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    • 2. 发明专利
    • Alloy for corrosion resistant coating and member coated therewith
    • 耐腐蚀涂层及其涂层合金
    • JP2007169733A
    • 2007-07-05
    • JP2005370142
    • 2005-12-22
    • Dai Ichi High Frequency Co Ltd第一高周波工業株式会社
    • MATSUBARA YOICHITAKEYA AKIHIROMIYATA SEIICHIRO
    • C22C19/03C22C38/00C22C38/44F22B37/10F23G5/48F28F19/06
    • PROBLEM TO BE SOLVED: To provide a corrosion resistant buildup material capable of withstanding a corrosive atmosphere in an incinerator, particularly, a severe corrosive atmosphere where gaseous hydrogen chloride and melted ash are coexistent, and to provide a new incinerator member built-up therewith.
      SOLUTION: As the corrosion resistant alloy to be coated on the member to be used in a corrosive atmosphere produced in the incinerator, by using an alloy comprising 0.5 to 1.7% B, 6 to 25% Si, ≤40% Cr, Fe+Co: ≤15%Mo+1/2W:≤20%, ≤3.0% C, Al: ≤1%V+Nb+Ta:≤10%, 3.0% Cu, and the balance Ni with impurities, the following effects can be obtained: (1) the effect that the alloy has excellent corrosion resistance to a corrosive atmosphere where hydrogen chloride and a molten salt are coexistent; and (2) the effect that the material cost and clad working cost are low compared with a tube the entire thickness of which is made of high alloy.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供能够在焚烧炉中特别是严重的腐蚀性气氛中耐腐蚀性气氛的耐腐蚀性积聚材料,其中气态氯化氢和熔融灰共存,并且提供一种新的焚烧炉构件, 随之而来。 作为在焚烧炉中生产的腐蚀性气氛中使用的构件上涂覆的耐蚀合金,通过使用含有0.5〜1.7%B,6〜25%Si,≤40%Cr的合金, Fe + Co:≤15%Mo + 1 / 2W:≤20%,≤3.0%C,Al:≤1%V + Nb + Ta:≤10%,3.0%Cu,余量为Ni与杂质, 可以获得以下效果:(1)合金对氯化氢和熔盐共存的腐蚀性气氛具有优异的耐腐蚀性; 和(2)与其整个厚度由高合金制成的管相比,材料成本和包层工作成本低的效果。 版权所有(C)2007,JPO&INPIT
    • 3. 发明专利
    • JOINING METHOD OF TARGET PLATE FOR SPUTTERING
    • JP2000117427A
    • 2000-04-25
    • JP30176298
    • 1998-10-09
    • DAI ICHI HIGH FREQUENCY CO LTD
    • MIYATA SEIICHIROKOBAYASHI RYOJI
    • B23K1/19B23K1/20B23K101/34B23K103/18C23C14/34
    • PROBLEM TO BE SOLVED: To obtain an inexpensive joining method by welding an alloy coating of an element which is selected from In, Sn, Pb and an activated metal on a joining surface of a target plate which is selected from carbon, silicon and ceramic, coating a low melting point brazing filler metal onto the joining surface of a lined metallic plate and superposing the target plate on the coating of the lined metallic plate to thermally fuse them. SOLUTION: In this joining method, a process wherein superposed coating is pressurized and solid-phase welded at a temperature equal to or lower than a melting point of coating is preferably prepared, and also an activated metal is preferably Ti. The activated metal is selected from a Ti group element such as Ti, Zr, Hf, a V group element such as V, Nb, Ta, a rare earth element such as La, Ce or the like. Copper, aluminum, an alloy thereof or the like having excellent heat conductivity are used in a lined metallic plate, and a low melting pint brazing filler metal of In, Sn, Pb, Zn base is preliminarily plated on a joining surface between a target plate and the lined metallic plate. When the target plate is joined to the lined metallic plate, both coatings are fused by heating them at a temperature equal to or more than a melting point of at least one side of coated metals.
    • 4. 发明专利
    • MARKING PIN
    • JP2000141252A
    • 2000-05-23
    • JP33842698
    • 1998-11-13
    • DAI ICHI HIGH FREQUENCY CO LTD
    • MIYATA SEIICHIROMATSUBARA YOICHIKOBAYASHI RYOJI
    • B25H7/04
    • PROBLEM TO BE SOLVED: To use a sintered cemented carbide rod as it is without grinding the same and to improve the toughness by padding the soft and tough metal around a core material made of cemented carbide at least a marking part to form a composite structure. SOLUTION: This marking pin 1 has a composite structure obtained by padding the soft metal 3 of high toughness around a core material 2 made of cemented carbide. One of purposes of the padding of the soft and tough metal is to relieve the impact applied to a point of the pin in the marking, by the composite structure, and another purpose is to dispense with the grinding of an outer diameter of the cemented carbide in the manufacturing of the pin. That is, the sintered cemented carbide of the core material 2 thinner than a predetermined size is used as it is, the soft metal 3 is padded on the surface of the cemented carbide outer periphery, and the padded layer 3 is machined to be finished with the predetermined size. As the padding layer 3 is soft, it can be inexpensively worked by a lathe or the like with high accuracy.
    • 6. 发明专利
    • Electrostatic chuck and manufacturing method thereof
    • 静电切割及其制造方法
    • JP2009176928A
    • 2009-08-06
    • JP2008013719
    • 2008-01-24
    • Suzuka Fuji Xerox Co LtdZaiken:Kk株式会社材研鈴鹿富士ゼロックス株式会社
    • SHINDO TAKUYAMIYATA SEIICHIRO
    • H01L21/683C08K3/00C08L83/02C08L101/00H02N13/00
    • PROBLEM TO BE SOLVED: To solve the problem that, in an electrostatic chuck of post fire type, the hermetical isolation from the atmosphere within a chamber is difficult because an electrode is exposed to the atmosphere in the chamber, and also the problem that, in the case where the electrode is bi-pole type, discharging is easy to occur between electrodes since there is a gap between the electrodes. SOLUTION: In the method for manufacturing the electrostatic chuck having such structure as two sheets of insulating layers of ceramics are bonded together with an internal electrode layer in between, when two sheets of insulating layers are bonded together with an internal electrode layer in between, the internal electrode layer and an electrically insulating joining material are simultaneously bonded to each of the two sheets of insulating layers by simultaneously sandwiching electrically insulating joining material whose at least upper and lower surfaces are made from adhesive material, in a portion of the space where no internal electrode layer exists, in the space between the two sheets of insulating layers. COPYRIGHT: (C)2009,JPO&INPIT
    • 解决的问题为了解决在后火式的静电卡盘中,由于电极暴露在室内的气氛中,与室内的气氛的气密隔离是困难的,并且还存在问题 在电极是双极型的情况下,由于电极之间存在间隙,容易在电极之间发生放电。 解决方案:在具有两层陶瓷绝缘层的结构的静电卡盘的制造方法中,内部电极层与内部电极层接合在一起时,当两片绝缘层与内部电极层接合在一起时 在内部电极层和电绝缘接合材料之间,通过同时夹住绝缘接合材料,其中至少上表面和下表面由粘合剂材料制成,并将电绝缘接合材料同时接合到两片绝缘层中的一部分空间 在两层绝缘层之间的空间内不存在内部电极层。 版权所有(C)2009,JPO&INPIT
    • 7. 发明专利
    • Water resistant material
    • 耐水材料
    • JP2010013640A
    • 2010-01-21
    • JP2009137356
    • 2009-06-08
    • Yamaguchi PrefectureZaiken:Kk山口県株式会社材研
    • MAE HIDEOMIYATA SEIICHIRO
    • C09D201/00C01B21/072C01F5/16C01F5/28C01F7/02C01F7/50C01F11/02C01F11/18C01F11/22C09D1/00C09D1/02
    • PROBLEM TO BE SOLVED: To solve problems such as heavy thickness, high processing cost, flocculation of powder, and erosion and dissolution by a hot alkali aqueous solution occurring in a conventional method carried out for forming a hydration preventing protective coating on the surface of powder producing hydrates. SOLUTION: In water-resistant powder, the surface, which generates a hydrate when reacting with water, is coated with a water-resistant coating film. The water-resistant coating film is constructed when saturated adsorption concentration of an unpolymerized organic compound, which has at least one hydroxy group and at least one functional group selected from a sulfonic acid group, an amine, a quaternary amine salt, a phosphate group, and a carboxylic acid group, is adsorbed to the hydrate layer surface, which is formed on the powder surface and has a thickness of 0.05-1 mass% in terms of the powder mass, of the powder, the functional groups or the hydroxy groups of the unpolymerized organic compound free on the outside of the hydrate layer are chemically connected via a crosslinking by oxygen, and the adsorbed organic compound is cured. A hydrate of a metal component of the powder and alkaline earth metal or a fluoride or both of the fluoride and the hydrate are mixed together. COPYRIGHT: (C)2010,JPO&INPIT
    • 解决的问题:为了解决厚厚度高,加工成本高,粉末絮凝,以及在用于形成防水保护涂层的常规方法中发生的热碱水溶液的侵蚀和溶解的问题 生产水合物的粉末表面。 解决方案:在防水粉末中,与水反应时产生水合物的表面涂覆有防水涂膜。 在具有至少一个羟基和至少一个选自磺酸基,胺,季胺盐,磷酸基等官能团的未聚合有机化合物的饱和吸附浓度的情况下,构成耐水性涂膜, 和羧酸基团被吸附到形成在粉末表面上的水合物层表面,并且其粉末,官能团或羟基的粉末质量的厚度为0.05-1质量% 在水合物层的外侧游离的未聚合有机化合物通过氧气进行交联化学连接,并且所吸附的有机化合物固化。 将粉末和碱土金属或氟化物或氟化物和水合物两者的金属组分的水合物混合在一起。 版权所有(C)2010,JPO&INPIT
    • 8. 发明专利
    • Electrostatic chuck
    • 静电卡
    • JP2008028297A
    • 2008-02-07
    • JP2006201748
    • 2006-07-25
    • Zaiken:Kk株式会社材研
    • MIYATA SEIICHIRO
    • H01L21/683H02N13/00
    • PROBLEM TO BE SOLVED: To solve the problem of easily generating electric discharge between electrodes at the time of applying high voltage under reduced pressure due to a gap between the electrodes in the case of bipolar electrodes in post fire type electrostatic chuck, and the problem of exposure of the electrode film side surface to the external atmosphere due to generation of a gap corresponding to the electrode film thickness on the side surface of two ceramic plates sandwiching the electrodes. SOLUTION: An electrostatic chuck has a bipolar internal electrode film disposed between two ceramic insulating layers with the two insulating layers bonded by the internal electrode film. The internal electrode film is embedded in an electrode groove formed in either one of the surfaces bonded to the two insulating layers of the internal electrode film. The end face of a rib formed between the electrode grooves is bonded by forming a rib groove on the side facing the rib, and inserting to the electric insulating bonding material filling the rib groove. COPYRIGHT: (C)2008,JPO&INPIT
    • 解决的问题:为了解决在后火式静电卡盘中的双极性电极的情况下由于电极间的间隙而在减压下施加高电压时容易产生电极之间的放电的问题,以及 由于产生与夹着电极的两个陶瓷板的侧面上的电极膜厚度相对应的间隙,电极膜侧表面暴露于外部大气的问题。 解决方案:静电卡盘具有设置在两个绝缘层之间的双极内部电极膜,两个绝缘层通过内部电极膜粘合。 内部电极膜嵌入形成在与内部电极膜的两个绝缘层接合的表面中的任一个表面上的电极槽。 形成在电极槽之间的肋的端面通过在面向肋的一侧形成肋槽而插入到填充肋槽的电绝缘接合材料上。 版权所有(C)2008,JPO&INPIT
    • 9. 发明专利
    • Electrostatic chuck
    • JP2004087766A
    • 2004-03-18
    • JP2002246419
    • 2002-08-27
    • Zaiken:Kk株式会社材研
    • MIYATA SEIICHIRO
    • H01L21/683H01L21/68H02N13/00
    • PROBLEM TO BE SOLVED: To provide an electrostatic chuck with the functions of a heater and a cooler, which does not generate crack when using, even when the surface of a dielectric substance is worked to be thin in order to improve the electrostatic attraction property and capable of quickly controlling the surface temperature, in the electrostatic chuck having a post fire structure used in a semiconductor manufacturing device wherein the mixing of impurities is strictly limited. SOLUTION: The electrostatic chuck is constituted of a structure wherein a rib is formed on the rear surface of a dielectric ceramics integrally with the dielectric ceramics to divide the rear surface into independent areas. The electrode film of the chuck is formed on a recessed bottom surface surrounding the rib, while a lining material of insulating ceramics having the same linear expansion coefficient or the same quality as the dielectric ceramics is fitted to the film of the recessed part. The inside surface of the rib surrounding the recess is connected to the periphery of end surface of the lining material, then the lining material is connected to the rear surface of the dielectric ceramics while pinching the electrode film between them. In this case, a groove for conducting refrigerant to flow through the same is formed on the connecting surface of the lining material and the rear surface of the dielectric ceramics. COPYRIGHT: (C)2004,JPO
    • 10. 发明专利
    • Ceramic heater, and manufacturing method thereof
    • 陶瓷加热器及其制造方法
    • JP2009170389A
    • 2009-07-30
    • JP2008029662
    • 2008-01-10
    • Zaiken:Kk株式会社材研
    • MIYATA SEIICHIRO
    • H05B3/20H05B3/12H05B3/18H05B3/24
    • PROBLEM TO BE SOLVED: To solve problems wherein a gap equivalent to a thickness of a heater circuit of an electric heat film remains between two sheets of ceramics in a post fire type ceramic heater, and the gap may cause short-circuiting of the circuit by mixture of foreign bodies, or, a side face of the electric heat film is exposed to and connected with an actual use atmosphere (or an atmosphere in a chamber) outside the heater, which may cause atmospheric pollution by a leak of film components to the atmosphere, or, airtight segregation between an atmosphere (the air) at a power supply terminal side of the heater and an actual-usage atmosphere (or an atmosphere in a chamber) is difficult or the like.
      SOLUTION: In the ceramic heater with a structure wherein the electric heat film made of metal with a high melting point interposed between two insulating layers made of ceramics and two insulating layers are joined by melting the electric heat film, a space section is filled up and glued with glass by holding the glass at the space section where the electric heat film does not exist in a space sandwiched by two joined insulating layers.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了解决在后火式陶瓷加热器中在电热膜的加热器电路的厚度等于两片陶瓷之间的间隙的间隙可能导致短路的问题, 通过异物混合的电路或电热膜的侧面暴露于加热器外部的实际使用气氛(或室内的气氛)中,这可能由于膜的泄漏而引起大气污染 或者在加热器的供电端子侧的气氛(空气)和实际使用气氛(或室内的气氛)之间的气密分离困难等。 解决方案:在具有这样的结构的陶瓷加热器中,其中通过熔化电热膜将由陶瓷制成的两个绝缘层和两个绝缘层之间的熔点高的金属制成的电热膜接合在一起,空间部分 通过在由两个接合的绝缘层夹在的空间中不存在电热膜的空间部分处保持玻璃来填充和胶合玻璃。 版权所有(C)2009,JPO&INPIT