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1. 发明专利

JP2014203507A プラズモンジェネレータの製造方法有权
标题翻译： PLASMON发电机的制造方法
公开(公告)号：JP2014203507A
公开(公告)日：2014-10-27
申请号：JP2013223049
申请日：2013-10-28
申请人：ヘッドウェイテクノロジーズインコーポレイテッド , Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： TANEMURA SHIGEKI , SASAKI YOSHITAKA , ITO HIROYUKI , IKEGAWA YUKINORI , ARAKI HIRONORI , TOMITA SEIICHIRO
IPC分类号： G11B5/31 , G11B5/02
CPC分类号： G11B5/3163 , G11B5/314 , G11B5/6088 , G11B5/84 , G11B2005/0021 , Y10T29/49032
摘要：【課題】信頼性の高いプラズモンジェネレータを製造する。【解決手段】プラズモンジェネレータの製造方法は、金属多結晶体よりなり、後にプラズモンジェネレータとなるプラズモンジェネレータ予定部を含む初期膜501を形成する工程と、少なくともプラズモンジェネレータ予定部において、金属多結晶体を構成する複数の結晶粒が成長するように、加熱用光を用いて初期膜501を加熱する工程と、初期膜501の加熱を停止する工程と、加熱を停止する工程の後で、初期膜501を加工してプラズモンジェネレータを形成する工程とを備えている。プラズモンジェネレータを形成する工程は、プラズモンジェネレータ予定部に、近接場光を発生する前端面を形成する工程を含む。【選択図】図9
摘要翻译：要解决的问题：制造高可靠性等离子体发生器。解决方案：等离子体发生器的制造方法包括以下步骤：形成包括由金属多晶材料形成的待等离子体发生器部分的初始膜501和稍后成为等离子体发生器在至少等离子体发生器部分上使用加热光加热初始膜501，以便生长构成金属多晶材料的多个晶粒; 停止初始膜501的加热; 并且在停止加热的步骤之后处理初始膜501以形成等离子体激元发生器。形成等离子体发生器的步骤包括在待等离子体发生器部分上形成用于产生近场光的前端面的步骤。

2. 发明专利

JP2013229088A Perpendicular magnetic recording head with magnetic return path section 有权
标题翻译：具磁性返回路段的全磁性记录头
公开(公告)号：JP2013229088A
公开(公告)日：2013-11-07
申请号：JP2012274306
申请日：2012-12-17
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド , Sae Magnetics(H K )Ltd , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , ARAKI HIRONORI , TOMITA SEIICHIRO , SATO KAZUKI , TANEMURA SHIGEKI , SHIMIZU TATSUYA
IPC分类号： G11B5/31
CPC分类号： G11B5/1278 , G11B5/17 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： PROBLEM TO BE SOLVED: To avoid problems caused by a large area of an end face of a magnetic return path section, which is located on the rear side with respect to a main magnetic pole in a moving direction of a recording medium, being exposed on a medium facing surface.SOLUTION: A magnetic head includes a coil, a mail magnetic pole 15, a shield 16, a magnetic return path section 30, and an accommodating section 50, which are located above an upper surface 1a of a substrate 1. The accommodating section 50 accommodates at least a portion of the magnetic return path section 30. The magnetic return path section 30 is located between the main magnetic pole 15 and the upper surface 1a of the substrate 1 and connects a portion of the main magnetic pole 15 away from a medium facing surface 80 with the shield 16 to form a space for a portion of the coil to pass through. The accommodating section 50 includes an intervening section 50A which stands between the magnetic return path section 30 and the medium facing surface 80, and the intervening section 50A has a sloped surface 50Aa facing the magnetic return path section 30. The magnetic return path section 30 includes a sloped section 31B which is located between a portion of the coil and the sloped surface 50Aa and extending along the sloped surface 50Aa.
摘要翻译：要解决的问题：为了避免在记录介质的移动方向上相对于主磁极位于后侧的磁性返回路径部分的大面积面积引起的问题被暴露在面向介质的表面。解决方案：磁头包括位于基板1的上表面1a上方的线圈，邮磁磁极15，屏蔽层16，磁返回路径部分30和容纳部分50。容纳部50容纳回磁通路部30的至少一部分。磁返回路径部30位于主磁极15与基板1的上表面1a之间，并且将主磁极15的一部分远离具有屏蔽16的介质面向表面80，以形成用于线圈的一部分通过的空间。容纳部分50包括位于磁返回路径部分30和介质相对表面80之间的中间部分50A，并且中间部分50A具有面向磁返回路径部分30的倾斜表面50Aa。磁返回路径部分30包括位于线圈的一部分和倾斜表面50Aa之间并沿着倾斜表面50Aa延伸的倾斜部分31B。

3. 发明专利

JP2013065389A Method of manufacturing plasmon generator 有权
标题翻译：制造等离子发生器的方法
公开(公告)号：JP2013065389A
公开(公告)日：2013-04-11
申请号：JP2012097331
申请日：2012-04-23
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ARAKI HIRONORI , SATO KAZUKI , YASUDA KAZUMASA
IPC分类号： G11B5/31 , G11B5/02 , G11B7/22
CPC分类号： G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To manufacture a plasmon generator whose front end face including a near-field light generating part is small in width.SOLUTION: A plasmon generator 50 includes a propagation part 51 for propagating a surface plasmon. The propagation part 51 has a bottom surface 51a, a top surface 51b, a first side surface 51c, a second side surface 51d and a front end face 51e. The front end face 51e includes a near-field light generating part 51g. A method of manufacturing the plasmon generator 50 includes the steps of: forming a base part; forming a metal film that is to later become the plasmon generator; and forming a filler layer. The base part includes a base surface and a protruding part that protrudes from the base surface. The protruding part has a top surface that is different in level from the base surface, and a first sidewall 241Pb connecting the top surface of the protruding part to the base surface. The metal film includes an adhesion part adhering to the first sidewall 241Pb. The filler layer has a second sidewall disposed such that the adhesion part is interposed between the first sidewall 241Pb and the second sidewall.
摘要翻译：要解决的问题：制造包括近场光产生部分的前端面的宽度小的等离子体激元发生器。解决方案：等离子体发生器50包括用于传播表面等离子体激元的传播部分51。传播部51具有底面51a，顶面51b，第一侧面51c，第二侧面51d和前端面51e。前端面51e包括近场光产生部51g。制造等离子体发生器50的方法包括以下步骤：形成基部; 形成以后成为等离子体发生器的金属膜; 并形成填料层。基部包括基部表面和从基部表面突出的突出部分。突出部分具有与基部表面不同的顶表面，以及将突出部分的顶表面连接到基底表面的第一侧壁241Pb。金属膜包括附着在第一侧壁241Pb上的粘接部。填充层具有第二侧壁，该第二侧壁设置成使得粘附部分插入在第一侧壁241Pb和第二侧壁之间。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2011134428A Heat-assisted magnetic recording head with internal mirror 有权
标题翻译：热辅助磁记录头与内镜
公开(公告)号：JP2011134428A
公开(公告)日：2011-07-07
申请号：JP2010161422
申请日：2010-07-16
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： ARAKI HIRONORI , SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ISHIZAKI KAZUO , HORINAKA TAKEHIRO
IPC分类号： G11B5/31
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/001 , G11B2005/0021 , Y10T29/49032
摘要： PROBLEM TO BE SOLVED: To prevent reduction in utilizing efficiency of light caused by an internal mirror. SOLUTION: A heat-assisted magnetic recording head has an internal mirror 30 that includes a reflecting film support body 27 and a reflecting film 35. The internal mirror 30 reflects light that comes from above a waveguide 26 so that the reflected light travels through the waveguide 26 toward a medium facing surface. The reflecting film support body 27 includes first and second inclined surfaces 272a and 272b. The reflecting film 35 includes first and second portions 351 and 352 that are located on the first and second inclined surfaces 272a and 272b, respectively. The step of forming the reflecting film support body 27 includes two-taper etching for an initial support body. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了防止由内部反射镜引起的光的利用效率的降低。解决方案：热辅助磁记录头具有包括反射膜支撑体27和反射膜35的内反射镜30.内反射镜30反射来自波导26上方的光，使得反射光行进通过波导26朝向面向介质的表面。反射膜支撑体27包括第一和第二倾斜表面272a和272b。反射膜35包括分别位于第一和第二倾斜表面272a和272b上的第一和第二部分351和352。形成反射膜支撑体27的步骤包括用于初始支撑体的双锥度蚀刻。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2011023093A Heat-assisted magnetic recording head with laser diode fixed to slider 有权
标题翻译：热辅助磁记录头，激光二极管固定在滑块上
公开(公告)号：JP2011023093A
公开(公告)日：2011-02-03
申请号：JP2010019274
申请日：2010-01-29
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ARAKI HIRONORI
IPC分类号： G11B5/31 , G11B5/02 , G11B5/60
CPC分类号： G11B5/314 , G11B5/4866 , G11B2005/001 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To provide a heat-assisted magnetic recording head that allows easy alignment of laser light with a waveguide while using an edge-emitting laser diode as the light source for emitting light that is used for generating near-field light.
SOLUTION: A heat-assisted magnetic recording head 200 includes a slider 201, an edge-emitting laser diode 202 fixed to the slider 201, and an external mirror 203 provided outside the slider 201. The slider 201 includes a magnetic pole, a waveguide, a near-field light generating element, and a substrate. The laser diode 202 includes: an active layer; an emitting end face that lies at an end in a direction parallel to the plane of the active layer and includes an emission part for emitting laser light; and a bottom surface that lies at an end in a direction perpendicular to the plane of the active layer. The laser diode is arranged so that the bottom surface faces the top surface 201c of the slider 201. The external mirror 203 reflects the laser light emitted from the emission part toward the waveguide.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种热辅助磁记录头，其允许在使用边缘发射激光二极管作为用于发射近场的光的光源时容易地对准激光与波导光。解决方案：热辅助磁记录头200包括滑块201，固定到滑块201的边缘发射激光二极管202和设置在滑块201外部的外部反射镜203.滑块201包括磁极，波导，近场光产生元件和衬底。激光二极管202包括：有源层; 位于与有源层的平面平行的方向上的端部的发射端面，并且包括用于发射激光的发射部分; 以及位于与有源层的平面垂直的方向上的端部的底表面。激光二极管被布置成使得底表面面向滑块201的顶表面201c。外反射镜203将从发射部分发射的激光朝向波导反射。版权所有（C）2011，JPO＆INPIT

6. 发明专利

JP2010277676A Method for manufacturing perpendicular magnetic recording head, which has two side shields 有权
标题翻译：具有双面磁性记录头的磁性记录头的制造方法
公开(公告)号：JP2010277676A
公开(公告)日：2010-12-09
申请号：JP2009284430
申请日：2009-12-15
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： ISHIZAKI KAZUO , SASAKI YOSHITAKA , ARAKI HIRONORI , ITO HIROYUKI , TANEMURA SHIGEKI , HAN CHERNG-CHYI
IPC分类号： G11B5/31
CPC分类号： G11B5/3146 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： PROBLEM TO BE SOLVED: To make a precise alignment between a magnetic pole layer and two side shields and to control the shapes of the magnetic pole layer and two side shields. SOLUTION: A magnetic head includes: a magnetic pole layer 12; side shields 13C1, 13C2; and an accommodation layer 25 having groove parts 25a, 25b1 and 25b2 which accommodate the magnetic pole layer 12 and the side shields 13C1, 13C2. A method for manufacturing the magnetic head includes a process in which the groove parts 25a, 25b1 and 25b2 are formed in a nonmagnetic layer by using an etching mask layer having a first-third aperture parts. This process includes: a step in which the second and third aperture parts are covered with a first mask and etching is made to the nonmagnetic layer by using the first aperture part to form the groove part 25a; and a step in which the first aperture part is covered with a second mask and etching is made to the nonmagnetic layer by using the second and third aperture parts to form the groove parts 25b1, 25b2. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了在磁极层和两个侧面屏蔽之间进行精确对准，并且控制磁极层和两个侧面屏蔽件的形状。解决方案：磁头包括：磁极层12; 侧面屏蔽13C1，13C2; 以及具有容纳磁极层12和侧面罩13C1，13C2的槽部25a，25b1,25b2的容置层25。制造磁头的方法包括通过使用具有第一至第三孔径的蚀刻掩模层，将凹槽部分25a，25b1和25b2形成为非磁性层的工艺。该方法包括：第一和第三孔径部分被第一掩模覆盖的步骤，并且通过使用第一孔部分对非磁性层进行蚀刻以形成槽部分25a; 以及第一开口部被第二掩模覆盖的步骤，并且通过使用第二和第三孔部对非磁性层进行蚀刻以形成槽部25b1,25b2。版权所有（C）2011，JPO＆INPIT

7. 发明专利

JP2009277333A Method of manufacturing magnetic head for perpendicular magnetic recording 有权
标题翻译：磁性磁记录制作方法
公开(公告)号：JP2009277333A
公开(公告)日：2009-11-26
申请号：JP2008313457
申请日：2008-12-09
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , ARAKI HIRONORI , TANEMURA SHIGEKI , ISHIZAKI KAZUO , HORINAKA TAKEHIRO
IPC分类号： G11B5/31
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： PROBLEM TO BE SOLVED: To precisely form a magnetic pole layer capable of preventing problems resulting from skew and improving recording characteristics. SOLUTION: A magnetic head includes a magnetic pole layer, and an encasing layer 12 having a groove 12a that accommodates the magnetic pole layer. A manufacturing method for the magnetic head includes steps of: forming a nonmagnetic layer that may later forms the groove 12a thereat and may thereby become the encasing layer 12; forming the groove 12a in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer 12; and forming the magnetic pole layer so that the magnetic pole layer is accommodated in the groove 12a of the encasing layer 12. The nonmagnetic layer is formed of Al 2 O 3 . The step of forming the groove 12a in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl 3 and N 2 among BCl 3 , Cl 2 and N 2 . COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：精确地形成能够防止由于歪斜引起的问题和改善记录特性的磁极层。解决方案：磁头包括磁极层，以及具有容纳磁极层的槽12a的封装层12。一种用于磁头的制造方法包括以下步骤：形成可以稍后在其上形成凹槽12a的非磁性层，从而可能成为包层12; 在非磁性层中形成槽12a，使得非磁性层成为包层12; 并且形成磁极层，使得磁极层容纳在包层12的槽12a中。非磁性层由Al SB SB 3形成。在非磁性层中形成凹槽12a的步骤包括通过用至少包含BCl 3 SB 3和/或SB SB 3的蚀刻气体的反应离子蚀刻来对非磁性层进行锥蚀刻的步骤 > BCI 3 ，Cl 2 和N 2 。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2008021398A Magnetic head for perpendicular magnetic recording, and its manufacturing method 有权
标题翻译：磁性记录磁头及其制造方法
公开(公告)号：JP2008021398A
公开(公告)日：2008-01-31
申请号：JP2007038796
申请日：2007-02-20
申请人： Headway Technologies Inc , Shinka Jitsugyo Kk , ヘッドウェイテクノロジーズインコーポレイテッド , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , TANEMURA SHIGEKI , ARAKI HIRONORI , LI DONG-HONG , SHIMIZU TATSUJI , SHIMIZU TATSUYA
IPC分类号： G11B5/31
CPC分类号： G11B5/1278
摘要： PROBLEM TO BE SOLVED: To decide throat height accurately and to suppress an end part of a shield layer in a medium facing surface from being projected by heat generated by a coil. SOLUTION: The magnetic head is provided with a magnetic pole layer 16, a shield layer 20, a gap layer 18 arranged between the magnetic pole layer 16 and the shield layer 20, and a coil 23. The shield layer 20 has a first layer 20A, a second layer 20C, a third layer 20E and a forth layer 20G arranged in order on the gap layer 18. The first layer 20A has an end plane arranged in a medium facing surface 30. The second layer 20C has a first plane arranged in the medium facing surface 30, a second plane in contact with the first layer 20A, and a third plane reverse to the second plane. The third layer 20E is in contact with the third plane of the second layer 20C. Respective end planes near the medium facing surface 30 in the third layer 20E and the forth layer 20G are arranged far from the medium facing surface 30. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：准确地确定喉部高度并且抑制介质面向表面中的屏蔽层的端部被由线圈产生的热量投影。解决方案：磁头设置有磁极层16，屏蔽层20，布置在磁极层16和屏蔽层20之间的间隙层18和线圈23.屏蔽层20具有第一层20A，第二层20C，第三层20E和第四层20G依次布置在间隙层18上。第一层20A具有布置在介质面向表面30中的端面。第二层20C具有第一层布置在介质面向表面30中的平面，与第一层20A接触的第二平面和与第二平面相反的第三平面。第三层20E与第二层20C的第三平面接触。第三层20E和第四层20G中面向介质的表面30附近的各个端平面布置成远离介质面向表面30.版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2007026636A Structure for thin film magnetic head and its manufacturing method and thin film magnetic head 有权
标题翻译：薄膜磁头结构及其制造方法及薄膜磁头
公开(公告)号：JP2007026636A
公开(公告)日：2007-02-01
申请号：JP2006152192
申请日：2006-05-31
申请人： Headway Technologies Inc , Shinka Jitsugyo Kk , ヘッドウェイテクノロジーズインコーポレイテッド , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , KAMIKAMA TAKEHIRO , SHIMIZU TATSUJI , ARAKI HIRONORI , TANEMURA SHIGEKI , ISHIZAKI KAZUO
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： PROBLEM TO BE SOLVED: To improve an overwrite characteristics. SOLUTION: A manufacturing method for structure of a thin film magnetic heads is equipped with: a process for preparing an insulating layer 10; a process for forming, on the insulating layer 10, a first resist layer 51 having a first slit pattern 51a corresponding to an extra fine groove part and a second slit pattern 51b corresponding to a temporary groove part extending from the first slit pattern 51a and also integrally extending along an outer edge of a concave part of the main part; a process for etching the insulating layer 10 by using the first resist layer 51 as a mask; a process for removing the first resist layer 51; a process for forming a second resist layer having an opening pattern corresponding to the concave part of the main body on the insulating layer 10; and a process for etching the insulating layer 10 by using the second resist layer as the mask. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提高覆盖特性。解决方案：薄膜磁头结构的制造方法配备有：制备绝缘层10的工艺; 在绝缘层10上形成第一抗蚀剂层51，该第一抗蚀剂层51具有对应于从第一狭缝图案51a延伸的临时槽部分对应的第二狭缝图案51a和与第二狭缝图案51a延伸的第二狭缝图案51b相对应的第二狭缝图案51a，沿主体部分的凹部的外缘整体延伸; 通过使用第一抗蚀剂层51作为掩模来蚀刻绝缘层10的工艺; 去除第一抗蚀剂层51的工艺; 在绝缘层10上形成具有与主体的凹部对应的开口图案的第二抗蚀剂层的工序; 以及通过使用第二抗蚀剂层作为掩模来蚀刻绝缘层10的工艺。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2006252753A Magnetic head for perpendicular magnetic recording and method of manufacturing the same 有权
标题翻译：磁头记录用磁头及其制造方法
公开(公告)号：JP2006252753A
公开(公告)日：2006-09-21
申请号：JP2006058845
申请日：2006-03-06
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , ARAKI HIRONORI , HORINAKA TAKEHIRO , TANEMURA SHIGEKI
IPC分类号： G11B5/31
CPC分类号： G11B5/1278 , G11B5/3116 , Y10T29/49032 , Y10T29/49034 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： PROBLEM TO BE SOLVED: To accurately form a magnetic pole layer of a desired shape in a magnetic head for perpendicular magnetic recording, and a method of manufacturing the same. SOLUTION: The magnetic head is provided with an accommodation layer 15 made of a non-magnetic material and having a groove 15a that opens in the top surface, a non-magnetic metal layer 17 made of a non-magnetic metal material having a penetrating opening that is continuous to the groove 15a, and arranged on the top surface of the encasing layer 15, and a pole layer 24 made of a magnetic metal material and accommodated in the groove 15a of the accommodation layer 15 and in the opening 17a of the non-magnetic metal layer 17. The end face of the pole layer 24 arranged at a medium facing surface has a first portion 41 and a second portion that is loacated apart from a substrate at the first portion and connected to the first portion. The width of the first portion 41 is decreased as a distance from the substrate is decreased. The second portion 42 has a uniform width that defines the track width. On the medium facing surface, the non-magnetic metal layers 17 exist on both sides of the second portion 42 in the direction of the track width. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了在垂直磁记录用磁头中精确地形成期望形状的磁极层及其制造方法。解决方案：磁头设置有由非磁性材料制成并具有在顶表面上开口的槽15a的容纳层15，由非磁性金属材料制成的非磁性金属层17，其具有与凹槽15a连续并且布置在包装层15的顶表面上的贯穿孔，以及由磁性金属材料制成并容纳在容纳层15的槽15a中和开口17a中的极层24 非磁性金属层17上的极板层24的端面设置有第一部分41和第二部分，第一部分41和第二部分与第一部分处的基底相隔离，并连接到第一部分。第一部分41的宽度随着离开基板的距离减小而减小。第二部分42具有限定轨道宽度的均匀宽度。在介质表面上，非磁性金属层17沿轨道宽度的方向存在于第二部分42的两侧。版权所有（C）2006，JPO＆NCIPI

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