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1. 发明专利

JP2014222697A 電極埋め込み石英部材及びその製造方法有权
标题翻译：电极嵌入式微粒成员及其制造方法
公开(公告)号：JP2014222697A
公开(公告)日：2014-11-27
申请号：JP2013101310
申请日：2013-05-13
申请人：コバレントマテリアル株式会社 , Covalent Materials Corp
发明人： YASUMOTO YASUHIRO , MURAMATSU SHIGEKO , GOTO HIROYUKI
IPC分类号： H01L21/683
摘要：【課題】静電チャックやヒータ等の半導体処理用部材であって、内部電極の酸化や該部材の強度の低下等の不具合を生じることなく、内部電極への導通を確実に得ることができ、かつ、給電端子を任意の位置に設定することができる電極埋め込み石英部材及びその製造方法を提供する。【解決手段】石英ガラス板1,3,6の内部に、該石英ガラス板の一主面から異なる深さに配置された第1の電極7及び第2の電極2と、第1の電極7と第2の電極2に挟まれた柱状の通電体4とが埋設され、通電体4は、石英ガラス柱状体41の内部には貫通体43が埋設され、石英ガラス柱状体41の表面には導電性材料からなる被覆層42が形成され、天面及び底面がそれぞれ、第1の電極7及び第2の電極2と接合されている電極埋め込み石英部材を作製する。【選択図】図1
摘要翻译：要解决的问题：提供作为用于静电卡盘，加热器等的半导体加工的部件的电极嵌入式石英部件，并且可以可靠地获得对内部电极的导通，而没有诸如内部电极的氧化的任何问题并且构件的强度降低，并且可以将设置在任意位置的馈电端子及其制造方法。本发明提供一种电极嵌入石英构件，使得第一电极7和第二电极2 布置在石英玻璃板的一个主表面和夹在第一电极7和第二电极2之间的柱状导电体4的不同深度处埋设在石英玻璃板1,3和6中; 导电体4具有嵌入石英玻璃柱体41内的贯通体43; 在石英玻璃柱体41的上表面上由导电材料形成涂层42; 并且顶表面和底表面与第一电极7和第二电极2接合。

2. 发明专利

JP2014178332A Ceramic particle for chromatography filler and manufacturing method thereof 有权
标题翻译：用于色谱填料的陶瓷颗粒及其制造方法
公开(公告)号：JP2014178332A
公开(公告)日：2014-09-25
申请号：JP2014115078
申请日：2014-06-03
申请人： Covalent Materials Corp , コバレントマテリアル株式会社
发明人： UEMOTO HIDEO , SUGINO TOMONORI , GOTO HIROYUKI
IPC分类号： G01N30/88 , B01J20/02 , B01J20/04 , B01J20/08 , B01J20/10 , B01J20/16 , B01J20/281 , B01J20/30
摘要： PROBLEM TO BE SOLVED: To provide ceramic particles for chromatography filler capable of enlarging a reaction area with eluent or the like without reducing the size of the particle itself, and provide a manufacturing method thereof.SOLUTION: A ceramic particle 10 for chromatography filler has a plurality of opening pores 20 on an external surface 10a thereof. In the opening pore 20, an average pore diameter is 500 nm ore more and 50 μm or less, and a bore diameter of an opening part of the external surface 10a is 300 nm or more and 20 μm or less.
摘要翻译：要解决的问题：提供能够在不减小颗粒本身的尺寸的情况下能够用洗脱剂等扩大反应区域的色谱填料用陶瓷颗粒，并提供其制造方法。溶胶：用于色谱填料的陶瓷颗粒10具有多个开口孔20位于其外表面10a上。在开孔20中，平均孔径为500nm以上且50μm以下，外表面10a的开口部的孔径为300nm以上且20μm以下。

3. 发明专利

JP2014057013A Electrostatic chuck 审中-公开
标题翻译：静电卡
公开(公告)号：JP2014057013A
公开(公告)日：2014-03-27
申请号：JP2012202162
申请日：2012-09-14
申请人： Covalent Materials Corp , コバレントマテリアル株式会社
发明人： MURAMATSU SHIGEKO , GOTO HIROYUKI , KOBAYASHI HIROAKI
IPC分类号： H01L21/683 , B23Q3/15 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic chuck with a stronger attraction force, having an electrode pattern with excellent in-plane uniformity of an attraction force.SOLUTION: In the electrostatic chuck in the present invention, electrodes are embedded into a plate-like insulator of which at least one principal surface is an attraction surface. The electrodes constitute an electrode pattern in which positive electrodes and negative electrodes are alternately arranged. The positive electrodes and negative electrodes comprise: a linear trunk portion extending toward the peripheral edge direction from the center point of the attraction surface; and a linear branch portion branching off from the trunk portion. The branch portion is formed in a circular arc shape or a polygonal shape, along the peripheral edge of an arbitrary concentric circle or an arbitrary concentric polygon that is centered at the center point. The number of the branch portion extending from the trunk portion positioned on the peripheral edge of the arbitrary concentric circle is only one each for one of the electrodes.
摘要翻译：要解决的问题：提供一种具有较强吸引力的静电卡盘，其电极图案具有优异的吸引力的面内均匀性。解决方案：在本发明的静电卡盘中，将电极嵌入板状绝缘子的至少一个主表面是吸引表面。电极构成交替配置正极和负极的电极图案。正极和负极包括：从吸引面的中心点向周缘方向延伸的线状主干部; 以及从躯干部分分支的直线分支部。分支部分沿着任意同心圆的圆周边缘或以中心点为中心的任意同心多边形形成圆弧形或多边形。从位于任意同心圆的周缘的主干部分延伸的分支部分的数量仅对于一个电极仅一个。

4. 发明专利

JP2013077508A Planar heater 审中-公开
标题翻译：平面加热器
公开(公告)号：JP2013077508A
公开(公告)日：2013-04-25
申请号：JP2011217773
申请日：2011-09-30
申请人： Covalent Materials Corp , コバレントマテリアル株式会社
发明人： GOTO HIROYUKI , MURAMATSU SHIGEKO , KOBAYASHI HIROAKI
IPC分类号： H05B3/20 , H05B3/10 , H05B3/84
摘要： PROBLEM TO BE SOLVED: To provide a planar heater which forms non formation parts where a transparent conductive film is not formed on a formation surface of the transparent conductive film, partially changes the resistance on the transparent conductive film formation surface by using the non formation parts, and controls the temperature distribution in the surface.SOLUTION: In a planar heater 1, a transparent conductive film 3 is formed on at least one surface of a transparent substrate 2, and metal electrodes 4 for voltage application are disposed at both ends of the transparent substrate 3. Multiple non formation parts 3a where the transparent conductive film is not formed are formed on a formation surface of the transparent conductive film 3 where the transparent conductive film 3 is formed. This structure increases the apparent resistance of the transparent conductive film and controls a current flow and Joule heat generated thereby controlling the in-plane temperature distribution.
摘要翻译：要解决的问题：为了提供一种在透明导电膜的形成表面上形成没有形成透明导电膜的非形成部分的平面加热器，通过使用透明导电膜形成表面的电阻来部分地改变透明导电膜形成表面的电阻非形成部分，并控制表面的温度分布。解决方案：在平面加热器1中，在透明基板2的至少一个表面上形成透明导电膜3，并且在透明基板3的两端设置用于施加电压的金属电极4。在形成透明导电膜3的透明导电膜3的形成表面上形成未形成透明导电膜的部分3a。这种结构增加了透明导电膜的视在电阻并且控制电流和由此产生的焦耳热，从而控制面内温度分布。版权所有（C）2013，JPO＆INPIT

5. 发明专利

JP2012014018A Method for producing glass micro lens array 有权
标题翻译：生产玻璃微透镜阵列的方法
公开(公告)号：JP2012014018A
公开(公告)日：2012-01-19
申请号：JP2010151421
申请日：2010-07-01
申请人： Takeji Arai , Covalent Materials Corp , コバレントマテリアル株式会社 , 武二新井
发明人： ARAI TAKEJI , GOTO HIROYUKI , KANAMARU EIICHI , UEDA SHINICHI
IPC分类号： G02B3/00 , C03C15/00 , C03C23/00
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a glass micro lens array, by which the glass micro lens array free from defectiveness and excellent in durability and translucency can be easily mass-produced with high precision.SOLUTION: In this method for producing the glass micro lens array, on a mirror-polished glass substrate, a laser beam absorbing film is formed; local stress is given to the glass substrate by irradiating a laser beam to the film; and then the film is removed; and dry etching or wet etching is applied to the glass substrate to form a portion, where the stress locally exists, into a shape of a concave lens.
摘要翻译：解决的问题：为了提供一种玻璃微透镜阵列的制造方法，通过该方法可以高精度地容易地批量生产无缺陷性和耐久性和半透明性的玻璃微透镜阵列。解决方案：在该玻璃微透镜阵列的制造方法中，在镜面抛光玻璃基板上形成激光束吸收膜，通过向薄膜照射激光束来对玻璃基板施加局部应力; 然后去除电影; 并且对玻璃基板施加干蚀刻或湿蚀刻，以形成局部存在应力的部分为凹透镜的形状。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2011159653A Paste and plasma-resistant member 审中-公开
标题翻译：耐油和耐等级会员
公开(公告)号：JP2011159653A
公开(公告)日：2011-08-18
申请号：JP2010017662
申请日：2010-01-29
申请人： Covalent Materials Corp , コバレントマテリアル株式会社
发明人： GOTO HIROYUKI , YOKOYAMA MASARU
IPC分类号： H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a resist paste having high plasma resistance, even when dry etching is performed using fluorine plasma and no risk of causing a patterning failure by remaining after etching.
SOLUTION: The paste 102 patterned by screen printing is used as a resist. The paste is characterized by adding a filler consisting of particles having a resistance to the fluorine plasma to a resin, and the filler is either one of yttrium oxide (Y
2 O
3 ) and yttrium aluminum garnet (YAG) having the resistance to the fluorine plasma or a mixture of both.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：即使当使用氟等离子体进行干法蚀刻并且没有通过在蚀刻之后残留图案化故障的风险时，提供具有高等离子体电阻的抗蚀剂浆料。解决方案：通过丝网印刷图案化的糊状物102用作抗蚀剂。特征在于将由氟等离子体具有耐性的颗粒组成的填料添加到树脂中，并且填料是氧化钇（Y O 3 ）和具有对氟等离子体的耐受性的两者的混合物的钇铝石榴石（YAG）。版权所有（C）2011，JPO＆INPIT

7. 发明专利

JP2010046654A Method for producing ceramic particle 审中-公开
标题翻译：生产陶瓷颗粒的方法
公开(公告)号：JP2010046654A
公开(公告)日：2010-03-04
申请号：JP2009067722
申请日：2009-03-19
申请人： Covalent Materials Corp , コバレントマテリアル株式会社
发明人： SUGINO TOMONORI , UEMOTO HIDEO , GOTO HIROYUKI
IPC分类号： B01J13/00 , B01J20/04 , C01B25/32
摘要： PROBLEM TO BE SOLVED: To provide a ceramic particle the reaction area of which with an eluted liquid can be made larger without forcing the ceramic particle itself to have smaller size and which has excellent monodispersibility. SOLUTION: A method for producing the ceramic particle comprises the steps of: preparing an O/W emulsion by dispersing an oil drop particle (O) consisting of first oil in slurry (W); supplying the prepared O/W emulsion to a first flow passage; supplying an oily solvent containing second oil and an oleophilic surfactant to a second flow passage, which is opposed bi-directionally to the first flow passage at an optional angle and then merged with the first flow passage, to impart shear stress to the O/W emulsion and form a minute liquid droplet in which the oil drop particle is caged; and firing the formed minute liquid droplet. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种陶瓷颗粒，可以使其与洗脱液体的反应面积更大，而不会使陶瓷颗粒本身具有较小的尺寸并且具有优异的单分散性。解决方案：一种制备陶瓷颗粒的方法包括以下步骤：通过将由第一油组成的油滴颗粒（O）分散在浆料（W）中来制备O / W乳液; 将制备的O / W乳液供应到第一流动通道; 将第二油和亲油表面活性剂的油性溶剂供应到第二流动通道，所述第二流动通道以任意角度与所述第一流动通道相对置，然后与所述第一流动通道合并，以向所述O / W 并形成油滴颗粒笼中的微小液滴; 并焙烧形成的微小液滴。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2009025196A Fine channel structure, and manufacturing method of fine channel structure 有权
标题翻译：精细通道结构和精细通道结构的制造方法
公开(公告)号：JP2009025196A
公开(公告)日：2009-02-05
申请号：JP2007189729
申请日：2007-07-20
申请人： Covalent Materials Corp , コバレントマテリアル株式会社
发明人： GOTO HIROYUKI , MURAYAMA HARUO , KIMIJIMA SUSUMU , ICHIJIMA MASAHIKO
IPC分类号： G01N35/08 , B01J19/00 , B81B1/00 , B81C3/00 , G01N37/00
CPC分类号： B32B38/06 , B01L3/5027 , B01L3/502707 , B01L2200/12 , B01L2300/0645 , B01L2300/0816 , B01L2300/0887 , B32B38/145 , B32B2037/246 , B32B2309/02 , B32B2309/10 , Y10T156/1064 , Y10T428/24562 , Y10T428/2457 , Y10T428/24744
摘要： PROBLEM TO BE SOLVED: To provide a fine channel structure, capable of detecting accurately the concentration of liquid flowing in the channel or the concentration of an object material in the liquid, or the like, by forming a plurality of electrodes on the inner surface of the fine channel, and a manufacturing method of the fine channel structure. SOLUTION: In this fine channel structure 10 wherein a fine channel 3 having a prescribed sectional shape is formed in a laminate formed, by laminating successively substrates 1a, 1b, 1c having each electrode 2a, 2b, 2c comprising a thin film and formed thereon, the fine channel 3 is formed in the vertical direction β vertical to the lamination direction α of the laminate, and each inner surface 3a, 3b of the fine channel 3 has an acute angle θ, with respect to the lamination direction α of the laminate, and the plurality of electrodes 2a, 2b, 2c are formed in a state exposed in the laminating direction α of each inner surface 3a, 3b of the fine channel 3. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供精细的通道结构，能够精确地检测在通道中流动的液体的浓度或液体中的物体的浓度等，通过在其上形成多个电极精细通道的内表面以及精细通道结构的制造方法。解决方案：在具有规定截面形状的精细通道3形成的细小通道结构10中，通过依次层压具有包括薄膜的电极2a，2b，2c的基板1a，1b，1c，以及形成在其上的细沟道3形成在垂直于叠层方向的层叠方向α的垂直方向β上，并且细沟道3的每个内表面3a，3b相对于层叠方向α具有锐角θ 层叠体和多个电极2a，2b，2c以细沟道3的内表面3a，3b的层叠方向α露出的状态形成。（C）2009，JPO＆INPIT

9. 发明专利

JP2010100503A Ceramic particle and method of manufacturing the same 审中-公开
标题翻译：陶瓷颗粒及其制造方法
公开(公告)号：JP2010100503A
公开(公告)日：2010-05-06
申请号：JP2008275837
申请日：2008-10-27
申请人： Covalent Materials Corp , コバレントマテリアル株式会社
发明人： UEMOTO HIDEO , GOTO HIROYUKI , SUGINO TOMONORI , YASUMOTO YASUHIRO
IPC分类号： C04B38/00 , C01B25/32 , C01B31/36 , C01B33/18 , C01B33/26 , C01G25/02 , C04B38/06
摘要： PROBLEM TO BE SOLVED: To provide a ceramic particle which is provided with a skeleton part having sufficient strength, can increase a reaction area with an eluate or the like without reducing the size of the particle itself and obtaining a high relative surface area and is excellent in adsorptivity of a catalyst, cell, protein or the like, and to provide a method of manufacturing the ceramic particle.
SOLUTION: The ceramic particle 10 has a plurality of open pores 20 on the outer surface 10a thereof, an average pore size of the open pores 20 is 2 μm or more and 50 μm or less, a diameter O
t of opening parts on the outer surface 10a side of the open pores 20 is 1 μm or more and 30 μm or less, the skeleton part 30 constituting the opening pores 20 is constituted with dense material and ceramic fine particles having a relative surface area of 1m
2 /g or more are attached to the outer surface 10a and inner wall surface of the open pores 20.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供具有足够强度的骨架部分的陶瓷颗粒，可以在不减小颗粒本身的尺寸并且获得高的相对表面积的情况下增加与洗脱液等的反应面积并且催化剂，电池，蛋白质等的吸附性优异，并且提供陶瓷颗粒的制造方法。解决方案：陶瓷颗粒10在其外表面10a上具有多个开孔20，开孔20的平均孔径为2μm以上且50μm以下，直径O SB 在开孔20的外表面10a侧的开口部的为1μm以上且30μm以下，构成开口孔20的骨架部30由致密材料构成，具有相对的陶瓷微粒表面积1m

10. 发明专利

JP2008026437A Method for producing glass microlens array and glass microlens array 审中-公开
标题翻译：生产玻璃微阵列和玻璃微阵列的方法
公开(公告)号：JP2008026437A
公开(公告)日：2008-02-07
申请号：JP2006196518
申请日：2006-07-19
申请人： Covalent Materials Corp , コバレントマテリアル株式会社
发明人： GOTO HIROYUKI
IPC分类号： G02B3/00 , C03C15/00 , C03C23/00
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a glass microlens array by which glass microlens arrays excellent in durability and light transmittance can be mass-produced at a low cost.
SOLUTION: The method for producing a glass microlens array includes a step of locally applying stress to a glass substrate so polished as not to leave a crushed layer by being irradiated with laser light, and a step of forming portions in which stress is locally present in a lens shape by subjecting the stress applied glass substrate to isotropic dry etching or isotropic wet etching.
COPYRIGHT: (C)2008,JPO&INPIT

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