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    • 6. 发明专利
    • Positive liquid-repellent resist composition
    • 积极的液体电阻组合物
    • JP2012220860A
    • 2012-11-12
    • JP2011088758
    • 2011-04-13
    • Daikin Ind Ltdダイキン工業株式会社
    • ADACHI YUKIMORITA MASAMICHI
    • G03F7/033G03F7/016G03F7/021G03F7/032
    • PROBLEM TO BE SOLVED: To provide a positive liquid-repellent resist composition having high storage stability, causing no generation of foreign substances during forming a film, and having excellent liquid repellency.SOLUTION: A liquid-repellent resist composition includes a fluorine-based polymer (A) comprising, as repeating units, (a1) 100 pts.wt. of α-substituted acrylate having a 4-6C fluoroalkyl group (which may have an ethereal oxygen atom between carbon atoms), (a2) 40 to 80 pts.wt. of an unsaturated organic acid, (a3) 15 to 80 pts.wt. of an epoxy group-containing monomer, and (a4) 60 to 80 pts.wt. of a monomer containing an alkyleneoxy group represented by (RO)R. The fluorine-based polymer (A) has a fluorine concentration of 15 to 40 wt.%, an acid value of 10 to 200 mgKOH/g and a weight average molecular weight of 3,000 to 20,000.
    • 要解决的问题:提供具有高储存稳定性的积极的防液性抗蚀剂组合物,在形成膜期间不产生异物,并且具有优异的拒液性。 解决方案:防液抗蚀剂组合物包括含有作为重复单元的(a1)100重量份的氟基聚合物(A) 具有4-6C氟烷基(在碳原子之间可具有醚性氧原子)的α-取代丙烯酸酯,(a2)40〜80重量份 的不饱和有机酸,(a3)15〜80重量份 的含环氧基的单体,和(a4)60〜80重量份。 的含有由(R 1 O)表示的亚烷氧基的单体 n / SP>。 氟系聚合物(A)的氟浓度为15〜40重量%,酸值为10〜200mgKOH / g,重均分子量为3000〜20,000。 版权所有(C)2013,JPO&INPIT