOLVED: To provide a method of forming wirings of a semiconductor element which enables prevention of contamination by the aging of wiring materials resulting from ordinary high temperature surface reaction and thermal diffusion by reducing or substantially eliminating chemical reaction with the circumferential atmosphere and/or movement by thermal diffusion of atoms of wiring materials after formation of electronic circuit wirings. SOLUTION: In the method of forming wirings of a semiconductor element in which ultra-fine electronic circuit wirings are formed, the electronic circuits are formed by embedding conductor materials including at least Cu layer into the substrate material and only the open surface of the electronic circuits is covered with a material for preventing movement by thermal diffusion of the conductor material. COPYRIGHT: (C)2003,JPO

10. 发明专利

JPH066012A COATING STRUCTURE FOR ELECTRIC CIRCUIT 失效
公开(公告)号：JPH066012A
公开(公告)日：1994-01-14
申请号：JP18179192
申请日：1992-06-16
申请人： EBARA CORP
发明人： IKEDA YUKIO , KOGURE NAOAKI , INOUE HIROAKI
IPC分类号： H05K1/09 , H05K3/24
摘要： PURPOSE:To prevent the deterioration with time of wiring material by a method wherein the surface of the conductor material, which is arranged in a substrate, is coated with the material having relatively low reactivity with environment. CONSTITUTION:A two-layer structure wiring, in which a Cu layer 2 and an Au layer l are buried, is formed on the substrate 4 of an insulator or a semiconductor, the outside of the conductor material of this electric circuit wiring is brought into contact with the solution formed by adding and mixing a complexing agent and a reducing agent to NiSO4-6H2O, a electroless plating is conducted, and an Ni-B alloy 3 is deposited on the Ag layer 1. As a result, the surface of the conductor of the electric circuit wiring material can be suppressed its reacting with environment and also the movement of its constituent diffusion can be suppressed. As a result, the deterioration with time of the electric circuit can be suppressed or prevented.

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