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    • 6. 发明专利
    • Ultra-violet light transmissive fluorine-containing polymer and pellicle made of same polymer
    • 超紫外光透射含氟聚合物和相同聚合物的胶体
    • JP2004102269A
    • 2004-04-02
    • JP2003296230
    • 2003-08-20
    • Asahi Glass Co Ltd旭硝子株式会社
    • MATSUKURA IKUOOKAMOTO SHUICHIOHARU KAZUYAMUROTANI EISUKE
    • C08F34/02G03F1/62G03F1/14
    • PROBLEM TO BE SOLVED: To provide a pellicle which has superior transmissivity and durability to light of short wavelength and is usable even for photolithography using a KrF excimer laser etc. SOLUTION: A pellicle film is bonded to a frame with an adhesive. The pellicle is a pellicle for exposure processing using light of ≤200 nm in wavelength and the pellicle film and/or adhesive is made of a polymer containing repetitive units represented by a formula (1). In the formula (1), Q is a 1-3C polyfluoroalkylene group in straight chain structure etc., or a group having one or more atoms, selected from hydrogen atoms and fluorine atoms in the polyfluoroalkylene group, substituted for by a polyfluoroalkyl group which many contain ethereal oxygen atoms, and X is a hydrogen atom, a fluorine atoms or a 1-3C polyfluoroalkyl group which may contain ethereal oxygen atoms. COPYRIGHT: (C)2004,JPO
    • 解决方案:提供对短波长的光具有优异的透射率和耐久性的防护薄膜组件,并且即使对于使用KrF准分子激光器等的光刻也可以使用。解决方案:将防护薄膜贴合到框架上, 粘合剂。 防护薄膜组件是使用波长≤200nm的光进行曝光处理的防护薄膜组件,防护薄膜和/或粘合剂由含有由式(1)表示的重复单元的聚合物制成。 在式(1)中,Q是直链结构等中的1-3C多氟亚烷基,或具有选自多氟亚烷基中的氢原子和氟原子的一个或多个原子的基团,被多氟烷基取代, 许多含有醚原子,X是氢原子,氟原子或可含有醚性氧原子的1-3C多氟烷基。 版权所有(C)2004,JPO
    • 10. 发明专利
    • Coating liquid and method for forming coated film
    • 涂料液和形成涂膜的方法
    • JP2009091373A
    • 2009-04-30
    • JP2006017154
    • 2006-01-26
    • Asahi Glass Co Ltd旭硝子株式会社
    • KITAMURA TATEOTSUZAKI MASAAKIOKAMOTO SHUICHINAGASE MICHIOMI
    • C09D201/00B05D7/24C08J7/04C09D5/00C09D7/12C09D127/12C09D133/00C09D169/00
    • C08J7/04B05D7/02C08J7/047C08J2333/00C08J2369/00C08J2423/00C09D127/12C09D133/16
    • PROBLEM TO BE SOLVED: To provide a coating liquid hardly causing adverse effects on the global environment, causing little effects on a synthetic resin base material, having various kinds of film-forming components homogeneously dissolved or dispersed therein, and having excellent spreadability on the surface of the base material and excellent drying property, and to provide a method for forming a coated film by which the coated film having little unevenness can be formed in a short time without causing bad effects on the global environment and the synthetic resin base material. SOLUTION: The coating liquid comprises tridecafluorooctane or a solvent composition comprising ≥60 mass% of tridecafluorooctane and other organic solvents, and the coated film-forming components. The method for forming the coated film on the base material comprises coating the coating liquid on the base material, followed by evaporating the solvents. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了提供对全球环境几乎不产生不利影响的涂布液,对各种成膜组分均匀地溶解或分散在其中并且具有优异的铺展性的合成树脂基材几乎没有影响 在基材表面上具有良好的干燥性能,并且提供了一种形成涂膜的方法,通过该方法可以在短时间内形成具有很小不均匀性的涂膜,而不会对全局环境和合成树脂基体造成不良影响 材料。 溶液:涂布液包含十三氟辛烷或包含≥60质量%的十三氟辛烷和其它有机溶剂的溶剂组合物和涂布的成膜组分。 在基材上形成涂膜的方法包括将涂布液涂覆在基材上,然后蒸发溶剂。 版权所有(C)2009,JPO&INPIT