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1. 发明专利

JP2005014203A Micro device and process for producing it 审中-公开
标题翻译：微型设备及其生产工艺
公开(公告)号：JP2005014203A
公开(公告)日：2005-01-20
申请号：JP2004138462
申请日：2004-05-07
申请人： Nanoworld Ag , ナノワールドアーゲー
发明人： DETTERBECK MANFRED , LUTTER STEFAN , BURRI MATHIEU , HARTMANN THEO , AKIYAMA TERUNOBU
IPC分类号： B81C1/00 , B81B3/00 , C23F1/40 , G03F7/00 , G03F7/16
CPC分类号： G03F7/0035 , B81C99/0085 , G03F7/16
摘要： PROBLEM TO BE SOLVED: To prevent a photoresist layer formed on a thin layer (e.g. silicon nitride, silicon oxide, metal, diamond) from stripping off by an etching solution.
SOLUTION: A thin layer (fixed layer) 1 is formed on a silicon substrate 3 and through-holes 4 are formed on the fixed layer by etching. In addition, cavities are dug so that they make around the lower part of the fixed layer which is left by etching. Next, the photoresist layer 5 is formed so that it fills the cavities under the fixed layer. The overhung rims 12 of the fixed layer 1 are fixed so that they do not strip off the photoresist layer.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了防止由蚀刻溶液剥离形成在薄层（例如氮化硅，氧化硅，金属，金刚石）上的光致抗蚀剂层。解决方案：在硅衬底3上形成薄层（固定层）1，通过蚀刻在固定层上形成通孔4。此外，挖出空腔，使得它们通过蚀刻留下固定层的下部周围。接下来，形成光致抗蚀剂层5，使其填充固定层下的空腔。固定层1的悬垂边缘12是固定的，使得它们不剥离光致抗蚀剂层。版权所有（C）2005，JPO＆NCIPI

2. 发明专利

JP3813591B2 Spm sensor and its manufacturing method 有权
公开(公告)号：JP3813591B2
公开(公告)日：2006-08-23
申请号：JP2003077604
申请日：2003-03-20
申请人：ナノワールドアーゲー
发明人：ルッターシュテファン
IPC分类号： G01B21/00 , B81B1/00 , B81B3/00 , B81C1/00 , G01Q70/02 , G01Q70/10 , G01Q70/16
CPC分类号： G01Q70/16 , G01Q70/10

3. 发明专利

JP2003302328A Spm sensor and method of manufacturing the same 有权
标题翻译： SPM传感器及其制造方法
公开(公告)号：JP2003302328A
公开(公告)日：2003-10-24
申请号：JP2003077604
申请日：2003-03-20
申请人： Nanoworld Ag , ナノワールドアーゲー
发明人： LUTTER STEFAN
IPC分类号： G01B21/00 , B81B1/00 , B81B3/00 , B81C1/00 , G01Q70/02 , G01Q70/10 , G01Q70/16 , G01N13/12 , G01N13/10 , G01N13/16 , G12B21/04 , G12B21/08
CPC分类号： G01Q70/16 , G01Q70/10
摘要： PROBLEM TO BE SOLVED: To provide an SPM sensor which is provided with a holding part, a cantilever and a sensor tip, in which the sensor tip protrudes from a face of the cantilever at a free end part of the cantilever and in which the cantilever and the three-face sensor tip are composed of single-crystal (100) silicon and to provide a method of manufacturing the SPM sensor. SOLUTION: The manufacturing method uses a low-cost process step and a wet chemical etching step at a mainframe, and the SPM sensor which is provided with the rectangular cantilever having the tip protruding or not protruding from the free end part is manufactured from a single object. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种SPM传感器，其设置有保持部，悬臂和传感器尖端，传感器尖端在悬臂的自由端部从悬臂的表面突出，并且在其中悬臂和三面传感器尖端由单晶（100）硅组成，并提供制造SPM传感器的方法。解决方案：制造方法在主机上使用低成本的工艺步骤和湿化学蚀刻步骤，并且制造具有尖端突出或不从自由端部突出的矩形悬臂的SPM传感器从单个对象。版权所有（C）2004，JPO

4. 发明专利

JP2006167716A Surface coating apparatus and surface coating method 审中-公开
标题翻译：表面涂层装置和表面涂层方法
公开(公告)号：JP2006167716A
公开(公告)日：2006-06-29
申请号：JP2005356150
申请日：2005-12-09
申请人： Nanoworld Ag , ナノワールドアーゲー
发明人： HARTMANN THEO , SULZBACH THOMAS , RICHTER CHRISTOPH , LUDGE HANS-JURGEN , KRAUSE OLIVER
IPC分类号： B05B15/04 , B05B13/04 , B05B15/06 , B05C5/00 , B05C5/02 , B05C9/08 , B05D1/02
CPC分类号： B05B15/0425 , B05B15/0437 , B05B15/62
摘要： PROBLEM TO BE SOLVED: To provide a coating apparatus and method in which the re-deposition of a sprayed coating material and the soiling by the sprayed coating material on the surface of a coated processed product are suppressed. SOLUTION: The coating apparatus 1 has a coating nozzle 2 for applying the coating material on the surface of the processed product 3 and a suction apparatus for sucking coating material vapor and/or air containing the sprayed coating material. The coating nozzle 2 and the processed product 3 are relatively moved. A suction bell 4 arranged to cover an opening part 9 of the coating nozzle 2 is firmly connected to a nozzle wall 14 of the spray nozzle 2. The suction bell 4 is constituted so as to include an inner bell 5 and an outer bell 6 and is arranged with a slight distance from the processed good 3. The outer bell 6 is arranged to cover the inner bell 5 to keep a separated state from the inner bell 5. The inner bell 5 forms a spray chamber 7 and a suction chamber 8 having a suction port 10 between the outer bell 6 and the inner bell 5 is formed by the outer bell 6 and the inner bell 5. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种涂覆装置和方法，其中抑制喷涂涂层材料的再沉积和喷涂涂层材料在被涂覆的处理产品的表面上的污染。解决方案：涂覆设备1具有涂覆喷嘴2，用于将涂料施加到加工产品3的表面上，以及用于吸取包含喷涂涂料的涂料蒸气和/或空气的抽吸装置。涂布喷嘴2和加工品3相对移动。布置成覆盖喷嘴2的开口部9的吸入口4牢固地连接到喷雾喷嘴2的喷嘴壁14.吸入钟4构成为包括内钟5和外钟6，被布置成与处理好的物品3稍微距离。外钟6布置成覆盖内钟5以保持与内钟5分离的状态。内钟5形成喷雾室7和吸入室8，吸入室8具有通过外钟6和内钟5形成外钟6和内钟5之间的吸气口10.（C）2006，JPO＆NCIPI

7. 发明专利

JP3813592B2 Spm sensor manufacturing method 有权
公开(公告)号：JP3813592B2
公开(公告)日：2006-08-23
申请号：JP2003077605
申请日：2003-03-20
申请人：ナノワールドアーゲー
发明人：ルッターシュテファン
IPC分类号： B81B3/00 , B81C1/00 , G01Q70/10 , G01Q70/16
CPC分类号： G01Q70/16 , G01Q70/10

8. 发明专利

JP2006170979A Sensor for scanning probe microscope, and its manufacturing method 审中-公开
标题翻译：扫描探针显微镜传感器及其制造方法
公开(公告)号：JP2006170979A
公开(公告)日：2006-06-29
申请号：JP2005334218
申请日：2005-11-18
申请人： Nanoworld Ag , ナノワールドアーゲー
发明人： KRAUSE OLIVER , LEHRER CHRISTOPH , PETERSEN SILKE
IPC分类号： B82B1/00 , B82B3/00 , G01Q70/12 , G01Q70/16
CPC分类号： G01Q70/12
摘要： PROBLEM TO BE SOLVED: To provide a sensor for a scanning probe microscope, and its manufacturing method. SOLUTION: This sensor for the scanning probe microscope includes a cantilever 3, a holding member 2, a sensor tip 4 provided with an electron beam deposition type (called as EBD hereinafter) probe tip 5, each end part of the cantilever 3 is formed with the holding member 2, and the sensor tip 4, the EBD probe tip 5 is fixed directly to a base part of the sensor tip 4, and the EBD probe tip 5 is fixed engaged with a hole 6 formed by removing one part of the base part of the sensor tip 4. This manufacturing method therefor includes an etching process by photolithography, or a process for forming the EBD probe tip 5 in the hole 6 of the sensor tip 4 by corpuscular beam deposition, after removing a material by irradiation of a corpuscular beam. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于扫描探针显微镜的传感器及其制造方法。解决方案：用于扫描探针显微镜的该传感器包括悬臂3，保持构件2，设置有电子束沉积型（以下称为EBD）探针尖5的传感器末端4，悬臂3的每个端部形成有保持构件2，并且传感器末端4，EBD探针尖端5直接固定到传感器尖端4的基部，并且EBD探针尖端5与通过除去一个部分形成的孔6固定该制造方法包括通过光刻法进行的蚀刻工艺，或者通过粒子束沉积在传感器尖端4的孔6中形成EBD探针尖端5的工序，辐射红细胞束。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2004004052A Spm sensor and method for manufacturing the same 有权
公开(公告)号：JP2004004052A
公开(公告)日：2004-01-08
申请号：JP2003116970
申请日：2003-04-22
申请人： Nanoworld Ag , ナノワールドアーゲー
发明人： LUTTER STEFAN , DETTERBECK MANFRED , HARTMANN THEO
IPC分类号： G01B21/30 , B81B3/00 , G01Q70/14 , G01Q70/16 , G01N13/16 , G12B21/02
CPC分类号： G01Q70/16 , G01Q70/14 , Y10T29/49007
摘要： PROBLEM TO BE SOLVED: To improve a SPM sensor based on a conventional technology, and to provide a method for manufacturing the improved SPM sensor. SOLUTION: The SPM sensor is manufactured and has a cantilever, a holding element at one end of the cantilever and a sensor chip at the other end of the cantilever. The holding element is made of a photoresist. The cantilever and/or the sensor chip are made of the other material. The photoresist is preferably SU-8, and the other material is preferably silicon, a silicon compound or metals. The manufacturing method also consists of manufacture of a frame having a plurality of SPM sensors. The frame, a holding part and at least the holding element consists of SU-8. The SPM sensor can be manufactured at low cost, and the sensor can be used with the frame disassembled. COPYRIGHT: (C)2004,JPO

10. 发明专利

JP2010091571A Method for manufacturing scanning type microsensor having scanning tip and positioning mark on rear surface of this scanning tip 有权
标题翻译：在本扫描提示的后表面上制作具有扫描提示和定位标记的扫描型微型传感器的方法
公开(公告)号：JP2010091571A
公开(公告)日：2010-04-22
申请号：JP2009236323
申请日：2009-10-13
申请人： Nanoworld Ag , ナノワールドアーゲー
发明人： SULZBACH THOMAS , KRAUSE OLIVER , BURRI MATHIEU , DETTERBECK MANFRED , IRMER BERND , PENZKOFER CHRISTIAN
IPC分类号： G01Q70/16 , G01Q60/38
CPC分类号： G01Q70/16 , G01Q70/08
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a scanning tip and a mark of an SPM sensor. SOLUTION: The SPM sensor 1 includes a support unit 2, a cantilever 3, a scanning tip 4 on a lower surface 6 of the cantilever 3 and a mark 8 on the upper surface 7 of the cantilever 3. The mark 8 on the upper surface 7 of the cantilever 3 is located at a position corresponding to the scanning tip 4 on the lower surface 6 of the cantilever 3. With this configuration, since the exact position of the scanning tip 4 is shown on the upper surface 7 of the cantilever 3, the SPM sensor 1 can be easily adjusted. The support unit 2 is prepared by a method in the prior art together with the cantilever 3, and then, the scanning tip 4 and the mark 8 are evaporated on the cantilever 3 by irradiation with particle beams, automatically adjusted and generated. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于制造SPM传感器的扫描尖端和标记的方法。
解决方案：SPM传感器1包括支撑单元2，悬臂3，悬臂3的下表面6上的扫描末端4和悬臂3的上表面7上的标记8.标记8 悬臂3的上表面7位于与悬臂3的下表面6上的扫描尖端4相对应的位置。利用该构造，由于扫描末端4的确切位置被示出在可以容易地调节悬臂3，SPM传感器1。支撑单元2通过现有技术中的方法与悬臂3一起制备，然后扫描尖端4和标记8通过照射粒子束而在悬臂3上蒸发，自动调节和产生。版权所有（C）2010，JPO＆INPIT

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