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71. 发明专利

JP4758405B2 The sensor element and the physical sensor device 有权
公开(公告)号：JP4758405B2
公开(公告)日：2011-08-31
申请号：JP2007254822
申请日：2007-09-28
申请人：アオイ電子株式会社 , 国立大学法人香川大学
发明人：隆今野 , 原橋口 , 賢治郎綾野
IPC分类号： G01Q30/04 , G01B7/00 , G01Q20/04 , G01Q60/32

72. 发明专利

JP2010127754A Self displacement sensing cantilever and scanning probe microscope 有权
标题翻译：自动位移感应扫描仪和扫描探针显微镜
公开(公告)号：JP2010127754A
公开(公告)日：2010-06-10
申请号：JP2008302429
申请日：2008-11-27
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： IYOGI MASATO , WATANABE NAOYA
IPC分类号： G01Q20/04 , G01Q30/02 , G01Q60/22 , G01Q60/40 , G01Q60/56
CPC分类号： G01Q20/04 , G01Q30/025 , G01Q70/14
摘要： PROBLEM TO BE SOLVED: To provide a self displacement sensing cantilever that allows measurement of a scanning probe microscope to be simultaneously executed under irradiation with light, facilitates application of a functional coating film without impairing functions of a displacement detection unit, and also, allows physical properties such as light, electricity, and magnetism to be highly accurately and easily measured, and a scanning probe microscope. SOLUTION: The self displacement sensing cantilever 1 includes: a cantilever 4 that has a probe 2 at its tip and has the base end 3 at its terminal end; a displacement detection unit 5 that is provided in the cantilever 4 so as to detect displacement of the cantilever 4; an electrode 6 that is connected to the displacement detection unit 5 and communicates with the base end 3; and an insulating film 7 that is formed on the electrode 6 and the displacement detection unit 5 respectively on the cantilever 4 so that a coating film of an arbitrary functional material 8 coats the insulating film 7. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供能够在光照射下同时执行扫描探针显微镜的测量的自移位感测悬臂，便于施加功能性涂膜而不损害位移检测单元的功能，并且还能够高精度地容易地测定光，电，磁性等物理性质的扫描探针显微镜。解决方案：自移位检测悬臂1包括：悬臂4，其顶端具有探针2，并在其末端具有基端3; 设置在悬臂4中以检测悬臂4的位移的位移检测单元5; 连接到位移检测单元5并与基端3连通的电极6; 以及在悬臂4上分别形成在电极6和位移检测单元5上的绝缘膜7，使得任意功能材料8的涂膜涂覆绝缘膜7.版权所有（C）2010， JPO＆INPIT

73. 发明专利

JP2008309630A Device and method for measurement in liquid 有权
标题翻译：液体测量装置和方法
公开(公告)号：JP2008309630A
公开(公告)日：2008-12-25
申请号：JP2007157585
申请日：2007-06-14
申请人： National Univ Corp Shizuoka Univ , Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社 , 国立大学法人静岡大学
发明人： IWATA FUTOSHI , NAKAGAMI TAKUYA , KIKUCHI SHUICHI , TAKAOKA OSAMU
IPC分类号： G01B7/34 , G01Q20/04 , G01Q30/14 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To measure a sample in liquid in a stable state for a long period of time utilizing a self-detection type probe while preventing the degradation of sensitivity without causing any influence on wiring.
SOLUTION: The device 1 for measurement in liquid includes the self-detection type probe 2 having a strain resistance element whose resistance value varies according to the displacement amount of a cantilever 11, and a wiring part provided in an exposed state on the surface of the cantilever and electrically connected to the strain resistance element; an in-liquid setting means 3 for creating in-liquid environment in which the probe and the cantilever are submerged in liquid W; an insertion electrode 4 arranged in a state of being at least partially submerged in the liquid; a voltage applying means 5 for applying voltage to the insertion electrode and the wiring part so that the potential of the insertion electrode is on the positive electrode side compared with the potential of the wiring part; a detecting means 6 for detecting the displacement amount of the cantilever; and a measuring means 7 for measuring the surface shape or material property of the sample by allowing the self-detection type probe to scan while controlling a distance between the probe and the sample surface S1 to make the displacement amount of the cantilever constant.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：使用自检型探针长时间稳定地测量液体中的样品，同时防止灵敏度降低，而不会对布线造成任何影响。解决方案：用于液体测量的装置1包括具有应变电阻元件的自检型探头2，该应变电阻元件的电阻值根据悬臂11的位移量而变化，以及布置部分设置在暴露状态悬臂的表面并电连接到应变电阻元件; 用于产生其中探针和悬臂浸没在液体W中的液体内环境的液体内设置装置3; 以至少部分浸没在液体中的状态配置的插入电极4; 电压施加装置5，用于向插入电极和布线部分施加电压，使得插入电极的电位在正极侧与布线部分的电位相比; 用于检测悬臂的位移量的检测装置6; 以及测量装置7，用于通过允许自检型探针在控制探针与样品表面S1之间的距离的同时进行扫描来测量样品的表面形状或材料性质，以使悬臂的位移量恒定。版权所有（C）2009，JPO＆INPIT

74. 发明专利

JP2008241618A Cantilever type sensor 有权
标题翻译： CANTILEVER型传感器
公开(公告)号：JP2008241618A
公开(公告)日：2008-10-09
申请号：JP2007085568
申请日：2007-03-28
申请人： Gunma Univ , Tokyo Sokki Kenkyusho Co Ltd , 国立大学法人群馬大学 , 株式会社東京測器研究所
发明人： HOSAKA SUMIO , SONE ITSUHITO , OKANO HARUKI
IPC分类号： G01N5/02 , G01G3/16 , G01K7/32 , G01Q20/04
摘要： PROBLEM TO BE SOLVED: To detect a physical quantity with high accuracy.
SOLUTION: The resistance change of a strain resistance element 16A corresponding to the vibration state of a cantilever 10, is detected as a voltage change by a bridge circuit 18A to output a detected vibration signal. In the state where the cantilever 10 is resonated, the resonance signal of a high-frequency component is taken out of the vibration signal by a high pass filter 19B and the deformation signal of DC components are extracted as low-frequency components from a drive signal by a low-pass filter 19C. Then, the resonance signal is corrected, by using the deformation signal to detect the change of resonance frequency to detect the time range of the mass of the substance attached to the cantilever from the change of the resonance frequency. Alternatively, The time change of a temperature is detected on the basis of the deformation signal.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：高精度地检测物理量。解决方案：通过桥接电路18A将与悬臂10的振动状态对应的应变电阻元件16A的电阻变化检测为电压变化，以输出检测到的振动信号。在悬臂10谐振的状态下，通过高通滤波器19B将高频分量的谐振信号从振动信号中取出，并将DC分量的变形信号从驱动信号中提取为低频分量通过低通滤波器19C。然后，通过使用变形信号来检测谐振频率的变化来校正谐振信号，以从共振频率的变化来检测附着到悬臂的物质的质量的时间范围。或者，根据变形信号检测温度的时间变化。版权所有（C）2009，JPO＆INPIT

75. 发明专利

JP2008096578A Working device and working method using atomic force microscope 审中-公开
标题翻译：使用原子力显微镜的工作装置和工作方法
公开(公告)号：JP2008096578A
公开(公告)日：2008-04-24
申请号：JP2006276429
申请日：2006-10-10
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： TAKAOKA OSAMU
IPC分类号： B81C99/00 , B82B3/00 , B82Y40/00 , G01Q10/06 , G01Q20/04 , G01Q30/02 , G01Q60/24 , G01Q80/00 , G03F1/72
摘要： PROBLEM TO BE SOLVED: To extend a lifetime of a working probe used for a mechanical removal process with an atomic force microscope and to reduce a drift in a probe position during working. SOLUTION: The back face temperature of a working probe 1 penetrating a cantilever 3, is monitored through a minute thermocouple 2 stuck and fixed to the back face 1a; and when the temperature exceeds a predetermined temperature, the working is stopped. The working position is corrected by predicting a drift of the probe position caused by thermal expansion of the cantilever 3 due to the temperature increase of the probe 1, based on the measured temperature of the probe 1. The temperature of the probe 1 is controlled within a predetermined range to continue working by heater-heating or cooling the back face 1a while monitoring through the minute thermocouple 2 stuck and fixed to the back face of the probe 1. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：使用原子力显微镜延长用于机械去除过程的工作探针的寿命，并减少工作期间探头位置的漂移。解决方案：穿过悬臂3的工作探头1的背面温度通过粘贴并固定到背面1a的微小热电偶2进行监测; 并且当温度超过预定温度时，停止工作。基于探测器1的测量温度，通过预测由于探针1的温度升高引起的悬臂梁3的热膨胀引起的探头位置的漂移而校正工作位置。探头1的温度被控制在通过加热器加热或冷却背面1a，同时通过微型热电偶2进行监测并固定到探针1的背面，继续工作的预定范围。（C）2008，JPO＆INPIT

76. 发明专利

JP3989704B2 Scanning probe microscope 有权
公开(公告)号：JP3989704B2
公开(公告)日：2007-10-10
申请号：JP2001307771
申请日：2001-10-03
申请人：エスアイアイ・ナノテクノロジー株式会社
发明人：和徳安藤 , 武博山岡 , 喜春白川部 , 寛高橋
IPC分类号： G01B11/00 , G01B21/00 , G01Q20/04 , G01Q30/10 , G01Q30/16 , G01Q60/50 , G01Q60/56

77. 发明专利

JP3908713B2 Atomic force microscope for the force direction cantilever with sensor 有权
公开(公告)号：JP3908713B2
公开(公告)日：2007-04-25
申请号：JP2003347346
申请日：2003-10-06
申请人：エスアイアイ・ナノテクノロジー株式会社
发明人：信宏清水 , 喜春白川部 , 寛高橋
IPC分类号： G01B21/30 , G01Q20/04 , G01Q60/24 , G01Q60/38
CPC分类号： G01Q20/04 , G01Q60/38

78. 发明专利

JP3905254B2 Scanning probe microscope 有权
公开(公告)号：JP3905254B2
公开(公告)日：2007-04-18
申请号：JP16433399
申请日：1999-06-10
申请人：エスアイアイ・ナノテクノロジー株式会社
发明人：誠人伊與木 , 英介冨田 , 正夫長谷川
IPC分类号： G01B7/34 , G01B5/28 , G01B7/00 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q20/04 , G01Q60/22 , G01Q60/24 , G01Q60/32 , G01Q70/02 , G01Q70/10 , G01Q90/00
CPC分类号： G01Q10/04 , G01Q70/02 , Y10S977/872

79. 发明专利

JP2006343213A FINE STRUCTURAL BODY, CANTILEVER, SCANNING PROBE MICROSCOPE, AND METHOD FOR MEASURING AMOUNT OF DEFORMATION OF THE FINE STRUCTURAL BODY 审中-公开
公开(公告)号：JP2006343213A
公开(公告)日：2006-12-21
申请号：JP2005169089
申请日：2005-06-09
申请人： TDK CORP
发明人： OTA NAOKI , KUWAJIMA TETSUYA
IPC分类号： G01B7/34 , G01B21/30 , G01Q20/04 , G01Q60/22 , G01Q60/38 , G01Q60/54 , G01Q70/00
摘要： PROBLEM TO BE SOLVED: To provide a very small, high-sensitivity, and high-performance sensor for a desired location with a desired shape and size in a fine structural body, of which at least a part can be elastically deformed, facilitate assembling and adjustment of components when elastic deformations of the fine structure is to be measured, reduce the size of and simplify the detection circuit, and detect local displacements of a fine location of the fine structural body. SOLUTION: The fine structure is a cantilever 1 in which a beam part 14 is deformed elastically. The cantilever 1 is provided with the sensor 12 for detecting elastic deformations of the beam part 14 by tunnel effect. COPYRIGHT: (C)2007,JPO&INPIT

80. 发明专利

JP2006258429A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2006258429A
公开(公告)日：2006-09-28
申请号：JP2005072260
申请日：2005-03-15
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： WATANABE KAZUTOSHI
IPC分类号： G01B21/30 , G01Q20/04 , G01Q60/24 , G01Q60/30 , G01Q60/40 , G01Q60/46
CPC分类号： G01Q60/40 , G01Q20/04 , G01Q60/30
摘要： PROBLEM TO BE SOLVED: To highly accurately measure electrical properties of a sample without being affected by leaked light. SOLUTION: This scanning probe microscope is equipped with a cantilever 3 having a probe 2 provided to its leading end, a support part 4 for supporting the cantilever 3, a self-detection type probe 6 having a piezoelectric resistance element 5 changed in its resistance value corresponding to the displacement quantity of the cantilever 3, a detection means for detecting the value of the current flowing through the piezoelectric resistance element 5 to detect the displacement quantity of the cantilever 3, a moving means for relatively moving a sample stand, on which the sample is placed, and the probe 2 in an XY direction and a Z direction, a control means for controlling the moving means so as to make the distance between the probe 2 and the surface of the sample constant and measuring the surface shape of the sample S, an applying means for applying a predetermined voltage across the probe 2 and the surface of the sample and a measuring means for measuring the electrical physical properties caused by the applied voltage. The probe 2 extends up to the base end of the cantilever 3 to be electrically connected to the conductive film 28 electrically connectable to the measuring means. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：高度精确地测量样品的电性能而不受泄漏的光影响。
解决方案：该扫描探针显微镜配备有悬臂3，其具有设置在其前端的探针2，用于支撑悬臂3的支撑部分4，具有改变的压电电阻元件5的自检型探针6 其电阻值对应于悬臂3的位移量;检测装置，用于检测流过压电电阻元件5的电流值以检测悬臂3的位移量;移动装置，用于相对移动样品台; 样品放置在其上，探针2在XY方向和Z方向上，控制装置，用于控制移动装置，以使得探针2和样品表面之间的距离恒定并测量表面形状的样品S，用于在探针2和样品表面上施加预定电压的施加装置和用于测量电物理专用的测量装置由施加的电压引起的。探针2延伸到悬臂3的基端，以电连接到可连接到测量装置的导电膜28。版权所有（C）2006，JPO＆NCIPI

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