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    • 10. 发明专利
    • Display device
    • JP5330585B2
    • 2013-10-30
    • JP2012231373
    • 2012-10-19
    • 株式会社東芝
    • 信美 斉藤知正 上田慎太郎 中野修一 内古閑
    • G09F9/30G02F1/1343G02F1/1368H01L21/336H01L29/786H01L51/50H05B33/12H05B33/22H05B33/28
    • PROBLEM TO BE SOLVED: To provide a display device using an oxide semiconductor whose characteristic variation due to a heat treatment is suppressed. SOLUTION: There are provided a thin-film transistor comprising: an insulating layer; a gate electrode on the insulating layer; a semiconductor layer which is disposed on the gate electrode through a gate insulating layer and is formed by an oxide layer; and a source electrode and a drain electrode which are disposed on the semiconductor layer apart from each other across the gate electrode, and a display device comprising: a pixel electrode having an electric resistance lower than that of the semiconductor layer which are connected to any one of the source electrode and the drain electrode and are formed by the oxide layer; an optical element which causes at least either a change in optical characteristics or light emission by an electric signal supplied to the pixel electrode; and a film disposed below the pixel electrode and is formed by the same material as the gate insulating layer, wherein the surface on the side of the semiconductor layer of the gate insulating film on the gate electrode has higher smoothness than the surface on the side of the pixel electrode of a film disposed below the pixel electrode. COPYRIGHT: (C)2013,JPO&INPIT