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    • 81. 发明专利
    • Optical switch apparatus
    • 光开关装置
    • JP2007010966A
    • 2007-01-18
    • JP2005191479
    • 2005-06-30
    • Olympus Corpオリンパス株式会社
    • NAKANO JUNICHIMATSUO DAISUKEMURAKAMI KENJIKAMIYA NOBUTAKA
    • G02B26/08B81B3/00
    • G02B6/359G02B6/2931G02B6/3518G02B6/357G02B6/3584
    • PROBLEM TO BE SOLVED: To provide an inexpensive and compact optical switch apparatus in which light loss is reduced. SOLUTION: The optical switch apparatus has: an input optical fiber 102 and output optical fibers; a grating 107 which demultiplexes an optical signal into a plurality of optical signals having different wavelengths; a plurality of movable mirrors 108a or the like which are respectively tilted to reflect the respectively demultiplexed optical signals and to properly direct the optical signals to the output optical fibers 103; a mirror angle detector 109a or the like which detects the respective tilt angles of the respective movable mirrors 108a or the like; a table 111 which correlates the wavelength numbers λno for discriminating the optical signals having a plurality of wavelengths and the output destination number OUTno for discriminating the input optical fiber 102 and the output optical fibers 103 to the tilt angles of the respective movable mirrors 108a or the like; and a control circuit 110 which performs a feedback control of the movable mirrors 108a or the like so that the tilt angles AD output from the table 11 and the output from the mirror angle detector 109a or the like coincide with each other. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种廉价且紧凑的光损失减小的光开关装置。 解决方案:光开关装置具有:输入光纤102和输出光纤; 光栅107,其将光信号解复用为具有不同波长的多个光信号; 多个可移动镜108a等分别倾斜以反映分别被解复用的光信号并将光信号适当地引导到输出光纤103; 检测各个可移动镜108a等的倾斜角度的镜角检测器109a等; 将用于区分具有多个波长的光信号的波长数λno和将输入光纤102和输出光纤103区分为各个可移动反射镜108a的倾斜角的输出目的地号码OUTno相关联的表111 喜欢; 以及控制电路110,其执行可移动反射镜108a等的反馈控制,使得从表11输出的倾斜角度AD和来自反射镜角度检测器109a的输出等彼此一致。 版权所有(C)2007,JPO&INPIT
    • 84. 发明专利
    • Optical switch
    • 光开关
    • JP2006276487A
    • 2006-10-12
    • JP2005095965
    • 2005-03-29
    • Fujitsu Ltd富士通株式会社
    • YAMASHITA SHINJIYAMAMOTO TAKESHIAKASHI TAMOTSUSHIBATA KOHEIAOTA HIROSHI
    • G02B26/08
    • G02B6/3586G02B6/2931G02B6/29313G02B6/3518G02B6/356G02B6/357G02B6/3588
    • PROBLEM TO BE SOLVED: To suppress occurrence of reduction in optical coupling efficiency to an output spectroscopic path. SOLUTION: The optical switch comprises; a first spectroscopic section 5-1, a second spectroscopic section 5-2 which further spectroscopically analyzes a plurality of wavelength components that are spectroscopically analyzed by the first spectroscopic section 5-1, a plurality of movable mirrors 7a which respectively reflect the plurality of wavelength components that are spectroscopically analyzed by the second spectroscopic section 5-2 so as to direct the components to different directions and a control section 8 which compensates for the deviation with respect to the optical axis of the plurality of waveform components being spectroscopically analyzed by the second spectroscopic section 5-2 by the settings of the angles of the reflection surfaces at the plurality of movable mirrors 7a. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:抑制对输出光谱路径的光耦合效率的降低的发生。 解决方案:光开关包括: 第一分光部5-1,进一步光谱分析由第一分光部5-1光谱分析的多个波长成分的第二分光部5-2,分别反射多个波长的多个可动镜7a 通过第二光谱部分5-2进行光谱分析的部件,以便将部件指向不同的方向;以及控制部分8,其补偿相对于多个波形分量的光轴的偏差,由第二光谱部分5-2进行光谱分析 通过对多个可动镜7a的反射面的角度的设定来进行分光部5-2。 版权所有(C)2007,JPO&INPIT
    • 88. 发明专利
    • Microoptical device and method of manufacturing same
    • 微波器件及其制造方法
    • JP2005107180A
    • 2005-04-21
    • JP2003340797
    • 2003-09-30
    • Japan Aviation Electronics Industry Ltd日本航空電子工業株式会社
    • KATO YOSHICHIKAYOSHIDA MEGUMIMORI KEIICHIKONDO KENJIHAMADA YOSHIHIKOIMAKI OSAMU
    • B81B3/00B81C1/00G02B6/35G02B26/08
    • G02B6/3584B81B3/0083B81B2201/045B81C1/00182G02B6/122G02B6/136G02B6/3514G02B6/3518G02B6/3546G02B6/357G02B6/3596G02B26/0841
    • PROBLEM TO BE SOLVED: To provide a microoptical device having a structure in which a mirror face has a fine and complicated shape, irregularities of the flat mirror face are in the level of 10 nm or smaller, and the wet etching time is made short, and to provide a method of manufacturing the same. SOLUTION: A masking material layer 44 is formed on a substrate 31 which is composed of a silicon substrate 42 and a single crystal silicon device layer 43 interposing an intermediate layer 41 of silicon dioxide (Fig. A), the masking material layer 44 is patterned, a mask 45 is formed having a pattern which is the same as the flat figure of an object optical device. In this case, the face to become a mirror face is the (100) plane of a silicon crystal. The device layer 43 is vertically etched by using the mask 45 as a mask with a dry etching of reactive ion until the intermediate layer 41 is exposed (Fig.C). Thereafter, the side wall face of a mirror 4 is made to be a flat crystal face (100) by performing an anisotropic wet etching in the crystal orientation in a KOH solution for approximately 10 minutes. Then, only the intermediate layer 41 under the movable part of the optical device is removed by selectively wet-etching the intermediate layer 41 (Fig.D). COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供具有镜面具有细小且复杂形状的结构的微光学装置,平面镜面的凹凸处于10nm以下的水平,湿蚀刻时间为 缩短,并提供制造方法。 解决方案:掩模材料层44形成在由硅衬底42和插入二氧化硅的中间层41(图A)的单晶硅器件层43)组成的衬底31上,掩模材料层 44被图案化,形成具有与对象光学装置的平面图相同的图案的掩模45。 在这种情况下,成为镜面的面是硅晶体的(100)面。 通过使用掩模45作为掩模,用反应离子的干蚀刻直到中间层41暴露(图C)来垂直蚀刻器件层43。 此后,通过在KOH溶液中进行约10分钟的晶体取向的各向异性湿蚀刻,使反射镜4的侧壁面成为平坦的晶面(100)。 然后,通过选择性地湿法蚀刻中间层41(图D),仅去除光学器件可移动部分下面的中间层41。 版权所有(C)2005,JPO&NCIPI