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    • 1. 发明专利
    • Apparatus and system for adjusting optical axis
    • 调整光轴的装置和系统
    • JP2005331541A
    • 2005-12-02
    • JP2004147238
    • 2004-05-18
    • Dainippon Printing Co LtdSigma Koki Kkシグマ光機株式会社大日本印刷株式会社
    • TABATA YOSHINORIITO TOSHIHIDEKAWAKAMI YUJIKASHIWAGI TAKESHIYAMAUCHI TAKESHI
    • G02B7/198G02B7/02
    • PROBLEM TO BE SOLVED: To adjust the angle and position of a light beam, using a simple structure. SOLUTION: For the purpose of adjusting the optical axis of a light beam L1 made incident on an XYZ three-dimensional coordinate system, there are attached to a supporting body a first mirror 10 having a reflection face M1, in which a face parallel to the XY plane is rotated by only an angle α relative to an axis 11 parallel to the Y axis and a second mirror 20 having a reflection face M2, in which a face parallel to the XZ plane is rotated by only an angle β relative to an axis 21 parallel to the X axis. A positional adjusting means which moves the entire support body having the two mirrors in parallel with the XY plane is provided, as is provided with an angular adjusting means which adjusts the angle of the second mirror 20. The incident light beam L1, reflected on the reflection faces M1, M2, is emitted as an outgoing light L3, wherein the optical axis can be adjusted with respect to the position and the angle, by controlling the position and the angle-adjusting means. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:使用简单的结构来调整光束的角度和位置。 解决方案:为了调整入射在XYZ三维坐标系上的光束L1的光轴,附着在支撑体上,具有反射面M1的第一反射镜10,其中面 平行于XY平面的平面相对于平行于Y轴的轴线11旋转角度α和具有反射面M2的第二反射镜20,其中平行于XZ平面的面仅旋转角度β相对 到与X轴平行的轴线21。 提供了一种使具有与XY平面平行的两个反射镜的整个支撑体移动的位置调节装置,其设置有调整第二反射镜20的角度的角度调节装置。入射光束L1 作为出射光L3发射反射面M1,M2,其中通过控制位置和角度调节装置,可以相对于位置和角度调整光轴。 版权所有(C)2006,JPO&NCIPI
    • 2. 发明专利
    • Exposure apparatus
    • 曝光装置
    • JP2005332847A
    • 2005-12-02
    • JP2004147239
    • 2004-05-18
    • Dainippon Printing Co Ltd大日本印刷株式会社
    • TABATA YOSHINORIITO TOSHIHIDEKAWAKAMI YUJIKASHIWAGI TAKESHIYAMAUCHI TAKESHI
    • G03F7/20H01L21/027
    • PROBLEM TO BE SOLVED: To make adjustments to an angle and position of an exposure beam by a simple structure.
      SOLUTION: An exposure beam L1 generated by a light source is incident into an optical axis adjustment device arranged on an XYZ three-dimensional coordinate system, and an exposure beam L3 with its optical axis adjusted is introduced into an exposure surface. In the optical axis adjustment device, a first mirror 10 having a reflection surface M1 which is a surface parallel to the XY plane rotated by an angle α around an axis 11 parallel to the Y axis, and a second mirror 20 having a reflection surface M2 which is a surface parallel to the XZ plane rotated by an angle β around an axis 21 parallel to the X axis, are attached to a supporter, and a position adjustment means for making a parallel movement of the whole body of the supporter containing the two mirrors along the XY plane, and an angle adjustment means for adjusting the angle of the second mirror 20, are installed. An incident light L1 is reflected on the reflection surfaces M1 and M2 to be emitted as an emission light L3, with its optical axis adjusted for position and angle by controlling the position adjustment means and the angle adjustment means.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:通过简单的结构来调整曝光光束的角度和位置。 解决方案:由光源产生的曝光光束L1入射到布置在XYZ三维坐标系上的光轴调节装置中,并且将其光轴调节的曝光束L3引入曝光表面。 在光轴调整装置中,具有与平行于与Y轴平行的轴11旋转了角度α的与XY平面平行的面的反射面M1的第一反射镜10和具有反射面M2的第二反射镜20 是与平行于X轴平行的轴线21旋转了角度β的XZ平面的表面,附着在支撑体上,位置调整机构用于使支撑体的整体平行移动, 并且安装有用于调整第二反射镜20的角度的角度调节装置。 通过控制位置调整装置和角度调节装置,入射光L1反射在反射面M1和M2上,作为发射光L3发射,其光轴被调整为位置和角度。 版权所有(C)2006,JPO&NCIPI