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1. 发明专利

JP2012098399A Galvano scanner and laser beam machine 有权
标题翻译： GALVANO扫描仪和激光光束机
公开(公告)号：JP2012098399A
公开(公告)日：2012-05-24
申请号：JP2010244421
申请日：2010-10-29
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： YAMAMOTO AKIHIRO , DOI AKIRA , MATSUKA DAISUKE , TOYAMA SOICHI , SUGAWARA HIROYUKI
IPC分类号： G02B26/10 , B23K26/08 , G02B26/08 , H02K1/27
CPC分类号： H02K33/00 , G02B26/105 , H02K1/276 , H02K1/2766 , H02K21/12 , H02K21/14 , H02K26/00 , H02K2213/03
摘要： PROBLEM TO BE SOLVED: To reduce consumption power at the time of driving by improving proportion of torque constant to moment of inertia and decreasing current required for driving.SOLUTION: A galvano scanner 1 includes: a rotor that comprises a shaft 10 which becomes a rotation center and a permanent magnet 11 which is arranged around the shaft and is divided into multiple poles in a circumferential direction of the shaft; and a stator that comprises coils 13, a yoke 14 and an outer case 15 which are arranged on the outside of the rotor through an air gap. In the galvano scanner 1 in which the rotor oscillates within a range of predetermined angle, the permanent magnet 11 includes grooves 50 in a direction of rotating shaft that are formed across magnetic poles of the permanent magnet 11 which are adjacent in a circumferential direction, and the permanent magnet 11 is divided into two or more pieces per pole by a division line 60.
摘要翻译：要解决的问题：通过提高转矩常数与转动惯量的比例以及减少驱动所需的电流来减少驾驶时的消耗功率。电动扫描仪1包括：转子，其包括成为旋转中心的轴10和围绕轴布置并沿着轴的圆周方向分成多个极的永磁体11; 以及包括通过空气间隙布置在转子外侧的线圈13，轭14和外壳15的定子。在其中转子在预定角度范围内振荡的电流计扫描器1中，永久磁铁11包括在周向上相邻的永磁体11的磁极两端形成的沿旋转轴方向的槽50，以及永久磁铁11通过划分线60将每个极分成两个或多个。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2008245464A Elecromagnetic actuator, and laser machining equipment 有权
标题翻译：电动执行器和激光加工设备
公开(公告)号：JP2008245464A
公开(公告)日：2008-10-09
申请号：JP2007084944
申请日：2007-03-28
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： OTSUKI HARUAKI , DOI AKIRA , KITAMURA KONOSUKE , OKUBO YAICHI , TOYAMA SOICHI
IPC分类号： H02K9/08 , G02B26/08 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide an electromagnetic actuator and laser machining equipment capable of improving the operation rate by preventing the temperature rise.
SOLUTION: In the electromagnetic actuator in which a rotation angle of a rocking shaft 1 is detected by supporting the rocking shaft 1 having a rotor held at the central part in the shaft direction with a pair of bearings 5a, 5b disposed on both sides of the rotor, by allowing the bearings 5a, 5b to be supported with a cylindrical housing which holds the rotor, by covering the motor with the housing composed of an outer cylinder 4 and brackets 2, 3, and by disposing an angle detecting means at one shaft end of the rocking shaft 1, a gas inflow port 18 and a gas exhaust port 19 are provided which connects the outside and the inside of the outer cylinder 4. In this case, a cover 13 is provided in which the angle detecting means is airtightly covered with an O-ring 25 and a barrier rib 22 against the outside of the housing, and this cover 13 can be connected to the housing.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够通过防止温度升高来提高运行速度的电磁致动器和激光加工设备。解决方案：在电磁致动器中，通过在轴向上支撑具有保持在中心部分的转子的摆动轴1，通过一对轴承5a，5b来设置摆动轴1的旋转角度通过使轴承5a，5b由保持转子的圆筒形壳体支撑，通过用由外筒4和托架2,3组成的壳体覆盖电动机，并且通过设置角度检测装置在摆动轴1的一个轴端设置有连接外筒4的外侧和内侧的气体流入口18和排气口19.在这种情况下，设置盖13，其中角度检测装置通过O形环25和隔离肋22气密地覆盖住壳体的外部，并且该盖13可以连接到壳体。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2008043133A Rocking actuator device and laser machining device 审中-公开
标题翻译：摇动执行器装置和激光加工装置
公开(公告)号：JP2008043133A
公开(公告)日：2008-02-21
申请号：JP2006216988
申请日：2006-08-09
申请人： Hitachi Via Mechanics Ltd , Nagoya Institute Of Technology , 国立大学法人名古屋工業大学 , 日立ビアメカニクス株式会社
发明人： TOYAMA SOICHI , KITAMURA KONOSUKE , DOI AKIRA , HIRAI HIROTAKE , SEKI KENTA , KANO YOSHIAKI
IPC分类号： H02K9/22 , G02B26/08 , G02B26/10 , H02K1/22 , H02K1/27 , H02K9/19
CPC分类号： H02K26/00 , H02K33/16
摘要： PROBLEM TO BE SOLVED: To provide a rocking actuator device and a laser machining device, with which a temperature rise of a permanent magnet in a moving magnet-type rocking actuator is controlled and highly reliable processing is realized without deterioration of a processing throughput and hole position precision even if a positioning operation of a galvanometer mirror is continuously performed at high speed, for example.
SOLUTION: A cooling jacket 43 cooling a case 41 and heat transmission bypassing means 50 and 51 which are brought into contact with a coil 33 and the case 41 are arranged. The heat transmission bypassing means 50 and 51 guide heat generated in the coil 33 to the case 41, and the temperature rise of the coil 33 is controlled. Grooves 300 to 302 in a radial direction are arranged in the permanent magnet 30 confronted with the coil 33, and occurrence of eddy current in the permanent magnet 30 is prevented. Depth of the grooves is set to be not less than skin depth shown by a function of a volume resistivity and permeability of the permanent magnet 30, and a fundamental frequency of current flowing to the coil 33.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种摆动致动器装置和激光加工装置，通过该摆动致动器装置和激光加工装置，可以控制移动磁体式摆动致动器中的永久磁铁的温度上升，并且可以实现高度可靠的处理，而不会使处理恶化即使以高速连续地进行电动反射镜的定位操作，也能够提高吞吐量和孔位精度。解决方案：布置冷却壳体41的冷却套43和与线圈33和壳体41接触的热传递旁路装置50和51。热传递旁路装置50和51将线圈33中产生的热引导到壳体41，并且控制线圈33的温度升高。在与线圈33相对的永磁体30中配置有径向的槽部300〜302，并且防止永磁体30的涡电流的产生。凹槽的深度被设定为不小于永磁体30的体积电阻率和磁导率的函数所示的趋肤深度以及流过线圈33的电流的基频。（C）2008 ，JPO＆INPIT

4. 发明专利

JP2006235414A Laser scanner and laser beam machine using the same 审中-公开
标题翻译：激光扫描仪和激光光束机使用相同
公开(公告)号：JP2006235414A
公开(公告)日：2006-09-07
申请号：JP2005052239
申请日：2005-02-28
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： OTSUKI HARUAKI , SAKAMOTO ATSUSHI , DOI AKIRA , SUGAWARA HIROYUKI , TOYAMA SOICHI , OKUBO YAICHI , ONO TAKASHI
IPC分类号： G02B26/10 , B23K26/08 , B23K26/38
摘要： PROBLEM TO BE SOLVED: To improve positioning accuracy of a laser scanner.
SOLUTION: The laser scanner includes an electromagnetic actuator for rocking a mirror attached to the shaft end part of a rocking shaft to change the emission direction of a laser beam, a detector 120 for detecting the angle of rocking of the rocking shaft, and a controller for controlling the rocking shaft and the emission direction of the laser beam. The controller constitutes a servo mechanism which feeds back the angle of rocking to position the mirror. The electromagnetic actuator has a coil. A voltage applied to the coil and a current flowing in the coil are detected, and the applied voltage and the current which are sampled in the same time are filtered by filters 244a and 244b of the same characteristics. A resultant signal is processed by a digital processor, and a temperature estimation means 310 estimates the temperature of the coil on the basis of the processed signal, and torsional natural vibration of the rocking shaft are suppressed on the basis of the estimated temperature.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提高激光扫描仪的定位精度。解决方案：激光扫描仪包括用于摇摆安装在摇轴的轴端部的反射镜以改变激光束的发射方向的电磁致动器，用于检测摇摆轴的摆动角度的检测器120，以及用于控制摇轴和激光束的发射方向的控制器。控制器构成伺服机构，其反馈摆动角度以定位反射镜。电磁致动器具有线圈。检测施加到线圈的电压和在线圈中流动的电流，并且通过具有相同特性的滤波器244a和244b对施加的电压和同时采样的电流进行滤波。结果信号由数字处理器处理，温度估计装置310基于处理的信号估计线圈的温度，并且基于估计的温度来抑制摆动轴的扭转自然振动。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2006147734A Interlayer connection device and interlayer connection method 有权
标题翻译：中间层连接装置和中间层连接方法
公开(公告)号：JP2006147734A
公开(公告)日：2006-06-08
申请号：JP2004333839
申请日：2004-11-18
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： DOI AKIRA , KISHI MASAKAZU , MATSUMOTO TADASHI , AKABOSHI HARUO , YAMAGUCHI YOSHIHIDE
IPC分类号： H05K3/46
摘要： PROBLEM TO BE SOLVED: To provide an interlayer connecting device which ensures electrical connection between layers and, in which a substrate can be worked in a short time.
SOLUTION: The interlayer connecting device 100 connects the layers of a multilayered substrate 14 having many via holes 50 to one another. The substrate 14 is arranged in a vacuum vessel 11, and an aerosol generating chamber 20 is connected to the vacuum vessel 11. A gas introducing section 80 supplies gas to the aerosol generating chamber 20 and controls the supplied gas. A fine metallic particle introducing section 82 introduces fine conductive metallic particles which bury the via holes 50 to the aerosol generating chamber 20, and controls the introduced particles. A nozzle array 24 in which nozzles 25 corresponding to arrangements of the via holes 50 are formed is arranged in the connection between the aerosol generating chamber 20 and a vacuum chamber.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种层间连接装置，其确保层之间的电连接，并且其中基板可以在短时间内加工。解决方案：层间连接装置100将具有多个通孔50的多层基板14的层彼此连接。基板14布置在真空容器11中，气溶胶发生室20连接到真空容器11.气体导入部80将气体供给到气溶胶发生室20并控制供给气体。精细的金属颗粒引入部分82将通孔50的细导电金属颗粒引入气溶胶发生室20，并控制引入的颗粒。其中形成有对应于通孔50的布置的喷嘴25的喷嘴阵列24布置在烟雾发生室20和真空室之间的连接中。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2014229720A ガスレーザ発振器及びレーザ加工装置审中-公开
标题翻译：气体激光振荡器和激光加工装置
公开(公告)号：JP2014229720A
公开(公告)日：2014-12-08
申请号：JP2013107546
申请日：2013-05-22
申请人：ビアメカニクス株式会社 , Via Mechanics Ltd
发明人： DOI AKIRA , OMAE GOICHI , OTANI NOBUYOSHI , YAMAMURA HIDEO
IPC分类号： H01S3/041 , H01S3/00 , H01S3/038 , H01S3/134
摘要：【課題】電極の熱変形に基づくレーザビームの位置ズレを抑えることができるガスレーザ発振器及びそれを使用するレーザ加工装置を提供する。【解決手段】流量調節装置25は、熱電対21からの測定信号23に基づいてマスフローコントローラ29に流量制御信号27を送り、ここを流れる流量を調節することによって、上電極1の温度が所定の値Taとなるように制御する。また同様に、流量調節装置26は、熱電対22からの測定信号24に基づいてマスフローコントローラ30に流量制御信号28を送り、ここを流れる流量を調節することによって、下電極2の温度が所定の値Tbとなるように制御する。上電極1と下電極2の温度がTa=Tbとなるように、流量調節装置25、26を設定しておき、暖気運転後の上電極1と下電極2の温度TaとTbをそれぞれ一定に制御する。【選択図】図1
摘要翻译：要解决的问题：提供一种能够抑制基于电极的热变形的激光束的位置偏移的气体激光振荡器，并提供使用该激光振荡器的激光加工装置。解决方案：流量调节装置25将流量速度控制信号27基于来自热电偶21的测量信号23到质量流量控制器29，并调节流过此处的流量，使得上电极1的温度被控制到预定值Ta。类似地，流量调节装置26基于来自热电偶22的测量信号24将流量控制信号28发送到质量流量控制器30，并且调节在此流过的流量，使得下部电极 2被控制到预定值Tb。流量调节装置25,26以上电极1的温度Ta和下电极2的温度Tb相等的方式设定，上电极1的温度Ta，Tb和预热操作后的下电极2分别控制恒定。

7. 发明专利

JP2013072952A Galvano scanner and laser processing device 审中-公开
标题翻译： GALVANO扫描仪和激光加工设备
公开(公告)号：JP2013072952A
公开(公告)日：2013-04-22
申请号：JP2011211023
申请日：2011-09-27
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： YAMAMOTO AKIHIRO , DOI AKIRA , MATSUKA DAISUKE , SUGAWARA HIROYUKI , TOYAMA SOICHI
IPC分类号： G02B26/10 , B23K26/08
摘要： PROBLEM TO BE SOLVED: To allow the temperature rise of a permanent magnet to be prevented without the occurrence of poor lubrication or grease leakage due to coolant passage.SOLUTION: A galvano scanner 1 includes: a rotor 20 having a mirror 100 attached to one end of a revolving shaft 11 holding a permanent magnet 12 and having an encoder plate 17 attached to the other end; and a stator 30 having the rotor rotatably housed in an internal space thereof, in which the rotor 20 is minutely rotated within a prescribed angular range. Further, the galvano scanner 1 includes: a hollow part 2 which is provided in an axial direction of the revolving shaft 11; a nozzle 60 which is installed in the hollow part 2 to spray a coolant not needing to be recovered, which is supplied from an end part on the side of the encoder plate 17, into the hollow part 2; and cooling lines 40, 41, and 42 thorough which the sprayed coolant passes in the rotor 20 and is discharged from an end part on the side of the rotor 20.
摘要翻译：要解决的问题：为了防止永久磁铁的温度升高而不会由于冷却剂通过而导致润滑不良或漏油。电动扫描仪1包括：转子20，其具有附接到保持永磁体12的旋转轴11的一端并且具有附接到另一端的编码器板17的反射镜100; 转子20在规定的角度范围内微小地旋转的定子30，该定子30具有可旋转地容纳在其内部空间中的转子。此外，电动扫描仪1包括：沿旋转轴11的轴向设置的中空部2; 安装在中空部2中以将从编码器板17侧的端部供给的不需要回收的冷却剂喷射到中空部2的喷嘴60; 和冷却管线40,41和42，通过喷射的冷却剂通过转子20并从转子20侧的端部排出。（C）2013，JPO和INPIT

8. 发明专利

JP2010087176A Method of forming conductor pattern 审中-公开
标题翻译：形成导体图案的方法
公开(公告)号：JP2010087176A
公开(公告)日：2010-04-15
申请号：JP2008253776
申请日：2008-09-30
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： SANO YUICHIRO , DOI AKIRA , KISHI MASAKAZU
IPC分类号： H05K3/10
摘要： PROBLEM TO BE SOLVED: To provide a method of forming a conductor pattern inexpensively forming a conductor pattern uniform in terms of composition with high throughput.
SOLUTION: In this method of forming a conductor pattern used for forming the conductor pattern by heating and baking a conductor pattern precursor 4 formed of conductor particles 3 arranged on a substrate 1, the substrate 1 and the conductor pattern precursor 4 are irradiated with light 6 in a wavelength range wherein an absorption index when the light is absorbed in the substrate 1 is smaller than that when the light is absorbed in the conductor pattern precursor 4.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种形成导体图案的方法，其廉价地形成具有高成品率的组成的导体图案。解决方案：在通过加热和烘烤由布置在基板1上的导体颗粒3形成的导体图案前体4形成用于形成导体图案的导体图案的方法中，基板1和导体图案前体4被照射当光吸收在基板1中时的吸收指数小于在导体图案前体4中吸收光时的吸收指数的波长范围内的光6。（C）2010，JPO＆INPIT

9. 发明专利

JP2008228524A Rocking actuator and laser machining device 审中-公开
标题翻译：摇动执行器和激光加工装置
公开(公告)号：JP2008228524A
公开(公告)日：2008-09-25
申请号：JP2007066924
申请日：2007-03-15
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： DOI AKIRA , OTSUKI HARUAKI , MATSUKA DAISUKE , KITAMURA KONOSUKE , TOYAMA SOICHI
IPC分类号： H02P25/06 , G02B26/10 , H02K11/00 , H02K33/16
摘要： PROBLEM TO BE SOLVED: To provide a rocking actuator that suppresses variations in the torque constant, while controlling magnet temperature using a simple constitution, and to provide a laser machining device that uses such a rocking actuator. SOLUTION: The rocking actuator includes a rotor, which is composed of a rotary shaft 12 and a magnet 13 arranged around the rotary shaft 12, a coil 14 arranged around the rotor, and a current supply means for supplying a current to the coil 14. The current supply means is made into a current supply means 35 that supplies a high-frequency current in addition to a current for rotating the rotor. A temperature detection means is provided so as to measure a temperature of the magnet 13. The current supply means 35 controls a temperature of the magnet 13, by superimposing a high-frequency current on a current supplied to the coil 14, on the basis of the measurement result of the temperature detection means. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种通过简单的结构控制磁体温度来抑制转矩常数的变化的摆动致动器，并且提供使用这种摆动致动器的激光加工装置。解决方案：摆动致动器包括转子，该转子由旋转轴12和围绕旋转轴12布置的磁体13，围绕转子设置的线圈14和用于向电动机提供电流的电流供应装置电流供给装置被制成电流供应装置35，除了用于旋转转子的电流之外还提供高频电流。提供温度检测装置以便测量磁体13的温度。电流供给装置35通过基于提供给线圈14的电流叠加高频电流来控制磁体13的温度温度检测装置的测量结果。版权所有（C）2008，JPO＆INPIT

10. 发明专利

JP2006147783A Interlayer connection method of multilayer wiring board and interlayer connection device thereof 审中-公开
标题翻译：多层布线板的层间连接方法及其中间层连接装置
公开(公告)号：JP2006147783A
公开(公告)日：2006-06-08
申请号：JP2004334859
申请日：2004-11-18
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： KISHI MASAKAZU , DOI AKIRA , AKABOSHI HARUO
IPC分类号： H05K3/46
摘要： PROBLEM TO BE SOLVED: To simplify device configuration so as to reduce running cost while improving the reliability of the electric connection between a conductor layer for forming electric circuits and a metal conductor generated. SOLUTION: Conductive particulates 1 are made to float in carrier gas in an aerosol formation room 20, and the aerosol is made to blow off from a nozzle 25 to a via hole 50 formed in a multilayer wiring board 14. On the assumption that the diameter of conductive particulates 1 is 0.3-10 μm, when the conductive particulates 1 are made to collide with the conductor layer of a multilayer wiring board 14 at about 600 m per second, conductive particulates 1 are melt to the conductor layer of the multilayer wiring board 14 by collision energy so as to make it possible to electrically connect the conductor layer of the surface of the multilayer wiring board 14 with an internal conductor layer. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了简化装置结构以降低运行成本，同时提高用于形成电路的导体层和产生的金属导体之间的电连接的可靠性。解决方案：将导电颗粒1浮在气溶胶形成室20中的载气中，使气溶胶从喷嘴25吹出到形成在多层布线板14中的通孔50.假定导电颗粒1的直径为0.3-10μm，当使导电颗粒1与多层布线板14的导体层以每秒约600m的速度相撞时，导电颗粒1熔化到通过碰撞能量使多层布线板14能够将多层布线板14的表面的导体层与内部导体层电连接。版权所有（C）2006，JPO＆NCIPI

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