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    • 5. 发明专利
    • Liquid-repellent resist composition
    • 液体电阻组合物
    • JP2011184517A
    • 2011-09-22
    • JP2010049202
    • 2010-03-05
    • Daikin Industries Ltdダイキン工業株式会社
    • MORITA MASAMICHIADACHI YUKI
    • C08F220/22G02B1/04G02B5/00G02B5/20G03F7/004G03F7/027G03F7/033G03F7/038H01L21/027
    • PROBLEM TO BE SOLVED: To provide a liquid-repellent resist composition having good storage stability, hardly causing foreign matter at film formation, and having excellent liquid-repelling properties. SOLUTION: The liquid-repellent resist composition contains (A1) a fluoropolymer containing (a1) 100 pts.wt. of an α-substituted acrylate having a 4-8C fluoroalkyl group (which may have an ethereal oxygen atom between carbon atoms), (a2) 5-80 pts.wt. of an epoxy group-containing monomer and (a3) 10-40 pts.wt. of a monomer containing an alkylene oxide group represented by (R 1 O) n R 2 , as repeating units, and having the fluorine concentration of 15-40 wt.% in the fluoropolymer (A1), and the weight average molecular weight of 3,000-20,000. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供具有良好储存稳定性的疏液性抗蚀剂组合物,几乎不会在成膜时引起异物,并且具有优异的防液性。 防溶剂组合物含有(A1)含有(a1)100重量份的含氟聚合物。 的具有4-8C氟代烷基(其可以在碳原子之间具有醚性氧原子)的α-取代的丙烯酸酯,(a2)5-80重量份 的含环氧基的单体和(a3)10-40重量份 的含有以(R 1 SP)O表示的烯化氧基团的单体作为重复单元,并且氟浓度为 在含氟聚合物(A1)中为15-40重量%,重均分子量为3,000-20,000。 版权所有(C)2011,JPO&INPIT
    • 6. 发明专利
    • Top coat composition for liquid repellent-lyophilic patterning
    • 用于液体润肤剂的顶层组合物
    • JP2011053266A
    • 2011-03-17
    • JP2009199562
    • 2009-08-31
    • Daikin Industries Ltdダイキン工業株式会社
    • MORITA MASAMICHIADACHI YUKI
    • G03F7/11G02B5/20H01L21/027
    • PROBLEM TO BE SOLVED: To provide a top coat composition of high liquid repellent property enabling high definition display by an application process.
      SOLUTION: The top coat composition for liquid repellent-lyophilic patterns is prepared by solving fluorine polymer (A) containing at least 70 wt.% or more of α position substitution acrylate having 1-6C fluoroalkyl group, wherein an α position substitution group is a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a CFX
      1 X
      2 group (where, X
      1 and X
      2 are independently a hydrogen atom, a fluorine atom or a chlorine atom), a cyano group, a 1-20C direct chain or branched fluoroalkyl group, a substituted or unsubstituted benzyl group, a substituted or unsubstituted phenyl group or a 2-20C direct chain or branched alkyl group, in a solvent (B), and can form the liquid repellent-lyophilic patterns having a liquid repellent region of a PGMEA contact angle of 70 degrees or more.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种具有高防液性的顶涂层组合物,能够通过涂布工艺实现高清晰度显示。 解决方案:通过溶解含有至少70重量%以上具有1-6个碳原子的烷基的α取代丙烯酸酯的氟聚合物(A)来制备用于疏液疏液型图案的面漆组合物,其中α位置取代 基团是氟原子,氯原子,溴原子,碘原子,CFX 1 X 2 组(其中,X 1 和X 2 独立地为氢原子,氟原子或氯原子),氰基,1-20C直链或支链氟代烷基,取代或未取代的苄基,取代或未取代的苄基, 未取代的苯基或2-20C直链或支链烷基,并且可以形成具有PGMEA接触角为70度以上的疏液区域的疏液疏液性图案。 版权所有(C)2011,JPO&INPIT