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    • 6. 发明专利
    • Method and device for non-destructive material inspection by laser ultrasonic wave
    • 激光超声波非破坏性材料检测方法与装置
    • JP2005147813A
    • 2005-06-09
    • JP2003384573
    • 2003-11-14
    • Kansai Electric Power Co Inc:TheLaser Gijutsu Sogo KenkyushoNon-Destructive Inspection Co Ltd財団法人レーザー技術総合研究所関西電力株式会社非破壊検査株式会社
    • UCHIDA SHIGEAKIOREG KOCHAEVHASHIMOTO KAZUHISAMATSUBARA SHIGEYUKIMATSUI SHIGEKI
    • E02D33/00G01N29/00
    • PROBLEM TO BE SOLVED: To allow very precise, accurate and reliable inspection, of course when a material surface is a specular face, and even when a rough surface such as a surface of a concrete structure.
      SOLUTION: In this nondestructive material inspection device, a pulse laser beam from a pulse laser 20 is emitted toward the material surface of a measured object via a movable mirror 7 to generate an elastic wave (ultrasonic wave), a laser beam from a continuous oscillation laser 1 for a signal is branched by a polarization beam splitter 4, one thereof is emitted as a probe beam to the material surface coaxially with the pulse laser beam via the movable mirror 7, a reflected beam is transferred as a signal beam with a wave front deformed by an influence of a scattering face on the material surface and the elastic wave, and phase-modulated, the signal beam and a reference beam are made to get incident, crossed with a prescribed angle, into a laser beam interferometer by a photorefractive crystal 9, and the presence of a defect in an inside of a material is detected based on a change in the phase modulation of an interfered beam therein.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了允许非常精确,准确和可靠的检查,当然,当材料表面是镜面时,甚至当诸如混凝土结构的表面的粗糙表面时。 解决方案:在这种非破坏性材料检测装置中,来自脉冲激光器20的脉冲激光束经由可移动反射镜7向测量物体的材料表面发射以产生弹性波(超声波),来自 用于信号的连续振荡激光器1由偏振分束器4分支,其中一个作为探测光束通过可移动反射镜7与脉冲激光束同轴地发射到材料表面,反射光束作为信号光束传送 波面由材料表面上的散射面和弹性波的影响而变形,并进行相位调制,使信号光束和参考光束以规定的角度入射到激光束干涉仪中 通过光折射晶体9,并且基于其中的干涉光束的相位调制的变化来检测材料内部的缺陷的存在。 版权所有(C)2005,JPO&NCIPI
    • 7. 发明专利
    • Slender type x-ray irradiation equipment
    • JP2004229698A
    • 2004-08-19
    • JP2003018480
    • 2003-01-28
    • Laser Gijutsu Sogo Kenkyusho財団法人レーザー技術総合研究所
    • IMAZAKI KAZUO
    • G21K5/00A61B1/00A61N5/10G21K5/02
    • PROBLEM TO BE SOLVED: To provide slender type X-ray irradiation equipment of a high efficiency which can generate an enough dose of X-rays at an immediate vicinity of an object part for treatment of cancerous cells in a human body without giving a big burden to the human body even though the object part is in deep part of the body or a patient is old in age, while it is very small-sized and cheap, and a radiotherapy apparatus equipped with the above irradiation equipment. SOLUTION: The slender type X-ray irradiation equipment 10 includes a transmission line C 1 for a laser beam, a vacuum suction pipe P 1 , a transmission line C 2 for an optical fiber for illumination, a transportation pipe P 2 for a cooling medium, a transmission line C 3 for imaging light, a long and thin combined cable 11 wherein a wire W for wire operations is covered as one body with a protection material and a terminal head 12 is connected to the end of the above cable, and is constituted to irradiate a laser beam on a target 16 in a vacuum chamber 14 to generate X-rays which are converged to a prescribed size by a converging window member 17 and emitted to irradiate the object part, and is to be the slender type X-ray irradiation equipment with diameters of the combined cable 11 and of the terminal head 12 made to be a few mm or smaller. COPYRIGHT: (C)2004,JPO&NCIPI
    • 8. 发明专利
    • Exhaust gas absorbent and exhaust gas treatment device using the same
    • 排气吸收和排气处理装置使用相同
    • JP2003305333A
    • 2003-10-28
    • JP2002113437
    • 2002-04-16
    • Laser Gijutsu Sogo Kenkyusho財団法人レーザー技術総合研究所
    • SHIMADA YOSHINORIIN KOHAUCHIDA SHIGEAKIWADA YUJIYAMANAKA CHIYOE
    • B01D53/60B01D53/34B01D53/74B01D53/77B01J20/04
    • Y02A50/2344
    • PROBLEM TO BE SOLVED: To obtain an exhaust gas absorbent which can remarkably improve the absorption efficiency by utilizing the properties of a porous material having a large specific surface area as a means for absorbing and removing hazardous components such as nitrogen oxides NOx contained in exhaust gas, and which has combinedly has the properties as a solution absorbent. SOLUTION: A porous material of an adsorptive material having micropores 2 is used as the exhaust gas absorbent 1. Liquid parts 3 in which an alkaline substance such as sodium hydroxide is dissolved are carried on the surface of the material part 1a of the gas absorbent 1 so as to have each angstrom or micrometer thickness and size. When the exhaust gas passes through the inside of the pores 2, the hazardous components are taken into the liquid parts 3 by chemical reactions to be removed. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:为了获得可以通过利用具有大比表面积的多孔材料的性质来显着提高吸收效率的废气吸收剂作为用于吸收和去除诸如氮氧化物的有害成分的装置 在废气中,并且其具有作为溶液吸收剂的性质。 解决方案:使用具有微孔2的吸附材料的多孔材料作为废气吸收剂1.其中溶解有碱性物质如氢氧化钠的液体部分3被承载在材料部分1a的表面上 气体吸收剂1,以便具有每埃埃或厚度的厚度和尺寸。 当废气通过孔2的内部时,有害成分通过化学反应被吸入液体部分3中以除去。 版权所有(C)2004,JPO
    • 9. 发明专利
    • Method and equipment for exfoliating photoresist
    • 用于激光光刻胶的方法和设备
    • JP2003303789A
    • 2003-10-24
    • JP2002107559
    • 2002-04-10
    • Laser Gijutsu Sogo KenkyushoToyo Seimitsu Kogyo Kk東洋精密工業株式会社財団法人レーザー技術総合研究所
    • FUJITA MASAYUKIYOSHIKADO AKIRA
    • G03F7/42B23K26/00G03F7/36H01L21/027H01L21/302
    • PROBLEM TO BE SOLVED: To obtain a method and equipment for exfoliating photoresist wherein the pollution of the environment, the abuse of water resources, etc., are excluded and productivity can be improved by exfoliating and eliminating photoresist by using an optical means in which the photoresist is eliminated when an electronic component like a circuit board is worked and treated by photolithographic technology. SOLUTION: A circuit board K having a substrate including a photoresist is transferred by transfer equipment C, short-pulse laser light of prescribed intensity is transmitted from laser generating equipment 10 to the photoresist, irradiation is performed by converting the short pulse laser light into belt-shaped laser light having a prescribed width and length by using a radiation head 12. Spreading adjustment and the irradiation are performed so as to obtain intensity by which irradiating laser light generates a thermal shock exfoliation phenomenon on an interface between the photoresist and the substrate. The photoresist is exfoliated and removed along the whose length by moving the circuit board K. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:为了获得排除环境污染,水资源滥用等的去角质光刻胶的方法和设备,通过使用光学装置剥离和消除光致抗蚀剂可以提高生产率 当电子部件如电路板被加工并通过光刻技术处理时,其中光致抗蚀剂被去除。 解决方案:具有包含光致抗蚀剂的基板的电路板K由传送设备C转移,具有规定强度的短脉冲激光从激光发生设备10传输到光致抗蚀剂,照射通过转换短脉冲激光 通过使用辐射头12将光照射成具有规定宽度和长度的带状激光。进行扩散调节和照射,以获得照射激光在光刻胶和光致抗蚀剂之间的界面上产生热冲击剥离现象的强度 底物。 光致抗蚀剂通过移动电路板K沿其长度被剥离和去除。版权所有(C)2004,JPO