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1. 发明专利

JP4078220B2 Ultrasound image inspection apparatus 有权
公开(公告)号：JP4078220B2
公开(公告)日：2008-04-23
申请号：JP2003026615
申请日：2003-02-04
申请人：日立建機ファインテック株式会社
发明人：健竹内
IPC分类号： G01N29/28 , G01N29/04 , G01N29/06 , G01N29/26

2. 发明专利

JP2007248418A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2007248418A
公开(公告)日：2007-09-27
申请号：JP2006076206
申请日：2006-03-20
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KURODA HIROSHI , KENBO YUKIO , KURENUMA TORU , YANAGIMOTO HIROAKI , MINOMOTO YASUSHI , MIWA SHIGERU
IPC分类号： G01Q30/04 , G01Q60/24 , G01Q90/00 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope, used as an inline automatic inspection apparatus in semiconductor production processes and capable of managing information effectively useful for defect management and defect analysis afterwards, when notifying a computer of the amount of state detected, when defects are detected and recording of the nonconformity. SOLUTION: The scanning probe microscope includes both a probe 15 at a tip of a cantilever 16, and a measuring unit 23 for bringing the probe close to the point of measurement of a wafer 14 and acquiring information on the surface of a sample at the point of measurement. The scanning probe microscope is provided with a coordinate value acquiring part (arithmetic and control unit 31) for acquiring data on the coordinate values of points of measurement set in the surface of the sample; a state amount measuring part (electric charge movement monitor part 17) for measuring the amount of state, at least on defects at the points of measurement; a storage part (state amount recording device 33); and a recording execution part (arithmetic and control unit 31) for relating the coordinate values on the points of measurement to the amount of state and recording them in the storage part. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种扫描探针显微镜，用作半导体制造工艺中的在线自动检查装置，并且能够管理有效地用于缺陷管理和缺陷分析的信息，当通知计算机的状态量检测到，当检测到缺陷并记录不合格时。解决方案：扫描探针显微镜包括在悬臂16的尖端处的探针15和用于使探针靠近晶片14的测量点并且获取关于样品表面的信息的测量单元23 在测量点。扫描探针显微镜具备坐标值取得部（运算控制部31），该坐标值取得部（31）用于获取在样本表面设定的测量点的坐标值的数据; 至少在测量点的缺陷上测量状态量的状态量测量部（电荷运动监视部17）存储部（状态量记录装置33）; 以及用于将测量点上的坐标值与状态量相关并将其记录在存储部分中的记录执行部分（运算和控制单元31）。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2007248417A Method for controlling probe of scanning probe microscope 审中-公开
标题翻译：用于控制扫描探针显微镜探针的方法
公开(公告)号：JP2007248417A
公开(公告)日：2007-09-27
申请号：JP2006076205
申请日：2006-03-20
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KURENUMA TORU , KURODA HIROSHI , YANAGIMOTO HIROAKI , KENBO YUKIO
IPC分类号： G01Q10/02 , G01Q10/04 , G01Q10/06
摘要： PROBLEM TO BE SOLVED: To provide a method for controlling the probe of a scanning probe microscope, and capable of improving the reliability in overall measurement accuracy and easily controlling the movement of a tip part of the probe, in a scanning probe microscope for measuring the shapes of surface irregularities of samples etc. at predetermined points of measurement by a step-in method.
SOLUTION: The method for controlling the probe of a scanning probe microscope is applied to a scanning probe microscope, provided with a probe part having the probe 20 opposite to a sample 12; a detection part for detecting physical quantities acting between the sample and the probe; a measuring part for measuring information on the surface of the sample, on the basis of the physical quantities; and a moving mechanism. When the probe is made to move along the shape of the surface of the sample, on the basis of measurement values D
n-1 and D
n , at least at two points of measurement acquired by already executed measuring operations, the approaching direction α n-1 > of the probe 20, at the next point of measurement at which a measuring operation is scheduled, is determined in the method.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于控制扫描探针显微镜的探针的方法，并且能够在扫描探针显微镜中提高整体测量精度的可靠性并且容易地控制探针的尖端部分的移动用于通过步进法测量预定的测量点处的样品等的表面不规则形状。解决方案：将扫描探针显微镜的探针的控制方法应用于扫描探针显微镜，其具有探针部分，其具有与样品12相对的探针20; 用于检测作用在样品和探针之间的物理量的检测部分; 用于根据物理量测量样品表面上的信息的测量部件; 和移动机构。当探针沿着样品表面的形状移动时，基于测量值D n-1 和D n ，至少在两点通过已经执行的测量操作获得的测量在测量操作被调度的下一个测量点处探测器20的接近方向α n-1 >在该方法中确定。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2007218677A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2007218677A
公开(公告)日：2007-08-30
申请号：JP2006038164
申请日：2006-02-15
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： EDAMURA MANABU , KUNITOMO YUICHI , INANOBE YOSHIHITO , HIROKI TAKENORI
IPC分类号： G01Q10/02 , G01Q30/18 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To obtain better measuring images by reducing the vibration noise that exerts adverse effects on a measuring image at measurement.
SOLUTION: This scanning probe microscope is equipped with a sample stand 13 for holding a sample 23, a support 12 on which the sample stand is placed, a probe 22 for receiving the physical action produced with respect to the surface of the sample; a measuring head 30 for outputting the physical action as a signal, a driving mechanism (XY-axis coarse movement mechanisms 15 and 16 and an XY-axis fine adjustment scanner 35) for scanning the probe, with respect to the surface of the sample and a driving mechanism (Z-axis coarse movement mechanism 17 and a Z-axis fine adjustment scanner 34) for changing the distance between the probe and the sample. The sample stand is connected/fixed to another member via a damping alloy spacer 19.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过减少在测量时对测量图像产生不利影响的振动噪声来获得更好的测量图像。
解决方案：该扫描探针显微镜配备有用于保持样品23的样品台13，放置样品台的支撑体12，用于接收相对于样品表面产生的物理作用的探针22 ; 用于输出作为信号的物理作用的测量头30，用于扫描探针的驱动机构（XY轴粗动机构15和16以及XY轴微调扫描器35）相对于样品的表面，以及用于改变探针与样品之间的距离的驱动机构（Z轴粗动机构17和Z轴微调扫描器34）。样品台通过阻尼合金垫片19连接/固定到另一个构件上。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2007163333A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2007163333A
公开(公告)日：2007-06-28
申请号：JP2005361260
申请日：2005-12-15
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： NOMOTO MINEO , WATANABE MASAHIRO , MARUYAMA SHIGENOBU , BABA SHUICHI , KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI
IPC分类号： G01B21/30 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q30/02 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope such as an atomic force microscope or the like enhanced in throughput as an in-line device by shortening a probe approach time. SOLUTION: The scanning probe microscope for measuring the surface shape of a sample includes: a height sensor 116 for measuring the height of the surface of the sample at a height measuring position C separated from a probe measuring position by a distance L; and a control means for raising a sample stage 104 using a result, which is obtained by measuring the height data hC of the surface of the sample at the height measuring position C by the height sensor 116 and allowing the surface of the sample to approach the leading end on the basis of the height shift data ΔZ or difference-in-level data (RhC-RhA) between the surface height of the sample at the height measuring position and the surface height of the sample at the probe measuring position so as to set the interval between the surface of the sample at the probe measuring position and the leading end of the probe to a desired range (hg). COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过缩短探针接近时间，提供诸如原子力显微镜等的扫描探针显微镜，其作为在线装置的生产量增加。解决方案：用于测量样品表面形状的扫描探针显微镜包括：高度传感器116，用于测量与探针测量位置分开距离L的高度测量位置C处的样品表面的高度; 以及控制装置，用于使用通过由高度传感器116测量在高度测量位置C处的样品的表面的高度数据hC而获得的结果，并且允许样品的表面接近基于在高度测量位置处的样品的表面高度与探针测量位置处的样品的表面高度之间的高度偏移数据ΔZ或水平位置数据（RhC-RhA）的前端，以便将探针测量位置处的样品表面与探针的前端之间的间隔设置到所需的范围（hg）。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2007101440A Image forming method of ultrasonic imaging device 审中-公开
标题翻译：超声成像装置的图像形成方法
公开(公告)号：JP2007101440A
公开(公告)日：2007-04-19
申请号：JP2005293621
申请日：2005-10-06
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： HEBARU TOSHIYUKI
IPC分类号： G01N29/26 , G01N29/44
摘要： PROBLEM TO BE SOLVED: To provide the imaging forming method of an ultrasonic imaging device capable of detecting a concealed flaw or the like, which can not be detected by a conventional scanning system, by the setting of the same sampling pitch and scanning range as a conventional scanning system.
SOLUTION: In the image forming method of the ultrasonic imaging device, a probe 11 for emitting an ultrasonic wave to an inspection target 13 to receive the echo thereof is sent in a main scanning direction and a sub-scanning direction to be subjected to scanning operation. This image forming method has a first stage for indicating a scanning range and a sampling pitch, a second stage for performing scanning while shifting the scanning start position in the main scanning direction at the +1/n interval of the sampling pitch in the main scanning direction at the time of sending movement in the sub-scanning direction and a third stage for performing scanning while shifting the scanning start position in the main scanning direction at the interval of -1/n of the sampling pitch in the main scanning direction at the time of the sending movement in the sub-scanning direction when the number of the sending movements in the sub-scanning direction becomes n-times.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供能够检测由常规扫描系统无法检测到的隐藏缺陷等的超声波成像装置的成像形成方法，通过设置相同的采样间距和扫描作为常规扫描系统。解决方案：在超声波成像装置的图像形成方法中，将用于向检查对象13发送超声波以接收其回波的探针11在主扫描方向和副扫描方向上发送以进行扫描操作。该图像形成方法具有用于指示扫描范围和采样间距的第一级，用于在主扫描中以采样间距的+ 1 / n间隔沿主扫描方向移动扫描开始位置的同时进行扫描的第二级在副扫描方向上发送移动时的方向，以及第三级，用于在主扫描方向上以主扫描方向上的采样间距的-1 / n的间隔沿主扫描方向移动扫描开始位置当副扫描方向的发送次数为n次时，在副扫描方向上的发送移动的时间。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2006308313A Scanning probe microscope and evaluation method of its probe 审中-公开
标题翻译：扫描探针显微镜及其探测评估方法
公开(公告)号：JP2006308313A
公开(公告)日：2006-11-09
申请号：JP2005128139
申请日：2005-04-26
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MORIMOTO TAKASHI , SHINAKI TORU , NAGANO YOSHIYUKI
IPC分类号： G01Q40/02 , G01Q60/38 , G01Q90/00
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope constituted so as to accurately and quantitatively evaluate the leading end shape of its probe by simple work, and also to provide an evaluation method of its probe.
SOLUTION: The evaluation method of the probe of the scanning probe microscope is constituted of: a measuring step S12 for successively measuring a plurality of the grooves W1-W5, which are respectively different in inside dimension and formed to the probe evaluating region of a reference sample 11, by the probe; a comparing step S14 for comparing the depth measuring data (measuring profiles 13) obtained in the measuring step with the known depth data D0 related to the probe evaluating region; and a judging step S15 for judging the measurable and usable condition related to the probe used in measurement on the basis of the compared result of the comparing step.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种扫描探针显微镜，其构造成通过简单的工作来精确地和定量地评价探针的前端形状，并且还提供其探针的评价方法。解决方案：扫描探针显微镜的探针的评估方法由以下部分构成：测量步骤S12，用于连续测量内部尺寸不同并形成于探针评价区域的多个槽W1-W5 的参考样品11; 比较步骤S14，用于将在测量步骤中获得的深度测量数据（测量轮廓13）与与探测评估区域相关的已知深度数据D0进行比较; 以及判断步骤S15，用于基于比较步骤的比较结果来判断与测量中使用的探针相关的可测量和可用状态。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2006234665A Ultrasonic inspection device 审中-公开
标题翻译：超声波检查装置
公开(公告)号：JP2006234665A
公开(公告)日：2006-09-07
申请号：JP2005051384
申请日：2005-02-25
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MORITA TERU , NAGANO YOSHIYA
IPC分类号： G01N29/04 , G01N29/00
CPC分类号： G01N2291/02881
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic inspection device capable of measuring stable and highly-accurate defect reflecting echo, by removing an influence of a temperature change of an inspection object and measuring water by performing temperature compensation of a sound pressure round-trip transmission rate.
SOLUTION: This ultrasonic inspection device is equipped with a defect detection part 27 for detecting a defect 18 existing inside by applying an ultrasonic wave from a probe to the inspection object 14 immersed in the measuring water 13, a path length measuring part for measuring the path length to a size known part 14a of the inspection object and outputting path length data acquired by measurement, and a control operation part 23 for controlling each operation. The ultrasonic inspection device is also equipped with a defect reflecting echo measuring part, a path length/sound velocity conversion part 26 for converting the path length data into the sound velocity, a water temperature meter 30, a measuring water sound velocity calculation part 31, a sound pressure round-trip transmission rate calculation part 32, a correction value calculation part 33 for calculating a correction value by comparison between a reference sound pressure round-trip transmission rate and the sound pressure round-trip transmission rate, and a defect reflecting echo correction part 34 for correcting the defect reflecting echo by the correction value.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够测量稳定且高准确度的反射回波缺陷的超声波检查装置，通过去除检测对象的温度变化和测量水的影响，通过进行声压回合的温度补偿传输速率。解决方案：该超声波检查装置配备有用于检测存在于内部的缺陷18的缺陷检测部27，该检测部通过将浸没在测量水13中的检查对象14的探针施加超声波，路径长度测量部，测量到检测对象的尺寸已知部分14a的路径长度，并输出通过测量获取的路径长度数据;以及控制操作部23，用于控制每个操作。超声波检查装置还配备有缺陷反射回波测量部，将路径长度数据变换为声速的路径长度/声速变换部26，水温计30，测量水声速度计算部31，声压往返传送速度计算部分32，校正值计算部分33，用于通过比较参考声压往返传播速率和声压往返传播速率之间的校正值和反射回波缺陷校正部分34，用于通过校正值校正反射回波的缺陷。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2006145333A Probe regeneration method, and scanning probe microscope 审中-公开
标题翻译：探针再生方法和扫描探针显微镜
公开(公告)号：JP2006145333A
公开(公告)日：2006-06-08
申请号：JP2004334431
申请日：2004-11-18
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： SHINAKI TORU , MORIMOTO TAKASHI , KURENUMA TORU
IPC分类号： G01Q40/00 , G01Q60/16 , G01Q60/24 , G01Q60/38 , G01Q70/00
摘要： PROBLEM TO BE SOLVED: To provide a probe regeneration method and a scanning probe microscope capable of maintaining all the time a tip of a probe with a favorable sharpness degree, capable of prolonging a service life of the probe, capable of holding favorably precision for measurement and inspection, capable of reducing cost, and capable of enhancing data reproducibility.
SOLUTION: This probe regeneration method is a method executed by the scanning probe microscope provided with a probe part having the probe opposed to a sample, a probe moving mechanism for conducting approach and evacuation moving to/from the probe, and scanning moving for the probe, a measuring part for measuring a physical quantity generated between the probe and the sample when the probe scans a surface of the sample, and a sample stage mounted with the sample, and for scanning the surface of the sample with the probe to measure the surface of the sample, while changing a position of the probe with respect to the sample by the probe moving mechanism while keeping the physical quantity constant by the measuring part. The method has a step for preparing the regeneration working sample, and a step for pushing the probe onto the regeneration working sample under a mounted condition to regenerate the tip of the probe.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供探头再生方法和扫描探针显微镜，其能够始终保持具有良好锐度的探头的尖端，能够延长探针的使用寿命，能够有利地保持测量和检查的精度，能够降低成本，并能够提高数据再现性。解决方案：该探针再生方法是由扫描探针显微镜执行的方法，该扫描探针显微镜设置有具有与样品相对的探针的探针部分，用于进行接近和从探针移动的抽吸的探针移动机构，以及扫描移动对于探针，测量部件用于当探针扫描样品的表面时，测量在探针和样品之间产生的物理量，以及安装有样品的样品台，并且用探针扫描样品表面在通过测量部件保持物理量恒定的同时，通过探头移动机构改变探针相对于样品的位置，测量样品的表面。该方法具有用于制备再生工作样品的步骤，以及在安装状态下将探头推到再生工作样品上以再生探针的尖端的步骤。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2006138655A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2006138655A
公开(公告)日：2006-06-01
申请号：JP2004326293
申请日：2004-11-10
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KUNITOMO YUICHI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI , KENBO YUKIO , INANOBE YOSHIHITO , KAWASAKI TAKAHIKO
IPC分类号： G01B21/30 , G01Q30/04 , G01Q30/06 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of obtaining precise measurement data by eliminating noise component characteristically arises only in specific scanning direction of the measurement device.
SOLUTION: The scanning probe microscope comprises: the cantilever 14 provided with prove 13; the moving mechanisms 11 and 17 for relatively moving the position of the probe to the sample 10; the detection means for detecting the specific physical amount; the measurement means for measuring the surface of the sample; and the measurement control means 60 for controlling the operation of the moving mechanisms and the measurement means. The measurement control means comprises: the scanning direction setting means 61 for setting the first scanning direction and the second scanning direction crossing at an arbitrary angle; the measurement performing means 62 for obtaining the measurement data by measuring the surface of the sample while scanning and moving the probe in the first scanning direction and the second scanning direction; the first subtraction means 63 for operating the difference of data between the first line data and the second line data; and the second subtraction means 64 for subtracting the above data difference from the measurement data concerning the first scanning direction.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供能够通过消除噪声分量获得精确的测量数据的扫描探针显微镜，其特征在于仅在测量装置的特定扫描方向上产生。解决方案：扫描探针显微镜包括：提供证明13的悬臂14; 用于将探针的位置相对移动到样品10的移动机构11和17; 用于检测特定物理量的检测装置; 用于测量样品表面的测量装置; 以及用于控制移动机构和测量装置的操作的测量控制装置60。测量控制装置包括：用于设置第一扫描方向和第二扫描方向以任意角度交叉的扫描方向设置装置61; 测量执行装置62，用于通过在第一扫描方向和第二扫描方向扫描和移动探针的同时测量样品的表面来获得测量数据; 用于操作第一行数据和第二行数据之间的数据差的第一减法装置63; 以及用于从与第一扫描方向有关的测量数据减去上述数据差的第二减法装置64。版权所有（C）2006，JPO＆NCIPI

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