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    • 7. 发明专利
    • LAMINATION TYPE PIEZOELECTRIC ELEMENT
    • JPS6365687A
    • 1988-03-24
    • JP20801386
    • 1986-09-05
    • TOYOTA MOTOR CORP
    • KAMIYA HIDEO
    • H01L41/09H01L41/083
    • PURPOSE:To obtain an integral lamination type piezoelectric displacement element that is free from breakage by interposing a piezoelectric ceramic thin layer having coupling coefficient ratios between those of in the direction of thickness and in the direction of broadening that are more than 4.8 at an interface between an internal electrode layer and a piezoelectric ceramic layer. CONSTITUTION:An intermediate piezoelectric ceramic slurry having a large ratio of Kt/Kp (where Kt represents a coupling coefficient in the direction of thickness and Kp represents the coupling coefficient in the direction of broadening) of PbTiO3 and the like is coated at both upper and lower faces of a piezoelectric ceramic green sheet 1 such as PZT (lead zircotitanate) and others. After completing its coating, an internal electrode 2 is formed by printing a conductor paste on one side of the above green sheet 1. The prescribed sheets of the above sheet 1 are laminated and attached to the internal electrode using pressure and after that they are baked. On the other hand, a piezoelectric ceramic thin layer having a large ratio of Kt/Kp is formed at one side of the above piezoelectric ceramic green sheet 1 and after printing the conductor paste on the above ceramic thin layer, another piezoelectric ceramic, thin layer having a large ratio of Kt/Kp is formed on the printed paste. Then the prescribed sheets of the sheet 1 are laminated and pressed under pressure and they may be baked as well. These lamination type piezoelectric elements are composed of piezoelectric ceramic sheets 1, internal electrode layers 2, and interconnection leads 3.