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    • 5. 发明专利
    • Semiconductor device manufacturing method
    • 半导体器件制造方法
    • JP2012186403A
    • 2012-09-27
    • JP2011049851
    • 2011-03-08
    • Teramikros Inc株式会社テラミクロス
    • SHIODA JUNJI
    • H01L21/56H01L23/12
    • H01L2224/11
    • PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method which can inhibit a dent from being formed on a surface of an encapsulation layer in a package.SOLUTION: In a semiconductor device manufacturing process, after forming an encapsulation film 17-1 in a temporary cured state by performing a series of processes including coating of a liquid encapsulation material 33 on a semiconductor wafer 21, defoaming and calcination, a series of processes including coating of the liquid encapsulation material 33, defoaming and final baking is performed again, and an encapsulation layer 17 forming an integrated layer without a borderline, which includes the encapsulation film 17-1 in the temporary cured state and an encapsulation film 17-2 composed of the encapsulation material 33 coated thereafter is formed. Accordingly, the encapsulation layer 17 having a uniform film thickness and a flat surface condition is formed.
    • 要解决的问题:提供一种能够抑制在封装中的封装层的表面上形成凹陷的半导体器件制造方法。 解决方案:在半导体器件制造工艺中,在通过执行包括在半导体晶片21上涂覆液体封装材料33的一系列工艺,消泡和煅烧之后,在临时固化状态下形成封装膜17-1之后, 再次进行包括液体包封材料33的涂布,消泡和最终烘烤的一系列处理,形成没有边界线的一体化层的封装层17,其包括处于临时固化状态的封装膜17-1和封装膜 形成由其后涂覆的封装材料33构成的17-2。 因此,形成具有均匀膜厚和平坦表面状态的封装层17。 版权所有(C)2012,JPO&INPIT
    • 7. 发明专利
    • Semiconductor device and manufacturing method of the same
    • 半导体器件及其制造方法
    • JP2012174950A
    • 2012-09-10
    • JP2011036626
    • 2011-02-23
    • Teramikros Inc株式会社テラミクロス
    • KAWAMURA MASAO
    • H01L23/12
    • H01L2224/16
    • PROBLEM TO BE SOLVED: To provide a semiconductor device including a semiconductor structure called SOI, which is less likely to be restricted in circuit design to set a lower surface of a semiconductor substrate of the semiconductor structure to ground potential.SOLUTION: A semiconductor device comprises a multilayer printed board 12 and a semiconductor structure 31 called SOI mounted in a recess 15 provided on the side of a lower surface of the multilayer printed board 12 in a face-up manner. Further, the semiconductor structure 31 is mounted on a printed wiring board 1 by connection of a center part of a lower surface of a semiconductor substrate 33 with ground wiring 3 of the printed wiring board 1 via a conductive adhesive layer 43 arranged below the lower surface of the semiconductor substrate 33. In this case, it is almost unnecessary to regard a routing line for ground. Accordingly, it becomes possible to cause the semiconductor device to be less likely to be restricted in circuit design to set the lower surface of the semiconductor substrate 33 of the semiconductor structure 31 to ground potential.
    • 要解决的问题:提供一种包括称为SOI的半导体结构的半导体器件,其不太可能限制电路设计以将半导体结构的半导体衬底的下表面设置为接地电位。 解决方案:半导体器件包括多层印刷电路板12和称为SOI的半导体结构31,其被安装在设置在多层印刷电路板12的下表面侧面上的凹部15中。 此外,半导体结构31通过半导体衬底33的下表面的中心部分与印刷电路板1的接地布线3之间的连接,安装在印刷电路板1上,导电粘合层43布置在下表面 在这种情况下,几乎不需要考虑用于地面的路线。 因此,可以使半导体器件不太可能受到电路设计的限制,以将半导体结构31的半导体衬底33的下表面设置为接地电位。 版权所有(C)2012,JPO&INPIT