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1. 发明专利

JP2007237210A Laser beam machining method and apparatus 审中-公开
标题翻译：激光束加工方法和装置
公开(公告)号：JP2007237210A
公开(公告)日：2007-09-20
申请号：JP2006061364
申请日：2006-03-07
申请人： Aisin Seiki Co Ltd , Laser Gijutsu Sogo Kenkyusho , アイシン精機株式会社 , 財団法人レーザー技術総合研究所
发明人： NAGAI HIROYUKI , SASAKI RYUICHIRO , YOSHIDA MUTSUMI , FUJITA MASAYUKI , IZAWA YUSAKU
IPC分类号： B23K26/36 , B23K26/00 , B23K26/06 , B23K26/40 , B23K101/40 , B28D5/00 , B28D5/02 , H01L21/301
摘要： PROBLEM TO BE SOLVED: To provide a laser beam machining method and a laser beam machining apparatus by which a brittle material such as semiconductor crystal is machined while suppressing occurrence of chipping and cracking. SOLUTION: The laser beam machining apparatus is provided with: a low fluence irradiation means 2 by which the surface of a crystalline workpiece 6 is irradiated with a pulsed laser beam at a prescribed low fluence; and a high fluence irradiation means 2' by which the irradiation region of the workpiece irradiated by the low fluence irradiation means 2 is irradiated with a pulsed laser beam at a prescribed high fluence for varying the surface shape of the workpiece 6. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种激光束加工方法和激光束加工装置，通过该激光束加工装置可以在抑制碎裂和破裂的发生的同时加工诸如半导体晶体的脆性材料。解决方案：激光束加工装置设置有：低能量照射装置2，以规定的低能量密度用脉冲激光束照射结晶工件6的表面; 以及用于改变工件6的表面形状的以规定的高注量脉冲激光束照射由低能量照射装置2照射的工件的照射区域的高能量照射装置2'。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2011023560A Light emitting device 审中-公开
标题翻译：发光装置
公开(公告)号：JP2011023560A
公开(公告)日：2011-02-03
申请号：JP2009167488
申请日：2009-07-16
申请人： Laser Gijutsu Sogo Kenkyusho , Panasonic Electric Works Co Ltd , パナソニック電工株式会社 , 財団法人レーザー技術総合研究所
发明人： TANAKA KENICHIRO , TSUBAKI KENJI , KUBO MASAO , FUJITA MASAYUKI , MIYANAGA NORIAKI , FUJIMOTO YASUSHI , TSUBAKIMOTO KOJI
IPC分类号： H01L33/50
摘要： PROBLEM TO BE SOLVED: To provide a light emitting device capable of improving wavelength conversion efficiency of a wavelength conversion portion. SOLUTION: The light emitting device includes an LED chip 1, and the wavelength conversion portion 2 disposed on a light extraction surface side of the LED chip 1 to convert part of light emitted from the LED chip 1 into light having a wavelength longer than that of the LED chip 1. The wavelength conversion portion 2 is composed of a structure wherein a plurality of wavelength conversion element portions 21 are combined and arrayed, which use fluorescent glass as glass to which a rare earth element excited with the light emitted from the LED chip 1 to emit the light having the wavelength longer than that of the LED chip 1 is added. In the wavelength conversion portion 2, the wavelength conversion element portions 21 are optical fibers 120 each including the fluorescent glass as a core 121, and the respective optical fibers 120 are arrayed each having an optical-axis direction aligned with the optical axis direction of the LED chip 1. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决的问题：提供能够提高波长转换部的波长转换效率的发光装置。解决方案：发光器件包括LED芯片1和设置在LED芯片1的光提取表面侧上的波长转换部分2，以将从LED芯片1发射的光的一部分转换成具有波长较长的光波长转换部分2由多个波长转换元件部分21组合和排列的结构组成，其中使用荧光玻璃作为玻璃，稀土元素被从添加发光长于LED芯片1的光的LED芯片1。在波长转换部分2中，波长转换元件部分21是包括作为核心121的荧光玻璃的光纤120，并且各个光纤120排列成具有与光轴方向对准的光轴方向 LED芯片1.版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2009031237A Non-destructive inspection method and device using laser plasma radiation electromagnetic wave 审中-公开
标题翻译：使用激光等离子体辐射电磁波的非破坏性检测方法和器件
公开(公告)号：JP2009031237A
公开(公告)日：2009-02-12
申请号：JP2007216481
申请日：2007-07-27
申请人： Laser Gijutsu Sogo Kenkyusho , Osaka Univ , 国立大学法人大阪大学 , 財団法人レーザー技術総合研究所
发明人： TANAKA KAZUO , NAKAJIMA HIROTOMO , SHIMADA YOSHINORI , HASHIMOTO KAZUHISA , YAMAURA MICHITERU , FUJITA MASAYUKI
IPC分类号： G01N22/00 , G01N22/02
摘要： PROBLEM TO BE SOLVED: To provide a method and device to irradiate laser onto an inspection object surface, generate laser plasma, obtain information of radiated electromagnetic waves, and perform a remote non-destructive inspection inside the inspection object or around the irradiation surface.
SOLUTION: A plasma form is desired to be linear, and a required frequency is obtained by setting twice of plasma length to be the wavelength of the electromagnetic waves. The electromagnetic waves with good directivity and a defined frequency band can be irradiated by generating one or a plurality of linear laser plasma on the inspection object surface. An equivalent investigation results can be obtained as in the cases that measurement is made by shifting the generation place of plasma and that measurement is made by performing signal processing and using a large opening antenna with sharp directivity. The non-destructive inspection is performed by generating one or a plurality of plasma channels on the inspection surface, generating electromagnetic waves with directivity, guiding the electromagnetic waves generated on the inspection surface, and analyzing the electromagnetic waves reflected from the inspection object.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种在检查对象表面上照射激光的方法和装置，产生激光等离子体，获得辐射电磁波的信息，并在检查对象内或照射周围进行远程无损检查表面。解决方案：等离子体形式希望是线性的，并且通过将等离子体长度设定为电磁波的波长的两倍来获得所需的频率。可以通过在检查对象表面上生成一个或多个线性激光等离子体来照射具有良好方向性和定义的频带的电磁波。通过移动等离子体的产生位置进行测量，并且通过执行信号处理并且使用具有尖锐方向性的大开口天线进行测量，可以获得等效的调查结果。通过在检查面上产生一个或多个等离子体通道，产生具有方向性的电磁波，引导在检查面上产生的电磁波，分析检查对象反射的电磁波，进行非破坏性检查。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2005321048A Rolling slide part, and method for manufacturing the same 审中-公开
标题翻译：滚动部件及其制造方法
公开(公告)号：JP2005321048A
公开(公告)日：2005-11-17
申请号：JP2004140058
申请日：2004-05-10
申请人： Koyo Seiko Co Ltd , Laser Gijutsu Sogo Kenkyusho , 光洋精工株式会社 , 財団法人レーザー技術総合研究所
发明人： ISHII HIDEAKI , YAMAKAWA KAZUYOSHI , MATSUYAMA HIROKI , FUJITA MASAYUKI
IPC分类号： F16C33/14 , B23K26/00 , F16C33/64
CPC分类号： F16C33/585 , F16C19/06 , F16C33/64 , F16C33/6651 , F16C2240/42 , F16C2240/44 , F16C2240/54
摘要： PROBLEM TO BE SOLVED: To provide a rolling slide part, in which friction torque can be reduced, and in which generation of damages on metal can be restricted. SOLUTION: This rolling slide part comprises a rolling slide surface (raceway surface) 1a to roll and slide relatively to the surface of a counter member. In the rolling slide surface (raceway surface) 1a, center line surface roughness (Ra) is set in a range of 0.02-0.2 μm. Short pulse laser is radiated in pulse width of 1-5 ps to form dense surface structure having recessed grooves 2a, 2b, 2c, etc. periodically. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供可以减少摩擦转矩的滚动滑动部件，并且可以限制对金属的损坏的产生。解决方案：该滚动滑动部件包括相对于相对构件表面滚动和滑动的滚动滑动表面（滚道表面）1a。在滚动滑动面（滚道面）1a中，中心线表面粗糙度（Ra）设定在0.02〜0.2μm的范围内。短脉冲激光以1-5ps的脉冲宽度辐射，以形成周期性地具有凹槽2a，2b，2c等的致密表面结构。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2004354535A Method for processing light receiving/emitting part of optical medium 有权
公开(公告)号：JP2004354535A
公开(公告)日：2004-12-16
申请号：JP2003149918
申请日：2003-05-27
申请人： Laser Gijutsu Sogo Kenkyusho , Matsushita Electric Works Ltd , 松下電工株式会社 , 財団法人レーザー技術総合研究所
发明人： TANAKA KENICHIRO , KUBO MASAO , FUJITA MASAYUKI , HASHIDA MASAKI
IPC分类号： G02B1/11
摘要： PROBLEM TO BE SOLVED: To inexpensively perform processing for enhancing light propagation efficiency with simple equipment and to easily perform the processing even when an optical medium is small. SOLUTION: In providing the fine rugged shape of a periodic structure on the boundary between two optical media having different refractive indices, the fine rugged shape of the periodic structure corresponding to working energy density is formed on the surface of the optical medium by using an ultra-high intensity pulse laser whose pulse width is ≤1 ps so as to perform laser abrasion to the optical medium. The fine rugged shape which is effective to decrease light reflection loss is easily formed in a non-contact state. COPYRIGHT: (C)2005,JPO&NCIPI

6. 发明专利

JP2004230507A Material for polishing, grinding and cutting by electromagnetic wave, and its manufacturing method 审中-公开
标题翻译：电磁波抛光，研磨和切割材料及其制造方法
公开(公告)号：JP2004230507A
公开(公告)日：2004-08-19
申请号：JP2003021443
申请日：2003-01-30
申请人： Laser Gijutsu Sogo Kenkyusho , Nippon Unit Kk , 日本ユニット株式会社 , 財団法人レーザー技術総合研究所
发明人： HASHIDA MASAKI , FUJITA MASAYUKI , NIIZAKI YUICHIRO
IPC分类号： B24D3/00
摘要： PROBLEM TO BE SOLVED: To provide a material for polishing, grinding and cutting to be formed into a fine material and to be formed into a complicated shape material.
SOLUTION: This material is manufactured by putting an experimental material 20 combining a fundamental material of metal, synthetic resin, animal fiber, vegetable fiber, etc. and one or more than one kinds of abrasive grains of diamond, etc. in a container 14 on a rotary disc 13 of an electronic range 11 and by using an electromagnetic wave.
COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：提供用于抛光，研磨和切割的材料，以形成为精细材料并形成复杂的形状材料。解决方案：该材料通过将金属，合成树脂，动物纤维，植物纤维等的基本材料和金刚石等的一种或多种磨粒等组合在一起的实验材料20 容器14在电子范围11的旋转盘13上并通过使用电磁波。版权所有（C）2004，JPO＆NCIPI

7. 发明专利

JP2009081235A Characteristic control method for n-type oxide semiconductor 有权
标题翻译： N型氧化物半导体的特性控制方法
公开(公告)号：JP2009081235A
公开(公告)日：2009-04-16
申请号：JP2007248660
申请日：2007-09-26
申请人： Laser Gijutsu Sogo Kenkyusho , Okuno Chem Ind Co Ltd , Osaka Municipal Technical Research Institute , Osaka Univ , Univ Kinki , 国立大学法人大阪大学 , 地方独立行政法人大阪市立工業研究所 , 奥野製薬工業株式会社 , 学校法人近畿大学 , 財団法人レーザー技術総合研究所
发明人： TSUKAMOTO MASAHIRO , ABE NOBUYUKI , TAKAHASHI MASAYA , OTSUKA KUNIAKI , YOSHIDA MINORU , NAKANO HITOSHI , FUJITA MASAYUKI
IPC分类号： H01L21/428 , H01L21/268
摘要： PROBLEM TO BE SOLVED: To provide a novel use of an n-type oxide semiconductor represented by titanium oxide by making good use of characteristics unique thereto. SOLUTION: Disclosed is a characteristic control method for the n-type oxide semiconductor characterized in that the coating or molding of the n-type oxide semiconductor is irradiated with femtosecond laser light; and a characteristic control method for n-type oxide semiconductor characterized in that after the n-type oxide semiconductor is irradiated with femtosecond laser light by the method, the irradiating portion is irradiated with continuous wave laser light or pulse laser light of ≤1 ms in pulse interval to be put into the state before the irradiation with the femtosecond laser light. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：通过充分利用其特有的特征，提供由氧化钛表示的n型氧化物半导体的新颖用途。解决方案：公开了一种用于n型氧化物半导体的特性控制方法，其特征在于，用飞秒激光照射n型氧化物半导体的涂覆或模塑; 以及用于n型氧化物半导体的特征控制方法，其特征在于，在通过该方法对n型氧化物半导体进行了飞秒激光的照射之后，照射部分用连续波激光或≤1ms的脉冲激光照射在用飞秒激光照射之前将脉冲间隔置于状态。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2005250173A Laser irradiating method and laser irradiation apparatus 审中-公开
标题翻译：激光辐射方法和激光辐射装置
公开(公告)号：JP2005250173A
公开(公告)日：2005-09-15
申请号：JP2004061239
申请日：2004-03-04
申请人： Cluster Technology Co Ltd , Laser Gijutsu Sogo Kenkyusho , クラスターテクノロジー株式会社 , 財団法人レーザー技術総合研究所
发明人： KITAOKA KENJI , TSUBAKIMOTO KOJI , FUJITA MASAYUKI
IPC分类号： G03F7/20 , H01L21/027 , H01L21/268 , H01S3/00
摘要： PROBLEM TO BE SOLVED: To provide a laser irradiation method and a laser irradiation apparatus with high use efficiency of laser light. SOLUTION: A desired image is obtained on an object by irradiating the object with a laser beam via an image forming element. The image forming element uses a reflective element 11 which can form a two-dimensional image by switching a plurality of micromirrors 11b into at least two directions. Or, as for the image forming element, a reflective element having a plurality of micromirrors aligned in at least two directions to form a two-dimensional image can be used. A hologram image is formed in the image forming element so as to impart a phase difference into laser beams of at least two series assigned to at least two directions, and these beams are made to interfere with each other and to irradiate the object. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种激光照射方法和激光使用效率高的激光照射装置。解决方案：通过图像形成元件用激光束照射物体，在物体上获得期望的图像。图像形成元件使用能够通过将多个微镜11b切换成至少两个方向而形成二维图像的反射元件11。或者，对于图像形成元件，可以使用具有至少两个方向排列以形成二维图像的多个微镜的反射元件。在图像形成元件中形成全息图像，以将相位差赋予分配给至少两个方向的至少两个系列的激光束，使这些光束相互干涉并照射物体。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2003303789A Method and equipment for exfoliating photoresist 有权
标题翻译：用于激光光刻胶的方法和设备
公开(公告)号：JP2003303789A
公开(公告)日：2003-10-24
申请号：JP2002107559
申请日：2002-04-10
申请人： Laser Gijutsu Sogo Kenkyusho , Toyo Seimitsu Kogyo Kk , 東洋精密工業株式会社 , 財団法人レーザー技術総合研究所
发明人： FUJITA MASAYUKI , YOSHIKADO AKIRA
IPC分类号： G03F7/42 , B23K26/00 , G03F7/36 , H01L21/027 , H01L21/302
摘要： PROBLEM TO BE SOLVED: To obtain a method and equipment for exfoliating photoresist wherein the pollution of the environment, the abuse of water resources, etc., are excluded and productivity can be improved by exfoliating and eliminating photoresist by using an optical means in which the photoresist is eliminated when an electronic component like a circuit board is worked and treated by photolithographic technology. SOLUTION: A circuit board K having a substrate including a photoresist is transferred by transfer equipment C, short-pulse laser light of prescribed intensity is transmitted from laser generating equipment 10 to the photoresist, irradiation is performed by converting the short pulse laser light into belt-shaped laser light having a prescribed width and length by using a radiation head 12. Spreading adjustment and the irradiation are performed so as to obtain intensity by which irradiating laser light generates a thermal shock exfoliation phenomenon on an interface between the photoresist and the substrate. The photoresist is exfoliated and removed along the whose length by moving the circuit board K. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：为了获得排除环境污染，水资源滥用等的去角质光刻胶的方法和设备，通过使用光学装置剥离和消除光致抗蚀剂可以提高生产率当电子部件如电路板被加工并通过光刻技术处理时，其中光致抗蚀剂被去除。解决方案：具有包含光致抗蚀剂的基板的电路板K由传送设备C转移，具有规定强度的短脉冲激光从激光发生设备10传输到光致抗蚀剂，照射通过转换短脉冲激光通过使用辐射头12将光照射成具有规定宽度和长度的带状激光。进行扩散调节和照射，以获得照射激光在光刻胶和光致抗蚀剂之间的界面上产生热冲击剥离现象的强度底物。光致抗蚀剂通过移动电路板K沿其长度被剥离和去除。版权所有（C）2004，JPO

10. 发明专利

JP2012077328A Vapor deposition mask, manufacturing method of the same, and vapor deposition method 审中-公开
标题翻译：蒸气沉积掩模，其制造方法和蒸发沉积方法
公开(公告)号：JP2012077328A
公开(公告)日：2012-04-19
申请号：JP2010221634
申请日：2010-09-30
申请人： Laser Gijutsu Sogo Kenkyusho , Mitsubishi Plastics Inc , 三菱樹脂株式会社 , 財団法人レーザー技術総合研究所
发明人： MURAYAMA HIDEKI , SEKI HITOSHI , MITA MASAAKI , FUJITA MASAYUKI , SOMEKAWA TOMOHIRO
IPC分类号： C23C14/04 , B23K26/00 , B23K26/32 , B23K26/38
摘要： PROBLEM TO BE SOLVED: To provide a vapor deposition mask which is easily manufactured, lightweight, high in elasticity, and capable of considerably reducing the coefficient of thermal expansion, and a manufacturing method of the vapor deposition mask, and a vapor deposition method using the vapor deposition mask.SOLUTION: A CFRP-made mask blank 3 is disposed on a three-dimensional movable stage 2, and the mask blank 3 is irradiated with a laser beam L via a converging optical system 1. By moving the three-dimensional movable stage 2 according to the predetermined pattern, vapor deposition through holes 5 are formed in the mask blank 3. Vapor deposition through holes of the predetermined pattern may be formed by executing the scanning movement of the laser beam L while the mask blank 3 is fixed. A CFRP-made reinforcing sheet 6 may be fixed to the vapor deposition mask 4 by thermal fusion bonding by laser irradiation.
摘要翻译：解决的问题：提供容易制造，重量轻，弹性高，能够显着降低热膨胀系数的气相沉积掩模，以及蒸镀掩模的制造方法和气相沉积方法。解决方案：将CFRP制成的掩模坯料3设置在三维可移动台2上，并且通过会聚光学系统1对激光束L照射掩模坯料3.通过移动三维可移动台根据预定图案，在掩模坯料3中形成气相沉积通孔5.通过在掩模坯料3固定时执行激光束L的扫描运动，可以形成预定图案的气泡沉积。 CFRP制的增强片6可以通过激光照射的热熔接而固定在蒸镀掩模4上。版权所有（C）2012，JPO＆INPIT

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