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1. 发明专利

JP2013131712A Inactive gas injection apparatus 有权
标题翻译：不活动气体注射装置
公开(公告)号：JP2013131712A
公开(公告)日：2013-07-04
申请号：JP2011281857
申请日：2011-12-22
申请人： Daifuku Co Ltd , 株式会社ダイフク
发明人： TAKAHARA MASAHIRO , UEDA TOSHITO
IPC分类号： H01L21/673 , H01L21/02
CPC分类号： H01L21/67393 , B65B31/04 , H01L21/67769
摘要： PROBLEM TO BE SOLVED: To provide an inactive gas injection apparatus which prevents a substrate from deteriorating from the proper state and also prevents particles from adhering to the substrate when an inactive gas is injected into a container.SOLUTION: In an inactive gas injection apparatus, injection means N, which injects an inactive gas from an air inlet 50i of a container 50 into the container 50 while discharging a gas in the container 50 from an air outlet 50o of the container 50 to the exterior, is installed on a support part supporting the container 50 housing a substrate W, and the inactive gas injection apparatus is provided with control means H controlling the operation of the injection means N. The injection means N is formed so that the supply flow rate of the inactive gas may change. The control means H is formed so as to control the operation of the injection means N so that the supply flow rate is gradually increased toward a target flow rate when the inactive gas is supplied to the container 50 supported by the support part.
摘要翻译：要解决的问题：提供一种无效气体注入装置，其防止基板从正常状态劣化，并且当惰性气体注入容器时也防止颗粒附着到基板上。解决方案：在惰性气体注入装置中，注射装置N将从容器50的空气入口50i进入容器50的惰性气体从容器50的空气出口50o排出到外部，同时将容器50中的气体从容器50的空气出口50o排出到外部，容纳基板W的容器50，并且非活性气体注入装置设置有控制喷射装置N的操作的控制装置H.喷射装置N形成为使得惰性气体的供给流量可能改变。控制装置H形成为控制喷射装置N的操作，使得当将惰性气体供应到由支撑部支撑的容器50时，供应流量朝向目标流量逐渐增加。

2. 发明专利

JP2014241377A 保管棚用の不活性ガス注入装置有权
标题翻译：用于保存架的燃气喷射装置
公开(公告)号：JP2014241377A
公开(公告)日：2014-12-25
申请号：JP2013123858
申请日：2013-06-12
申请人：株式会社ダイフク , Daifuku Co Ltd
发明人： TAKAHARA MASAHIRO , UEDA TOSHITO
IPC分类号： H01L21/673 , B65G1/00
CPC分类号： F17C13/02 , F17C2221/014 , F17C2227/044 , F17C2250/03 , F17C2250/032 , F17C2250/07 , F17C2260/04 , F17C2270/0518 , F17C2270/059
摘要：【課題】不活性ガスの供給を停止した状態での点検作業に加えて、不活性ガスの供給が変更されることなく継続した状態での点検作業を行うことができる保管棚用の不活性ガス注入装置が求められる。【解決手段】停止無効指令が指令されていない通常停止状態において、点検扉の開状態が検出された場合は、容器50に対する不活性ガスの供給を停止させ、停止無効指令が指令された停止無効状態において、点検扉55の開状態が検出された場合は、直前供給パターンに基づく不活性ガスの供給を継続させると共に、直前供給パターンを定めるパラメータの人為操作による変更を禁止する保管棚用の不活性ガス注入装置。【選択図】図4
摘要翻译：要解决的问题：除了在惰性气体供应停止的状态下的检查工作之外，还提供一种能够在不改变惰性气体供给的状态下进行检查工作的保存架的惰性气体注入装置。在没有指示停止无效的正常停止状态下检测到检查门的打开状态的情况下，用于保存架的惰性气体注入装置停止向容器50供给惰性气体。在打开状态在停止无效指令的停止无效状态下检测到检查门55，该装置基于先前的供给模式继续供应惰性气体，并且禁止对确定先前供给模式的参数的人为改变。

3. 发明专利

JP2013133194A Article storage facility 有权
标题翻译：文章存储设施
公开(公告)号：JP2013133194A
公开(公告)日：2013-07-08
申请号：JP2011284257
申请日：2011-12-26
申请人： Daifuku Co Ltd , 株式会社ダイフク
发明人： OTSUKA HIROSHI , TAKAHARA MASAHIRO , UEDA TOSHITO
IPC分类号： B65G1/00
CPC分类号： H01L21/67769 , A47F10/00 , H01L21/67393
摘要： PROBLEM TO BE SOLVED: To provide an article storage facility capable of preventing problems in a substrate in a conveyance container housed in a housing part even when inert gas can not be appropriately supplied to the housing part.SOLUTION: The article storage facility includes supply parts 62 for sections, a plurality of supply parts 63 for housing parts, a bypass part 72 for communicating, among the plurality of supply parts 63 for the housing parts, two or more supply parts 63 for the housing part with one another, and a bypass switch valve 73 for switching the bypass part 72 between an open state where the inert gas can flow and a closed state where the inert gas can not flow.
摘要翻译：要解决的问题：提供一种即使在惰性气体不能适当地供给到壳体部件的情况下，也能够防止容纳在壳体部的输送容器内的基板的问题的物品收纳设备。解决方案：物品收纳设备包括供给部件用于容纳部分的多个供给部63，用于壳体部的多个供给部63之间用于连通的旁通部72，用于壳体部的两个以上供给部63和旁路用于将旁路部72切换到惰性气体可以流动的打开状态和惰性气体不能流动的关闭状态的切换阀73。

4. 发明专利

JP2013100152A Article storage facility 有权
标题翻译：文章存储设施
公开(公告)号：JP2013100152A
公开(公告)日：2013-05-23
申请号：JP2011243847
申请日：2011-11-07
申请人： Daifuku Co Ltd , 株式会社ダイフク
发明人： UEDA TOSHITO , TANAKA SHIGEYUKI
IPC分类号： B65G1/04
摘要： PROBLEM TO BE SOLVED: To provide an article storage facility capable of determining, by a simple process, timing for starting protrusion operation of an article holding part from a retracted position.SOLUTION: Movement control is performed which controls movement of a movement base so that if a storage part as a transfer work target is instructed among a plurality of storage parts, it is accelerated to a set moving speed from a movement start position and it is moved at the set moving speed, and then it is decelerated to be moved to a target stop position for the storage part as the transfer work target, and protrusion control is performed which starts protrusion operation from a retracted position when an elapsed time clocked by a clocking means reaches a time shorter, by a protrusion set time, than a time required for movement of the movement base from the movement start position to the target stop position, and starts to make the article holding part in a transfer device to protrude and operate from the retracted position toward a protrusion position before the movement base stops at the target stop position.
摘要翻译：要解决的问题：提供一种能够通过简单的处理来确定物品保持部从缩回位置的突出操作的定时的物品存储设备。解决方案：执行移动控制，其控制移动基座的移动，使得如果在多个存储部分中指示作为传送作业目标的存储部件，则从移动开始位置被加速到设定的移动速度，并且以设定的移动速度移动，然后被减速以移动到作为传送作业目标的存储部的目标停止位置，并且执行突起控制，当经过时间被启动时，执行从缩回位置开始的突起操作通过计时装置比移动基座从移动开始位置移动到目标停止位置所需的时间更短的突出设定时间，并开始使物品保持部分在转印装置中突出并且在移动基座停止在目标停止位置之前从缩回位置朝向突出位置操作。版权所有（C）2013，JPO＆INPIT

5. 发明专利

JP2013142009A Article storage facility 有权
标题翻译：文章存储设施
公开(公告)号：JP2013142009A
公开(公告)日：2013-07-22
申请号：JP2012001557
申请日：2012-01-06
申请人： Daifuku Co Ltd , 株式会社ダイフク
发明人： TAKAHARA MASAHIRO , UEDA TOSHITO
IPC分类号： B65G1/00 , H01L21/673
CPC分类号： B65B5/00 , H01L21/67393 , H01L21/67769
摘要： PROBLEM TO BE SOLVED: To provide article storage facility which can maintain favorable environment inside transport containers even when inert gas is supplied from an inert gas supply source to a plurality of transport containers.SOLUTION: When the number of inert gas supplying parts which are simultaneously put in a first supply state exceeds a simultaneous supply maximum number calculated by a simultaneous supply calculating part, inert gas supplying parts less than the simultaneous supply maximum number among the inert gas supply parts simultaneously in the first supply state are put in the first supply state as a simultaneous start processing #13, and a start delay processing of delaying start of the first supply state by a set delay time for the remaining inert gas supplying parts is executed.
摘要翻译：要解决的问题：提供即使在从惰性气体供给源向多个运送容器供给惰性气体的情况下也能够保持运输容器内的有利环境的物品收纳设备。解决方案：当同时存在惰性气体供给部件的数量处于第一供给状态的情况超过由同时供给计算部计算出的同时供给最大数量，在第一供给状态下同时供给惰性气体供给部中的同时供给最大数量的惰性气体供给部分被置于第一供给状态作为同时起动处理＃13，并且执行将剩余惰性气体供给部的设定延迟时间延迟第一供给状态的开始的开始延迟处理。

6. 发明专利

JP2010228856A Article conveying facility 有权
标题翻译：文章传送设施
公开(公告)号：JP2010228856A
公开(公告)日：2010-10-14
申请号：JP2009077391
申请日：2009-03-26
申请人： Daifuku Co Ltd , 株式会社ダイフク
发明人： UEDA TOSHITO
IPC分类号： B65G1/00
摘要： PROBLEM TO BE SOLVED: To provide an article conveying facility capable of previously preventing inconvenience by the fact that an article support body is projected out from retreated attitude in the state that a relationship of the existing state of an article on the article support body and a stopping position of an article transferring device is unsuitable.
SOLUTION: It is detected whether or not the article is in the proper stopping state that it is stopped at a scooped position in the state that the article is not present on the article support body or it is stopped at an unloaded position in the article is present on the article support body based on detection information of a position detection means for detecting a position in a shelf lateral width direction and a vertical direction of the article transferring device and an existence detection means for detecting existence of the article on the article support body of the article transferring device. Thereby, when it is detected that the article is in the proper stopping state, the article support body is projected out from retreated attitude when the projection instruction is instructed, and when it is detected that the article is not in the proper stopping state, the article support body is not projected out from the retreated attitude even if the projection instruction is instructed.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种物品输送设备，其能够在物品支撑体的现有状态与物品支撑物的现有状态的关系的状态下预先防止由物品支撑体从退避姿势中突出出来的不便之处身体和物品传送装置的停止位置是不合适的。
解决方案：检测物品是否处于正确的停止状态，即在物品不存在于物品支撑体上或者在物品支撑体上停止的状态下停止在舀取位置基于用于检测物品转移装置的货架横向宽度方向和竖直方向上的位置的位置检测装置的检测信息和用于检测物品传送装置的存在检测装置的检测信息，物品存在于物品支撑体上文章传送装置的物品支撑体。因此，当检测到物品处于适当的停止状态时，当指示投影指示时，物品支撑体从后退姿态突出，并且当检测到物品处于不正确的停止状态时，即使投影指示被指示，物品支撑体也不会退出撤退姿态。版权所有（C）2011，JPO＆INPIT

7. 发明专利

JP2009263035A Article delivering device 有权
标题翻译：文章传送设备
公开(公告)号：JP2009263035A
公开(公告)日：2009-11-12
申请号：JP2008111627
申请日：2008-04-22
申请人： Daifuku Co Ltd , 株式会社ダイフク
发明人： SAKATA HIROSHI , IKENAGA KENSUKE , UEDA TOSHITO
IPC分类号： B65G1/04 , B65G1/00
摘要： PROBLEM TO BE SOLVED: To provide an article delivering device capable of preventing abrasion of an accommodation shelf and an article as much as possible when articles accommodated in an accommodation part of the accommodation shelf are picked up. SOLUTION: This article delivering device includes a travel cart capable of traveling on a front side of an accommodation shelf, an article locating body capable of elevating along an elevation mast standing from the travel cart and moving forward and backward between a projecting position and a retreating position, and control means (H) controlling an elevation action and a forward and backward moving action of the article locating body for pick-up and accommodation processing. The control means moves the article locating body toward a retreating position by a setting distance at a specific timing while the article locating body is raised from a rising start position to a rising end position, in a scoop control, in which the article locating body is raised from the rising start position to the rising end position while it is projected to a projecting position and positioned in a lower space of the article accommodated in the accommodation part, and then retreated to the retreating position as pick-up processing. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在容纳在住宿架的容纳部分中的物品被拾起时尽可能多地防止住宿架和物品的磨损的物品传送装置。解决方案：该物品传送装置包括能够在住宿搁架的前侧行进的旅行车，能够沿着从旅行车站站立的升降桅杆升降并且在突出位置之间前后移动的物品定位体和退避位置，以及控制装置（H），其控制物品定位体的拾取和调节处理的升降动作和向前和向后移动动作。该控制装置在物品定位体是从上升起始位置升高到上升终止位置的同时将特定定时的物品定位体朝向退避位置移动设定距离，当其被投影到突出位置并且定位在容纳在容纳部分中的物品的较低空间中时，从升起的起始位置升高到上升端位置，然后作为拾取处理而退回至撤回位置。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2015009913A 保管設備有权
标题翻译：存储设备
公开(公告)号：JP2015009913A
公开(公告)日：2015-01-19
申请号：JP2013134269
申请日：2013-06-26
申请人：株式会社ダイフク , Daifuku Co Ltd
发明人： TAKAHARA MASAHIRO , UEDA TOSHITO
IPC分类号： B65G1/00 , H01L21/673
CPC分类号： H01L21/67769 , F17C13/02 , F17C2221/014 , F17C2227/044 , F17C2250/032 , F17C2270/0518 , F17C2270/059 , H01L21/67389 , H01L21/67393 , Y10T137/0419 , Y10T137/4259
摘要：【課題】収納部が設置される設置空間において不活性気体の濃度が局所的に高くなることを抑制できる保管設備を提供する。【解決手段】複数の収納部10Sにおける不活性気体の供給状態を監視して、複数の供給量調節装置40を制御し、複数の収納部10Sを複数の監視エリアに分けて複数の収納部10Sにおける不活性気体の供給状態を監視し、複数の監視エリアの夫々に属する収納部10Sへの不活性気体の供給状態が、予め定められた設定制限条件を満たすように、複数の供給量調節装置40を制御する。【選択図】図2
摘要翻译：要解决的问题：提供能够在安装存储部件的安装空间中抑制惰性气体浓度的局部增加的存储设备。解决方案：通过监测多个存储部件中的惰性气体供给状态来控制多个供给量调节装置40 如图10S所示，将多个存储部10S分割为多个监视区域，然后监视多个存储部10S中的惰性气体供给状态。控制多个供给量调节装置40，使得属于多个监视区域中的每一个的存储部10S的惰性气体供给状态满足预定的设定限制条件。

9. 发明专利

JP2013139319A Article storage facility 有权
标题翻译：文章存储设施
公开(公告)号：JP2013139319A
公开(公告)日：2013-07-18
申请号：JP2012000205
申请日：2012-01-04
申请人： Daifuku Co Ltd , 株式会社ダイフク
发明人： TAKAHARA MASAHIRO , UEDA TOSHITO
IPC分类号： B65G1/00 , H01L21/673
CPC分类号： H01L21/67393 , H01L21/67389 , H01L21/67769
摘要： PROBLEM TO BE SOLVED: To provide article storage facility configured to change the supply state of inert gas by an inert gas supply unit selected out of a plurality of inert gas supply units.SOLUTION: An article storage facility includes a specified supply unit selecting means for freely selecting any of or all of inert gas supply units as a specified supply unit. A control means controls a flow rate adjusting device to operate in a container storage mode of supplying the inert gas to a conveyance container in a prescribed supply manner, and also controls the flow rate adjusting device to operate in a specified supply unit supply mode of supplying the inert gas from the discharge port to the specified supply unit selected by the specified supply unit selecting means in a specified supply unit supply manner.
摘要翻译：要解决的问题：提供一种物品储存设备，其被配置为通过从多个惰性气体供应单元中选择的惰性气体供应单元来改变惰性气体的供给状态。一种物品存储设备包括：指定的供应单元选择装置，自由选择任何一个或全部惰性气体供应单元作为指定的供应单元。控制装置控制流量调节装置，以规定的供给方式将惰性气体供给到运送容器的容器储存模式进行操作，并且还控制流量调节装置以规定的供给单元供给模式进行动作由指定的供给单元选择单元以指定的供给单元供给方式从排出口向指定供给单元所选择的惰性气体。

10. 发明专利

JP2013139318A Article storage facility 有权
标题翻译：文章存储设施
公开(公告)号：JP2013139318A
公开(公告)日：2013-07-18
申请号：JP2012000204
申请日：2012-01-04
申请人： Daifuku Co Ltd , 株式会社ダイフク
发明人： TAKAHARA MASAHIRO , UEDA TOSHITO
IPC分类号： B65G1/137 , B65G1/00 , H01L21/673
CPC分类号： H01L21/67393 , H01L21/67011 , H01L21/67769
摘要： PROBLEM TO BE SOLVED: To provide article storage facility capable of suppressing the consumption of inert gas, and preventing a substrate in a conveying container from being stained.SOLUTION: An article storage facility includes: a conveying means for conveying conveyance containers to storage units in which the conveyance containers for storing substrates are stored; and an inert gas supply unit including a flow rate adjusting device to freely adjust the flow rate of the inert gas discharged from a discharge port with respect to a plurality of the storage units, and freely supply the inert gas into the conveyance containers. A control means H1 brings the storage units in storage supply states when the conveyance containers are stored in the storage units, when the conveyance containers are not stored in the storage units, brings the storage units in supply-suspended states, and in the case of storing the conveyance containers in the storage units, changes the storage units from supply-suspended states to pre-storage supply states, and thereafter, stores the conveyance containers in the storage units.
摘要翻译：要解决的问题：提供能够抑制惰性气体的消耗并防止输送容器中的基材被污染的物品储存设备。解决方案：物品储存设备包括：输送装置，用于将输送容器输送到存储单元存储用于存储基板的输送容器; 以及惰性气体供给单元，其包括流量调节装置，用于自由地调节从排出口排出的惰性气体相对于多个存储单元的流量，并将惰性气体自由地供给到输送容器中。当输送容器未被存储在存储单元中时，控制装置H1将输送容器存储在存储单元中时，将存储单元置于存储供应状态，使存储单元处于供应暂停状态，并且在将输送容器储存在存储单元中，将存储单元从供应暂停状态改变为预存储供应状态，然后将输送容器存储在存储单元中。

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