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1. 发明专利

JP2005277408A Dielectric element, piezoelectric element, ink-jet head and ink-jet recording device, and method of manufacturing same 有权
标题翻译：电介质元件，压电元件，喷墨头和喷墨记录装置及其制造方法
公开(公告)号：JP2005277408A
公开(公告)日：2005-10-06
申请号：JP2005053955
申请日：2005-02-28
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： MATSUDA KATAYOSHI , FUKUI TETSURO , IFUKU TOSHIHIRO , WASA KIYOTAKA
IPC分类号： B41J2/045 , B41J2/01 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01G4/06 , H01G4/10 , H01G4/12 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316 , H01L41/39 , H02N2/00 , H01L41/24
CPC分类号： H01G4/1227 , B41J2/14233 , B41J2/161 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/14258 , H01G4/10 , H01L41/0973 , H01L41/1875 , H01L41/316 , H01L41/319
摘要： PROBLEM TO BE SOLVED: To provide dielectric substances and piezoelectric substances that have excellent characteristics and also can be formed to make thin films, and also provide a method of manufacturing those substances, and further to provide actuators of ink-jet head etc. using the piezoelectric elements. SOLUTION: The dielectric substances that can be utilized as piezoelectric substances or the like are formed to have a stacked structure of two dielectric layers having different relative dielectric constants. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供具有优异特性并且还可以形成薄膜的电介质和压电材料，并且还提供制造这些物质的方法，并且还提供喷墨头等的致动器使用压电元件。解决方案：可以用作压电材料等的电介质物质形成为具有不同相对介电常数的两个电介质层的堆叠结构。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2006303519A Liquid injection recording head and its manufacturing method 审中-公开
标题翻译：液体注射记录头及其制造方法
公开(公告)号：JP2006303519A
公开(公告)日：2006-11-02
申请号：JP2006149765
申请日：2006-05-30
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： UNNO AKIRA , MATSUDA KATAYOSHI , FUKUI TETSURO , WASA KIYOTAKA
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/18 , H01L41/22 , H01L41/316
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of piezo-electric element which can realize a microfabrication generally used in a semiconductor process by making a piezo-electric film constituting the piezo-electric element or a vibration cone or the like thin in film thickness, and a manufacturing method of liquid injection recording head having a liquid discharge opening formed in long size and high density.
SOLUTION: The head comprises a liquid discharge opening 2 and pressure chamber 3, a piezo-electric film 9 containing Pb, Ti and Zr, and a piezo-electric vibrator 10 consisting of electrodes 7, 8 prepared in its both sides. The piezo-electric film 9 comprises a first layer 11 and a second layer 12 which are formed so that either of them may have a perovskite structure, and contact with each other. Furthermore, a single orientation crystal or single crystal PZT is formed by depositing in such a way that it is quickly cooled at a cooling speed of 30°C/min for a range from a depositing temperature to at least 450°C.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种压电元件的制造方法，其可以通过使构成压电元件的压电薄膜或振动锥等薄膜来实现通常用于半导体工艺的微细加工以及具有长尺寸和高密度形成的液体排出口的液体注射记录头的制造方法。解决方案：头包括液体排出口2和压力室3，包含Pb，Ti和Zr的压电膜9和由其两侧制备的电极7,8组成的压电振动器10。压电膜9包括第一层11和第二层12，第一层11和第二层12形成为使得它们中的任一个可以具有钙钛矿结构并且彼此接触。此外，通过以从沉积温度至至少450℃的范围以30℃/ min的冷却速度快速冷却的方式沉积形成单取向晶体或单晶PZT。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2005322941A Method of manufacturing piezoelectric element and method of manufacturing liquid injection recording head 有权
标题翻译：制造压电元件的方法和制造液体注射记录头的方法
公开(公告)号：JP2005322941A
公开(公告)日：2005-11-17
申请号：JP2005179774
申请日：2005-06-20
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： UNNO AKIRA , MATSUDA KATAYOSHI , FUKUI TETSURO , WASA KIYOTAKA
IPC分类号： B41J2/16 , B41J2/14 , B41J2/145 , C23C14/58 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/316 , H01L41/39 , H02N2/00 , H01L41/24
摘要： PROBLEM TO BE SOLVED: To implement the method of manufacturing a piezoelectric element which makes it possible to carry out microfabrication generally used in a semiconductor process by thinning a piezoelectric film, a vibration plate, or the like which constitute the piezoelectric element, and to implement the method of manufacturing a long liquid injection recording head having a highly densely-formed liquid discharge outlets.
SOLUTION: A liquid injection recording head comprises a liquid discharge outlets 2, a pressure chamber 3, and a piezoelectric vibration portion 10 comprising a piezoelectric film 9 containing Pb, Ti, and Zr and electrodes 7 and 8 provided on both sides of the piezoelectric film. The piezoelectric film 9 comprises first and second layers 11 and 12, each of which has a perovskite structure, and formed to be in contact with each other. The piezoelectric film is formed by quickly cooling the film at the cooling rate of 30°C/min or more to at least 450°C from temperature at the time of the film formation. Thus, single orientation crystal or single crystal PZT is formed.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题为了实现制造压电元件的方法，其可以通过使构成压电元件的压电薄膜，振动板等变薄来进行通常用于半导体工艺中的微细加工，并且实现制造具有高致密形成的液体排出口的长液体注射记录头的方法。解决方案：液体注射记录头包括液体排出口2，压力室3和压电振动部分10，压电振动部分10包括含有Pb，Ti和Zr的压电膜9和设置在两侧的电极7和8 压电薄膜。压电膜9包括第一层11和第二层12，每层具有钙钛矿结构，并形成为彼此接触。通过从成膜时的温度以30℃/分钟以上的冷却速度快速冷却至至少450℃来形成压电膜。因此，形成单取向晶体或单晶PZT。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP3833070B2 The liquid jet head and a method of manufacturing 有权
标题翻译：空值
公开(公告)号：JP3833070B2
公开(公告)日：2006-10-11
申请号：JP2001033823
申请日：2001-02-09
申请人：キヤノン株式会社 , 清孝和佐
发明人：清孝和佐 , 堅義松田 , 章海野 , 哲朗福井 , 隆夫米原
IPC分类号： B41J2/045 , H01L41/09 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01L41/08 , H01L41/18 , H01L41/22 , H01L41/29 , H01L41/319 , H02N2/00
CPC分类号： B41J2/1628 , B41J2/161 , B41J2/1629 , B41J2/1632 , B41J2/1646 , H01L41/0815 , H01L41/0973 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49401
摘要： A piezoelectric structure includes a vibrational plate; a piezoelectric film; the vibrational plate including a layer of a monocrystal material, a polycrystal material, a monocrystal material doped with an element which is different from an element constituting the monocrystal material, or a polycrystal material doped with an element which is different from an element constituting the polycrystal materials, and oxide layers sandwiching the aforementioned layer, the piezoelectric film has a single orientation crystal or monocrystal structure.
摘要翻译：压电结构包括振动板; 压电薄膜; 振动板包括单晶材料层，多晶材料，掺杂有与构成单晶材料的元素不同的元素的单晶材料，或掺杂有与构成多晶体的元素不同的元素的多晶材料材料和夹着上述层的氧化物层，压电膜具有单取向晶体或单晶结构。

5. 发明专利

JP3796394B2 Manufacturing method and a method of manufacturing a liquid jet recording head of the piezoelectric element 有权
公开(公告)号：JP3796394B2
公开(公告)日：2006-07-12
申请号：JP2000185795
申请日：2000-06-21
申请人：キヤノン株式会社 , 清孝和佐
发明人：清孝和佐 , 堅義松田 , 章海野 , 哲朗福井
IPC分类号： B41J2/045 , H01L41/09 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , C04B35/49 , C04B35/491 , C23C14/06 , H01L41/08 , H01L41/18 , H01L41/22 , H01L41/316 , H01L41/332 , H01L41/39
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1646 , B41J2002/14258 , H01L41/0805 , H01L41/1876 , H01L41/316 , Y10T29/42 , Y10T29/49155
摘要： A piezoelectric element structure comprises a supporting substrate, and a piezoelectric film supported on the supporting substrate, in which the piezoelectric film contains a first layer, and a second layer having zirconium, each provided with perovskite structure, and formed to be in contact with each other or laminated through an intermediate layer, and the temperature is set at 500 DEG C or more at the time of thin film formation so as to provide the piezoelectric film, and a quick cooling is given from the thin film formation temperature at least to 450 DEG C with a cooling speed of 30 DEG C/min or more for the formation thereof. The piezoelectric film thus formed is in a small thickness as compared with the conventional piezoelectric film, but presents a large piezoelectric constant, hence making it possible to perform efficient microprocessing thereof reliably.

6. 发明专利

JP2012147021A Piezoelectric film and liquid discharge head provided with the same 审中-公开
标题翻译：压电薄膜和液体放电头
公开(公告)号：JP2012147021A
公开(公告)日：2012-08-02
申请号：JP2012093323
申请日：2012-04-16
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： AOKI KATSUMI , MATSUDA KATAYOSHI , FUKUI TETSURO , WASA KIYOTAKA
IPC分类号： H01L41/18 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To provide a thick piezoelectric film suitably usable for an actuator element, particularly for a piezoelectric element of a liquid discharge head, and provide a liquid discharge head using the same.SOLUTION: The piezoelectric film has a structure having a plurality of layers. Each layer is either a single-orientation film or a single crystal film. The film thickness of one layer of the plurality of layers of the piezoelectric film is 0.5 μm or more and 2.0 μm or less.
摘要翻译：要解决的问题：提供适用于致动器元件的厚的压电膜，特别是用于液体排出头的压电元件，并提供使用该压电膜的液体排出头。解决方案：压电薄膜具有多层结构。每个层都是单取向膜或单晶膜。压电膜的多层的一层的膜厚为0.5μm以上且2.0μm以下。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP4293312B2 Dielectric element, a piezoelectric element, the ink-jet head and an ink jet recording apparatus, as well as methods for their production 有权
标题翻译：空值
公开(公告)号：JP4293312B2
公开(公告)日：2009-07-08
申请号：JP2005053955
申请日：2005-02-28
申请人：キヤノン株式会社 , 清孝和佐
发明人：俊博伊福 , 清孝和佐 , 堅義松田 , 哲朗福井
IPC分类号： B41J2/045 , H01L41/09 , B41J2/01 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01G4/06 , H01G4/10 , H01G4/12 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316 , H01L41/39 , H02N2/00
CPC分类号： H01G4/1227 , B41J2/14233 , B41J2/161 , B41J2/1634 , B41J2/1642 , B41J2/1646 , B41J2002/14258 , H01G4/10 , H01L41/0973 , H01L41/1875 , H01L41/316 , H01L41/319
摘要： A dielectric element includes a lower electrode layer provided on a substrate, a dielectric layer provided on the lower electrode layer and an upper electrode layer provided on the dielectric layer. The dielectric layer has a first dielectric layer provided on a side of the lower electrode layer, and a second dielectric layer provided on a side of the upper electrode layer. The second dielectric layer is a layer comprised mainly of an oxide including four or more kinds of metal element components, and the first dielectric layer does not substantially include at least one component selected from metal elements included in the oxide layer of the second dielectric layer and is comprised mainly of an oxide including at least three components selected from the remaining metal elements without substantially including Ti and Zr elements.
摘要翻译：电介质元件包括设置在基板上的下电极层，设置在下电极层上的电介质层和设置在电介质层上的上电极层。电介质层具有设置在下电极层一侧的第一电介质层和设置在上电极层一侧的第二电介质层。第二电介质层是主要由包括四种或更多种金属元素组分的氧化物组成的层，并且第一介电层基本上不包括选自包含在第二介电层的氧化物层中的金属元素中的至少一种成分，主要由包括至少三种选自剩余金属元素的组分的氧化物组成，而基本不包括Ti和Zr元素。

8. 发明专利

JP2007112069A Liquid discharge head 审中-公开
标题翻译：液体放电头
公开(公告)号：JP2007112069A
公开(公告)日：2007-05-10
申请号：JP2005307821
申请日：2005-10-21
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： AOKI KATSUMI , MATSUDA KATAYOSHI , WASA KIYOTAKA
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/319
摘要： PROBLEM TO BE SOLVED: To provide an oriented piezoelectric layer with a simpler configuration having piezoelectric properties optimum as a liquid discharge head using a direct deposition method, and a liquid discharge head having a layer structure of a piezoelectric actuator capable of utilizing to the maximum the electric field applied to the oriented piezoelectric layer even when using a transfer method and exhibiting a superior piezoelectric performance.
SOLUTION: The liquid discharge head uses a piezoelectric element in which at least one of two electrode layers is of single orientation and the piezoelectric layer formed on the electrode layer is also of single orientation, or a piezoelectric element in which the electrode layer is of single orientation or the piezoelectric layer is formed on a single crystal/YSZ single crystal/Si as single orientation or a single crystal, as a piezoelectric element having a diaphragm 101 provided to the liquid discharge head and the piezoelectric layer 103 held between the two electrode layers 102, 104.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：提供一种具有简单构造的取向压电层，其具有使用直接沉积方法作为液体排出头最佳的压电特性，以及具有压电致动器的层结构的液体排出头，该压电致动器能够利用即使使用转印方法并表现出优异的压电性能，施加到取向压电层的电场也是最大的。解决方案：液体排出头使用其中两个电极层中的至少一个具有单一取向并且形成在电极层上的压电层也是单一取向的压电元件，或者其中电极层单向取向的单晶或YSZ单晶/ Si单晶或单晶形成压电层，作为设置在液体排出头上的隔膜101的压电元件和保持在两个电极层102,104。（C）2007，JPO＆INPIT

9. 发明专利

JP2005244133A Dielectric element, piezoelectric element, inkjet head, inkjet recording apparatus, and method of manufacturing the same 审中-公开
标题翻译：电介质元件，压电元件，喷墨头，喷墨记录装置及其制造方法
公开(公告)号：JP2005244133A
公开(公告)日：2005-09-08
申请号：JP2004055549
申请日：2004-02-27
申请人： Canon Inc , Kiyotaka Wasa , キヤノン株式会社 , 清孝和佐
发明人： IFUKU TOSHIHIRO , MATSUDA KATAYOSHI , AOKI KATSUMI , TAKEDA KENICHI , WASA KIYOTAKA
IPC分类号： B41J2/045 , B41J2/01 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01G4/12 , H01G4/33 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316 , H02N2/00
CPC分类号： B41J2/14233 , B41J2202/03 , H01L41/1875 , H01L41/316 , H01L41/319
摘要： PROBLEM TO BE SOLVED: To provide a dielectric member and a piezoelectric member whose characteristics are satisfactory and which can be a thin film, and a method of manufacturing the same, and furthermore, to provide an actuator such as an inkjet head or the like using the piezoelectric element.
SOLUTION: A dielectric member that can be utilized as a piezoelectric member is so formed as to possess a laminated structure composed of two kinds of dielectric layers having different dielectric constants.
COPYRIGHT: (C)2005,JPO&NCIPI

10. 发明专利

JP5010132B2 The piezoelectric film and a method of manufacturing the same 有权
标题翻译：空值
公开(公告)号：JP5010132B2
公开(公告)日：2012-08-29
申请号：JP2005307841
申请日：2005-10-21
申请人：キヤノン株式会社 , 清孝和佐
发明人：清孝和佐 , 堅義松田 , 哲朗福井 , 活水青木
IPC分类号： H01L41/09 , B41J2/14 , B41J2/16 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316 , H02N2/00
摘要： PROBLEM TO BE SOLVED: To provide a thick piezoelectric material film which can apply preferably to an actuator element, especially to a piezoelectric material element of a liquid discharge head, and to provide a manufacturing method for the piezoelectric material film. SOLUTION: When the piezoelectric material film is formed by vapor-phase film formation, the piezoelectric material film is formed on a board under a temperature higher than the Curie temperature of the component of the piezoelectric material film in a film formation process. This film formation process is divided into a plurality of film formation subprocesses, and a given time of a film formation stopping process is set between respective film formation subprocesses. COPYRIGHT: (C)2007,JPO&INPIT

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