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1. 发明专利

JP2005331541A Apparatus and system for adjusting optical axis 有权
标题翻译：调整光轴的装置和系统
公开(公告)号：JP2005331541A
公开(公告)日：2005-12-02
申请号：JP2004147238
申请日：2004-05-18
申请人： Dainippon Printing Co Ltd , Sigma Koki Kk , シグマ光機株式会社 , 大日本印刷株式会社
发明人： TABATA YOSHINORI , ITO TOSHIHIDE , KAWAKAMI YUJI , KASHIWAGI TAKESHI , YAMAUCHI TAKESHI
IPC分类号： G02B7/198 , G02B7/02
摘要： PROBLEM TO BE SOLVED: To adjust the angle and position of a light beam, using a simple structure. SOLUTION: For the purpose of adjusting the optical axis of a light beam L1 made incident on an XYZ three-dimensional coordinate system, there are attached to a supporting body a first mirror 10 having a reflection face M1, in which a face parallel to the XY plane is rotated by only an angle α relative to an axis 11 parallel to the Y axis and a second mirror 20 having a reflection face M2, in which a face parallel to the XZ plane is rotated by only an angle β relative to an axis 21 parallel to the X axis. A positional adjusting means which moves the entire support body having the two mirrors in parallel with the XY plane is provided, as is provided with an angular adjusting means which adjusts the angle of the second mirror 20. The incident light beam L1, reflected on the reflection faces M1, M2, is emitted as an outgoing light L3, wherein the optical axis can be adjusted with respect to the position and the angle, by controlling the position and the angle-adjusting means. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：使用简单的结构来调整光束的角度和位置。解决方案：为了调整入射在XYZ三维坐标系上的光束L1的光轴，附着在支撑体上，具有反射面M1的第一反射镜10，其中面平行于XY平面的平面相对于平行于Y轴的轴线11旋转角度α和具有反射面M2的第二反射镜20，其中平行于XZ平面的面仅旋转角度β相对到与X轴平行的轴线21。提供了一种使具有与XY平面平行的两个反射镜的整个支撑体移动的位置调节装置，其设置有调整第二反射镜20的角度的角度调节装置。入射光束L1 作为出射光L3发射反射面M1，M2，其中通过控制位置和角度调节装置，可以相对于位置和角度调整光轴。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2005332847A Exposure apparatus 有权
标题翻译：曝光装置
公开(公告)号：JP2005332847A
公开(公告)日：2005-12-02
申请号：JP2004147239
申请日：2004-05-18
申请人： Dainippon Printing Co Ltd , 大日本印刷株式会社
发明人： TABATA YOSHINORI , ITO TOSHIHIDE , KAWAKAMI YUJI , KASHIWAGI TAKESHI , YAMAUCHI TAKESHI
IPC分类号： G03F7/20 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To make adjustments to an angle and position of an exposure beam by a simple structure.
SOLUTION: An exposure beam L1 generated by a light source is incident into an optical axis adjustment device arranged on an XYZ three-dimensional coordinate system, and an exposure beam L3 with its optical axis adjusted is introduced into an exposure surface. In the optical axis adjustment device, a first mirror 10 having a reflection surface M1 which is a surface parallel to the XY plane rotated by an angle α around an axis 11 parallel to the Y axis, and a second mirror 20 having a reflection surface M2 which is a surface parallel to the XZ plane rotated by an angle β around an axis 21 parallel to the X axis, are attached to a supporter, and a position adjustment means for making a parallel movement of the whole body of the supporter containing the two mirrors along the XY plane, and an angle adjustment means for adjusting the angle of the second mirror 20, are installed. An incident light L1 is reflected on the reflection surfaces M1 and M2 to be emitted as an emission light L3, with its optical axis adjusted for position and angle by controlling the position adjustment means and the angle adjustment means.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：通过简单的结构来调整曝光光束的角度和位置。解决方案：由光源产生的曝光光束L1入射到布置在XYZ三维坐标系上的光轴调节装置中，并且将其光轴调节的曝光束L3引入曝光表面。在光轴调整装置中，具有与平行于与Y轴平行的轴11旋转了角度α的与XY平面平行的面的反射面M1的第一反射镜10和具有反射面M2的第二反射镜20 是与平行于X轴平行的轴线21旋转了角度β的XZ平面的表面，附着在支撑体上，位置调整机构用于使支撑体的整体平行移动，并且安装有用于调整第二反射镜20的角度的角度调节装置。通过控制位置调整装置和角度调节装置，入射光L1反射在反射面M1和M2上，作为发射光L3发射，其光轴被调整为位置和角度。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2004078131A Device and method for adjusting optical axis 有权
公开(公告)号：JP2004078131A
公开(公告)日：2004-03-11
申请号：JP2002269210
申请日：2002-08-11
申请人： Dainippon Printing Co Ltd , Sigma Koki Kk , シグマ光機株式会社 , 大日本印刷株式会社
发明人： KOMATSU SHIGEHIKO , ITO TOSHIHIDE , MATSUYAMA TETSUYA , KASHIWAGI TAKESHI , UEDA KENJI
IPC分类号： G02B7/00
摘要： PROBLEM TO BE SOLVED: To stably maintain an optical axis for a light beam that passes through an existing optical path. SOLUTION: Polarization beam splitters 81X and 83X are set on a reference optical path S from an incidence point Qin toward an outgoing point Qout, and polarizing beams that transmit the beam splitters 81X and 83X are made incident from the incidence point Qin. Position information (position of irradiation point Q10 on photodetector 85) of little light for detection reflected by a light distributing surface ξ2x and orientation information (position of condensing point Q20 on photodetector 87) are stored in a storage device 91 as reference information. The polarization surface of incident light is turned by 90°, light beams are detoured to an optical path D1, a corner reflector 82 is used to lead the light beams from an optical path D3 to the optical dividing surface ξ2x, and the light beams are reflected to the outgoing point Qout. In such a case, pieces of position and orientation information of little light for detection that transmits the optical dividing surface ξ2x are detected to control the angle of an optical element 81X and the position of an optical element 82 so as to make the pieces of the position and orientation information close to the reference information in the storage device 91. COPYRIGHT: (C)2004,JPO

4. 发明专利

JP2004079979A Aligner 有权
公开(公告)号：JP2004079979A
公开(公告)日：2004-03-11
申请号：JP2002269209
申请日：2002-08-11
申请人： Dainippon Printing Co Ltd , 大日本印刷株式会社
发明人： KOMATSU SHIGEHIKO , ITO TOSHIHIDE , MATSUYAMA TETSUYA , KASHIWAGI TAKESHI , UEDA KENJI
IPC分类号： G03F7/20 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To stably keep optical beam by automatically adjusting when collimation fluctuates. SOLUTION: Polarized beam splitters 81X and 83X are disposed on a reference optical path S that runs from an incident point Qin to an ejection point Qout, and the polarized beam penetrating them enter the incident point Qin. The positional information (position of incident point Q10 on a light receiving element 85) and directional information (position of condensing point Q20 on a light receiving element 87) for a slight detection light reflected on a light distribution surface ξ2x are stored in a storage device 91 as reference information. The exposure beam in which a polarization plane of incident light is turned by 90° is made to detour for an optical path D1, and it is guided to the light distribution surface ξ2x from an optical path D3 by a corner reflector 82 to be reflected toward the ejection point Qout. Here, the positional and directional information for the slight detection light having penetrated the light distribution surface ξ2x is detected, and the angle of an optical element 81X and the position of an optical element 82 are so controlled that they approach the reference information in the storage device 91. COPYRIGHT: (C)2004,JPO

5. 发明专利

JP2002229216A EXPOSURE APPARATUS 失效
公开(公告)号：JP2002229216A
公开(公告)日：2002-08-14
申请号：JP2001028355
申请日：2001-02-05
申请人： DAINIPPON PRINTING CO LTD
发明人： KOMATSU SHIGEHIKO , ITO TOSHIHIDE , MATSUYAMA TETSUYA , KASHIWAGI TAKESHI , UEDA KENJI
IPC分类号： G03F7/20 , G03H1/04 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To stably keep a light beam by automatically adjusting the optical axis against fluctuation. SOLUTION: In a state that the optical axis is adjusted to lead the light beam from a beam source from an incident point Qin toward an emitting point Qout, a beam distributor 83 is placed on a standard optical pass S and the position information (the position of a irradiation point Q10 on a light receiving element 85) and the directional information (the position of a converging point Q20 on a light receiving element 87) of reflected light from a light distribution surface ξ composed of a half mirror are stored in a storage device 91 as standard information. The light beam is detoured to an optical pass D1 by interposing a reflection element 81 on the standard optical pass S and is distributed into reflected light directed to an exposure surface and transmission light directed to the light receiving element 85 from the emitting point Qout by being led into the light distribution surface ξ from an optical pass D3 using corner reflector 82. The position information and the directional information of the transmission light are detected and the angle of the light reflection element 81 and the position of the corner reflector 82 are controlled by a controller 92 to be the position information and the directional information close to the standard information.

6. 发明专利

JP2002228908A APPARATUS AND METHOD FOR ADJUSTING OPTICAL AXIS 失效
公开(公告)号：JP2002228908A
公开(公告)日：2002-08-14
申请号：JP2001028354
申请日：2001-02-05
申请人： DAINIPPON PRINTING CO LTD , SIGMA KOKI KK
发明人： KOMATSU SHIGEHIKO , ITO TOSHIHIDE , MATSUYAMA TETSUYA , KASHIWAGI TAKESHI , UEDA KENJI
IPC分类号： G02B7/00 , G02B7/02
摘要： PROBLEM TO BE SOLVED: To stably maintain the optical axis of a light beam which passes through an existing optical path. SOLUTION: A beam distributor 83 is placed on a reference optical path S through which the light beam passes from an incoming point Qin to an outgoing point Qout. The positional information (the position of an irradiating point Q10 on a light receiving element 85) of reflected light from a light distribution surface ξ consisting of a half mirror, and directional information (the position of a converging point Q20 on a light receiving element 87) are stored into a storage device 91 as reference information. A light reflecting element 81 is inserted in the reference optical path S, thereby the light beam is detoured to an optical path D1, guided to the light distribution surface ξ from an optical path D3 by using a corner reflector 82, and distributed to reflected light which goes to the outgoing point Qout and transmitted light which goes to the light receiving element 85. Positional information and directional information on the transmitted light are detected, and the angle of the light reflecting element 81 and the position of the corner reflector 82 are controlled by a controller 92 so that the information approach the reference information in the storage device 91.

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