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    • 5. 发明专利
    • Semiconductor device
    • JP5049253B2
    • 2012-10-17
    • JP2008301460
    • 2008-11-26
    • パナソニック株式会社
    • 佳治 佐名川真太郎 林充彦 植田孝昌 酒井
    • G01P15/12G01P15/18H01L29/84
    • PROBLEM TO BE SOLVED: To provide a semiconductor device which can relax stress which occurs in a functional section caused by a difference in the linear expansion coefficient between a semiconductor substrate and a mounting substrate. SOLUTION: The semiconductor device 1 includes: the semiconductor substrate 10 in which a flexural part 13 is formed at the central part, which is thinner than the peripheral part; a circuit which is formed in the flexural part 13 on one side of the semiconductor device 10; an external connection electrode 17 which is provided on the other side of the semiconductor device 10; a through-hole wire 18 which passes through the semiconductor device 10 in the thickness direction for connecting the circuit and the external connection electrode 17; and a connecting part 43 which is provided on the one side of the semiconductor device 10 for connecting the through-hole wire 18 and the circuit. The semiconductor device further includes a first groove 31 which is formed nearer to the center of the semiconductor device 10 than the through-hole wire 18 on the other side of the semiconductor device 10 and a second groove 32 which is formed nearer to the periphery of the semiconductor device 10 than the through-hole wire 18 on the one side of the semiconductor device 10. COPYRIGHT: (C)2010,JPO&INPIT
    • 8. 发明专利
    • Semiconductor device
    • JP4925272B2
    • 2012-04-25
    • JP2006231339
    • 2006-08-28
    • パナソニック株式会社
    • 威 中筋佳治 佐名川
    • B81B3/00B81C3/00G01P15/08G01P15/12G01P15/18H01L23/02H01L23/12H01L29/84
    • PROBLEM TO BE SOLVED: To provide a semiconductor device capable of loosening a stress generated to a flexible element due to a linear expansion coefficient difference from a mounting board. SOLUTION: This acceleration sensor A, which is a semiconductor device, comprises a sensor substrate (function substrate) 1 having a flexion part (flexible element part) 13, a first cover substrate 2 jointed to the sensor substrate 1, and a second substrate 3 jointed to one surface side of the first cover substrate 2 in a form for surrounding the sensor substrate 1 between it and the first cover substrate 2. A groove part 20b for loosening a stress generated to the flexion part 13 together with joint of an electrode 25 for external connection and a conductor pattern 43 of a mounting board 40 is formed on the first cover substrate 2. A formation position of the groove 20b on one surface side is displaced from the formation position of the groove 20b on the other surface side so that a bellow-like structure part 28 is formed between a second electric connecting metal layer 29 and an external connecting electrode 25 electrically connected to the electric connecting metal layer 29. COPYRIGHT: (C)2008,JPO&INPIT