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1. 发明专利

JP2005277408A Dielectric element, piezoelectric element, ink-jet head and ink-jet recording device, and method of manufacturing same 有权
标题翻译：电介质元件，压电元件，喷墨头和喷墨记录装置及其制造方法
公开(公告)号：JP2005277408A
公开(公告)日：2005-10-06
申请号：JP2005053955
申请日：2005-02-28
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： MATSUDA KATAYOSHI , FUKUI TETSURO , IFUKU TOSHIHIRO , WASA KIYOTAKA
IPC分类号： B41J2/045 , B41J2/01 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01G4/06 , H01G4/10 , H01G4/12 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316 , H01L41/39 , H02N2/00 , H01L41/24
CPC分类号： H01G4/1227 , B41J2/14233 , B41J2/161 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/14258 , H01G4/10 , H01L41/0973 , H01L41/1875 , H01L41/316 , H01L41/319
摘要： PROBLEM TO BE SOLVED: To provide dielectric substances and piezoelectric substances that have excellent characteristics and also can be formed to make thin films, and also provide a method of manufacturing those substances, and further to provide actuators of ink-jet head etc. using the piezoelectric elements. SOLUTION: The dielectric substances that can be utilized as piezoelectric substances or the like are formed to have a stacked structure of two dielectric layers having different relative dielectric constants. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供具有优异特性并且还可以形成薄膜的电介质和压电材料，并且还提供制造这些物质的方法，并且还提供喷墨头等的致动器使用压电元件。解决方案：可以用作压电材料等的电介质物质形成为具有不同相对介电常数的两个电介质层的堆叠结构。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2007116006A Piezoelectric material film, manufacturing method therefor, and liquid discharge head having the piezoelectric material film 有权
标题翻译：压电材料薄膜，其制造方法和具有压电材料薄膜的液体放电头
公开(公告)号：JP2007116006A
公开(公告)日：2007-05-10
申请号：JP2005307841
申请日：2005-10-21
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： AOKI KATSUMI , MATSUDA KATAYOSHI , FUKUI TETSURO , WASA KIYOTAKA
IPC分类号： H01L41/09 , B41J2/14 , B41J2/16 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316 , H02N2/00
摘要： PROBLEM TO BE SOLVED: To provide a thick piezoelectric material film which can apply preferably to an actuator element, especially to a piezoelectric material element of a liquid discharge head, and to provide a manufacturing method for the piezoelectric material film.
SOLUTION: When the piezoelectric material film is formed by vapor-phase film formation, the piezoelectric material film is formed on a board under a temperature higher than the Curie temperature of the component of the piezoelectric material film in a film formation process. This film formation process is divided into a plurality of film formation subprocesses, and a given time of a film formation stopping process is set between respective film formation subprocesses.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以优选应用于致动器元件的压电材料薄膜，特别是提供一种液体排出头的压电材料元件，并提供一种压电材料薄膜的制造方法。解决方案：当通过气相成膜形成压电材料膜时，在成膜过程中，在高于压电材料膜的组分的居里温度的温度下，在板上形成压电材料膜。该成膜工序分为多个成膜子工序，在各成膜次工序之间设定成膜停止处理的规定时间。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2006303519A Liquid injection recording head and its manufacturing method 审中-公开
标题翻译：液体注射记录头及其制造方法
公开(公告)号：JP2006303519A
公开(公告)日：2006-11-02
申请号：JP2006149765
申请日：2006-05-30
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： UNNO AKIRA , MATSUDA KATAYOSHI , FUKUI TETSURO , WASA KIYOTAKA
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/18 , H01L41/22 , H01L41/316
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of piezo-electric element which can realize a microfabrication generally used in a semiconductor process by making a piezo-electric film constituting the piezo-electric element or a vibration cone or the like thin in film thickness, and a manufacturing method of liquid injection recording head having a liquid discharge opening formed in long size and high density.
SOLUTION: The head comprises a liquid discharge opening 2 and pressure chamber 3, a piezo-electric film 9 containing Pb, Ti and Zr, and a piezo-electric vibrator 10 consisting of electrodes 7, 8 prepared in its both sides. The piezo-electric film 9 comprises a first layer 11 and a second layer 12 which are formed so that either of them may have a perovskite structure, and contact with each other. Furthermore, a single orientation crystal or single crystal PZT is formed by depositing in such a way that it is quickly cooled at a cooling speed of 30°C/min for a range from a depositing temperature to at least 450°C.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种压电元件的制造方法，其可以通过使构成压电元件的压电薄膜或振动锥等薄膜来实现通常用于半导体工艺的微细加工以及具有长尺寸和高密度形成的液体排出口的液体注射记录头的制造方法。解决方案：头包括液体排出口2和压力室3，包含Pb，Ti和Zr的压电膜9和由其两侧制备的电极7,8组成的压电振动器10。压电膜9包括第一层11和第二层12，第一层11和第二层12形成为使得它们中的任一个可以具有钙钛矿结构并且彼此接触。此外，通过以从沉积温度至至少450℃的范围以30℃/ min的冷却速度快速冷却的方式沉积形成单取向晶体或单晶PZT。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2005322941A Method of manufacturing piezoelectric element and method of manufacturing liquid injection recording head 有权
标题翻译：制造压电元件的方法和制造液体注射记录头的方法
公开(公告)号：JP2005322941A
公开(公告)日：2005-11-17
申请号：JP2005179774
申请日：2005-06-20
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： UNNO AKIRA , MATSUDA KATAYOSHI , FUKUI TETSURO , WASA KIYOTAKA
IPC分类号： B41J2/16 , B41J2/14 , B41J2/145 , C23C14/58 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/316 , H01L41/39 , H02N2/00 , H01L41/24
摘要： PROBLEM TO BE SOLVED: To implement the method of manufacturing a piezoelectric element which makes it possible to carry out microfabrication generally used in a semiconductor process by thinning a piezoelectric film, a vibration plate, or the like which constitute the piezoelectric element, and to implement the method of manufacturing a long liquid injection recording head having a highly densely-formed liquid discharge outlets.
SOLUTION: A liquid injection recording head comprises a liquid discharge outlets 2, a pressure chamber 3, and a piezoelectric vibration portion 10 comprising a piezoelectric film 9 containing Pb, Ti, and Zr and electrodes 7 and 8 provided on both sides of the piezoelectric film. The piezoelectric film 9 comprises first and second layers 11 and 12, each of which has a perovskite structure, and formed to be in contact with each other. The piezoelectric film is formed by quickly cooling the film at the cooling rate of 30°C/min or more to at least 450°C from temperature at the time of the film formation. Thus, single orientation crystal or single crystal PZT is formed.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题为了实现制造压电元件的方法，其可以通过使构成压电元件的压电薄膜，振动板等变薄来进行通常用于半导体工艺中的微细加工，并且实现制造具有高致密形成的液体排出口的长液体注射记录头的方法。解决方案：液体注射记录头包括液体排出口2，压力室3和压电振动部分10，压电振动部分10包括含有Pb，Ti和Zr的压电膜9和设置在两侧的电极7和8 压电薄膜。压电膜9包括第一层11和第二层12，每层具有钙钛矿结构，并形成为彼此接触。通过从成膜时的温度以30℃/分钟以上的冷却速度快速冷却至至少450℃来形成压电膜。因此，形成单取向晶体或单晶PZT。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2012147021A Piezoelectric film and liquid discharge head provided with the same 审中-公开
标题翻译：压电薄膜和液体放电头
公开(公告)号：JP2012147021A
公开(公告)日：2012-08-02
申请号：JP2012093323
申请日：2012-04-16
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： AOKI KATSUMI , MATSUDA KATAYOSHI , FUKUI TETSURO , WASA KIYOTAKA
IPC分类号： H01L41/18 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To provide a thick piezoelectric film suitably usable for an actuator element, particularly for a piezoelectric element of a liquid discharge head, and provide a liquid discharge head using the same.SOLUTION: The piezoelectric film has a structure having a plurality of layers. Each layer is either a single-orientation film or a single crystal film. The film thickness of one layer of the plurality of layers of the piezoelectric film is 0.5 μm or more and 2.0 μm or less.
摘要翻译：要解决的问题：提供适用于致动器元件的厚的压电膜，特别是用于液体排出头的压电元件，并提供使用该压电膜的液体排出头。解决方案：压电薄膜具有多层结构。每个层都是单取向膜或单晶膜。压电膜的多层的一层的膜厚为0.5μm以上且2.0μm以下。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2007276151A Inkjet printer head 审中-公开
标题翻译： INKJET打印机头
公开(公告)号：JP2007276151A
公开(公告)日：2007-10-25
申请号：JP2006101995
申请日：2006-04-03
申请人： Canon Inc , キヤノン株式会社
发明人： AOTO HIROSHI , IFUKU TOSHIHIRO , MATSUDA KATAYOSHI , TAKEDA KENICHI , FUKUI TETSURO
IPC分类号： B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide an inkjet printer head of high density nozzle arrangement in which the problems of decreasing in delivering efficiency, crosstalk and the like are improved, and to provide an inkjet head having no problem of durability such as occurrence of crack even when delivering is repeated.
SOLUTION: In the inkjet head having a plurality of compression chambers 3, nozzles 10 and a piezoelectric/electrostrictive actuator 7, a wall forming a vibration region 8 out of the walls of the compression chamber 3 is located on a first surface 9 side of a substrate forming the compression chamber, a groove 12 is formed in parallel with the longitudinal direction of the compression chamber 3 in the boundary region of the vibration region 8 of adjoining piezoelectric/electrostrictive actuators 7, and the angle made by a surface formed by the sidewall 13 of the groove 12 in the longitudinal direction and the first surface 9 side of a substrate forming the compression chamber is set in the range of 100-145°.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种高密度喷嘴布置的喷墨打印机头，其中改善了输送效率降低，串扰等问题，并且提供了一种没有出现耐久性等问题的喷墨头即使交货重复也是如此。解决方案：在具有多个压缩室3，喷嘴10和压电/电致伸缩致动器7的喷墨头中，在压缩室3的壁之外形成振动区域8的壁位于第一表面9 形成压缩室的基板的一侧，在相邻的压电/电致伸缩致动器7的振动区域8的边界区域中形成有与压缩室3的长度方向平行的槽12，并且由形成的表面形成的角度通过槽12的侧壁13沿长度方向和形成压缩室的基板的第一表面9侧设定在100-145°的范围内。版权所有（C）2008，JPO＆INPIT

7. 发明专利

JP2006205572A Manufacturing method for three-dimensional hollow structure, and manufacturing method for liquid ejection head 审中-公开
标题翻译：三维中空结构的制造方法和液体喷射头的制造方法
公开(公告)号：JP2006205572A
公开(公告)日：2006-08-10
申请号：JP2005021447
申请日：2005-01-28
申请人： Canon Inc , キヤノン株式会社
发明人： OGAWA KIYOAKI , FUKUI TETSURO , AOKI KATSUMI , KUROTOBI MAKOTO , KOMURO HIROKAZU
IPC分类号： B41J2/16 , B41J2/045 , B41J2/05 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a three-dimensional structure, which enables a shape of a hollow area to be arbitrarily designed. SOLUTION: This method for manufacturing the three-dimensional hollow structure comprises at least a step of partially forming a porous area in a silicon substrate, a step of forming a silicon layer on the substrate forming the porous area and of partially forming the porous area in the silicon layer, and a step of forming a hollow area by removing the porous area by etching. The method for manufacturing the three-dimensional hollow structure is used for the manufacture of the an ejection head of an inkjet recording apparatus with good positional accuracy, excellent in heat resistance and durability by virtue of the absence of a joint. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够任意设计中空区域的形状的三维结构的制造方法。解决方案：用于制造三维中空结构的方法至少包括在硅衬底中部分形成多孔区域的步骤，在形成多孔区域的衬底上形成硅层并部分地形成硅层中的多孔区域，以及通过蚀刻去除多孔区域而形成中空区域的步骤。用于制造三维中空结构的方法用于制造具有良好定位精度的喷墨记录装置的喷射头，由于不存在接头而具有优异的耐热性和耐久性。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2005353746A Actuator and ink jet head 审中-公开
标题翻译：执行器和墨水喷头
公开(公告)号：JP2005353746A
公开(公告)日：2005-12-22
申请号：JP2004171277
申请日：2004-06-09
申请人： Canon Inc , キヤノン株式会社
发明人： MATSUDA KATAYOSHI , AOKI KATSUMI , TAKEDA KENICHI , IFUKU TOSHIHIRO , FUKUI TETSURO
IPC分类号： B41J2/045 , B41J2/055 , H01L41/09 , H01L41/187 , H02N2/00
摘要： PROBLEM TO BE SOLVED: To use a piezoelectric strain film of high orientation crystal as the piezoelectric material of an actuator, and also to enhance close contact with a lower electrode.
SOLUTION: The actuator is provided, on a substrate, with the piezoelectric material and a pair of electrodes which are arranged to hold the piezoelectric material. In this actuator, a lead alloy region is provided to at least the piezoelectric material side of at least one electrode among a pair of electrodes and to at least one electrode side of the piezoelectric material.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：使用高取向晶体的压电应变膜作为致动器的压电材料，并且还增强与下电极的紧密接触。解决方案：致动器在基板上设置有压电材料和一对电极，其被布置成保持压电材料。在该致动器中，至少在一对电极中的至少一个电极的压电材料侧和压电材料的至少一个电极侧上设置铅合金区域。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2005247926A Resin additive and resin composition 审中-公开
标题翻译：树脂添加剂和树脂组合物
公开(公告)号：JP2005247926A
公开(公告)日：2005-09-15
申请号：JP2004057632
申请日：2004-03-02
申请人： Canon Inc , キヤノン株式会社
发明人： TOSHIDA YOSHI , FUKUI TETSURO , SATO MASAHIRO , KANBARA HAJIME
IPC分类号： C07D303/24 , C07D263/14 , C08K5/09 , C08K5/353 , C08L67/00 , C08L69/00 , C08L101/00
摘要： PROBLEM TO BE SOLVED: To provide a resin additive capable of inhibiting a resin from undergoing a change in properties when recycled.
SOLUTION: The resin additive contains a compound having a structure represented by formula (A) or (B). In formula (A), r1 to r4 are each independently a hydrogen atom, an alkyl group, or a halogen atom; r5 to r8 are each independently a hydrogen atom, an alkyl group, a halogen atom, an alkoxyl group, or a group of atoms necessary to form, together with two adjacent carbon atoms constituting part of the benzene ring, a ring structure from a combination of rn and rn+1 bonded to the two respective carbon atoms (provided that n=5, 6, or 7); r
9 to r
12 are each independently a hydrogen atom, an alkyl group, or a halogen atom; and R is an aryl group, an acyl group, or an arylcarbonyl group. In formula (B), R
1 is a linear or branched alkyl group, r
13 to r
16 are each a hydrogen atom, an alkyl group, or a halogen atom.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：待解决的问题：提供能够抑制树脂在再循环时经历特性变化的树脂添加剂。解决方案：树脂添加剂含有具有由式（A）或（B）表示的结构的化合物。在式（A）中，r1至r4各自独立地为氢原子，烷基或卤素原子; r5至r8各自独立地为与组成苯环的一部分的两个相邻碳原子一起形成与组合的环结构所必需的氢原子，烷基，卤素原子，烷氧基或原子团的rn和rn + 1与两个相应的碳原子键合（条件是n = 5,6或7）; r 9 至r SB 12各自独立地为氢原子，烷基或卤素原子; 并且R是芳基，酰基或芳基羰基。在式（B）中，R SB 1是直链或支链烷基，R 16和R 16各自为氢原子，烷基基团或卤原子。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2005186528A Liquid ejection head and manufacturing method therefor 审中-公开
标题翻译：液体喷射头及其制造方法
公开(公告)号：JP2005186528A
公开(公告)日：2005-07-14
申请号：JP2003432987
申请日：2003-12-26
申请人： Canon Inc , キヤノン株式会社
发明人： AOKI KATSUMI , FUKUI TETSURO , TAKEDA KENICHI , IFUKU TOSHIHIRO , MATSUDA KATAYOSHI
IPC分类号： B41J2/16
摘要： PROBLEM TO BE SOLVED: To improve the durability, liquid resistance, etc. of a liquid ejection head.
SOLUTION: A heating resistor 12, serving as an ejection energy generating means, and an insulation layer 11a are provided on an element substrate 11 of the liquid ejection head. A liquid-pressurizing-chamber structural member 13, wherein a liquid pressurizing chamber 14, serving as a liquid channel, and an ejection port 16 are formed on the insulation layer 11a, is obtained by heating a coated layer, using a molding material of a metallic oxide uncontaining organic matter, at room temperatures or 500°C or lower, so as to cure the coated layer. Since the metallic oxide has proper close adhesion to a silicon substrate etc. and does not contain the organic matter, it has excellent durability. Additionally, since the kind of a liquid such as ink is not limited, an applicable scope of the liquid ejection head can be expanded.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提高液体喷射头的耐久性，耐液体性等。解决方案：作为喷射能量产生装置的加热电阻器12和绝缘层11a设置在液体喷射头的元件基板11上。通过对涂布层进行加热，使用成膜材料，在绝缘层11a上形成作为液体通道的液体加压室14和喷出口16的液体加压室结构部件13。金属氧化物不含有机物质，室温或500℃以下，以固化涂层。由于金属氧化物与硅衬底等具有适当的密合性，并且不含有机物质，所以具有优异的耐久性。此外，由于液体如油墨的种类没有限制，可以扩大液体喷射头的适用范围。版权所有（C）2005，JPO＆NCIPI

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