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    • 3. 发明专利
    • Method for producing zinc oxide thin film, antistatic thin film produced by the same, ultraviolet ray cut thin film, and transparent electrode thin film
    • 生产氧化锌薄膜的方法,由其生产的抗静电薄膜,超紫外线切割薄膜和透明电极薄膜
    • JP2012087021A
    • 2012-05-10
    • JP2010235992
    • 2010-10-20
    • Tosoh Finechem CorpUniv Of Miyazaki国立大学法人 宮崎大学東ソー・ファインケム株式会社
    • INABA KOICHIROTOYODA KOJIHAGA KENICHITOKUTOME KOICHIYOSHINO KENJITAKEMOTO HIROHITO
    • C01G9/02H01B5/14H01B13/00
    • PROBLEM TO BE SOLVED: To provide a zinc oxide thin film that has an average transmittance of 80% or higher for visible light even in low-temperature deposition where the heating temperature of a substrate during deposition is 300°C or lower and the volume resistivity is low enough to be utilizable for an antistatic thin film, from a composition containing, as base, an organic zinc compound or its partial hydrolyzate.SOLUTION: This method of manufacturing the zinc oxide thin film having an average transmittance of 80% or higher for visible radiation includes at least one operation of applying the following composition to a substrate surface under an inert gas atmosphere and then heating the obtained coating film. The composition is a solution obtained by dissolving the organic zinc compound or its partial hydrolyzate into a mixed solvent of an electron donative organic solvent and an organic solvent of a kind different from that of the electron donative organic solvent. The composition can further contain a group 3B element compound. An antistatic thin film consisting of the zinc oxide thin film obtained by the production method, an ultraviolet ray cut thin film, and a transparent electrode thin film are also provided.
    • 要解决的问题:为了提供即使在沉积期间基板的加热温度为300℃以下的低温沉积中,对于可见光的平均透射率为80%以上的氧化锌薄膜,以及 体积电阻率足够低,可用于抗静电薄膜,由含有有机锌化合物或其部分水解产物的组合物组成。 解决方案:对于可见光辐射的平均透射率为80%以上的氧化锌薄膜的制造方法,在惰性气体气氛下,至少具有将以下组成施加于基材表面的工序, 涂膜。 组合物是通过将有机锌化合物或其部分水解产物溶解在给电子性有机溶剂和与供电子性有机溶剂不同的有机溶剂的混合溶剂中而获得的溶液。 组合物还可以含有3B族元素化合物。 还提供了由通过制造方法获得的氧化锌薄膜,紫外线切割薄膜和透明电极薄膜构成的抗静电薄膜。 版权所有(C)2012,JPO&INPIT
    • 4. 发明专利
    • Composition for producing zinc oxide thin film and method for producing zinc oxide thin film using composition for producing doped zinc oxide thin film, antistatic thin film produced by the method, ultraviolet ray cut thin film, and transparent electrode thin film
    • 用于生产氧化锌薄膜的组合物和使用组合物生产氧化锌薄膜的氧化锌薄膜的方法,通过该方法生产的抗静电薄膜,超紫外线切割薄膜和透明电极薄膜
    • JP2012087015A
    • 2012-05-10
    • JP2010235480
    • 2010-10-20
    • Tosoh Finechem CorpUniv Of Miyazaki国立大学法人 宮崎大学東ソー・ファインケム株式会社
    • INABA KOICHIROTOYODA KOJIHAGA KENICHITOKUTOME KOICHIYOSHINO KENJITAKEMOTO HIROHITO
    • C01G9/02
    • PROBLEM TO BE SOLVED: To provide a method for obtaining a transparent zinc oxide thin film and a zinc oxide thin film doped with a group 3B element by coating film-formation such as spin coating, using a composition for producing the zinc oxide thin film that is made of organic zinc compound as raw material, has no ignitability, and is easily treated.SOLUTION: This method for producing the zinc oxide thin film having an average transmittance of 80% or higher for visible light includes at least one operation of applying one of compositions A-C to a substrate surface under an inert gas atmosphere and then heating the obtained coated object. The composition A contains partial hydrolyzate of an organic zinc compound, and the molar ratio of added water to the organic zinc compound is 0.05 or higher and lower than 0.4. The composition B contains a product obtained by adding water to a solution of the organic zinc compound and a group 3B element compound and partially hydrolyzing the organic zinc compound. The molar ratio of the group 3B element compound to the organic zinc compound is 0.005-0.3. The molar ratio of the addition amount of water to the total amount of the organic zinc compound and the group 3B element compound is 0.05 or higher and lower than 0.4. The composition C contains a product obtained by adding the group 3B element compound to the partial hydrolyzate of the organic zinc compound so that the molar ratio thereof to the organic zinc compound is 0.005-0.3. The molar ratio of the added water to the organic zinc compound is 0.05 or higher and lower than 0.4.
    • 待解决的问题:为了提供一种通过涂覆成膜如旋涂来获得掺杂有3B族元素的透明氧化锌薄膜和氧化锌薄膜的方法,使用用于制备氧化锌的组合物 由有机锌化合物作为原料制成的薄膜不具有点火性,易于处理。 解决方案:用于生产可见光的平均透射率为80%以上的氧化锌薄膜的方法包括在惰性气体气氛下将组合物AC施加到基板表面的至少一种操作,然后加热 获得涂层物体。 组合物A含有有机锌化合物的部分水解产物,添加水与有机锌化合物的摩尔比为0.05以上且低于0.4。 组合物B包含通过向有机锌化合物和3B族元素化合物的溶液中加入水并部分水解有机锌化合物而获得的产物。 3B族元素化合物与有机锌化合物的摩尔比为0.005〜0.3。 水的添加量与有机锌化合物和3B族元素化合物的总量的摩尔比为0.05以上且低于0.4。 组合物C含有通过将3B族元素化合物与有机锌化合物的部分水解产物相加而获得的产物,使得其与有机锌化合物的摩尔比为0.005-0.3。 加入的水与有机锌化合物的摩尔比为0.05以上且低于0.4。 版权所有(C)2012,JPO&INPIT
    • 5. 发明专利
    • Method for forming zinc oxide thin film
    • 形成氧化锌薄膜的方法
    • JP2010126402A
    • 2010-06-10
    • JP2008303132
    • 2008-11-27
    • Tosoh Finechem CorpUniv Of Miyazaki国立大学法人 宮崎大学東ソー・ファインケム株式会社
    • INABA KOICHIROTOYODA KOJIHAGA KENICHITOKUTOME KOICHIYOSHINO KENJI
    • C01G9/02
    • PROBLEM TO BE SOLVED: To provide a method for forming a transparent zinc oxide thin film, which needs no heating or the heating to a temperature of 300°C or lower, in consideration of a heat-resistant temperature of a plastic substrate, a cost required for heating, etc.
      SOLUTION: The method for forming the thin film includes a process of forming the thin film by spray coating of a solution containing an organozinc compound dissolved in an organic solvent, onto the surface of a substrate under an atmospheric pressure or a pressurized atmosphere, in the presence of water and at 300°C or lower temperature of the substrate. The organic solvent has an electron-donative property and the organozinc compound is expressed by the formula (1): R
      1 -Zn-R
      1 (wherein R
      1 is a 1-7C linear or branched alkyl group).
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:考虑到塑料基板的耐热温度,提供一种形成不需要加热或加热到300℃以下的透明氧化锌薄膜的方法 ,加热所需的成本等。解决方案:用于形成薄膜的方法包括通过将溶解在有机溶剂中的含有机锌化合物的溶液喷雾涂覆在所述薄膜的表面上而形成薄膜的方法 在大气压或加压气氛下,在水的存在下和在基板的300℃或更低的温度下进行。 有机溶剂具有给电子性,有机锌化合物由式(1)表示:其中R 1 -Zn-R 1 是1-7C直链或支链烷基)。 版权所有(C)2010,JPO&INPIT
    • 8. 发明专利
    • Method for producing thin film by using composition for production of complex oxide thin film
    • 通过使用组合物生产复合氧化物薄膜生产薄膜的方法
    • JP2012106917A
    • 2012-06-07
    • JP2011229603
    • 2011-10-19
    • Tosoh Finechem CorpUniv Of Miyazaki国立大学法人 宮崎大学東ソー・ファインケム株式会社
    • HAGA KENICHIINABA KOICHIROTOYODA KOJITOKUTOME KOICHIYOSHINO KENJITAKEMOTO HIROHITO
    • C01G9/00C01G15/00H01L21/368
    • PROBLEM TO BE SOLVED: To provide a method for depositing a complex oxide thin film applicable to an oxide semiconductor film etc. such as an IGZO, by using a composition which is based on diethyl zinc or a partial hydrolyzate of an organic zinc compound such as diethyl zinc.SOLUTION: A method for producing a zinc oxide thin film having ≥80% of average transmittance to visible rays includes an operation to apply a composition containing an organic zinc compound represented by general formula (1) or a partial hydrolyzate of the organic zinc compound with water, and a compound of a group 3B element or a partial hydrolyzate of the compound of the group 3B element with water, wherein the molar ratio of the group 3B element to zinc is >0.1 and ≤5, to a substrate surface in an inert gas atmosphere, and next to heat the obtained coated film at least once. R-Zn-R(1) (in formula, Ris a straight-chain or branched 1-7C alkyl group). The composition further optionally contains an organic solvent.
    • 要解决的问题:提供一种沉积可应用于诸如IGZO的氧化物半导体膜等的复合氧化物薄膜的方法,通过使用基于二乙基锌的组合物或有机锌的部分水解产物 化合物如二乙基锌。 < P>解决方案:一种具有≥80%的对可见光透射率的平均透射率的氧化锌薄膜的制造方法,包括:将通式(1)表示的有机锌化合物或有机锌的部分水解物 锌化合物与水的混合物,以及第3B族元素化合物的3B族元素或部分水解产物与水的化合物,其中3B族元素与锌的摩尔比> 0.1和≤5,与基底表面 在惰性气体气氛中,然后将得到的涂膜加热至少一次。 1 -Zn-R 1 (1)(在公式中,R 1 SP>是直链或支链的1-7C烷基)。 组合物进一步任选地含有有机溶剂。 版权所有(C)2012,JPO&INPIT
    • 9. 发明专利
    • Composition for production of doped zinc oxide thin film, process for production of doped zinc oxide thin film
    • 用于生产氧化锌薄膜的组合物,用于生产氧化锌薄膜的方法
    • JP2010267383A
    • 2010-11-25
    • JP2009115111
    • 2009-05-12
    • Tosoh Finechem CorpUniv Of Miyazaki国立大学法人 宮崎大学東ソー・ファインケム株式会社
    • INABA KOICHIROTOYODA KOJIHAGA KENICHITOKUTOME KOICHIYOSHINO KENJI
    • H01B13/00C01G9/02C08J7/06
    • PROBLEM TO BE SOLVED: To provide a composition for production of a doped zinc oxide thin film, with which the zinc oxide thin film with transparency and low resistance can be obtained without heating at a film manufacturing stage or with heating at 300°C or less even if heated, and to provide a process for production of the doped zinc oxide thin film using the composition.
      SOLUTION: The composition for forming the zinc oxide thin film contains in its electron-donating organic solvent: an organic zinc compound represented by general formula (1) R
      1 -Zn-R
      1 (in the formula, R
      1 is an alkyl group); and an organic group 3B element compound represented by general formula (2) (in the formula, M is a group 3B element; and R
      2 , R
      3 and R
      4 are independently hydrogen or an alkyl group). A molar ratio of the organic group 3B element compound to the organic zinc compound is in a range of 0.001 to 0.3. The process for production of the doped zinc oxide thin film to form the zinc oxide thin film with the doped group 3B element includes spray coating of the composition on a substrate surface under an atmospheric pressure or under an added pressure, under an atmosphere of water existence, and under a condition of substrate temperature of 300°C or less.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种用于生产掺杂的氧化锌薄膜的组合物,通过该组合物可以获得具有透明度和低电阻的氧化锌薄膜,而不在膜制造阶段加热或在300℃加热 即使加热,也可以使用该组合物提供生产掺杂的氧化锌薄膜的工艺。 解决方案:用于形成氧化锌薄膜的组合物在其给电子有机溶剂中含有:由通式(1)表示的有机锌化合物R 1 -Zn-R 1 (式中,R 1 为烷基); 和通式(2)表示的有机基团3B元素化合物(式中,M为第3B族元素,R SP 3,R SP,R SP > 4 独立地是氢或烷基)。 有机基团3B元素化合物与有机锌化合物的摩尔比为0.001〜0.3。 用掺杂的3B族元素形成氧化锌薄膜的掺杂氧化锌薄膜的制造方法包括在大气压或加压下,在水存在的气氛下,在基板表面上喷涂该组合物 ,并且在基板温度为300℃以下的条件下进行。 版权所有(C)2011,JPO&INPIT