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1. 发明专利

JP2008058070A Method of controlling sample static eliminator for scanning probe microscope 审中-公开
标题翻译：用于扫描探针显微镜的样品静电消除器的控制方法
公开(公告)号：JP2008058070A
公开(公告)日：2008-03-13
申请号：JP2006233509
申请日：2006-08-30
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MINOMOTO YASUSHI , YANAGIMOTO HIROAKI , INANOBE YOSHIHITO , MAKIHARA NORIYA , MIWA SHIGERU
IPC分类号： G01Q30/02 , G01Q30/08 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To provide a method of controlling a sample static eliminator for a scanning probe microscope to shorten time for static elimination using a static eliminator as far as possible in performing the static elimination for a wafer, etc. by means of the static eliminator of the scanning probe microscope installed for an in-line automatic inspection process for the wafer, etc., to lengthen maintenance time for an electrode needle and X rays, thereby lengthening the cycle of component replacement.
SOLUTION: The method is applied to a scanning probe microscope with a measurement unit 1 and the static eliminator 301, the measurement unit 1 provided with a probe 20 on an end of a cantilever 21 and obtaining information on the surface of a specimen by bringing the probe close to the specimen 12 while the static eliminator 301 removing electrostatic charge in the specimen. The static eliminator 301 is activated in synchronizm with the operation start of the whole device. More specifically, the static eliminator 301 is activated at the timing of putting a signal lamp 401 on.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种控制扫描探针显微镜的样品静电消除器的方法，以通过使用静电消除器尽可能地减少用于晶片等的静电消除的静电消除时间的扫描探针显微镜的静电消除器，用于晶片等的在线自动检查过程，以延长电极针和X射线的维护时间，从而延长部件更换的周期。
解决方案：将该方法应用于具有测量单元1和静电消除器301的扫描探针显微镜，测量单元1在悬臂21的端部上设置有探针20，并获得关于样本表面的信息通过使探针靠近样本12，同时静电消除器301去除样本中的静电电荷。静电消除器301与整个设备的操作开始同步地被激活。更具体地说，在放置信号灯401的定时，静电消除器301被激活。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2005195548A Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：JP2005195548A
公开(公告)日：2005-07-21
申请号：JP2004004445
申请日：2004-01-09
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KURODA HIROSHI , KURENUMA TORU , YANAGIMOTO HIROAKI , KUNITOMO YUICHI , MORIMOTO TAKASHI , MINOMOTO YASUSHI
IPC分类号： G01Q30/02 , G01Q30/20 , G01Q60/24 , G01Q90/00 , G01N13/10 , G01N13/16
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of stable and highly reliable operation in inspections on wafers etc. without operation halts in an inspection apparatus or any damage to a probe even if samples are charged in an inline automatic inspection process of wafers etc.
SOLUTION: The scanning probe microscope is provided with a measuring unit 1 provided with a probe 20 at a tip of a cantilever 21 for acquiring information on sample surfaces by bringing the probe close to the samples 12, destaticizing devices (301 and 302) for removing electrostatic charges of the samples, an electrostatically charged state determining part 311 for detecting the state of electrostatic charges of the samples based on displacements of the cantilever, and an additional destaticizing control part 312 for additionally removing electricity in the case that the state of electrostatic charge of the samples exceeds a threshold value.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种扫描探针显微镜，其能够在检查设备中进行检查时能够稳定且高度可靠地进行检查，而不会在检查装置中停止操作或对探针造成任何损坏，即使样品在直列自动检查中进行充电晶片等的处理。解决方案：扫描探针显微镜设置有测量单元1，该测量单元1在悬臂21的尖端处设置有探针20，用于通过将探针靠近样品12来静电获取样品表面的信息用于去除样品的静电荷的装置（301和302），用于基于悬臂的位移检测样品的静电电荷状态的静电充电状态确定部311和用于另外去除电的额外去静电控制部312 样品的静电电荷状态超过阈值的情况。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2005069972A Method for controlling travel in probe in scanning probe microscope 审中-公开
标题翻译：用于扫描扫描显微镜中探测探测的方法
公开(公告)号：JP2005069972A
公开(公告)日：2005-03-17
申请号：JP2003302991
申请日：2003-08-27
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MINOMOTO YASUSHI , MIWA SHIGERU , MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI
IPC分类号： G01B21/30 , G01Q10/04 , G01Q10/06 , G01Q30/02 , G01Q60/24 , G01N13/16 , G01N13/10
CPC分类号： G01Q10/06 , G01Q30/06 , Y10T29/49828
摘要： PROBLEM TO BE SOLVED: To provide a method for controlling the travel of a probe in a scanning probe microscope for easily controlling the scanning travel of the probe on a sample surface, while maintaining high measurement precision, when measuring a part, or the like, having an inclination when measuring irregularities on the sample surface. SOLUTION: The method for controlling the travel of the probe in the scanning probe microscope comprises respective slight movement mechanisms 23, 29, 30 of X, Y, Z for relatively changing the positions of the probe and the sample, such as a cantilever 21 having the probe 20 that faces the sample 12, and an optical lever type optical detector for measuring atomic force, or the like generated between the probe and the sample, when the probe scans the surface of the sample. The method is applied to the scanning type probe microscope for measuring the sample surface by scanning the sample surface by the slight movement mechanism; while physical quantities are maintained constant by a measurement section, and has a feature for changing the approach direction of the probe, when the traveling direction for bringing the probe closer to the sample surface differs from a reaction direction, when the probe comes into contact with the sample surface at least by a set value. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于在扫描探针显微镜中控制探针的行程的方法，用于容易地控制探针在样品表面上的扫描行程，同时保持高测量精度，当测量零件时，或在测量样品表面上的不规则性时具有倾斜度。解决方案：用于控制探针在扫描探针显微镜中的移动的方法包括用于相对地改变探针和样品的位置的X，Y，Z的各个轻微移动机构23,29,30，例如当探头扫描样品表面时，探头20面向样品12的悬臂21和用于测量探针与样品之间产生的原子力的光学杆式光学检测器。该方法应用于扫描型探针显微镜，用于通过轻微移动机构扫描样品表面来测量样品表面; 而当物理量由测量部保持恒定时，当探头更靠近样品表面的行进方向与反作用方向不同时，具有用于改变探针的接近方向的特征，当探针接触时样品表面至少设定值。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2005043108A Specific pattern detecting method of scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜的特定图案检测方法
公开(公告)号：JP2005043108A
公开(公告)日：2005-02-17
申请号：JP2003200678
申请日：2003-07-23
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： NAGANO YOSHIYUKI , MORIMOTO TAKASHI , SHINAKI TORU , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MIWA SHIGERU , MURAYAMA TAKESHI
IPC分类号： G01B21/30 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q30/04 , H01L21/66 , G01N13/10
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of detecting a specific pattern even in a case that a plurality of the same patterns are arranged on a sample and corresponding even to the detection of a specific pattern of a shape not having two orthogonal edges, for example, the shape of a round bottom hole or the like.
SOLUTION: The specific pattern formed on the surface of the sample is detected by the scanning probe microscope equipped with a probe part, a fine adjustment mechanism for finely adjusting the position of a probe, a coarse adjustment mechanism for allowing the probe to move, approach and retreat with respect to the sample and a measuring part for measuring the physical quantity produced between the probe and the sample. When the region, wherein patterns are arranged cyclically, of the surface of the sample is measured by the measuring part by allowing the probe to scan by the fine adjustment mechanism or the coarse adjustment mechanism, scanning is performed at a first pitch until the patterns are found out or scanning is performed at a second pitch after the patterns are found out to measure the region of the patterns and the specific pattern is detected from a plurality of the patterns in the region.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：即使在多个相同的图案被布置在样本上的情况下也能够提供能够检测特定图案的扫描探针显微镜，甚至对于甚至不检测形状的特定图案的图案也是如此具有两个正交边缘，例如圆底孔等的形状。解决方案：通过配有探针部分的扫描探针显微镜，用于精细调节探针位置的微调机构，用于使探头接近的微调机构，检测在样品表面形成的特定图案相对于样品移动，接近和退避，以及用于测量探针和样品之间产生的物理量的测量部件。当通过允许探针通过微调机构或粗调机构扫描测量部分来测量样品表面的图案周期性区域时，以第一间距进行扫描，直到图案为在发现图案以测量图案的区域并且从该区域中的多个图案检测到特定图案之后，以第二间距执行发现或扫描。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2006250636A Transfer device 审中-公开
标题翻译：传输设备
公开(公告)号：JP2006250636A
公开(公告)日：2006-09-21
申请号：JP2005065981
申请日：2005-03-09
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： YANAGIMOTO HIROAKI , MINOMOTO YASUSHI , MIWA SHIGERU , KURENUMA TORU , KURODA HIROSHI , KUNITOMO YUICHI
IPC分类号： G12B5/00 , G01B21/00 , G01B21/30 , G01Q10/02 , G01Q10/04 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a mechanical transfer device capable of high speed precise and smooth scan, and transferring and scanning also eliminating generation of creeping phenomena at the stopping time, and capable of compatibility of high-speed scanning and high precision positioning for securing precision of dynamic positioning. SOLUTION: The transfer device is composed of: 2 pairs of driving shaft mechanisms (205A, 206A-1, 205B and 206B-1 etc. ) provided parallel in a direction transferring the scanning stage 211; 2 pairs of position detecting mechanisms (213A and 213B), provided with each of the 2 pairs of driving shaft mechanisms respectively; and the controller 33 etc. , for controlling the action of the 2 pair driving shaft mechanisms. The controller etc. are constituted, such that the deviation d of each driving position between 2 pairs of driving shaft mechanisms is maintained, by driving and controlling at least at the time of the stationary time of the scanning stage. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供能够高速精确和平滑扫描的机械传送装置，以及传送和扫描也消除了停止时产生的蠕变现象，并且能够兼容高速扫描和高精度定位以确保动态定位的精度。解决方案：传送装置由平行于传送扫描台211的方向设置的2对驱动轴机构（205A，206A-1,20BB和206B-1等）组成; 2对位置检测机构（213A和213B），分别设置有两对驱动轴机构中的每一个; 和控制器33等，用于控制2对驱动轴机构的动作。控制器等构成为通过至少在扫描阶段的静止时间的驱动和控制来维持2对驱动轴机构之间的每个驱动位置的偏差d。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2005156237A Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：JP2005156237A
公开(公告)日：2005-06-16
申请号：JP2003392289
申请日：2003-11-21
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KURODA HIROSHI , KURENUMA TORU , YANAGIMOTO HIROAKI , MINOMOTO YASUSHI , MIWA SHIGERU , MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI
IPC分类号： G01Q10/02 , G01Q10/04 , G01Q60/24 , G01Q60/26 , G01Q90/00 , G01N13/10 , G01N13/16
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope which has realized a needle tip state of monitoring at the of retraction of a probe, in a step-in type scanning probe microscope.
SOLUTION: This scanning probe microscope is constituted so that a cantilever 21, having the probe 20 provided to the leading end thereof is provided and the probe 20, is allowed to approach or to retreat with respect to a specimen 12, by moving the cantilever 21 to obtain the surface data of the specimen 12 and equipped with a probe retreat state confirming means 60 for confirming whether the retreating operation of the probe 20 is normal or abnormal. A displacement detector, for detecting the displacement quantity of the cantilever 21, is provided, and the probe retreat state confirming means 60 is composed of a monitor means 49 for monitoring the detection signal outputted from the displacement detector, after the retreat operation of the probe 20 has been completed and a decision means 61 for deciding whether the retreat operation of the probe 20 is normal or abnormal, on the basis of the detection signal monitored by the monitor means 49.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种扫描探针显微镜，其在阶梯式扫描探针显微镜中实现了在探针回缩时的针尖状态监测。解决方案：该扫描探针显微镜被构造成使得设置有其前端的探针20的悬臂21，并且通过移动允许探针20相对于样本12接近或退避悬臂21，以获得样本12的表面数据，并配备有用于确认探针20的后退操作是正常还是异常的探针后退状态确认装置60。提供了用于检测悬臂21的位移量的位移检测器，并且探针退避状态确认装置60包括监视装置49，用于在探头的后退操作之后监视从位移检测器输出的检测信号根据由监视装置49监视的检测信号，判定装置61是否正常或异常判定装置61。（C）2005，JPO＆NCIPI

7. 发明专利

JP2008089542A Method for controlling probe in scanning probe microscope 审中-公开
标题翻译：用于控制扫描探针显微镜中探针的方法
公开(公告)号：JP2008089542A
公开(公告)日：2008-04-17
申请号：JP2006273929
申请日：2006-10-05
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KURENUMA TORU , YANAGIMOTO HIROAKI , KENBO YUKIO , KUNITOMO YUICHI , MORIMOTO TAKASHI , SEKINO SATOSHI
IPC分类号： G01Q10/04 , G01Q10/06
CPC分类号： G01Q10/06 , G01Q30/06
摘要： PROBLEM TO BE SOLVED: To provide a method for controlling the probe in a scanning probe microscope that properly controls the twisted condition of the probe that is caused from a reaction force, applied from the inclination portion of unevenness on the surface of a sample to the top end of the probe. SOLUTION: The method applied to the scanning probe microscope comprises a probe section, having the probe 20 facing the sample 12; a detection section for detecting physical quantities between the sample and the probe; a measuring section for measuring surface information of the sample, based on the physical quantity, when the probe scans the surface of the sample; and a moving mechanism that has at least two degrees of freedom. The method makes the probe move in a moving direction that is different from the pushing direction, while pushing the probe to the surface of the sample; detects twisting of the probe that is generated during this movement operation; and adjusts one or both of a speed in the moving direction of the probe and the force in the pushing direction, based on the detected value. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种在扫描探针显微镜中控制探针的方法，该扫描探针显微镜适当地控制从反作用力引起的探针的扭曲状态，该反作用力从凹凸的倾斜部分施加在样品到探头的顶端。解决方案：应用于扫描探针显微镜的方法包括探针部分，探针20面向样品12; 用于检测样品和探针之间的物理量的检测部分; 测量部分，用于当探针扫描样品表面时，基于物理量来测量样品的表面信息; 以及具有至少两个自由度的移动机构。该方法使探针在与推动方向不同的移动方向上移动，同时将探针推向样品表面; 检测在该移动操作期间产生的探针的扭转; 并且基于检测值来调整探针的移动方向上的速度和推动方向上的力中的一个或两个。版权所有（C）2008，JPO＆INPIT

8. 发明专利

JP2006250637A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2006250637A
公开(公告)日：2006-09-21
申请号：JP2005065982
申请日：2005-03-09
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MINOMOTO YASUSHI , YANAGIMOTO HIROAKI , MIWA SHIGERU
IPC分类号： G01B21/30 , G01Q10/04 , G01Q40/00 , G01Q60/24 , G01Q90/00
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of controlling accurately the probe length by measuring the length of the probe mounted on a device, estimating accurately the abrasion state of the probe, keeping excellently the tip state of the probe during measurement, elongating the using lifetime of the probe, and keeping excellently accuracy of measuring/inspection.
SOLUTION: This scanning probe microscope is equipped with a probe part (21, 22 or the like) having the probe 20 facing to a sample 12, a probe moving mechanism 14, 15, 23, 29 for moving the probe, a measuring part 63 (24, 31, 32) for measuring a physical quantity generated between the probe and the sample, and a sample stage 11 where the sample is placed. The scanning probe microscope for measuring the sample surface by scanning the sample surface by the probe has a constitution equipped with a probe length measuring mechanism 62 for measuring the length in the axial direction of the probe 20.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供能够通过测量安装在装置上的探头的长度来准确地控制探针长度的扫描探针显微镜，准确地估计探针的磨损状态，保持探针的尖端状态在测量过程中，延长探头的使用寿命，并保持测量/检查精度。解决方案：该扫描探针显微镜配备有探头20面向样品12的探针部分（21,22等），用于移动探针的探针移动机构14,15,23,29 用于测量在探针和样品之间产生的物理量的测量部分63（24,31,32）以及放置样品的样品台11。用于通过探针扫描样品表面来测量样品表面的扫描探针显微镜具有配备有用于测量探针20的轴向长度的探针长度测量机构62的构造。版权所有（C）2006 ，JPO＆NCIPI

9. 发明专利

JP2005069762A Scanning type surface measuring instrument and measuring method using it 审中-公开
标题翻译：扫描型表面测量仪器和使用它的测量方法
公开(公告)号：JP2005069762A
公开(公告)日：2005-03-17
申请号：JP2003297470
申请日：2003-08-21
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI , KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MIWA SHIGERU
IPC分类号： G01B21/30 , G01Q30/02 , G01Q30/06 , G01Q60/24 , G01Q90/00 , G01N13/10
摘要： PROBLEM TO BE SOLVED: To provide a scanning type surface measuring instrument capable of enhancing the measuring precision of the flatness over a wide area in the measurement of the surface shape of the wide area on the surface of a substrate or wafer, and a measuring method using it.
SOLUTION: This scanning type surface measuring instrument is equipped with a cantilever 21 having the probe 20 opposed to a sample 12, a measuring part for measuring the atomic force caused between the probe and the sample when the surface of the sample is scanned by the probe, an XY stage 14 for wide area measurement performing scanning operation and a sample fixing chuck mechanism 16A and constituted so that the surface of the sample is scanned by the probe in the XY stage while keeping physical quantity constant in the measuring part to measure the surface of the sample. Further, this apparatus is equipped with a control part for setting almost the same measuring region as that set in the surface measurement of the sample to measure an apparatus error component before the original measurement of the sample and subtracting the measured value related to the apparatus error from the measured value related to the surface of the sample.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种扫描型表面测量装置，其能够在基板或晶片的表面上的广域的表面形状的测量中提高广域的平坦度的测量精度，以及使用它的测量方法。解决方案：该扫描型表面测量仪器配有悬臂21，探头20与样品12相对，测量部件用于测量样品表面扫描时探针与样品之间产生的原子力通过探针，用于进行扫描操作的广域测量的XY平台14和样品固定卡盘机构16A，并且构造成使得在XY台中通过探针扫描样品的表面，同时保持测量部分中的物理量恒定测量样品的表面。此外，该装置配备有用于设置与样本的表面测量中设置的几乎相同的测量区域的控制部分，以在样本的原始测量之前测量装置误差分量，并且减去与装置误差相关的测量值从与样品表面相关的测量值。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2007218676A Positioning method of measuring position of scanning probe microscope 审中-公开
标题翻译：测量探针微阵列位置的定位方法
公开(公告)号：JP2007218676A
公开(公告)日：2007-08-30
申请号：JP2006038163
申请日：2006-02-15
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MINOMOTO YASUSHI , YANAGIMOTO HIROAKI , MIWA SHIGERU
IPC分类号： G01Q10/04 , G01Q10/06 , G01Q30/02 , G01Q60/24 , G01Q60/38
摘要： PROBLEM TO BE SOLVED: To provide a positioning method of the measuring position of a scanning probe microscope, capable of performing positioning at a high speed with high precision, by eliminating the positional shift caused by the coarse operation of a Z-coarse adjustment part, at positioning of the probe at the measuring position in the scanning probe microscope.
SOLUTION: The positioning method of the measuring position of the scanning probe microscope includes a step S1 for deciding the measuring position set to the measuring surface of a sample 12 by the movement due to XYZ sample stages (11, 14 and 15) and the photographing operation of a TV camera 19 or the like; a step S2 for separating a probe 20 from the sample by the moving operation of the Z fine adjustment mechanism 23 of XYZ fine adjustment mechanisms (23 and 29); a step S3 for moving the probe to the measuring position on the measuring surface of the sample by the moving operation of an XY stage mechanism 14; and a step S4 for allowing the probe to approach the sample by the moving operation of the Z fine adjustment mechanism.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供扫描探针显微镜的测量位置的定位方法，能够以高精度高速定位，通过消除由Z粗糙度的粗略操作引起的位置偏移在扫描探针显微镜中将探头定位在测量位置时调节部分。解决方案：扫描探针显微镜的测量位置的定位方法包括步骤S1，用于通过XYZ样品台（11,14和15）的移动来确定对样品12的测量表面设置的测量位置的步骤S1，以及TV摄像机19等的拍摄操作; 通过XYZ微调机构（23,29）的Z微调机构23的移动动作，将探头20与样品分离的步骤S2; 步骤S3，用于通过XY台机构14的移动操作将探头移动到样品的测量表面上的测量位置; 以及通过Z精细调节机构的移动操作使探针接近样品的步骤S4。版权所有（C）2007，JPO＆INPIT

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