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1. 发明专利

JP2013234938A Magnetic sensor 有权
标题翻译：磁传感器
公开(公告)号：JP2013234938A
公开(公告)日：2013-11-21
申请号：JP2012108193
申请日：2012-05-10
申请人： Alps Electric Co Ltd , アルプス電気株式会社
发明人： KOIKE FUMITO , SASAKI SHINICHI , ENDO KAZUICHI , ASAZUMA KOTA
IPC分类号： G01D5/16 , G01R33/09 , H01L43/08
摘要： PROBLEM TO BE SOLVED: To provide a magnetic sensor requiring only the pattern of one type conductor part for a plurality of meander-shaped elements having different extending directions of extension parts.SOLUTION: A first element 11 is a meander-shaped element formed by connecting a plurality of first extension parts 11a extended in a Y direction and arranged at an interval in a X direction. A second element 12 is a meander-shaped element formed by connecting a plurality of second extension parts 12a extended in the X direction and arranged at an interval in the Y direction. At least one of the first element 11 and the second element 12 is a magnetoresistive effect element exhibiting a magnetoresistive effect. A conductor part 14 is connected between the first extension parts 11a or between the second extension parts 12a, which are faced at the interval. The conductor part 14 is a square having a first side 14a extended in the X direction and a second side 14b extended in the Y direction. A length L1 of the first side is larger than an interval T1, and a length L2 of the second side is larger than an interval T2.
摘要翻译：要解决的问题：提供一种只需要一种类型导体部分的图案的磁传感器，用于具有不同延伸方向延伸方向的多个曲折元件。解决方案：第一元件11是通过连接形成的曲折形元件多个沿Y方向延伸并以X方向间隔排列的第一延伸部分11a。第二元件12是通过连接沿X方向延伸的多个第二延伸部12a并以Y方向间隔设置而形成的曲折形元件。第一元件11和第二元件12中的至少一个是具有磁阻效应的磁阻效应元件。导体部分14连接在第一延伸部分11a之间或第二延伸部分12a之间，其间隔开。导体部分14是具有在X方向上延伸的第一侧面14a和在Y方向上延伸的第二侧面14b的正方形。第一侧的长度L1大于间隔T1，第二侧的长度L2大于间隔T2。

2. 发明专利

JP2013016609A Magnetic detection element, magnetic sensor using magnetic detection element, and manufacturing method of magnetic detection element 审中-公开
标题翻译：磁性检测元件，使用磁性检测元件的磁性传感器和磁性检测元件的制造方法
公开(公告)号：JP2013016609A
公开(公告)日：2013-01-24
申请号：JP2011147941
申请日：2011-07-04
申请人： Alps Electric Co Ltd , アルプス電気株式会社
发明人： KOIKE FUMITO , ASAZUMA KOTA , OMINATO KAZUYA
IPC分类号： H01L43/08 , G01R33/09 , H01L43/12
CPC分类号： G01R33/093
摘要： PROBLEM TO BE SOLVED: To provide a magnetic detection element which optimizes the thickness of a Ta protection layer and obtains stable and excellent soft magnetic characteristics compared to conventional magnetic detection elements, in particular, in a structure where a self-pinning type fixation magnetic layer is formed, and to provide a magnetic sensor using the magnetic detection element and a manufacturing method of the magnetic detection element.SOLUTION: A magnetic detection element 1 according to one embodiment includes a lamination film formed by laminating a free magnetic layer 5 on a fixation magnetic layer 3 through a nonmagnetic material layer 4. The fixation magnetic layer 3 is a self pinning type where a second magnetic layer 3c is laminated on a first magnetic layer 3a through a non magnetic intermediate layer 3b and the first magnetic layer 3a and the second magnetic layer 3c are magnetized and fixed in a non parallel manner. A top layer of the lamination layer is a protection layer 6 formed by Ta and the thickness of the protection layer 6 at the time of the deposition is 55Å or thicker.
摘要翻译：要解决的问题：提供一种优选Ta保护层的厚度的磁性检测元件，并且与常规的磁性检测元件相比获得稳定和优异的软磁特性，特别是在自固定型形成固定磁性层，并提供使用磁检测元件的磁传感器和磁检测元件的制造方法。解决方案：根据一个实施例的磁检测元件1包括通过非磁性材料层4将自由磁性层5层叠在固定磁性层3上而形成的层压膜。固定磁性层3是自锁型，第二磁性层3c通过非磁性中间层3b层叠在第一磁性层3a上，并且第一磁性层3a和第二磁性层3c以不平行的方式被磁化和固定。层叠层的顶层是由Ta形成的保护层6，并且在沉积时保护层6的厚度为55或更厚。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2012119613A Magnetic detection element and magnetic sensor using the same 审中-公开
标题翻译：使用磁性检测元件和磁传感器
公开(公告)号：JP2012119613A
公开(公告)日：2012-06-21
申请号：JP2010270304
申请日：2010-12-03
申请人： Alps Electric Co Ltd , アルプス電気株式会社
发明人： KOIKE FUMITO , ASAZUMA KOTA , SAITO MASAJI
IPC分类号： H01L43/10 , G01R33/09 , H01L43/08
摘要： PROBLEM TO BE SOLVED: To provide a self pinning type magnetic detection element which is formed by making a film thickness of a first magnetic layer in especially an SFP structure appropriate from the viewpoint of heat resistance and ΔMR, and to provide a magnetic sensor using the same.SOLUTION: The magnetic detection element comprises a laminate structure in which a fixed magnetic layer and a free magnetic layer are laminated through a non-magnetic material layer. The fixed magnetic layer 3 is formed of a first magnetic layer 3a and a second magnetic layer 3c laminated through a non-magnetic intermediate layer 3b, and is a self pinning type which is magnetized and fixed in anti-parallel. The first magnetic layer 3a is formed of FeCo(where x is 55 at% or more but 65 at% or less) of a material having higher coercive force than that in the second magnetic layer. The film thickness t1 of the first magnetic layer 3a is in a range of 14 Å or more but 20.5 Å or less, and is thinner than the second magnetic layer, and the difference between the amount of magnetization of the first magnetic layer 3a and that of the second magnetic layer 3c is substantially zero.
摘要翻译：要解决的问题：提供一种通过使特别是SFP结构的第一磁性层的膜厚适当地从耐热性和ΔMR的角度形成的自锁定型磁性检测元件，并提供磁性传感器使用相同。解决方案：磁性检测元件包括通过非磁性材料层层压固定磁性层和自由磁性层的层叠结构。固定磁性层3由通过非磁性中间层3b层压的第一磁性层3a和第二磁性层3c形成，并且是自我固定型，其被磁化并且反平行固定。第一磁性层3a由以下组成：其中，x为55at％以上，65aty为100以上的x ％以下）具有比第二磁性层中的矫顽力更高的矫顽力的材料。第一磁性层3a的膜厚t1在14以上且20.5以下的范围内，比第二磁性层薄，第一磁性层3a的磁化强度与第一磁性层3a的磁化强度之差的第二磁性层3c基本上为零。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2006032522A Exchange coupling film and magnetic detecting device using the same 审中-公开
标题翻译：交换耦合膜和使用其的磁性检测装置
公开(公告)号：JP2006032522A
公开(公告)日：2006-02-02
申请号：JP2004206889
申请日：2004-07-14
申请人： Alps Electric Co Ltd , アルプス電気株式会社
发明人： KIYONO TAKUYA , KOIKE FUMITO , HASEGAWA NAOYA
IPC分类号： H01L43/08 , G01R33/09 , G11B5/39 , H01F10/16 , H01F10/32
CPC分类号： B82Y25/00 , G01R33/093 , G11B5/3903 , H01F10/3263 , H01F10/3272 , H01L43/08
摘要： PROBLEM TO BE SOLVED: To provide an exchange coupling film which can reduce the frequency of magnetization inversion of a fixed magnetic layer by increasing the exchange coupling magnetic field of the exchange coupling film, wherein an anti-ferromagnetic layer made of IrMn and a fixed magnetic layer (ferromagnetic layer) made of CoFe are stacked, and to provide a magnetic detecting device using the exchange coupling film.
SOLUTION: A CoFe alloy forming a first magnetic layer 13 has a composition of Fe of 30 at% or more. Thus, the exchange coupling magnetic field can be increased between an anti-ferromagnetic layer 4 and a first magnetic layer 13. When the content of Fe is too much, the exchange coupling magnetic field decreases. Therefore, the atomic percent of Fe in the CoFe alloy is set to 90 at% or less.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种交换耦合膜，其可以通过增加交换耦合膜的交换耦合磁场来降低固定磁性层的磁化反转频率，其中由IrMn制成的反铁磁层和堆叠由CoFe制成的固定磁性层（铁磁性层），并提供使用该交换耦合膜的磁性检测装置。解决方案：形成第一磁性层13的CoFe合金的Fe的组成为30原子％以上。因此，可以在反铁磁层4和第一磁性层13之间增加交换耦合磁场。当Fe的含量太多时，交换耦合磁场减小。因此，CoFe合金中的Fe的原子百分比为90at％以下。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2003298139A Magnetic detecting element 审中-公开
标题翻译：磁性检测元件
公开(公告)号：JP2003298139A
公开(公告)日：2003-10-17
申请号：JP2002094031
申请日：2002-03-29
申请人： Alps Electric Co Ltd , アルプス電気株式会社
发明人： HASEGAWA NAOYA , KOIKE FUMITO , UMETSU EIJI , ISHIZONE MASAHIKO
IPC分类号： G01R33/09 , G11B5/39 , H01F10/13 , H01F10/16 , H01L43/08
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3903 , G11B5/3909
摘要： PROBLEM TO BE SOLVED: To provide a magnetic detecting element the free magnetic layer of which can be controlled appropriately for magnetization even when a track is narrowed and which is excellent in reproducing characteristics, and to provide a method of manufacturing the element. SOLUTION: Since a layer composed of a magnetic material having a small exchange stiffness energy, such as an Ni a Fe b layer (wherein, a and b are at.%, a >80 at.% and a+b=100 at.%), NiFeX (wherein, X denotes one, two, or more kinds of elements selected from among Mn, Cu, Zn, Ti, Al, Ge, Si, Cr, V, Sn, Ir, Ru, Nb, Sb, W, Mo, Os, and Ta), etc., is used as the magnetic material layer 30 of the free magnetic layer 28, the direction of magnetization at the central part of the free magnetic layer 28 can be changed easily and, accordingly, the magnetic field detection output of this magnetic detecting element can be improved. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：为了提供一种磁性检测元件，其自由磁性层可以适当地控制磁化，即使当轨道变窄并且再现特性优异，并且提供一种制造该元件的方法。解决方案：由于由具有小的交换刚度能量的磁性材料构成的层，例如Ni a Fe b 层（其中a和b在％，a> 80原子％，a + b = 100原子％），NiFeX（其中，X表示选自Mn，Cu，Zn，Ti，Al，Ge中的1种，2种以上的元素， Si，Cr，V，Sn，Ir，Ru，Nb，Sb，W，Mo，Os和Ta）等用作自由磁性层28的磁性材料层30，可以容易地改变自由磁性层28的中心部分，从而可以提高该磁性检测元件的磁场检测输出。版权所有（C）2004，JPO

6. 发明专利

JP2005203572A Magnetic detection element 有权
标题翻译：磁性检测元件
公开(公告)号：JP2005203572A
公开(公告)日：2005-07-28
申请号：JP2004008492
申请日：2004-01-15
申请人： Alps Electric Co Ltd , アルプス電気株式会社
发明人： IGARASHI KAZUSATO , HASEGAWA NAOYA , KOIKE FUMITO , UMETSU EIJI
IPC分类号： G01R33/09 , G11B5/127 , G11B5/33 , G11B5/39 , H01F10/30 , H01L43/08
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B2005/3996
摘要： PROBLEM TO BE SOLVED: To provide a magnetic detection element wherein optimal quality of material and thickness of a fixed magnetic layer are selected when an NOL (Nano Oxide Layer) having specular effect is used inside the fixed magnetic layer, and further, profile of the NOL is rationalized, so that high resistance change ratio (ΔR/R) and monodirective exchange bias magnetic field (Hex
* ) can be obtained.
SOLUTION: A nonmagnetic material non-abutting layer 53 which constitutes the fixed magnetic layer 35 is formed by CoFe, a nonmagnetic material abutting layer 55 is formed by Co, and the NOL 54 is interposed between the nonmagnetic material non-abutting layer 53 and the nonmagnetic material abutting layer 55. Furthermore, average thickness of the nonmagnetic material abutting layer 55 is established within a range of 16-19Å. As a result, both resistance change ratios (ΔR/R) and monodirective exchange bias magnetic field (Hex
* ) can be increased up to a value to be satisfied as compared with a former case wherein a fixed magnetic layer having three layer structure of CoFe/NOL/CoFe or three layer structures of Co/NOL/Co is used.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种磁性检测元件，其中当在固定磁性层内部使用具有镜面效应的NOL（纳米氧化物层）时，选择最佳质量的材料和固定磁性层的厚度， NOL的轮廓合理化，可以获得高电阻变化率（ΔR/ R）和单向交流偏置磁场（Hex * ）。解决方案：通过CoFe形成构成固定磁性层35的非磁性材料非抵接层53，由Co形成非磁性材料抵接层55，并且将NOL 54介于非磁性材料非接触层 53和非磁性材料抵接层55.另外，非磁性材料抵接层55的平均厚度建立在16-19埃的范围内。结果，与前一种情况相比，电阻变化率（ΔR/ R）和单向交换偏置磁场（Hex * ）的两个电阻可以增加到满足的值，其中固定磁使用具有CoFe / NOL / CoFe的三层结构的层或Co / NOL / Co的三层结构的层。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2013211472A Magnetic detection sensor, and magnetic sensor using the same 有权
标题翻译：磁性检测传感器和使用该磁传感器的磁传感器
公开(公告)号：JP2013211472A
公开(公告)日：2013-10-10
申请号：JP2012081916
申请日：2012-03-30
申请人： Alps Electric Co Ltd , アルプス電気株式会社
发明人： KOIKE FUMITO , ASAZUMA KOTA
IPC分类号： H01L43/08 , G01R33/09 , H01F10/16 , H01F10/32 , H01L43/10
CPC分类号： G01R33/093
摘要： PROBLEM TO BE SOLVED: To provide a magnetic detection sensor of a self pinning type in which especially disturbance noise resistance is improved compared with before, and a magnetic sensor using the same.SOLUTION: A magnetic detection sensor includes a lamination structure in which a fixed magnetic layer 3, and a free magnetic layer 5 are laminated via a non-magnetic material layer 4. In the fixed magnetic layer 3, a first magnetic layer 3a and a second magnetic layer 3c are laminated via a non-magnetic intermediate layer 3b. The first magnetic layer and the second magnetic layer are anti-parallely magnetization-fixed to form a self-pinned type configuration. The second magnetic layer is brought into contact with the non-magnetic material layer. The first magnetic layer 3a is formed of an FeCo having a coercive force higher than the second magnetic layer 3c. A film thickness t1 of the first magnetic layer 3a is in a range of 10 Å to 17 Å, and smaller than a film thickness t2 of the second magnetic layer 3c. A difference of magnetization volume between the first magnetic layer and the second magnetic layer is substantially zero. The non-magnetic intermediate layer 3b is formed of Rh.
摘要翻译：要解决的问题：提供一种自动锁定型的磁性检测传感器，其特别是与以前相比具有特别的抗干扰噪声性能，以及使用该磁性检测传感器的磁性传感器。磁性检测传感器包括层叠结构，其中固定磁性层3和自由磁性层5通过非磁性材料层4层叠。在固定磁性层3中，通过非磁性中间层3b层叠第一磁性层3a和第二磁性层3c。第一磁性层和第二磁性层被反平行地磁化固定以形成自固定型结构。第二磁性层与非磁性材料层接触。第一磁性层3a由具有高于第二磁性层3c的矫顽磁力的FeCo形成。第一磁性层3a的膜厚t1在第二磁性层3c的膜厚度t2的范围内，并且小于第二磁性层3c的膜厚度t2。第一磁性层和第二磁性层之间的磁化体积的差异基本为零。非磁性中间层3b由Rh形成。

8. 发明专利

JP2013183043A Magnetic detection element and magnetic sensor using the same 有权
标题翻译：使用磁性检测元件和磁传感器
公开(公告)号：JP2013183043A
公开(公告)日：2013-09-12
申请号：JP2012046181
申请日：2012-03-02
申请人： Alps Electric Co Ltd , アルプス電気株式会社
发明人： KOIKE FUMITO , ASAZUMA KOTA
IPC分类号： H01L43/08 , G01R33/09 , H01F10/16 , H01F10/32 , H01L43/10
摘要： PROBLEM TO BE SOLVED: To provide a self-pinning magnetic detection element in which disturbance noise resistance can be enhanced when compared with prior art, and to provide a magnetic sensor using the same.SOLUTION: In the magnetic detection element for use in a magnetic sensor not incorporating a permanent magnet, a fixed magnetic layer is self-pinning type where a first magnetic layer 3a and a second magnetic layer 3c are laminated with a nonmagnetic intermediate layer 3b interposed therebetween, and the first and second magnetic layers are magnetized and hardened in antiparallel. The second magnetic layer is in contact with the nonmagnetic intermediate layer, and the first magnetic layer 3a is formed of FeCo of higher coersive force material than the second magnetic layer 3c. Thickness t1 of the first magnetic layer 3a is in the range of 11-17 Å and thinner than the thickness t2 of the second magnetic layer 3c, and the difference of magnetization quantity between the first and second magnetic layers is substantially zero.
摘要翻译：要解决的问题：提供一种与现有技术相比可以提高干扰噪声电阻的自固定磁性检测元件，并提供使用该自检磁性检测元件的磁性传感器。解决方案：在用于磁性的磁性检测元件不包含永久磁铁的传感器，固定磁性层是自固定型，其中第一磁性层3a和第二磁性层3c层叠有非磁性中间层3b，第一和第二磁性层被磁化和硬化反平行第二磁性层与非磁性中间层接触，并且第一磁性层3a由比第二磁性层3c更高的强度力材料的FeCo形成。第一磁性层3a的厚度t1在11-17的范围内，比第二磁性层3c的厚度t2薄，并且第一和第二磁性层之间的磁化量差基本为零。

9. 发明专利

JP2012185044A Magnetic sensor and manufacturing method for the same 有权
标题翻译：磁传感器及其制造方法
公开(公告)号：JP2012185044A
公开(公告)日：2012-09-27
申请号：JP2011048567
申请日：2011-03-07
申请人： Alps Electric Co Ltd , アルプス電気株式会社
发明人： ANDO HIDETO , KOIKE FUMITO , ASAZUMA KOTA
IPC分类号： G01R33/09 , G01R33/02 , H01L43/08 , H01L43/10
摘要： PROBLEM TO BE SOLVED: To provide a magnetic sensor that in particular can form over the same chip a plurality of magnetic resistance effect elements differing in sensitivity axis direction and constituting a bridge circuit and is excellent in the accuracy of measurement.SOLUTION: A bridge circuit is configured of a plurality of magnetic resistance effect elements 13a through 13d disposed over the same chip 29. A fixed magnetic layer 21 of each of the magnetic resistance effect elements is of a self-pinned type, and sensitivity axis directions P1 through P4 of the magnetic resistance effect elements 13a and 13d (13b and 13c) making up a serial circuit are antiparallel to each other. An antiferromagnetic layer 24 that can cause a switched connection bias between it and a free magnetic layer 23 of each of the magnetic resistance effect elements to be generated without anneal processing in the magnetic field and the magnetizing directions of the free magnetic layers 23 to be aligned with the sensitivity axis directions in a state permitting variations of magnetization is disposed on the upper faces of the free magnetic layers 23.
摘要翻译：要解决的问题：提供一种特别能够在同一芯片上形成灵敏度轴方向不同的多个磁阻效应元件并构成桥接电路并且测量精度优异的磁传感器。解决方案：桥接电路由设置在同一芯片29上的多个磁阻效应元件13a至13d构成。每个磁阻效应元件的固定磁性层21具有自固定型，并且构成串联电路的磁阻效应元件13a和13d（13b和13c）的灵敏度轴方向P1至P4彼此反平行。反铁磁性层24能够使其与每个磁阻效应元件的自由磁性层23之间产生切换的连接偏压，而不会在磁场中产生退火处理，而使自由磁性层23的磁化方向对齐在允许磁化变化的状态下的灵敏度轴方向设置在自由磁性层23的上表面上。（C）2012，JPO＆INPIT

10. 发明专利

JP2006128410A Magnetic detecting element and its manufacturing method 审中-公开
标题翻译：磁性检测元件及其制造方法
公开(公告)号：JP2006128410A
公开(公告)日：2006-05-18
申请号：JP2004314604
申请日：2004-10-28
申请人： Alps Electric Co Ltd , アルプス電気株式会社
发明人： NAKABAYASHI AKIRA , UMETSU EIJI , IGARASHI KAZUSATO , KOIKE FUMITO , HASEGAWA NAOYA
IPC分类号： H01L43/08 , G01R33/09 , G11B5/39 , H01F10/16 , H01F10/28 , H01F10/30 , H01F10/32 , H01F41/30
CPC分类号： H01F10/3277 , B82Y25/00 , B82Y40/00 , G01R33/093 , G11B5/3929 , H01F10/30 , H01F10/3295 , H01F41/303 , H01L43/08 , Y10T428/1107 , Y10T428/1143 , Y10T428/115 , Y10T428/1193
摘要： PROBLEM TO BE SOLVED: To provide a magnetic detecting element and the manufacturing method of the same capable of increasing a change rate of magnetoresistance while suppressing the increase of magnetostriction constant of a free magnetic layer. SOLUTION: The free magnetic layer 36 is constituted of the three-layered structure of a first enhance layer 36a contacted with a non-magnetic material layer 35, a second enhance layer 36b and a low coercive force layer 36c. The value of magnetostriction constant λ of the second enhance layer 36b is smaller than the magnetostriction constant λ of the first enhance layer 36a. The structure of the enhance layer is changed from a conventional one-layered structure to a two-layered structure, and the value of magnetostriction constant λ of the second enhance layer 36b is made smaller than the value of magnetostriction constant λ of the first enhance layer 36a whereby the change rate of magnetoresistance can be increased while suppressing the increase of magnetostriction constant of the free magnetic layer. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在抑制自由磁性层的磁致伸缩常数的增加的同时提高磁阻的变化率的磁性检测元件及其制造方法。解决方案：自由磁性层36由与非磁性材料层35，第二增强层36b和低矫顽力层36c接触的第一增强层36a的三层结构构成。第二增强层36b的磁致伸缩常数λ的值小于第一增强层36a的磁致伸缩常数λ。增强层的结构从传统的单层结构变为两层结构，第二增强层36b的磁致伸缩常数λ的值小于第一增强层的磁致伸缩常数λ的值 36a，从而可以在抑制自由磁性层的磁致伸缩常数的增加的同时增加磁阻的变化率。版权所有（C）2006，JPO＆NCIPI

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