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    • 2. 发明专利
    • ANTIREFLECTION COATING WITH FUNCTION OF ATTENUATING LOW-FREQUENCY ELECTROMAGNETIC WAVE
    • JPH0669681A
    • 1994-03-11
    • JP24585592
    • 1992-08-21
    • ASAHI GLASS CO LTD
    • TAKAHASHI SHINICHIISOMURA TOSHIAKI
    • B32B7/02B32B9/00H05K9/00
    • PURPOSE:To provide a four-layer antireflection coating comprising a high refractive-index film, a low-refractive-index film, a high-refractive-index film, and a low-refractive index film on a substrate, in which the low-refractive-index film in direct contact with the substrate has a sheet resistance below a predetermined value to attenuate low-frequency electromagnetic waves. CONSTITUTION:A four layer antireflection coating comprises a first high- refractive-index film in direct contact with a substrate. The first film has a sheet resistance less than 7X10 OMEGA/square so as to attenuate low frequency electromagnetic waves of 400kHz or less to a quarter or less. Moreover, the optical film thickness n1d1 (n1: refractive index, d1: actual film thickness, the subscript letter is the number of layers above the substrate) of the first film should be within a range of 0.04 lambda0 to 0.082lambda0, where lambda0 is the designed wavelength. Preferably n1 should be within a range of 1.9 to 2.1 in order to obtain low sheet resistance and enough antireflection performance. Preferable materials of the first film include indium-tin oxide (refractive index 2.0), thin oxide (refractive index 2.0), zinc oxide (refractive index 2.1), or the like for its main ingredient.