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1. 发明专利

JP2015032778A 圧電体膜の製造方法、電気—機械変換素子の製造方法、および、液体吐出ヘッド、インクジェットプリンタ。有权
标题翻译：压电薄膜的制造方法，电化学转换元件的制造方法，液体排出头和喷墨打印机
公开(公告)号：JP2015032778A
公开(公告)日：2015-02-16
申请号：JP2013163167
申请日：2013-08-06
申请人：株式会社リコー , Ricoh Co Ltd
发明人： SHIMOFUKU HIKARI , MACHIDA OSAMU , TAKEUCHI JUN
IPC分类号： H01L41/318 , B41J2/045 , B41J2/055 , B41J2/16 , H01L41/187 , H01L41/43
摘要：【課題】膜厚ムラを抑制し、生産性に優れた圧電体膜の製造方法を提供する。【解決手段】圧電体膜の製造方法は、基板31上の第1の電極32表面にインクジェット方式によりゾル−ゲル液を部分的に塗布しパターン化されたゾル−ゲル膜53を形成する工程とゾル−ゲル膜を加熱処理することでゾル−ゲル膜を乾燥する工程とを有し、ゾル−ゲル膜を乾燥する工程は、ゾル−ゲル膜の加熱温度を室温から変更点温度Tcまで、第1の昇温レートにより昇温する第1の昇温工程と、変更点温度Tcに到達後、昇温レートを第2の昇温レートに変更しゾル−ゲル膜の加熱温度をゾル−ゲル膜の乾燥温度まで昇温する第2の昇温工程とを有し、変更点温度Tcはゾル−ゲル液の主溶媒の沸点Tbpとの間でTbp−23≦̸Tc≦̸Tbp+23の関係を満たし、第1の昇温レートは第2の昇温レートよりも遅い。【選択図】図6
摘要翻译：要解决的问题：提供抑制膜厚不均匀性并提高生产率的压电膜的制造方法。解决方案：压电膜的制造方法包括以下步骤：通过部分施加形成图案化溶胶 - 凝胶膜53 根据喷墨系统将溶胶 - 凝胶液体输送到基板31上的第一电极32的表面; 并通过对溶胶 - 凝胶膜进行加热处理来干燥溶胶 - 凝胶膜。干燥溶胶凝胶膜的步骤包括将溶胶 - 凝胶膜的加热温度从室温升高至变化点温度Tat的第一升温步骤，第一升温速度; 以及第二升温步骤，将升温速度改变到第二升温速度，并将溶胶 - 凝胶膜的加热温度提高到溶胶 - 凝胶膜的干燥温度。变化点温度满足变化点温度和溶剂 - 凝胶液体的沸点Tof与第一升温速度之间的关系T-23≤T≤T+ 23低于第二升温速度。

2. 发明专利

JP2015012010A 薄膜製造装置、電気機械変換素子、液体吐出ヘッド及びインクジェット記録装置审中-公开
标题翻译：制造薄膜，电化学转换元件，液体排出头和喷墨记录装置的装置
公开(公告)号：JP2015012010A
公开(公告)日：2015-01-19
申请号：JP2013133879
申请日：2013-06-26
申请人：株式会社リコー , Ricoh Co Ltd
发明人： TAKEUCHI JUN , MACHIDA OSAMU , SHIMOFUKU HIKARI
IPC分类号： H01L41/318 , B41J2/045 , B41J2/055 , B41J2/16 , B81B3/00 , F04B43/04 , G01C19/5628 , G01P15/09 , H01L21/8246 , H01L27/105 , H01L41/047 , H01L41/09 , H01L41/113 , H01L41/187 , H01L41/43
摘要：【課題】雰囲気中の水分と反応しやすい機能性インクの吐出において、ノズル開口での目詰まりの発生を防止し、良好な吐出を維持可能な薄膜製造装置を提供する。【解決手段】薄膜製造装置は、基板を保持するステージと、ステージに対向して配置され、水と反応性を有する機能性インクをインクジェット法によりノズルから吐出して基板上に塗布する液体吐出ヘッド208と、液体吐出ヘッド208の吐出面208aをキャッピングするキャップ部材60とを少なくとも備え、キャッピングにより密閉されたキャップ部材内部60aの雰囲気の湿度が調整される。【選択図】図1
摘要翻译：要解决的问题：提供一种能够抑制在喷嘴开口处发生堵塞的薄膜制造装置，以保持排出可能与气氛中的水分发生反应的功能油墨的良好排出。解决方案：一种制造装置薄膜至少包括：用于保持基板的台架; 液体排出头208，其布置成与舞台相对，并且以喷墨方式排出具有与喷嘴的水反应性的功能油墨，以将功能油墨施加到基底上; 以及帽部件60，用于封盖液体排放头208的排出表面208a，其中调节了通过盖帽密封的盖构件的内部60a中的气氛的湿度。

3. 发明专利

JP2014154742A Electromechanical conversion element, manufacturing method of electromechanical conversion element, driving method of electromechanical conversion element, droplet discharge head, and image forming apparatus 审中-公开
标题翻译：电动转换元件，电动转换元件的制造方法，电动转换元件的驱动方法，喷射头和图像形成装置
公开(公告)号：JP2014154742A
公开(公告)日：2014-08-25
申请号：JP2013024159
申请日：2013-02-12
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： AKIYAMA ZENICHI , WATANABE YASUHIRO , MACHIDA OSAMU , SHIMOFUKU HIKARI , TAKEUCHI JUN
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To provide an electromechanical conversion element that has high reliability, and has suppressed the occurrence of an imprint phenomenon without providing a new film in a layered configuration.SOLUTION: An electromechanical conversion element 9 includes a lower electrode 6, a piezoelectric film 7, and an upper electrode 8, which are sequentially formed on a substrate 5 having a pressure chamber 4 formed therein. The upper electrode 8 comprises a first upper electrode 8a that is formed at a position corresponding to a liquid chamber formation position in the substrate 5, and a second upper electrode 8b that is separated from the first upper electrode 8a and formed at a position corresponding to a liquid chamber non-formation position in the substrate 5.
摘要翻译：要解决的问题：提供一种具有高可靠性的机电转换元件，并且在层叠构造中不设置新的膜的情况下，抑制了印记现象的发生。解决方案：机电转换元件9包括下电极6，压电膜7和上电极8，它们依次形成在其上形成有压力室4的基板5上。上电极8包括形成在与衬底5中的液体室形成位置相对应的位置的第一上部电极8a和与第一上部电极8a分离并形成在与第一上部电极8a对应的位置的位置的第二上部电极8b 在基板5中的液体室非成形位置。

4. 发明专利

JP2014013843A Electromechanical conversion element, method for manufacturing the same, droplet discharge head, and droplet discharge device 有权
标题翻译：电动转换元件，制造它们的方法，喷射头和排墨装置
公开(公告)号：JP2014013843A
公开(公告)日：2014-01-23
申请号：JP2012150889
申请日：2012-07-04
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： MACHIDA OSAMU , SHIMOFUKU HIKARI , TAKEUCHI JUN
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , B41J2/16 , H01L41/18 , H01L41/187 , H01L41/22
摘要： PROBLEM TO BE SOLVED: To provide an electromechanical conversion element, and so on capable of preventing a resistance value of a first electrode (lower electrode) from being increased.SOLUTION: The electromechanical conversion element comprises: a first electrode including a first metallic film, a conductive film formed on the first metallic film, a second metallic film formed on the conductive film, and a conductive oxide film formed on a predetermined region on the second metallic film; an electromechanical conversion film formed on the conductive oxide film; and a second electrode formed on the electromechanical conversion film. The conductive film is formed of a conductive material whose etching rate is slower than that of the first metallic film.
摘要翻译：要解决的问题：提供能够防止第一电极（下电极）的电阻值增加的机电转换元件等。解决方案：机电转换元件包括：第一电极，包括第一金属膜，形成在第一金属膜上的导电膜，形成在导电膜上的第二金属膜和形成在第二金属膜上的预定区域上的导电氧化物膜; 形成在导电氧化膜上的机电转换膜; 以及形成在机电转换膜上的第二电极。导电膜由蚀刻速率比第一金属膜的蚀刻速度慢的导电材料形成。

5. 发明专利

JP2013225669A Method for manufacturing piezoelectric film, piezoelectric film, method for manufacturing electromechanical conversion element, liquid discharge head, and ink jet printer 审中-公开
标题翻译：制造压电薄膜的方法，压电薄膜，制造机电转换元件的方法，液体放电头和喷墨打印机
公开(公告)号：JP2013225669A
公开(公告)日：2013-10-31
申请号：JP2013055960
申请日：2013-03-19
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： SHIMOFUKU HIKARI , MACHIDA OSAMU , TASHIRO RYO , TAKEUCHI JUN , CHIN KENHO
IPC分类号： H01L41/318 , B41J2/16 , H01L21/316 , H01L41/187
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric film capable of suppressing occurrence of a coffee-stain phenomenon in a step of drying a sol-gel film and free from film thickness irregularity, and also to provide a method for manufacturing an electromechanical conversion element, a liquid discharge head, and an ink jet printer.SOLUTION: A method for manufacturing a piezoelectric film comprises the steps of: forming a patterned sol-gel film 53 by partly applying a sol-gel liquid to a surface of a first electrode 32 provided on a substrate 31 in an ink jet method; and drying the sol-gel film 53 by heat treatment. A rate of temperature increase per minute from a room temperature in the step of drying the sol-gel film 53 is not more than 45% of a boiling point of a main solvent constituting the sol-gel liquid.
摘要翻译：要解决的问题：提供一种能够抑制在溶胶 - 凝胶膜干燥并且没有膜厚不规则性的步骤中产生咖啡污点现象的压电膜的制造方法，并且提供一种制造方法机电转换元件，液体排出头和喷墨打印机。解决方案：一种用于制造压电膜的方法包括以下步骤：通过将溶胶 - 凝胶液部分地施加到表面上来形成图案化的溶胶 - 凝胶膜53 以喷墨方式设置在基板31上的第一电极32; 并通过热处理干燥溶胶 - 凝胶膜53。在溶胶 - 凝胶膜53的干燥步骤中，室温下每分钟的升温速度不超过构成溶胶 - 凝胶液的主要溶剂的沸点的45％。

6. 发明专利

JP2013168397A Liquid droplet discharge head, method for forming liquid droplet discharge dead, and inkjet recording device 审中-公开
标题翻译：液滴喷射头，形成液滴排出物的方法和喷墨记录装置
公开(公告)号：JP2013168397A
公开(公告)日：2013-08-29
申请号：JP2012029108
申请日：2012-02-14
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： MACHIDA OSAMU , SHIMOFUKU HIKARI , TASHIRO RYO , YAGI MASAHIRO
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , B41J2/16 , H01L41/18 , H01L41/22 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To provide a liquid droplet discharge head that has an electromechanical conversion element with improved quality, and to provide a method for forming the liquid droplet discharge head, and an inkjet recording device.SOLUTION: Liquid droplet discharge heads 2A and 2B deform a diaphragm 105 and thereby discharge liquid droplets from a liquid chamber 101. Each of the liquid droplet discharge heads 2A and 2B includes: an insulating layer 12 that is provided on the diaphragm 105; a first electrode layer 15 that is provided on the insulating layer 12; an electromechanical conversion film 30 that is formed by changing, by laser irradiation, a sol-gel layer applied to the first electrode layer 15; and a second electrode layer 16 that is provided on the electromechanical conversion film 30. The insulating layer 12 has lower thermal conductivity than the first electrode layer 15. The insulating layer 12 has such a thermal conductivity gradient that the thermal conductivity thereof decreases from the first electrode layer 15 toward the diaphragm 105.
摘要翻译：要解决的问题：提供一种具有提高质量的机电转换元件的液滴喷射头，以及提供一种形成液滴喷射头的方法和喷墨记录装置。解决方案：液滴喷射头2A和2B 使膜片105变形，从而从液体室101排出液滴。每个液滴喷射头2A和2B包括：设置在隔膜105上的绝缘层12; 设置在绝缘层12上的第一电极层15; 通过激光照射改变施加到第一电极层15上的溶胶 - 凝胶层形成的机电转换膜30; 以及设置在机电转换膜30上的第二电极层16.绝缘层12的热导率比第一电极层15低。绝缘层12具有这样的热导率梯度，导热率从第一电极层15朝向隔膜105。

7. 发明专利

JP2013065670A Electromechanical conversion element, method of manufacturing the same, droplet discharge head equipped with electromechanical conversion element, and droplet discharge device 审中-公开
标题翻译：电动转换元件及其制造方法，配备有机电转换元件的喷射头排出头和喷射装置
公开(公告)号：JP2013065670A
公开(公告)日：2013-04-11
申请号：JP2011202955
申请日：2011-09-16
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： AKIYAMA ZENICHI , MACHIDA OSAMU , SHIMOFUKU HIKARI , TASHIRO RYO , CHIN KENHO , YAGI MASAHIRO
IPC分类号： H01L41/39 , B41J2/045 , B41J2/055 , H01L41/09 , H01L41/18 , H01L41/22
摘要： PROBLEM TO BE SOLVED: To provide an electromechanical conversion element, a method of manufacturing the same, a droplet discharge head, and a droplet discharge device, capable of patterning and forming an electromechanical conversion film having the crystallinity of high quality in a simplified step.SOLUTION: The electromechanical conversion element is manufactured by a manufacturing method which includes the steps of: forming a first electrode 11 on a substrate or a base material film; forming a ceramic thin-film 12' being patterned on the surface of the first electrode 11; forming an electromechanical conversion film 15 on the ceramic thin-film 12' [including a first step (forming a hydrophobic part by surface-reforming only the first electrode 11), a second step (forming a coat 14 by a CSD method by printing a precursor solution 22 on the ceramic thin-film 12'), a third step (thermally treating the coat 14), and a fourth step (forming the electromechanical conversion film 15 to be a wanted film thickness by repeating the first step to the third step)]; and forming a second electrode on the electromechanical conversion film 15, so as to configure the droplet discharge head and the droplet discharge device.
摘要翻译：要解决的问题：为了提供一种机电转换元件，其制造方法，液滴喷射头和液滴喷射装置，其能够图案化和形成具有高质量结晶度的机电转换膜简化步骤。解决方案：机电转换元件通过制造方法制造，其包括以下步骤：在基板或基材膜上形成第一电极11; 在第一电极11的表面上形成图案化的陶瓷薄膜12'; 在陶瓷薄膜12'上形成机电转换膜15 [包括第一步骤（仅通过仅对第一电极11进行表面重整形成疏水部分）的第二步骤（通过CSD方法形成涂层14，通过印刷前体溶液22在陶瓷薄膜12'上），第三步骤（热处理涂层14）和第四步骤（通过重复第一步骤至第三步骤将机电转换膜15形成为期望的膜厚度）]; 并在机电转换膜15上形成第二电极，以构成液滴喷射头和液滴喷射装置。版权所有（C）2013，JPO＆INPIT

8. 发明专利

JP2012256756A Formation method of electromechanical conversion film, electromechanical conversion film, electromechanical conversion element, liquid discharge head and image forming apparatus 审中-公开
标题翻译：电化学转换膜，电化学转换膜，电化学转换元件，液体排出头和图像形成装置的形成方法
公开(公告)号：JP2012256756A
公开(公告)日：2012-12-27
申请号：JP2011129418
申请日：2011-06-09
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： SHIMOFUKU HIKARI , MACHIDA OSAMU , TASHIRO RYO , WATANABE YASUHIRO
IPC分类号： H01L41/22 , B41J2/045 , B41J2/055 , H01L41/09 , H01L41/18 , H01L41/24
CPC分类号： B41J2/14201 , B41J2/161 , B41J2/164 , H01L41/047 , H01L41/318 , H01L41/331
摘要： PROBLEM TO BE SOLVED: To provide an electromechanical conversion film for hardly causing a crack, and an electromechanical conversion element having stable electric characteristics.SOLUTION: A PZT precursor solution (sol-gel solution) 5 is applied to a patterned hydrophilic region 4 by an inkjet coating device, then droplets 6 of the PZT precursor solution 5 are made to hit across a coating region (the hydrophilic region 4) of a predetermined pattern region on a Pt surface on a substrate 1 and outside of the predetermined pattern region (SAM film 2: a water-repellent area). Since a contact angle outside of the predetermined pattern region is infinitely larger than that in the predetermined pattern region that is the hydrophilic region 4, a coating part outside of the predetermined pattern region of the hit sol-gel droplets 5 is sucked into the desired patten region and is levelled in the desired formation pattern. In the coating process, there is no generation of mist and individual coating defects caused by micro sol-gel droplets are not generated outside of the predetermined patten region.
摘要翻译：要解决的问题：提供几乎不产生裂纹的机电转换膜和具有稳定电特性的机电转换元件。解决方案：通过喷墨涂布装置将PZT前体溶液（溶胶 - 凝胶溶液）5施加到图案化的亲水区域4，然后使PZT前体溶液5的小滴6穿过涂覆区域（亲水的区域4）在基板1上的Pt表面上和预定图案区域（SAM膜2：防水区域）外面的预定图案区域。由于在预定图案区域外的接触角比作为亲水区域4的预定图案区域中的接触角大得多，因此将命中溶胶 - 凝胶液滴5的预定图案区域外侧的涂布部分吸入所需的图案并且以所需的形成图案平整。在涂布过程中，不产生雾，并且由微溶胶凝胶微滴引起的单独涂覆缺陷不会在预定的图案区域外部产生。版权所有（C）2013，JPO＆INPIT

9. 发明专利

JP2012064771A Manufacturing method of electromechanical conversion film, manufacturing method of electromechanical conversion element, electromechanical conversion element manufactured by the manufacturing method, droplet discharge head and droplet discharge device 有权
标题翻译：电动转换膜的制造方法，电化学转换元件的制造方法，制造方法制造的电动转换元件，喷射头排出头和排出装置
公开(公告)号：JP2012064771A
公开(公告)日：2012-03-29
申请号：JP2010208019
申请日：2010-09-16
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： MACHIDA OSAMU , SHIMOFUKU HIKARI , WATANABE YASUHIRO , TASHIRO RYO , AKIYAMA ZENICHI , UEDA KEIJI
IPC分类号： B41J2/055 , B05C5/00 , B41J2/045 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/318 , H01L41/331 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an electromechanical conversion film capable of forming the electromechanical conversion film of a desired pattern having a uniform film thickness when discharging a coating liquid containing a raw material for forming the electromechanical conversion film from a nozzle and coating an electrode with the liquid.SOLUTION: In the first coating process, the longitudinal direction of the nozzle column of a droplet discharge head and the longitudinal direction of a coating object area are made orthogonal to each other, and the coating liquid is applied so as to discharge droplets at such an interval that dots of the mutually independent droplets continuously discharged from the nozzle partially overlap in the coating object area. In the second and succeeding coating processes, the longitudinal direction of the nozzle column of the droplet discharge head and the longitudinal direction of the coating object area are made parallel to each other, and the coating liquid is applied so as to discharge the droplets at such an interval that the dots of the mutually independent droplets discharged from the nozzle do not overlap in the coating object area.
摘要翻译：要解决的问题：提供一种机电转换膜的制造方法，当将包含用于形成机电转换膜的原料的涂布液排出时，能够形成具有均匀膜厚的所需图案的机电转换膜喷嘴并用液体涂覆电极。解决方案：在第一涂布工艺中，将液滴喷头的喷嘴列的纵向方向和涂覆物体区域的纵向方向彼此正交，并施加涂布液以排出液滴在这样的间隔处，连续从喷嘴排出的相互独立的液滴的点在涂覆对象区域中部分重叠。在第二次和后续的涂布过程中，液滴喷射头的喷嘴列的纵向方向和涂覆物体区域的纵向方向彼此平行，并且施加涂布液以便以这种方式排出液滴从喷嘴排出的相互独立的液滴的点在涂布对象区域中不重叠的间隔。版权所有（C）2012，JPO＆INPIT

10. 发明专利

JP2012059903A Electromechanical conversion member, liquid discharge head and image forming device 有权
标题翻译：电子转换构件，液体排出头和图像形成装置
公开(公告)号：JP2012059903A
公开(公告)日：2012-03-22
申请号：JP2010201463
申请日：2010-09-08
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： SHIMOFUKU HIKARI , MACHIDA OSAMU , TASHIRO RYO , WATANABE YASUHIRO , UEDA KEIJI
IPC分类号： H01L41/09 , B41J2/14 , B41J2/16 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/318 , H01L41/331 , H01L41/39 , H01L41/43
摘要： PROBLEM TO BE SOLVED: To solve such a problem that when an electromechanical conversion film is formed by applying PZT precursor (sol-gel liquid) using a liquid discharge head, uneven film thickness occurs to cause cracking of a film or problems of electric characteristics in a heat treatment process.SOLUTION: A method of manufacturing an electromechanical conversion member includes a step for performing surface modification partially on an electrode, a step for forming a patterned electro-mechanical conversion film by partially coating the electrode with sol-gel liquid of a metal complex oxide discharged from a first liquid discharge head, a step for coating the electrode with liquid different from the sol-gel liquid discharged from a second liquid discharge head, a step for drying, thermally decomposing and crystallizing the partially applied sol-gel liquid, and a step for obtaining a desired film thickness by repeating these steps.
摘要翻译：解决的问题为了解决这样一个问题，即当使用液体排出头施加PZT前体（溶胶 - 凝胶液）形成机电转换膜时，会发生不均匀的膜厚度以引起膜的开裂或出现问题热处理过程中的电特性。解决方案：制造机电转换构件的方法包括部分地在电极上进行表面改性的步骤，通过用金属络合物的溶胶 - 凝胶液部分地涂覆电极来形成图案化机电转换膜的步骤从第一液体排出头排出的氧化物，用与第二液体排出头排出的溶胶 - 凝胶液不同的液体涂覆电极的步骤，用于干燥，部分涂布的溶胶 - 凝胶液的热分解和结晶的步骤，以及通过重复这些步骤获得所需膜厚的步骤。版权所有（C）2012，JPO＆INPIT

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