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1. 发明专利

JPH112657A COMPLEX IC TESTER 失效
公开(公告)号：JPH112657A
公开(公告)日：1999-01-06
申请号：JP15692597
申请日：1997-06-13
申请人： ADVANTEST CORP
发明人： HAYAMA HISAO , GOTO TOSHIO
IPC分类号： G01R31/26 , G01R31/01 , H05K13/00
摘要： PROBLEM TO BE SOLVED: To enable continuously and automatically testing by providing a test head for memory test and a test head for logic test in the course of a test tray and testing an IC to be tested in the test tray with both test heads. SOLUTION: In the course of a test tray TST, a test head 104A for memory test and a test head 104B for logic test are provided and test is conducted as the memory part and the logic part of an IC to be tested are left loaded on the same test tray TST. The test heads 104A tests ICs arranged on 4 rows at every 4 rows in 4 lines and 16 rows, for example and repeats the test 4 times. After completing the test, the test tray TST is sent to the position of the test head 104B. The test head 104B is provided with two socket for test, for example, and two ICs loaded on the test tray TST are touched in turn to test the logic part. By this, reloading of IC is made unnecessary and testing in short time becomes possible.

2. 发明专利

JPH1130645A SEMICONDUCTOR DEVICE TESTER 失效
公开(公告)号：JPH1130645A
公开(公告)日：1999-02-02
申请号：JP12869698
申请日：1998-05-12
申请人： ADVANTEST CORP
发明人： HAYAMA HISAO , GOTO TOSHIO , SUGANO YUKIO
IPC分类号： G01R31/26
摘要： PROBLEM TO BE SOLVED: To provide an integrated circuit tester that prevents the temperature of an integrated circuit heated up to the specified one from going down during the test. SOLUTION: A boxy body 70 made up by an adiabator is installed on top of a performance board PB, and an IC socket SK and a socket guide 35 are stored in a space surrounded by this boxy body 70 and the performance board PB. A through hole 71, where a sample integrated circuit to be conveyed by a movable rod 60R of a Z-axis drive device is retractable in an inner part of the said boxy body, is formed in an upper wall of the boxy body 70, and further, a switching plate 72 being shiftable in the horizontal direction is set up in an upper part of the said boxy body, and when the said movable rod is situated at the outside of the boxy body a by this switching plate 72, the through hole 71 is locked up and the inside of the boxy body is kept up into a state of being almost adiabatically insulated. Moreover, in a state that the sample integrated circuit comes into contact with the IC socket, a closing member 64 blockage a through hole 72A of the switching plate 72 is installed there, holding the inside of the boxy body into an adiabatic state.

3. 发明专利

JPH10227828A IC TESTER 失效
公开(公告)号：JPH10227828A
公开(公告)日：1998-08-25
申请号：JP2884397
申请日：1997-02-13
申请人： ADVANTEST CORP
发明人： SUGANO YUKIO , GOTO TOSHIO
IPC分类号： G01R31/26 , B65G49/07 , G01R31/28 , H05K13/02
摘要： PROBLEM TO BE SOLVED: To provide a structure which enables bringing of the temperature of an IC (semiconductor integrated circuit) closer to that of a heat plate even when the terminal structure thereof allows no so much contact area between the IC and the heat plate in its operation of heating the IC to be tested with the heat plate to test it. SOLUTION: A shutter plate 70 is arranged to cover the top surface of a heat plate 50 so that the top surface of recess parts 51 for housing ICs formed on the heat plate 50 can be opened or closed. Now, in a state where an IC conveying device does not access the heat plate 50, the recess parts 51 for housing ICs are kept closed by the shutter plate 70 to sufficiently contain the ICs in a closed space thereby applying sufficient heat energy to the ICs.

4. 发明专利

JPH10185994A DEVICE CONVEYING MECHANISM OF HANDLER IN CONSTANT TEMPERATURE TANK 失效
公开(公告)号：JPH10185994A
公开(公告)日：1998-07-14
申请号：JP34992996
申请日：1996-12-27
申请人： ADVANTEST CORP
发明人： GOTO TOSHIO
IPC分类号： G01R31/26 , B25J15/06
摘要： PROBLEM TO BE SOLVED: To surely attract with a device chuck even with the scattering of the position or the posture angle of IC on a soak stage. SOLUTION: Between the inner circumferential surface of coupling hole of each arm 3b and a device chuck 21 and between the inner circumferential surface of the penetration hole 28e of ceiling wall and a contact-in drive shaft 32', floating are provided, respectively. On each of drive shafts 32', 33' and 34', a joint head 53 capable of connecting and separating by fitting in the top of the device chuck 21 is formed. The contact-in drive shaft 32' is driven by an XYZθ stage 54. The image data of DUT of a soak stage and the environment are taken in with a camera 55, a controller 56 measures the position and the posture angle of the DUT using the data and controls the XYZθ stage 54 so as to drive the device chuck in X, Y, Z and θ directions in accordance with the measurement. Similarly, the device chuck connected to the contact press drive shaft can be adjusted to the position and the posture angle of a socket.

5. 发明专利

JPH10185993A IC TESTING DEVICE 失效
公开(公告)号：JPH10185993A
公开(公告)日：1998-07-14
申请号：JP34836596
申请日：1996-12-26
申请人： ADVANTEST CORP
发明人： FURUTA KATSUNOBU , GOTO TOSHIO
IPC分类号： G01R31/26
摘要： PROBLEM TO BE SOLVED: To facilitate treating by automatically operating only a Z-axis drive means plurality of times and fitting a guide pin and a guide hole, and storing the position information in an X-axis drive means and a Y-axis drive means in the fitted state of each shaft axis. SOLUTION: Excitation of drive sources 17A and 18A is released in teaching mode, a vacuum sucking head 11 is made freely movable in X-Y directions and by manually positioning to the IC socket 14 for testing, a guide pin 25 is made capable of inserting in a guide hole. The X-Y positions are stored in an X-axis position memory means 33A and a Y-axis position memory means 33B. Z-axis drive means is driven with a Z-axis automatic operation means 33D and a vacuum sucking head 11 is lowered with an air cylinder 15A. The vacuum sucking head 11 slightly moves according to the fitting state of the guide pin 25 and the guide hole and the guide pin converges in the least resistance state when the guide pin 25 fits in the guide hole. Therefore, at the ending of automatic operation, exact position information can be stored in the X-axis position memory means 33A and the Y-axis position memory means 33B.

6. 发明专利

JPH07280882A PICK AND PLACE SYSTEM 失效
公开(公告)号：JPH07280882A
公开(公告)日：1995-10-27
申请号：JP8740894
申请日：1994-04-04
申请人： ADVANTEST CORP
发明人： HAYAMA HISAO , GOTO TOSHIO
IPC分类号： G01R31/26 , H01L21/66 , H01L21/677 , H01L21/68 , H05K13/02
摘要： PURPOSE:To position a shaft, a vacuum and a suction port highly accurately by detecting the position of an IC to be measured through a laser differential displacement gauge carried on the arm of an IC handier and then designating a motor for Z direction control to turn a ball screw. CONSTITUTION:The pick and place system comprises a laser differential displacement gauge 1 carried on the arm 8 of an IC positioning handier, a ball screw 3 for Z direction drive, a motor 2 for Z direction control, a pulley 4, a shaft 5, a vacuum 6, and a suction port 7. An IC to be measured is positioned highly accurately in the height direction by means of the displacement gauge 1 which delivers an instruction to the motor 2 for turning the ball screw 3 through the pulley 4 thus positioning the shaft 5, the vacuum 6 and the suction port 7 highly accurately at designated positions.

7. 发明专利

JPH10194452A IC TEST EQUIPMENT 失效
公开(公告)号：JPH10194452A
公开(公告)日：1998-07-28
申请号：JP79297
申请日：1997-01-07
申请人： ADVANTEST CORP
发明人： GOTO TOSHIO
IPC分类号： B65G43/00 , B65G49/07 , H01L23/32
摘要： PROBLEM TO BE SOLVED: To easily set the moving amount of a Z-axis, by using a pulse driving- type motor as a Z-axis driving means, and specifying the down stroke of a vacuum suction head on the basis of the number of pulses. SOLUTION: The moving amount from the start of the drive of a Z-axis driving means 30 to the stop of the same at a desired down position, can be managed on the basis of the number of pulses by using a pulse driving motor as a Z-axis driving motor 31. Accordingly in a case when an IC socket for testing 12, is changed, a vacuum suction head 10 is once made to collide with an IC socket for testing 12 by using a collision block 13, for protecting the IC socket for testing 12. On this occasion, the number of pulses given by the time when the rotation of the Z-axis driving motor 31 is stopped, is stored, to set the driving amount of the Z-axis. After the setting, the Z-axis driving motor 31, is stopped at a position specified by the height of the collision block 13 without fail, so that the operation can be performed without using the collision block 13.

8. 发明专利

JPH08105937A AUTOMATIC HANDLER FOR DEVICE TESTER, AND DEVICE MEASURING METHOD THEREOF 失效
公开(公告)号：JPH08105937A
公开(公告)日：1996-04-23
申请号：JP26823094
申请日：1994-10-06
申请人： ADVANTEST CORP
发明人： GOTO TOSHIO , KIKUCHI ARITOMO , HAYAMA HISAO
IPC分类号： G01R31/26 , G01R31/308 , H01L21/66
摘要： PURPOSE: To inspect outer appearance at high speed, high precision, and high efficiency by controlling brightness of each light emitting element in a luminaire in which a number of the brightness-controllable light emitting elements are disposed around a camera. CONSTITUTION: Tens of trays each having a number of subject devices (DUT) 10 to be measured are stacked and contained in a loader part 14 of a loader/ unloader part. The DUT 10 is carried from the loader part 14 by a movable body 13 to a buffer stage 16. At a measuring part, the DUT 10 is handled by a movable body 19, and at a contact part, an electric test of the DUT 10 is conducted. After completion of the electric test, it is handled to a buffer stage 22 to be sent to the loader/unloader part. An appearance inspection part 27 comprises a camera 28, and a luminaire 29 having a number of brightness-- controllable light emitting elements and an appearance measuring base 30 disposed around it. As the light-emitting elements are brightness-controlled, proper illumination is applied to parts of the DUT 10 to be appearance-inspected to clarify shading, and image data after conversion through the camera 28 are processed at an operation processing part for measurement at high resolution.

9. 发明专利

JPH07243827A APPEARANCE TEST STAGE FOR IC 失效
公开(公告)号：JPH07243827A
公开(公告)日：1995-09-19
申请号：JP6007794
申请日：1994-03-04
申请人： ADVANTEST CORP
发明人： GOTO TOSHIO
IPC分类号： G01B11/24 , G01N21/84 , G01R31/28 , G12B9/08 , G12B17/02
摘要： PURPOSE:To provide an appearance test stage for ICs with highly accurate judging functions that is provided with punched holes on a guide stage, transmissive illumination plate, irradiating light source, electrostatic breakage preventive measures, etc., to work effectively together with an image measuring camera so as to judge the deformation of pins in an IC to be measured at final test. CONSTITUTION:An appearance test stage for ICs is placed on a handler having IC positioning function, and a specified punched hole is made in a guide stage 3 on the stage 3, on which electrostatic breakage preventive measures are provided. Then the handler is grounded, and a transmissive illumination plate 5 is provided with measures against irregular reflection when irradiated by an irradiating light and is also provided with an irradiating light source 6.

10. 发明专利

JPH05187846A DEVICE FOR INSPECTING LEAD OF SEMICONDUCTOR INTEGRATED DEVICE 失效
公开(公告)号：JPH05187846A
公开(公告)日：1993-07-27
申请号：JP308292
申请日：1992-01-10
申请人： ADVANTEST CORP
发明人： GOTO TOSHIO
IPC分类号： G01B11/24 , H01L21/66 , H01L23/50
摘要： PURPOSE:To inspect the lead of a semiconductor integrated device while the device is placed on a tray so as to prevent the deformation and bending of the lead by installing a parallel slit laser light source and picture taking camera to an X-Y-theta arm. CONSTITUTION:An X-Y-theta arm is constituted of a slit laser light source 5 supporting body 6, X-arm, and Y-arm by adjusting the relation among a camera 4, the supporting body 6, X-arm, and Y-arm. The camera 4 and light source 5 are fitted to the supporting body 6 in a rotatable state in the 9-direction so that the camera 4 can receive the reflected light of the laser light emitted toward an IC 2 placed on the upper surface of a tray 1 from the light source 5. The shaft section of the supporting body 6 itself is fitted to the X-arm in a slidable state and the X-arm is fitted to the Y-arm so that the X-arm can slide on the Y-arm in the Y-direction. By adjusting the X, Y, and theta, any leads on the upper, right, left, and lower side of any IC on the tray 1 can be inspected.

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