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1. 发明专利

JP2008043133A Rocking actuator device and laser machining device 审中-公开
标题翻译：摇动执行器装置和激光加工装置
公开(公告)号：JP2008043133A
公开(公告)日：2008-02-21
申请号：JP2006216988
申请日：2006-08-09
申请人： Hitachi Via Mechanics Ltd , Nagoya Institute Of Technology , 国立大学法人名古屋工業大学 , 日立ビアメカニクス株式会社
发明人： TOYAMA SOICHI , KITAMURA KONOSUKE , DOI AKIRA , HIRAI HIROTAKE , SEKI KENTA , KANO YOSHIAKI
IPC分类号： H02K9/22 , G02B26/08 , G02B26/10 , H02K1/22 , H02K1/27 , H02K9/19
CPC分类号： H02K26/00 , H02K33/16
摘要： PROBLEM TO BE SOLVED: To provide a rocking actuator device and a laser machining device, with which a temperature rise of a permanent magnet in a moving magnet-type rocking actuator is controlled and highly reliable processing is realized without deterioration of a processing throughput and hole position precision even if a positioning operation of a galvanometer mirror is continuously performed at high speed, for example.
SOLUTION: A cooling jacket 43 cooling a case 41 and heat transmission bypassing means 50 and 51 which are brought into contact with a coil 33 and the case 41 are arranged. The heat transmission bypassing means 50 and 51 guide heat generated in the coil 33 to the case 41, and the temperature rise of the coil 33 is controlled. Grooves 300 to 302 in a radial direction are arranged in the permanent magnet 30 confronted with the coil 33, and occurrence of eddy current in the permanent magnet 30 is prevented. Depth of the grooves is set to be not less than skin depth shown by a function of a volume resistivity and permeability of the permanent magnet 30, and a fundamental frequency of current flowing to the coil 33.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种摆动致动器装置和激光加工装置，通过该摆动致动器装置和激光加工装置，可以控制移动磁体式摆动致动器中的永久磁铁的温度上升，并且可以实现高度可靠的处理，而不会使处理恶化即使以高速连续地进行电动反射镜的定位操作，也能够提高吞吐量和孔位精度。解决方案：布置冷却壳体41的冷却套43和与线圈33和壳体41接触的热传递旁路装置50和51。热传递旁路装置50和51将线圈33中产生的热引导到壳体41，并且控制线圈33的温度升高。在与线圈33相对的永磁体30中配置有径向的槽部300〜302，并且防止永磁体30的涡电流的产生。凹槽的深度被设定为不小于永磁体30的体积电阻率和磁导率的函数所示的趋肤深度以及流过线圈33的电流的基频。（C）2008 ，JPO＆INPIT

2. 发明专利

JP2005349437A Method for deciding position of reference point in machining and laser beam machine 有权
标题翻译：用于决定加工和激光束机器中参考点位置的方法
公开(公告)号：JP2005349437A
公开(公告)日：2005-12-22
申请号：JP2004172853
申请日：2004-06-10
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： KITAMURA KONOSUKE
IPC分类号： B23K26/02 , B23K101/42
摘要： PROBLEM TO BE SOLVED: To provide a method for deciding quickly and highly precisely a reference point in machining, from an alignment mark set on a workpiece for the purpose of indicating a reference point in design, and also to provide a laser beam machine. SOLUTION: The method for deciding the reference point in machining is such that the image of a search area 5 is picked up where the alignment mark 1 provided on a printed circuit board 9 for the purpose of indicating the reference point in design is supposed to exist, that the image pickup data obtained is processed for pattern matching to specify the position of the alignment mark 1 and processed for binarization to extract the alignment mark 1 as a graphic, and that the center coordinates of the graphic so extracted is determined, deciding the obtained coordinates as the reference point in machining. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种用于在设计中指示参考点的目的，从设置在工件上的对准标记快速高度精确地确定加工中的参考点的方法，并且还提供激光束机。解决方案：用于确定加工中的参考点的方法是，为了在设计中指示参考点的目的而将设置在印刷电路板9上的对准标记1选择为搜索区域5的图像假设存在获得的图像拾取数据被处理用于模式匹配以指定对准标记1的位置并被处理以进行二值化以将对准标记1提取为图形，并且确定所提取的图形的中心坐标，将所获得的坐标确定为加工中的参考点。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2010071751A Apparatus for inspecting flatness of mirror 审中-公开
标题翻译：检查镜子平面的装置
公开(公告)号：JP2010071751A
公开(公告)日：2010-04-02
申请号：JP2008238242
申请日：2008-09-17
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： KITAMURA KONOSUKE , OMAE GOICHI , SUGAWARA HIROYUKI
IPC分类号： G01B11/24 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a dynamic flatness of a mirror, capable of checking flatness values of the mirror when being irradiated with a laser beam and being deformed maximally.
SOLUTION: The apparatus includes: a laser oscillator 8 which outputs pulsing laser beam 9; a beam splitter 12 which is arranged on the optical axis of the laser beam 9 at an angle of 45 degrees, transmits 50% portions of the incident laser beam 9 and reflects the remaining 50% portions; a reference mirror 13 which is arranged perpendicularly on the optical axis of the laser beam 9 transmitted by the beam splitter 12, and reflects the incident laser beam 9; an image processing device 17 which is arranged on the optical axis of laser beam 9tr being reflected by the beam splitter 12 after reflected by the reference mirror 13, is connected with a light receiving device 16 for receiving laser beam 9rt being transmitted by the beam splitter 12 after reflected by a mirror 1, and digitizes a surface shape of the mirror 1 from an interference fringe caused by the received laser beam 9tr and laser beam 9rt; and a controller 4 which operates the laser oscillator 8 and the light receiving device 16, based on the current position information of the mirror 1.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于检查反射镜的动态平坦度的装置，其能够在用激光束照射并且最大化地变形时检查反射镜的平坦度值。解决方案：该装置包括：激光振荡器8，其输出脉冲激光束9; 以45度角设置在激光束9的光轴上的分束器12透射入射激光束9的50％的部分并反射剩余的50％的部分; 参考反射镜13，其垂直设置在由分束器12透射的激光束9的光轴上，并反射入射激光束9; 布置在激光束9tr的光轴上的图像处理装置17被受到参考反射镜13反射后被分束器12反射的光接收装置16连接，用于接收由分束器传输的激光束9rt 12，由反射镜1反射，并且由接收的激光束9tr和激光束9rt引起的干涉条纹数字化反射镜1的表面形状; 以及基于反射镜1的当前位置信息来操作激光振荡器8和光接收装置16的控制器4.（C）2010，JPO＆INPIT

4. 发明专利

JP2008245464A Elecromagnetic actuator, and laser machining equipment 有权
标题翻译：电动执行器和激光加工设备
公开(公告)号：JP2008245464A
公开(公告)日：2008-10-09
申请号：JP2007084944
申请日：2007-03-28
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： OTSUKI HARUAKI , DOI AKIRA , KITAMURA KONOSUKE , OKUBO YAICHI , TOYAMA SOICHI
IPC分类号： H02K9/08 , G02B26/08 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide an electromagnetic actuator and laser machining equipment capable of improving the operation rate by preventing the temperature rise.
SOLUTION: In the electromagnetic actuator in which a rotation angle of a rocking shaft 1 is detected by supporting the rocking shaft 1 having a rotor held at the central part in the shaft direction with a pair of bearings 5a, 5b disposed on both sides of the rotor, by allowing the bearings 5a, 5b to be supported with a cylindrical housing which holds the rotor, by covering the motor with the housing composed of an outer cylinder 4 and brackets 2, 3, and by disposing an angle detecting means at one shaft end of the rocking shaft 1, a gas inflow port 18 and a gas exhaust port 19 are provided which connects the outside and the inside of the outer cylinder 4. In this case, a cover 13 is provided in which the angle detecting means is airtightly covered with an O-ring 25 and a barrier rib 22 against the outside of the housing, and this cover 13 can be connected to the housing.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够通过防止温度升高来提高运行速度的电磁致动器和激光加工设备。解决方案：在电磁致动器中，通过在轴向上支撑具有保持在中心部分的转子的摆动轴1，通过一对轴承5a，5b来设置摆动轴1的旋转角度通过使轴承5a，5b由保持转子的圆筒形壳体支撑，通过用由外筒4和托架2,3组成的壳体覆盖电动机，并且通过设置角度检测装置在摆动轴1的一个轴端设置有连接外筒4的外侧和内侧的气体流入口18和排气口19.在这种情况下，设置盖13，其中角度检测装置通过O形环25和隔离肋22气密地覆盖住壳体的外部，并且该盖13可以连接到壳体。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2010058162A Laser beam machining apparatus 审中-公开
标题翻译：激光加工设备
公开(公告)号：JP2010058162A
公开(公告)日：2010-03-18
申请号：JP2008228799
申请日：2008-09-05
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： SUGAWARA HIROYUKI , AIDA SHUJI , KITAMURA KONOSUKE , TOYAMA SOICHI , OKUBO YAICHI
IPC分类号： B23K26/06 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus in which temperature rise of a mirror holding part due to reflection light from a machining part is prevented, and which therefore maintains the accuracy of machining position and the accuracy of hole shape. SOLUTION: The laser beam machining apparatus 100 is configured in such a manner that a mirror 2 connected to an output shaft 4a of a motor 4 is positioned in the rotational direction and a laser beam 12 deflected by the mirror 2 is made incident on a desired position of a work (printed wire board) 17 to machine the work 17. In the laser beam machining apparatus, a light shielding body 50 for preventing reflection light 20 reflected by the work 17 from being made incident on a support member 4 which supports the mirror 2 is disposed. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：提供一种激光束加工设备，其中防止了由于来自加工部分的反射光引起的反射镜保持部分的温度上升，因此保持了加工位置的精度和孔形状的精度。解决方案：激光束加工装置100被构造成使得连接到电动机4的输出轴4a的反射镜2位于旋转方向上，并且由反射镜2偏转的激光束12被入射在工件（印刷线路板）17的期望位置上加工工件17.在激光束加工装置中，防止被工件17反射的反射光20入射到支撑构件4上的遮光体50 支撑反射镜2的设置。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2007036063A Manufacturing method of multilayer substrate 审中-公开
标题翻译：多层基板的制造方法
公开(公告)号：JP2007036063A
公开(公告)日：2007-02-08
申请号：JP2005219631
申请日：2005-07-28
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： KITAMURA KONOSUKE , AOYAMA HIROSHI
IPC分类号： H05K3/46 , H05K3/00 , H05K3/26
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a reliable multilayer substrate where conductive patterns on an upper layer and a lower layer are surely connected, even if the lines of a conductive pattern, or the intervals between lines are narrow. SOLUTION: The manufacturing method includes a process where an insulating layer 10 is arranged on the surface of a substrate 12 on which a conductive pattern 13 is formed, a process where an arranged surface of the insulating layer 10 is processed to provide a groove 5 and a via hole 2 that connects to the groove 5, and also connects to the conductive pattern 13 of the lower layer; and a process where a conductive layer is formed at the groove 5 and the via hole 2, and the processed conductive layer is connected to the conductive pattern 13 of the lower layer as a conductive pattern. By repeating these processes, a multilayer substrate is formed. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：即使导电图案的线或线之间的间隔窄，提供可靠地连接上层和下层上的导电图案的可靠多层基板的制造方法。解决方案：制造方法包括在其上形成导电图案13的基板12的表面上布置绝缘层10的工艺，其中处理绝缘层10的布置表面以提供绝缘层10的工艺槽5和连接到槽5的通孔2，并且还连接到下层的导电图案13; 以及在沟槽5和通孔2处形成导电层的工艺，并且处理的导电层作为导电图案连接到下层的导电图案13。通过重复这些处理，形成多层基板。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2004191880A Deflection method, deflection apparatus and laser processing apparatus 有权
公开(公告)号：JP2004191880A
公开(公告)日：2004-07-08
申请号：JP2002362946
申请日：2002-12-13
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： KITAMURA KONOSUKE , AOYAMA HIROSHI
IPC分类号： G02B27/10 , G02F1/33
摘要： PROBLEM TO BE SOLVED: To provide a deflection method and a deflection apparatus for making the apparatus smaller in size even when the deflection angle of the deflection apparatus is small, and to provide a laser processing apparatus. SOLUTION: Deflecting means 3a, 3b with variable deflection angles, a condenser lens 4, and a total reflection mirror 5 are disposed. Laser beams 2a, 2b, 2c emitted from the deflecting means 3a, 3b are condensed by the condenser lens 4 into beams having smaller diameters than the diameters of the laser beams 2 incident on the deflecting means 3a, 3b, and the condensed beams separated from each other for avoiding superposition of optical paths are made to enter the total reflection mirror 5. COPYRIGHT: (C)2004,JPO&NCIPI

8. 发明专利

JP2008298857A Scanner device and laser machining device 审中-公开
标题翻译：扫描仪和激光加工设备
公开(公告)号：JP2008298857A
公开(公告)日：2008-12-11
申请号：JP2007142052
申请日：2007-05-29
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： TOYAMA SOICHI , KITAMURA KONOSUKE , TANAKA SHUSUKE , MATSUKA DAISUKE
IPC分类号： G02B26/10 , B23K26/08 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To prevent a mirror from oscillating even when reaction of driving torque acts periodically from a rotary actuator driving the mirror.
SOLUTION: The scanner device constituted by supporting the mirror 13 on a rotary shaft 11 of the rotary actuator 10 to position the mirror 13 around an axial line 12 of the rotary shaft 11 is provided with: a support 20 fixing and supporting the rotary actuator 10; and a dynamic vibration absorber 40 having natural frequency being equal to resonance frequency of a supporting structure system composed of the rotary actuator 10, the mirror 13, and the support 20. The dynamic vibration absorber 40 is fixed on the support 20.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：即使当驱动转矩的反作用力从驱动反射镜的旋转致动器周期性地起作用时，也防止反射镜振荡。解决方案：通过将反射镜13支撑在旋转致动器10的旋转轴11上以将反射镜13定位在旋转轴11的轴线12上而构成的扫描仪装置设置有：固定和支撑旋转致动器10; 以及具有等于由旋转致动器10，反射镜13和支撑件20组成的支撑结构系统的共振频率的固有频率的动态吸振器40.动态吸振器40固定在支撑件20上。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2008272837A Machining method with work 审中-公开
标题翻译：加工方法与工作
公开(公告)号：JP2008272837A
公开(公告)日：2008-11-13
申请号：JP2007115586
申请日：2007-04-25
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： EMURA HAJIME , AOYAMA HIROSHI , KITAMURA KONOSUKE
IPC分类号： B23Q15/22 , B23B35/00 , B23B39/08 , B23B41/00
摘要： PROBLEM TO BE SOLVED: To provide a machining method with work capable of improving machining efficiency as well as machining accuracy.
SOLUTION: An amount of displacement relative to design values of a plurality of alignment marks 6 arranged on the work 2 is measured in advance, and just before machining, the amount of displacement relative to the design values of the respective two alignment marks 6 in an X and a Y direction is measured. Based on this measurement result, the amount of displacement relative to the design values of other alignment marks is corrected, thereby performing machining based on the positions of the corrected alignment marks 6.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够提高加工效率以及加工精度的加工方法。
解决方案：预先测量相对于布置在工件2上的多个对准标记6的设计值的位移量，并且刚好在加工之前，相对于相应的两个对准标记的设计值的位移量测量X和Y方向上的6。基于该测量结果，校正相对于其他对准标记的设计值的位移量，从而基于校正的对准标记6的位置进行加工。（C）2009，JPO＆INPIT

10. 发明专利

JP2007322542A Scanner device 有权
标题翻译：扫描仪
公开(公告)号：JP2007322542A
公开(公告)日：2007-12-13
申请号：JP2006150429
申请日：2006-05-30
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： KITAMURA KONOSUKE , AOYAMA HIROSHI , EMURA HAJIME
IPC分类号： G02B26/10 , B23K26/06
摘要： PROBLEM TO BE SOLVED: To provide a scanner device in which no deformation is caused on a mirror reflection face when the mirror is connected to the output shaft of an actuator with a necessary and sufficient force and no deformation is caused on the mirror reflection face when coil temperature rises. SOLUTION: A hole 8c engaging with the output shaft 5 is provided in the center in one end of a mount member 8 supporting the mirror 4, a groove 8g for fitting the mirror 4 is provided on the other end, wherein the groove has the depth direction in the center axis O direction of the hole 8c and has the width direction symmetric with respect to the center axis O. The scanner device is structured such that, in either positions, a cross section vertical to the center axis O is in point symmetry with respect to the center axis O. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种扫描仪装置，其中当反射镜以足够的力连接到致动器的输出轴并且在镜子上不产生变形时，在镜面反射面上不会引起变形线圈温度升高时的反射面。解决方案：在支撑反射镜4的安装部件8的一端的中央设置有与输出轴5卡合的孔8c，另一端设置有用于安装反射镜4的槽8g，具有孔8c的中心轴线O方向的深度方向，并且宽度方向相对于中心轴线O对称。扫描器装置的结构使得在任一位置上，垂直于中心轴线O的截面为相对于中心轴线O的点对称。（C）2008，JPO＆INPIT

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