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    • 81. 发明专利
    • Method for producing tetraalkylammonium salt solution
    • 生产四氯铵盐溶液的方法
    • JP2013095673A
    • 2013-05-20
    • JP2011237128
    • 2011-10-28
    • Tokuyama Corp株式会社トクヤマ
    • WATANABE ATSUSHIUMETSU NAOYUKIYAMASHITA YOSHIFUMI
    • C07C209/84B01J49/00C02F1/42C07C211/63G03F7/32
    • B01J39/04B01J49/06C02F1/42C02F2001/425C02F2101/38C02F2103/40C07C209/84G03F7/322G03F7/425C07C211/63
    • PROBLEM TO BE SOLVED: To efficiently remove a metal ion from a solution including the metal ion and a tetraalkylammonium ion, such as a resist development waste solution.SOLUTION: A solution including the metal ion and the tetraalkylammonium ion and a cation-exchange resin are brought into contact with each other to cause the ions to be adsorbed to the resin, and then the ions are eluted by an alkali metal salt solution. The tetraalkylammonium salt solution with low concentration not only of the alkali metal ion but also of the other metal ions are recoverable by monitoring the alkali metal ion concentration in the eluate and switching the recovery pathway before the alkali metal ion concentration rises suddenly. The recovered tetraalkylammonium salt is able to be made into tetraalkylammonium hydroxide by electrolysis. A sodium carbonate aqueous solution is most preferable as the alkali metal salt solution in terms of improbability of interfering substance formation during electrolysis, cost, or the like.
    • 解决的问题:为了有效地从包括金属离子和四烷基铵离子的溶液中除去金属离子,例如抗蚀剂显影废液。 解决方案:将包含金属离子和四烷基铵离子和阳离子交换树脂的溶液彼此接触以使离子被吸附到树脂上,然后离子被碱金属盐洗脱 解。 通过监测洗脱液中的碱金属离子浓度和在碱金属离子浓度突然升高之前切换回收途径,可以恢复低浓度的碱金属离子以及其它金属离子的低浓度四烷基铵盐溶液。 回收的四烷基铵盐能够通过电解制成氢氧化四烷基铵。 关于电解,成本等中的干扰物质形成的不可能性,最优选碳酸钠水溶液作为碱金属盐溶液。 版权所有(C)2013,JPO&INPIT