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1. 发明专利

JP2009176928A Electrostatic chuck and manufacturing method thereof 审中-公开
标题翻译：静电切割及其制造方法
公开(公告)号：JP2009176928A
公开(公告)日：2009-08-06
申请号：JP2008013719
申请日：2008-01-24
申请人： Suzuka Fuji Xerox Co Ltd , Zaiken:Kk , 株式会社材研 , 鈴鹿富士ゼロックス株式会社
发明人： SHINDO TAKUYA , MIYATA SEIICHIRO
IPC分类号： H01L21/683 , C08K3/00 , C08L83/02 , C08L101/00 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To solve the problem that, in an electrostatic chuck of post fire type, the hermetical isolation from the atmosphere within a chamber is difficult because an electrode is exposed to the atmosphere in the chamber, and also the problem that, in the case where the electrode is bi-pole type, discharging is easy to occur between electrodes since there is a gap between the electrodes. SOLUTION: In the method for manufacturing the electrostatic chuck having such structure as two sheets of insulating layers of ceramics are bonded together with an internal electrode layer in between, when two sheets of insulating layers are bonded together with an internal electrode layer in between, the internal electrode layer and an electrically insulating joining material are simultaneously bonded to each of the two sheets of insulating layers by simultaneously sandwiching electrically insulating joining material whose at least upper and lower surfaces are made from adhesive material, in a portion of the space where no internal electrode layer exists, in the space between the two sheets of insulating layers. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题为了解决在后火式的静电卡盘中，由于电极暴露在室内的气氛中，与室内的气氛的气密隔离是困难的，并且还存在问题在电极是双极型的情况下，由于电极之间存在间隙，容易在电极之间发生放电。解决方案：在具有两层陶瓷绝缘层的结构的静电卡盘的制造方法中，内部电极层与内部电极层接合在一起时，当两片绝缘层与内部电极层接合在一起时在内部电极层和电绝缘接合材料之间，通过同时夹住绝缘接合材料，其中至少上表面和下表面由粘合剂材料制成，并将电绝缘接合材料同时接合到两片绝缘层中的一部分空间在两层绝缘层之间的空间内不存在内部电极层。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2010013640A Water resistant material 有权
标题翻译：耐水材料
公开(公告)号：JP2010013640A
公开(公告)日：2010-01-21
申请号：JP2009137356
申请日：2009-06-08
申请人： Yamaguchi Prefecture , Zaiken:Kk , 山口県 , 株式会社材研
发明人： MAE HIDEO , MIYATA SEIICHIRO
IPC分类号： C09D201/00 , C01B21/072 , C01F5/16 , C01F5/28 , C01F7/02 , C01F7/50 , C01F11/02 , C01F11/18 , C01F11/22 , C09D1/00 , C09D1/02
摘要： PROBLEM TO BE SOLVED: To solve problems such as heavy thickness, high processing cost, flocculation of powder, and erosion and dissolution by a hot alkali aqueous solution occurring in a conventional method carried out for forming a hydration preventing protective coating on the surface of powder producing hydrates. SOLUTION: In water-resistant powder, the surface, which generates a hydrate when reacting with water, is coated with a water-resistant coating film. The water-resistant coating film is constructed when saturated adsorption concentration of an unpolymerized organic compound, which has at least one hydroxy group and at least one functional group selected from a sulfonic acid group, an amine, a quaternary amine salt, a phosphate group, and a carboxylic acid group, is adsorbed to the hydrate layer surface, which is formed on the powder surface and has a thickness of 0.05-1 mass% in terms of the powder mass, of the powder, the functional groups or the hydroxy groups of the unpolymerized organic compound free on the outside of the hydrate layer are chemically connected via a crosslinking by oxygen, and the adsorbed organic compound is cured. A hydrate of a metal component of the powder and alkaline earth metal or a fluoride or both of the fluoride and the hydrate are mixed together. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：为了解决厚厚度高，加工成本高，粉末絮凝，以及在用于形成防水保护涂层的常规方法中发生的热碱水溶液的侵蚀和溶解的问题生产水合物的粉末表面。解决方案：在防水粉末中，与水反应时产生水合物的表面涂覆有防水涂膜。在具有至少一个羟基和至少一个选自磺酸基，胺，季胺盐，磷酸基等官能团的未聚合有机化合物的饱和吸附浓度的情况下，构成耐水性涂膜，和羧酸基团被吸附到形成在粉末表面上的水合物层表面，并且其粉末，官能团或羟基的粉末质量的厚度为0.05-1质量％在水合物层的外侧游离的未聚合有机化合物通过氧气进行交联化学连接，并且所吸附的有机化合物固化。将粉末和碱土金属或氟化物或氟化物和水合物两者的金属组分的水合物混合在一起。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2008028297A Electrostatic chuck 审中-公开
标题翻译：静电卡
公开(公告)号：JP2008028297A
公开(公告)日：2008-02-07
申请号：JP2006201748
申请日：2006-07-25
申请人： Zaiken:Kk , 株式会社材研
发明人： MIYATA SEIICHIRO
IPC分类号： H01L21/683 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To solve the problem of easily generating electric discharge between electrodes at the time of applying high voltage under reduced pressure due to a gap between the electrodes in the case of bipolar electrodes in post fire type electrostatic chuck, and the problem of exposure of the electrode film side surface to the external atmosphere due to generation of a gap corresponding to the electrode film thickness on the side surface of two ceramic plates sandwiching the electrodes. SOLUTION: An electrostatic chuck has a bipolar internal electrode film disposed between two ceramic insulating layers with the two insulating layers bonded by the internal electrode film. The internal electrode film is embedded in an electrode groove formed in either one of the surfaces bonded to the two insulating layers of the internal electrode film. The end face of a rib formed between the electrode grooves is bonded by forming a rib groove on the side facing the rib, and inserting to the electric insulating bonding material filling the rib groove. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：为了解决在后火式静电卡盘中的双极性电极的情况下由于电极间的间隙而在减压下施加高电压时容易产生电极之间的放电的问题，以及由于产生与夹着电极的两个陶瓷板的侧面上的电极膜厚度相对应的间隙，电极膜侧表面暴露于外部大气的问题。解决方案：静电卡盘具有设置在两个绝缘层之间的双极内部电极膜，两个绝缘层通过内部电极膜粘合。内部电极膜嵌入形成在与内部电极膜的两个绝缘层接合的表面中的任一个表面上的电极槽。形成在电极槽之间的肋的端面通过在面向肋的一侧形成肋槽而插入到填充肋槽的电绝缘接合材料上。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2004087766A Electrostatic chuck 审中-公开
公开(公告)号：JP2004087766A
公开(公告)日：2004-03-18
申请号：JP2002246419
申请日：2002-08-27
申请人： Zaiken:Kk , 株式会社材研
发明人： MIYATA SEIICHIRO
IPC分类号： H01L21/683 , H01L21/68 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic chuck with the functions of a heater and a cooler, which does not generate crack when using, even when the surface of a dielectric substance is worked to be thin in order to improve the electrostatic attraction property and capable of quickly controlling the surface temperature, in the electrostatic chuck having a post fire structure used in a semiconductor manufacturing device wherein the mixing of impurities is strictly limited. SOLUTION: The electrostatic chuck is constituted of a structure wherein a rib is formed on the rear surface of a dielectric ceramics integrally with the dielectric ceramics to divide the rear surface into independent areas. The electrode film of the chuck is formed on a recessed bottom surface surrounding the rib, while a lining material of insulating ceramics having the same linear expansion coefficient or the same quality as the dielectric ceramics is fitted to the film of the recessed part. The inside surface of the rib surrounding the recess is connected to the periphery of end surface of the lining material, then the lining material is connected to the rear surface of the dielectric ceramics while pinching the electrode film between them. In this case, a groove for conducting refrigerant to flow through the same is formed on the connecting surface of the lining material and the rear surface of the dielectric ceramics. COPYRIGHT: (C)2004,JPO

5. 发明专利

JP2009170389A Ceramic heater, and manufacturing method thereof 审中-公开
标题翻译：陶瓷加热器及其制造方法
公开(公告)号：JP2009170389A
公开(公告)日：2009-07-30
申请号：JP2008029662
申请日：2008-01-10
申请人： Zaiken:Kk , 株式会社材研
发明人： MIYATA SEIICHIRO
IPC分类号： H05B3/20 , H05B3/12 , H05B3/18 , H05B3/24
摘要： PROBLEM TO BE SOLVED: To solve problems wherein a gap equivalent to a thickness of a heater circuit of an electric heat film remains between two sheets of ceramics in a post fire type ceramic heater, and the gap may cause short-circuiting of the circuit by mixture of foreign bodies, or, a side face of the electric heat film is exposed to and connected with an actual use atmosphere (or an atmosphere in a chamber) outside the heater, which may cause atmospheric pollution by a leak of film components to the atmosphere, or, airtight segregation between an atmosphere (the air) at a power supply terminal side of the heater and an actual-usage atmosphere (or an atmosphere in a chamber) is difficult or the like.
SOLUTION: In the ceramic heater with a structure wherein the electric heat film made of metal with a high melting point interposed between two insulating layers made of ceramics and two insulating layers are joined by melting the electric heat film, a space section is filled up and glued with glass by holding the glass at the space section where the electric heat film does not exist in a space sandwiched by two joined insulating layers.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了解决在后火式陶瓷加热器中在电热膜的加热器电路的厚度等于两片陶瓷之间的间隙的间隙可能导致短路的问题，通过异物混合的电路或电热膜的侧面暴露于加热器外部的实际使用气氛（或室内的气氛）中，这可能由于膜的泄漏而引起大气污染或者在加热器的供电端子侧的气氛（空气）和实际使用气氛（或室内的气氛）之间的气密分离困难等。解决方案：在具有这样的结构的陶瓷加热器中，其中通过熔化电热膜将由陶瓷制成的两个绝缘层和两个绝缘层之间的熔点高的金属制成的电热膜接合在一起，空间部分通过在由两个接合的绝缘层夹在的空间中不存在电热膜的空间部分处保持玻璃来填充和胶合玻璃。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2008218978A Electrostatic chuck and manufacturing method therefor 审中-公开
标题翻译：静电切割及其制造方法
公开(公告)号：JP2008218978A
公开(公告)日：2008-09-18
申请号：JP2007341794
申请日：2007-12-14
申请人： Zaiken:Kk , 株式会社材研
发明人： MIYATA SEIICHIRO
IPC分类号： H01L21/683 , C23C14/50 , C23C16/458 , H01L21/205 , H01L21/3065 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic chuck and a manufacturing method therefor, having a post-fire type structure, in which electrodes are airtight sealed to be isolated from the atmosphere in a chamber so as to solve the problems, such as contamination of the atmosphere in the chamber, dielectric breakdown between electrodes, plasma diffraction, and air leakage between the atmosphere in the chamber and the atmosphere out of the chamber. SOLUTION: An electrostatic chuck has a structure, in which an internal electrode layer is placed between two ceramic insulating layers (1 and 2), and the internal electrode layer is melted to braze the two insulating layers. Among the spaces between the two jointed insulating layers, there are spaces in which no internal electrode exists. Each of the spaces where there is no internal electrode is filled and bonded with an electrical insulating bonding material which has a single layer structure or a laminated structure, consisting of one or more layers and comprises a bonding material at least as its top and bottom layers. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决问题的方案为了提供一种静电卡盘及其制造方法，其具有：将电极气密密封以在室内与大气隔离的后火型结构，以解决问题，作为室内气氛的污染，电极之间的电介质击穿，等离子体衍射，以及室内的气氛与室外的气氛之间的空气泄漏。解决方案：静电卡盘具有将内部电极层放置在两个陶瓷绝缘层（1和2）之间的结构，并且内部电极层熔化以钎焊两个绝缘层。在两个接合绝缘层之间的空间中，存在没有内部电极存在的空间。每个没有内部电极的空间用具有单层结构的电绝缘接合材料或由一层或多层组成的层压结构填充并粘合，并且至少包括至少其顶层和底层的接合材料。版权所有（C）2008，JPO＆INPIT

7. 发明专利

JP2005071781A Electric resistor 审中-公开
标题翻译：电阻器
公开(公告)号：JP2005071781A
公开(公告)日：2005-03-17
申请号：JP2003299680
申请日：2003-08-25
申请人： Tateho Chem Ind Co Ltd , Zaiken:Kk , タテホ化学工業株式会社 , 株式会社材研
发明人： MIYATA SEIICHIRO
IPC分类号： H05B3/20 , B32B15/04 , C04B41/88 , H05B3/10 , H05B3/14
摘要： PROBLEM TO BE SOLVED: To provide a constituent composition of a coating capable of restraining an increase in the resistance of a Si group alloy coating even if it is repeatedly heated and cooled.
SOLUTION: In this electric resistor comprising a structure composed by coating the surface of a ceramic base material having an electric insulation property with a resistance coating formed of a Si group alloy, 0.03-5% of B is contained in the Si group alloy.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供能够抑制Si组合镀层的电阻增加的涂层的组成成分，即使其被反复加热和冷却。解决方案：在该电阻器中，包括由Si组合物形成的具有电绝缘性的陶瓷基材的表面涂布的结构，Si组中含有0.03〜5％的B 合金。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2012132892A Adhesion structure of thermocouple and adhesion method thereof 审中-公开
标题翻译：热电偶的粘合结构及其粘合方法
公开(公告)号：JP2012132892A
公开(公告)日：2012-07-12
申请号：JP2011116328
申请日：2011-05-07
申请人： Zaiken:Kk , 株式会社材研
发明人： MIYATA SEIICHIRO
IPC分类号： G01K1/14 , G01K7/02
摘要： PROBLEM TO BE SOLVED: To solve a problem in which an adhesion part is peeled off and a thermocouple is removed from a substrate, in which the temperature distribution of a surface is measured using a real substrate in which a thermocouple is preliminarily embedded to eliminate temperature unevenness when a semiconductor substrate is heat-treated.SOLUTION: When droplets of an inorganic adhesive are dropwise added to a thermocouple junction part and the thermocouple junction part is embedded in the droplets and bonded to the flat surface of a temperature measuring member, a flask frame surrounding the thermocouple junction part is mounted on the flat surface of the temperature measuring member and the droplets are dropwise added in the flask frame and the spreading of the added droplets is prevented by the flask, followed by contacting the droplets with the inner surface of the flask frame to solidify in the flask.
摘要翻译：要解决的问题：为了解决粘附部分被剥离并从基板去除热电偶的问题，其中使用预先嵌入热电偶的实际基板测量表面的温度分布以消除半导体衬底被热处理时的温度不均匀性。解决方案：当将无机粘合剂的液滴滴加到热电偶接合部分并且热电偶接合部分嵌入液滴中并结合到温度测量部件的平坦表面时，围绕热电偶接合部分的烧瓶框架是安装在温度测量构件的平坦表面上，并且将液滴滴加在烧瓶框架中，并且通过烧瓶防止添加的液滴的扩散，随后使液滴与烧瓶框架的内表面接触以在烧瓶。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2008277794A Method for preventing erosion of current carrying member comprising refractory metal 审中-公开
$Method for preventing erosion of current carrying member comprising refractory metal$
标题翻译：用于防止包含耐火金属的流体携带会员侵蚀的方法
公开(公告)号：JP2008277794A
公开(公告)日：2008-11-13
申请号：JP2008091892
申请日：2008-03-31
申请人： Zaiken:Kk , 株式会社材研
发明人： MIYATA SEIICHIRO
IPC分类号： H01L21/683 , H01L21/02 , H05B3/02 , H05B3/03 , H05B3/12 , H05B3/74
摘要： PROBLEM TO BE SOLVED: To solve such problems that: an electrically conductive member having a refractory metal such as Mo and W as a base material is excellent in thermal conductivity, electrical conductivity and thermal resistance but extremely inferior in oxidation resistance; and fusing the electrothermal coat of an Si alloy for imparting oxidation resistance causes the corrosion, i.e. erosion, of the base material to generate a brittle and thick silicide layer on the surface and cause the breaking and peeling of it. SOLUTION: The occurrence of erosion is prevented by using an Si-based alloy containing B or Mn, or forming a carburized layer or borided layer on a junction surface. COPYRIGHT: (C)2009,JPO&INPIT

10. 发明专利

JP2008277285A Electrothermal coating fused body, and its fusing method 审中-公开
标题翻译：电热熔融体系及其熔融方法
公开(公告)号：JP2008277285A
公开(公告)日：2008-11-13
申请号：JP2008089063
申请日：2008-03-31
申请人： Zaiken:Kk , 株式会社材研
发明人： MIYATA SEIICHIRO
IPC分类号： H05B3/14 , C04B41/88 , H05B3/10 , H05B3/20 , H05B3/26
摘要： PROBLEM TO BE SOLVED: To provide a high-strength electrothermal coating fused body excelling in adhesiveness to an aluminum nitride base material without causing separation when a coating of a Si alloy containing 0.2% or more B is fusion-bonded to aluminum nitride in order to solve a problem that, when a coating of the Si alloy containing 0.2% or more B is fusion-bonded to the aluminum nitride, the coating is separated, or easy to separate or the strength of the coating itself is low, and its electrothermal coating fusion coating method.
SOLUTION: This electrothermal coating fused body has a structure where an electrothermal coating formed of a Si alloy containing 0.2 wt.% or more of B is fusion-bonded to the surface of an aluminum nitride ceramic base material containing 1 wt.% of an sintering additive of a rare-earth element compound in terms of oxide. In the coating, not smaller than 0.1 wt.% of a rare-earth element using the rare-earth element compound of the sintering additive of the ceramic base material as a supply source is included.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种在含有0.2％以上的B的Si合金的涂层与氮化铝熔合的情况下，在氮化铝基体材料的粘接性方面优异的高强度电热涂敷熔融体，为了解决当含有0.2％以上的B的Si合金的涂层与氮化铝熔合时，分离涂层或容易分离或涂层本身的强度低的问题，以及其电热涂层熔覆法。解决方案：该电热涂层熔融体具有将含有0.2重量％以上的B的Si合金形成的电热涂层与含有1重量％以上的B的氮化铝陶瓷基材的表面熔合的结构，的稀土元素化合物的烧结添加剂。在涂层中，包含不少于0.1重量％的使用陶瓷基材的烧结添加剂的稀土元素化合物作为供给源的稀土元素。版权所有（C）2009，JPO＆INPIT

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