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1. 发明专利

JP2017083791A ペリクル、ペリクルの製造方法及びペリクルを用いた露光方法审中-公开
公开(公告)号：JP2017083791A
公开(公告)日：2017-05-18
申请号：JP2015215079
申请日：2015-10-30
申请人：三井化学株式会社 , Mitsui Chemicals Inc
发明人： OKUBO ATSUSHI , MIYAJIMA TSUNEAKI , ONO YOSUKE , TAKAMURA KAZUO
IPC分类号： G03F1/62 , G03F1/64
摘要：【課題】フォトマスクに着脱可能に載置し、十分な通気を確保しつつ、塵埃等の流入を防止した極端紫外光リソグラフィ用のペリクル、その製造方法及び露光方法を提供する。【解決手段】ペリクル膜を配置した第1の枠体と、前記第1の枠体を支持する第2の枠体と、前記第2の枠体の縁部に配置された係合部と、前記第1の枠体又は前記第2の枠体の少なくとも何れかを貫通する貫通孔と、前記貫通孔を覆い、前記第1の枠体又は第2の枠体の外側の面に配置されたフィルタと、前記第1の枠体と接続する面とは反対側の前記第2の枠体の面に配置された弾性部材と、を備えるペリクル。【選択図】図1

2. 发明专利

JP2014034590A Polyimide film and method for producing the same 有权
标题翻译：聚酰亚胺膜及其制造方法
公开(公告)号：JP2014034590A
公开(公告)日：2014-02-24
申请号：JP2012175013
申请日：2012-08-07
申请人： Mitsui Chemicals Inc , 三井化学株式会社
发明人： SAKATA YOSHIHIRO , FUKUKAWA KENICHI , OKAZAKI MASAKI , URAGAMI TATSUNOBU , MATSUDA TOSHINORI , ONO YOSUKE , YAMASHITA WATARU
IPC分类号： C08J5/18 , B29C41/12 , C08G73/10 , G02B5/20 , G02F1/1333 , H01L51/50 , H05B33/02
摘要： PROBLEM TO BE SOLVED: To provide a polyimide film and a method for producing the same, the film having high optical transparency and a small in-plane retardation.SOLUTION: A production method is provided for a polyimide film having overall light transmittance of 80% or more and an in-plane retardation of 10 nm or less. The method includes steps of: (a) applying a polyimide precursor-containing solution containing a polyimide precursor on a substrate; (b) heating a polyimide precursor film comprising the coating film of the polyimide precursor-containing solution until an imidization rate of the polyimide precursor reaches 90% or more and the residual amount of the solvent is reduced to 1 mass% or less; (c) peeling off the film obtained in step (b) from the substrate; and (d) heating the film obtained in step (c) again. In the step (d), a heating temperature of the film obtained in step (c) is controlled to be equal to or lower than the glass transition temperature of the polyimide.
摘要翻译：要解决的问题：为了提供一种聚酰亚胺膜及其制造方法，该膜具有高的光学透明度和小的面内延迟。解决方案：提供了一种制备方法，该聚酰亚胺膜的总透光率为80％以上，面内延迟为10nm以下。该方法包括以下步骤：（a）在基材上涂布含有聚酰亚胺前体的含聚酰亚胺前体溶液; （b）加热含有聚酰亚胺前体的溶液的涂膜的聚酰亚胺前体膜，直到聚酰亚胺前体的酰亚胺化率达到90％以上，溶剂的残留量为1质量％以下。（c）从基板剥离步骤（b）中获得的膜; 和（d）再次加热步骤（c）中获得的膜。在步骤（d）中，将步骤（c）中获得的膜的加热温度控制在等于或低于聚酰亚胺的玻璃化转变温度。

3. 发明专利

JP2012233021A Method for manufacturing polyimide film 有权
标题翻译：制备聚酰亚胺膜的方法
公开(公告)号：JP2012233021A
公开(公告)日：2012-11-29
申请号：JP2011100333
申请日：2011-04-28
申请人： Mitsui Chemicals Inc , 三井化学株式会社
发明人： MATSUDA TOSHINORI , ONO YOSUKE , KAGAYAMA AKISHI , SAKATA YOSHIHIRO , YAMASHITA WATARU , FUKUKAWA KENICHI
IPC分类号： C08J5/18 , C08G73/10
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a polyimide film, which does not cause appearance defects and a decrease in strength, and whitening and the like involved in the imidization reaction.SOLUTION: The method for manufacturing a polyimide film includes: (a) a step of coating on a support a polyamic acid-containing solution obtained by reacting a specific tetracarboxylic dianhydride with a specific diamine in a solvent; (b) a step of drying the solvent in the polyamic acid-containing solution at a temperature of 150°C or lower until a polyamic acid-containing film composed of a coating film of the polyamic acid-containing solution becomes tack-free; (c) a step of peeling the polyamic acid-containing film from the support; and (d) a step of fixing and heating the polyamic acid-containing film while the temperature is being raised from 150°C or lower to imidize the polyamic acid to thereby obtain the polyimide film.
摘要翻译：要解决的问题：提供一种不引起外观缺陷和强度降低的方法，以及涉及酰亚胺化反应的美白等。聚酰亚胺膜的制造方法包括：（a）在载体上涂布通过使特定的四羧酸二酐与特定的二胺在溶剂中反应得到的含聚酰胺酸的溶液的工序; （b）在150℃以下的温度下干燥含有聚酰胺酸的溶液中的溶剂，直到由含聚酰胺酸的溶液的涂膜组成的含聚酰胺酸的膜变得无粘性的步骤; （c）从载体剥离含聚酰胺酸的膜的步骤; 和（d）在将温度从150℃以上升温至聚酰胺酸酰亚胺化的同时，对含有聚酰胺酸的膜进行固定加热的步骤，得到聚酰亚胺膜。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2013052604A Heat-resistant double-sided metal laminated plate, heat-resistant transparent film using the same, and heat-resistant transparent circuit board 有权
标题翻译：耐高温双面金属层压板，耐热透明膜及耐热透明电路板
公开(公告)号：JP2013052604A
公开(公告)日：2013-03-21
申请号：JP2011192886
申请日：2011-09-05
申请人： Mitsui Chemicals Inc , 三井化学株式会社
发明人： SAKATA YOSHIHIRO , FUKUKAWA KENICHI , OKAZAKI MASAKI , URAGAMI TATSUNOBU , YAMASHITA WATARU , MATSUDA TOSHINORI , ONO YOSUKE , KAGAYAMA AKISHI
IPC分类号： B32B15/088 , B32B15/08 , B32B27/34 , C08G73/10 , H05K1/03
摘要： PROBLEM TO BE SOLVED: To obtain a heat-resistant double-sided metal laminated plate having metal layers on both sides of a polyimide film, having superior adhesiveness to metal, in which there is no change in dimensions even during soldering work, and in which there is less change in dimensions even during etching of the metal layers.SOLUTION: The heat-resistant double-sided metal laminate is obtained by preparing two laminates including: a metal foil; a first layer obtained by coating a block polyamic acid imide solution containing a specific block polyamic acid imide and a solvent over the metal foil and heating and drying the same; and a second layer obtained by coating a polyamic acid solution containing a specific polyamic acid and a solvent over the first layer and heating and drying the same. The two layers are made to face each other and are applied with thermo-compression bonding at 250-300°C.
摘要翻译：要解决的问题为了获得在聚酰亚胺膜的两侧具有金属层的耐热双面金属层压板，即使在焊接加工中也不会发生尺寸变化，对金属具有优良的粘合性，即使在金属层的蚀刻期间也存在较小的尺寸变化。解决方案：耐热双面金属层压板通过制备两个层压板获得，包括：金属箔; 通过在金属箔上涂覆含有特定嵌段聚酰胺酰亚胺和溶剂的嵌段聚酰胺酰亚胺溶液并加热并干燥而获得的第一层; 以及通过在第一层上涂布含有特定聚酰胺酸和溶剂的聚酰胺酸溶液并加热并干燥而获得的第二层。使两层相互面对并在250-300℃下进行热压接。版权所有（C）2013，JPO＆INPIT

5. 发明专利

JP2012256005A Liquid crystal alignment layer and liquid crystal display device having the same 有权
标题翻译：液晶对准层和液晶显示装置
公开(公告)号：JP2012256005A
公开(公告)日：2012-12-27
申请号：JP2011130352
申请日：2011-06-10
申请人： Mitsui Chemicals Inc , 三井化学株式会社
发明人： ONO YOSUKE , SHICHIJO SHIRO
IPC分类号： G02F1/1337 , C08G73/10 , G02F1/13363
摘要： PROBLEM TO BE SOLVED: To provide a liquid crystal alignment layer having a function of aligning a liquid crystal, for reducing the number of retardation films used in a liquid crystal display device and contributing to cost reduction.SOLUTION: Liquid crystal alignment layers 12-1, 22-1 contain a polyimide material comprising a tetracarboxylic acid dianhydride expressed by general formula (A) and diamines expressed by general formulae (B-1) to (B-3).

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